Patents by Inventor Su Xing
Su Xing has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20180190714Abstract: A method for fabricating a semiconductor device includes the steps of: forming a channel layer on a substrate; forming a gate dielectric layer on the channel layer; forming a source layer and a drain layer adjacent two sides of the gate dielectric layer; forming a bottom gate on the gate dielectric layer; forming a phase change layer on the bottom gate; and forming a top gate on the phase change layer.Type: ApplicationFiled: December 20, 2017Publication date: July 5, 2018Inventors: WANXUN HE, Su Xing
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Patent number: 10008614Abstract: A dual channel transistor includes a first gate electrode, a second gate electrode, a first gate insulation layer, a second gate insulation layer, a silicon semiconductor channel layer, and an oxide semiconductor channel layer. The first gate insulation layer is disposed on the first gate electrode. The silicon semiconductor channel layer is disposed on the first gate insulation layer. The oxide semiconductor channel layer is disposed on the silicon semiconductor channel layer. The second gate insulation layer is disposed on the oxide semiconductor channel layer. The second gate electrode is disposed on the second gate insulation layer.Type: GrantFiled: March 21, 2017Date of Patent: June 26, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Wanxun He, Su Xing
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Patent number: 9997627Abstract: A semiconductor device includes: a channel layer surrounded by a source layer; a first dielectric layer around the source layer; a gate layer around the channel layer and on the source layer; a first oxide semiconductor layer between the gate layer and the channel layer; a second oxide semiconductor layer between the gate layer and the drain layer; a second gate dielectric layer between the second oxide semiconductor layer and the drain layer; a drain layer on the gate layer and around the channel layer; and a second dielectric layer around the drain layer.Type: GrantFiled: September 19, 2017Date of Patent: June 12, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Wanxun He, Su Xing
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Publication number: 20180145081Abstract: The present invention provides a SRAM unit cell which includes a semiconductor substrate, six transistors, a first well, two first doped regions and two second doped regions. The transistors are disposed on the semiconductor substrate, and include a first gate line and a second gate line. The first well is disposed in the semiconductor substrate, and the first well has a first conductive type, wherein the first gate line and the second gate line extend onto the first well. The first doped regions are disposed in the first well at two sides of the first gate line, and the second doped regions are disposed in the first well at two sides of the second gate line.Type: ApplicationFiled: November 24, 2016Publication date: May 24, 2018Inventors: WANXUN HE, Su Xing
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Publication number: 20180122897Abstract: A method for fabricating semiconductor device includes the steps of first providing a substrate, forming a gate structure on the substrate, forming a hard mask on the substrate and the gate structure, patterning the hard mask to form trenches exposing part of the substrate, and forming raised epitaxial layers in the trenches. Preferably, the gate structure is extended along a first direction on the substrate and the raised epitaxial layers are elongated along a second direction adjacent to two sides of the gate structure.Type: ApplicationFiled: December 1, 2016Publication date: May 3, 2018Inventors: WANXUN HE, Su Xing
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Publication number: 20180102434Abstract: A semiconductor device includes: a channel layer surrounded by a source layer; a first dielectric layer around the source layer; a gate layer around the channel layer and on the source layer; a first oxide semiconductor layer between the gate layer and the channel layer; a second oxide semiconductor layer between the gate layer and the drain layer; a second gate dielectric layer between the second oxide semiconductor layer and the drain layer; a drain layer on the gate layer and around the channel layer; and a second dielectric layer around the drain layer.Type: ApplicationFiled: September 19, 2017Publication date: April 12, 2018Inventors: WANXUN HE, Su Xing
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Patent number: 9935099Abstract: The present invention provides a semiconductor device including a semiconductor substrate, a first well, a second well, a gate electrode, an oxide semiconductor structure and a diode. The first well is disposed in the semiconductor substrate and has a first conductive type, and the second well is also disposed in the semiconductor substrate, adjacent to the first well, and has a second conductive type. The gate electrode is disposed on the first well. The oxide semiconductor structure is disposed on the semiconductor substrate and electrically connected to the second well. The diode is disposed between the first well and the second well.Type: GrantFiled: December 2, 2015Date of Patent: April 3, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Zhibiao Zhou, Chen-Bin Lin, Su Xing, Chi-Chang Shuai, Chung-Yuan Lee
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Patent number: 9893066Abstract: A semiconductor transistor device includes an oxide semiconductor layer having an active surface, a source electrode, a drain electrode, a gate electrode and a control capacitor. The gate electrode, the source electrode and the drain electrode are directly in contact with the active surface. The gate electrode is disposed between the drain electrode and the source electrode. The gate electrode, the source electrode and the drain electrode are separated from each other. The control capacitor is electrically connected to the gate electrode through a connection.Type: GrantFiled: February 14, 2017Date of Patent: February 13, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Zhi-Biao Zhou, Shao-Hui Wu, Chi-Fa Ku, Chen-Bin Lin, Su Xing, Tien-Yu Hsieh
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Patent number: 9887238Abstract: A semiconductor device and a method for fabricating the semiconductor device have been provided. The method for fabricating a semiconductor device includes the steps of: forming a channel layer on a substrate; forming a gate dielectric layer on the channel layer; forming a source layer and a drain layer adjacent two sides of the gate dielectric layer; forming a bottom gate on the gate dielectric layer; forming a phase change layer on the bottom gate; and forming a top gate on the phase change layer.Type: GrantFiled: January 23, 2017Date of Patent: February 6, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Wanxun He, Su Xing
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Patent number: 9871049Abstract: A static random access memory device includes two body contacts and two resistive-switching devices. The body contacts are disposed in a wafer and are exposed from a back side of the wafer, wherein the body contacts electrically connect a static random access memory cell through a metal interconnect in the wafer. The resistive-switching devices connect the two body contacts respectively from the back side of the wafer. A method of forming a static random access memory device is also provided in the following. A wafer having two body contacts exposed from a back side of the wafer and a metal interconnect electrically connecting a static random access memory cell to the body contacts is provided. Two resistive-switching devices are formed to connect the two body contacts respectively from the back side of the wafer.Type: GrantFiled: May 12, 2017Date of Patent: January 16, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Wanxun He, Su Xing
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Patent number: 9865654Abstract: A semiconductor structure includes a front side and a back side opposite to the front side, at least a transistor device formed on the front side of the substrate, and an adjustable resistor formed on the back side of the substrate. The adjustable resistor includes at least a phase change material PCM layer.Type: GrantFiled: January 6, 2017Date of Patent: January 9, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Wanxun He, Su Xing
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Publication number: 20180006129Abstract: A transistor includes a semiconductor channel layer, a gate structure, a gate insulation layer, an internal electrode, and a ferroelectric material layer. The gate structure is disposed on the semiconductor channel layer. The gate insulation layer is disposed between the gate structure and the semiconductor channel layer. The internal electrode is disposed between the gate insulation layer and the gate structure. The ferroelectric material layer is disposed between the internal electrode and the gate structure. A spacer is disposed on the semiconductor channel layer, and a trench surrounded by the spacer is formed above the semiconductor channel layer. The ferroelectric material layer is disposed in the trench, and the gate structure is at least partially disposed outside the trench. The ferroelectric material layer in the transistor of the present invention is used to enhance the electrical characteristics of the transistor.Type: ApplicationFiled: June 20, 2017Publication date: January 4, 2018Inventors: Su Xing, Hsueh-Wen Wang, Chien-Yu Ko, Yu-Cheng Tung, Jen-Yu Wang, Cheng-Tung Huang, Yu-Ming Lin
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Patent number: 9837497Abstract: A channel structure includes a first patterned channel layer including a lower portion and an upper portion. The upper portion is disposed on the lower portion. A width of the upper portion is larger than a width of the lower portion. A material or a material composition ratio of the upper portion is different from a material or a material composition ratio of the lower portion. The height and the channel length of the channel structure are increased by disposing the first patterned channel layer, and the saturation current (Isat) of a transistor including the channel structure of the present invention may be enhanced accordingly.Type: GrantFiled: October 18, 2016Date of Patent: December 5, 2017Assignee: UNITED MICROELECTRONICS CORP.Inventors: Wanxun He, Su Xing
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Patent number: 9806191Abstract: A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a source layer; removing part of the source layer to form a first opening; forming a first channel layer in the first opening; forming a gate layer around the first channel layer and on the source layer; forming a drain layer on the gate layer and the first channel layer; removing part of the drain layer to form a second opening; and forming a second channel layer in the second opening.Type: GrantFiled: October 11, 2016Date of Patent: October 31, 2017Assignee: UNITED MICROELECTRONICS CORP.Inventors: Wanxun He, Su Xing
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Patent number: 9793345Abstract: A semiconductor device is disclosed, including a plurality of gate rings formed on a substrate and concentrically surrounding a first doped region formed in the substrate. The gate rings are equipotentially interconnected by at least a connecting structure. A second doped region is formed in the substrate, exposed from the space between adjacent gate rings. A third doped region is formed in the substrate adjacent to the outer perimeter of the outermost gate ring. The first doped region, the third doped region and the gate rings are electrically biased and the second doped regions are electrically floating.Type: GrantFiled: December 26, 2016Date of Patent: October 17, 2017Assignee: UNITED MICROELECTRONICS CORP.Inventors: Wanxun He, Su Xing
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Patent number: 9722093Abstract: An oxide semiconductor transistor includes an oxide semiconductor channel layer, a metal gate, a gate insulation layer, an internal electrode, and a ferroelectric material layer. The metal gate is disposed on the oxide semiconductor channel layer. The gate insulation layer is disposed between the metal gate and the oxide semiconductor channel layer. The internal electrode is disposed between the gate insulation layer and the metal gate. The ferroelectric material layer is disposed between the internal electrode and the metal gate. The ferroelectric material layer in the oxide semiconductor transistor of the present invention is used to enhance the electrical characteristics of the oxide semiconductor transistor.Type: GrantFiled: September 1, 2016Date of Patent: August 1, 2017Assignee: UNITED MICROELECTRONICS CORP.Inventors: Su Xing, Hsueh-Wen Wang, Chien-Yu Ko, Yu-Cheng Tung, Jen-Yu Wang, Cheng-Tung Huang, Yu-Ming Lin
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Patent number: 9673060Abstract: A device and method for integrated circuits with surrounding gate structures are disclosed. The device includes a semiconductor substrate and a fin structure on the semiconductor substrate. The fin structure is doped with a first conductivity type and includes a source region at one distal end and a drain region at the opposite distal end. The device further includes a gate structure overlying a channel region disposed between the source and drain regions of the fin structure. The fin structure has a rectangular cross-sectional bottom portion and an arched cross-sectional top portion. The arched cross-sectional top portion is semi-circular shaped and has a radius that is equal to or smaller than the height of the rectangular cross-sectional bottom portion. The source, drain, and the channel regions each are doped with dopants of the same polarity and the same concentration.Type: GrantFiled: May 17, 2016Date of Patent: June 6, 2017Assignee: Semiconductor Manufacturing International (Shanghai) CorporationInventors: De Yuan Xiao, Guo Qing Chen, Roger Lee, Chin Fu Yen, Su Xing, Xiao Lu Huang, Yong Sheng Yang
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Publication number: 20170154887Abstract: A semiconductor transistor device includes an oxide semiconductor layer having an active surface, a source electrode, a drain electrode, a gate electrode and a control capacitor. The gate electrode, the source electrode and the drain electrode are directly in contact with the active surface. The gate electrode is disposed between the drain electrode and the source electrode. The gate electrode, the source electrode and the drain electrode are separated from each other. The control capacitor is electrically connected to the gate electrode through a connection.Type: ApplicationFiled: February 14, 2017Publication date: June 1, 2017Inventors: Zhi-Biao Zhou, Shao-Hui Wu, Chi-Fa Ku, Chen-Bin Lin, Su Xing, Tien-Yu Hsieh
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Publication number: 20170125402Abstract: The present invention provides a semiconductor device including a semiconductor substrate, a first well, a second well, a gate electrode, an oxide semiconductor structure and a diode. The first well is disposed in the semiconductor substrate and has a first conductive type, and the second well is also disposed in the semiconductor substrate, adjacent to the first well, and has a second conductive type. The gate electrode is disposed on the first well. The oxide semiconductor structure is disposed on the semiconductor substrate and electrically connected to the second well. The diode is disposed between the first well and the second well.Type: ApplicationFiled: December 2, 2015Publication date: May 4, 2017Inventors: ZHIBIAO ZHOU, Chen-Bin Lin, Su Xing, Chi-Chang Shuai, Chung-Yuan Lee
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Patent number: 9627549Abstract: A semiconductor transistor device includes an oxide semiconductor layer having an active surface, a source electrode, a drain electrode, a gate electrode and a control capacitor. The gate electrode, the source electrode and the drain electrode are directly in contact with the active surface. The gate electrode is disposed between the drain electrode and the source electrode. The gate electrode, the source electrode and the drain electrode are separated from each other. The control capacitor is electrically connected to the gate electrode through a connection.Type: GrantFiled: October 5, 2015Date of Patent: April 18, 2017Assignee: UNITED MICROELECTRONICS CORP.Inventors: Zhi-Biao Zhou, Shao-Hui Wu, Chi-Fa Ku, Chen-Bin Lin, Su Xing, Tien-Yu Hsieh