Patents by Inventor Sun-Jay Chang

Sun-Jay Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20160211169
    Abstract: A diode includes a first plurality of combo fins having lengthwise directions parallel to a first direction, wherein the first plurality of combo fins comprises portions of a first conductivity type. The diodes further includes a second plurality of combo fins having lengthwise directions parallel to the first direction, wherein the second plurality of combo fins includes portions of a second conductivity type opposite the first conductivity type. An isolation region is located between the first plurality of combo fins and the second plurality of combo fins. The first and the second plurality of combo fins form a cathode and an anode of the diode. The diode is configured to have a current flowing in a second direction perpendicular to the first direction, with the current flowing between the anode and the cathode.
    Type: Application
    Filed: March 18, 2016
    Publication date: July 21, 2016
    Inventors: Sun-Jay Chang, Ming-Hsiang Song, Jen-Chou Tseng, Wun-Jie Lin, Bo-Ting Chen
  • Publication number: 20160204259
    Abstract: Disclosed are methods to form a FinFET diode of high efficiency, designed to resolve the degradation problem with a conventional FinFET diode arising from reduced active area, and a method of fabrication. The FinFET diode has a doped substrate, two spaced-apart groups of semiconductor fin structures, dielectric layers formed between the two groups and among the fin structures for insulation, a plurality of gate structures perpendicularly traversing both groups of the fin structures, and two groups of semiconductor strips respectively formed lengthwise upon the two groups of the fin structures. The two groups of semiconductor strips are doped to have opposite conductivity types, p-type and n-type. In an embodiment, the FinFET diode further has metal contacts formed upon the semiconductor strips. In another embodiment, the semiconductor strips may be integrally formed with the fin structures by epitaxial growth and in-situ doped.
    Type: Application
    Filed: March 21, 2016
    Publication date: July 14, 2016
    Inventors: Hsueh-Shih Fan, Ching-Fang Huang, CHIA-HSIN HU, MIN-CHANG LIANG, SUN-JAY Chang, SHIEN-YANG WU, WEN-HSING HSIEH
  • Publication number: 20160190122
    Abstract: A semiconductor structure comprises a semiconductor substrate and a shallow trench isolation (STI) feature over the substrate. The STI feature includes first and second portions. A top surface of the first portion is lower than a top surface of the second portion. The semiconductor structure further comprises fin active regions; conductive features on the fin active regions and the STI feature; and dielectric features separating the conductive features from the fin active regions. The semiconductor structure further comprises a first gate stack having a first one of the dielectric features and a first one of the conductive features overlying the first one of the dielectric features; and a second gate stack having a second one of the dielectric features and a second one of the conductive features overlying the second one of the dielectric features.
    Type: Application
    Filed: March 9, 2016
    Publication date: June 30, 2016
    Inventors: Chia-Hsin Hu, Sun-Jay Chang
  • Publication number: 20160163835
    Abstract: A fin field effect transistor (FinFET) and a method of forming the same are introduced. In an embodiment, trenches are formed in a substrate, wherein a region between adjacent trenches defines a fin. A dielectric material is formed in the trenches. A part of the substrate is doped and a region of high dopant concentration and a region of low dopant concentration are formed. Gate stacks are formed, portions of the fins are removed and source/drain regions are epitaxially grown in the regions of high/low dopant concentration. Contacts are formed to provide electrical contacts to source/gate/drain regions.
    Type: Application
    Filed: February 12, 2016
    Publication date: June 9, 2016
    Inventors: Chia-Hsin Hu, Sun-Jay Chang
  • Patent number: 9318621
    Abstract: A diode includes a first plurality of combo fins having lengthwise directions parallel to a first direction, wherein the first plurality of combo fins comprises portions of a first conductivity type. The diodes further includes a second plurality of combo fins having lengthwise directions parallel to the first direction, wherein the second plurality of combo fins includes portions of a second conductivity type opposite the first conductivity type. An isolation region is located between the first plurality of combo fins and the second plurality of combo fins. The first and the second plurality of combo fins form a cathode and an anode of the diode. The diode is configured to have a current flowing in a second direction perpendicular to the first direction, with the current flowing between the anode and the cathode.
    Type: Grant
    Filed: March 8, 2013
    Date of Patent: April 19, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sun-Jay Chang, Ming-Hsiang Song, Jen-Chou Tseng, Wun-Jie Lin, Bo-Ting Chen
  • Patent number: 9305918
    Abstract: The present disclosure provides methods to fabricate a semiconductor structure that includes a semiconductor substrate having a first region and a second region; a shallow trench isolation (STI) feature formed in the semiconductor substrate. The STI feature includes a first portion disposed in the first region and having a first thickness T1 and a second portion disposed in the second region and having a second thickness T2 greater than the first depth, the first portion of the STI feature being recessed from the second portion of the STI feature. The semiconductor structure also includes a plurality of fin active regions on the semiconductor substrate; and a plurality of conductive features disposed on the fin active regions and the STI feature, wherein one of the conductive features covers the first portion of the STI feature in the first region.
    Type: Grant
    Filed: September 8, 2014
    Date of Patent: April 5, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Hsin Hu, Sun-Jay Chang
  • Patent number: 9293378
    Abstract: Disclosed are methods to form a FinFET diode of high efficiency, designed to resolve the degradation problem with a conventional FinFET diode arising from reduced active area, and a method of fabrication. The FinFET diode has a doped substrate, two spaced-apart groups of substantially parallel, equally-spaced, elongated semiconductor fin structures, dielectric layers formed between the two groups and among the fin structures for insulation, a plurality of substantially equal-spaced and parallel elongated gate structures perpendicularly traversing both groups of the fin structures, and two groups of semiconductor strips respectively formed lengthwise upon the two groups of the fin structures. The two groups of semiconductor strips are doped to have opposite conductivity types, p-type and n-type. The FinFET diode further has metal contacts formed upon the semiconductor strips. In an embodiment, the semiconductor strips may be integrally formed with the fin structures by epitaxial growth and in-situ doped.
    Type: Grant
    Filed: July 6, 2015
    Date of Patent: March 22, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsueh-Shih Fan, Sun-Jay Chang, Chia-Hsin Hu, Min-Chang Liang, Shien-Yang Wu, Wen-Hsing Hsieh, Ching-Fang Huang
  • Patent number: 9281399
    Abstract: A fin field effect transistor (FinFET) and a method of forming the same are introduced. In an embodiment, trenches are formed in a substrate, wherein a region between adjacent trenches defines a fin. A dielectric material is formed in the trenches. A part of the substrate is doped and a region of high dopant concentration and a region of low dopant concentration are formed. Gate stacks are formed, portions of the fins are removed and source/drain regions are epitaxially grown in the regions of high/low dopant concentration. Contacts are formed to provide electrical contacts to source/gate/drain regions.
    Type: Grant
    Filed: May 19, 2015
    Date of Patent: March 8, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Hsin Hu, Sun-Jay Chang
  • Publication number: 20160056230
    Abstract: A circuit device includes core circuitry. The circuit device further includes a first set of guard rings having a first dopant type, the first set of guard rings being around a periphery of the core circuitry, the first set of guard rings comprising a first guard ring and a second guard ring. The circuit device further includes a second set of guard rings having a second dopant type, the second dopant type being opposite to the first dopant type, wherein at least one guard ring of the second set of guard rings is around a periphery of at least one guard ring of the first set of guard rings, and the second set of guard rings comprises a third guard ring and a fourth guard ring.
    Type: Application
    Filed: August 20, 2014
    Publication date: February 25, 2016
    Inventors: Wan-Yen LIN, Wun-Jie LIN, Yu-Ti SU, Bo-Ting CHEN, Jen-Chou TSENG, Kuo-Ji CHEN, Sun-Jay CHANG, Min-Chang LIANG
  • Publication number: 20160005660
    Abstract: Disclosed are methods to form a FinFET diode of high efficiency, designed to resolve the degradation problem with a conventional FinFET diode arising from reduced active area, and a method of fabrication. The FinFET diode has a doped substrate, two spaced-apart groups of substantially parallel, equally-spaced, elongated semiconductor fin structures, dielectric layers formed between the two groups and among the fin structures for insulation, a plurality of substantially equal-spaced and parallel elongated gate structures perpendicularly traversing both groups of the fin structures, and two groups of semiconductor strips respectively formed lengthwise upon the two groups of the fin structures. The two groups of semiconductor strips are doped to have opposite conductivity types, p-type and n-type. The FinFET diode further has metal contacts formed upon the semiconductor strips. In an embodiment, the semiconductor strips may be integrally formed with the fin structures by epitaxial growth and in-situ doped.
    Type: Application
    Filed: July 6, 2015
    Publication date: January 7, 2016
    Inventors: Hsueh-Shih Fan, Sun-Jay Chang, Chia-Hsin Hu, Min-Chang Liang, Shien-Yang Wu, Wen-Hsing Hsieh, Ching-Fang Huang
  • Patent number: 9166067
    Abstract: A band gap reference circuit includes an error-amplifier-based current mirror coupled between a first supply node and a pair of intermediate voltage nodes, and a matched diode pair for providing a proportional-to-absolute temperature (PTAT) current. The matched diode pair includes a first diode connected between a first intermediate voltage node from the pair of intermediate voltage nodes and a second supply node, and a second diode connected in series with a resistor between a second intermediate voltage node from the pair of intermediate voltage nodes and the second supply node. Each diode has a P-N diode junction that is a homojunction.
    Type: Grant
    Filed: November 26, 2013
    Date of Patent: October 20, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jaw-Juinn Horng, Chung-Hui Chen, Sun-Jay Chang, Chia-Hsin Hu
  • Publication number: 20150270396
    Abstract: A fin field effect transistor (FinFET) and a method of forming the same are introduced. In an embodiment, trenches are formed in a substrate, wherein a region between adjacent trenches defines a fin. A dielectric material is formed in the trenches. A part of the substrate is doped and a region of high dopant concentration and a region of low dopant concentration are formed. Gate stacks are formed, portions of the fins are removed and source/drain regions are epitaxially grown in the regions of high/low dopant concentration. Contacts are formed to provide electrical contacts to source/gate/drain regions.
    Type: Application
    Filed: May 19, 2015
    Publication date: September 24, 2015
    Inventors: Chia-Hsin Hu, Sun-Jay Chang
  • Patent number: 9093566
    Abstract: Disclosed are a FinFET diode of high efficiency, designed to resolve the degradation problem with a conventional FinFET diode arising from reduced active area, and a method of fabrication. The FinFET diode has a doped substrate, two spaced-apart groups of substantially parallel, equally-spaced, elongated semiconductor fin structures, dielectric layers formed between the two groups and among the fin structures for insulation, a plurality of substantially equal-spaced and parallel elongated gate structures perpendicularly traversing both groups of the fin structures, and two groups of semiconductor strips respectively formed lengthwise upon the two groups of the fin structures. The two groups of semiconductor strips are doped to have opposite conductivity types, p-type and n-type. The FinFET diode further has metal contacts formed upon the semiconductor strips. In an embodiment, the semiconductor strips may be integrally formed with the fin structures by epitaxial growth and in-situ doped.
    Type: Grant
    Filed: July 25, 2013
    Date of Patent: July 28, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsueh-Shih Fan, Sun-Jay Chang, Chia-Hsin Hu, Min-Chang Liang, Shien-Yang Wu, Wen-Hsing Hsieh, Ching-Fang Huang
  • Publication number: 20150194524
    Abstract: A fin field effect transistor (FinFET), and a method of fabrication, is introduced. In an embodiment, trenches are formed in a substrate, wherein a region between adjacent trenches defines a fin. A dielectric material is formed in the trenches. A part of the substrate is doped and a region of high dopant concentration and a region of low dopant concentration are formed. Gate stacks are formed, portions of the fins are removed and source/drain regions are epitaxially grown in the regions of high/low dopant concentration. Contacts are formed to provide electrical contacts to source/gate/drain regions.
    Type: Application
    Filed: January 8, 2014
    Publication date: July 9, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chia-Hsin Hu, Sun-Jay Chang
  • Patent number: 9076869
    Abstract: A fin field effect transistor (FinFET), and a method of fabrication, is introduced. In an embodiment, trenches are formed in a substrate, wherein a region between adjacent trenches defines a fin. A dielectric material is formed in the trenches. A part of the substrate is doped and a region of high dopant concentration and a region of low dopant concentration are formed. Gate stacks are formed, portions of the fins are removed and source/drain regions are epitaxially grown in the regions of high/low dopant concentration. Contacts are formed to provide electrical contacts to source/gate/drain regions.
    Type: Grant
    Filed: January 8, 2014
    Date of Patent: July 7, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Hsin Hu, Sun-Jay Chang
  • Publication number: 20150179771
    Abstract: A method for performing a stress memorization technique (SMT) a FinFET and a FinFET having memorized stress effects including multi-planar dislocations are disclosed. An exemplary embodiment includes receiving a FinFET precursor with a substrate, a fin structure on the substrate, an isolation region between the fin structures, and a gate stack over a portion of the fin structure. The gate stack separates a source region of the fin structure from a drain region of the fin structure and creates a gate region between the two. The embodiment also includes forming a stress-memorization technique (SMT) capping layer over at least a portion of each of the fin structures, isolation regions, and the gate stack, performing a pre-amorphization implant on the FinFET precursor by implanting an energetic doping species, performing an annealing process on the FinFET precursor, and removing the SMT capping layer.
    Type: Application
    Filed: February 26, 2015
    Publication date: June 25, 2015
    Inventors: Wen-Cheng Lo, Sun-Jay Chang
  • Publication number: 20150123246
    Abstract: A Bipolar Junction Transistor (BJT) includes an elongated collector line, an elongated emitter line parallel to the collector line, and an elongated base line parallel to the collector line and positioned between the collector line and the base line. The emitter line, the base line, and the collector line are formed over fin structures.
    Type: Application
    Filed: November 4, 2013
    Publication date: May 7, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Hsin Hu, Sun-Jay Chang, Min-Chang Liang, Shien-Yang Wu
  • Patent number: 8946038
    Abstract: A method of forming one or more diodes in a fin field-effect transistor (FinFET) device includes forming a hardmask layer having a fin pattern, said fin pattern including an isolated fin area, a fin array area, and a FinFET area. The method further includes etching a plurality of fins into a semiconductor substrate using the fin pattern, and depositing a dielectric material over the semiconductor substrate to fill spaces between the plurality of fins. The method further includes planarizing the semiconductor substrate to expose the hardmask layer. The method further includes implanting a p-type dopant into the fin array area and portions of the FinFET area, and implanting an n-type dopant into the isolated fin area, a portion of the of fin array area surrounding the p-well and portions of the FinFET area. The method further includes annealing the semiconductor substrate.
    Type: Grant
    Filed: November 25, 2013
    Date of Patent: February 3, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Hsin Hu, Sun-Jay Chang, Jaw-Juinn Horng, Chung-Hui Chen
  • Publication number: 20140377928
    Abstract: The present disclosure provides methods to fabricate a semiconductor structure that includes a semiconductor substrate having a first region and a second region; a shallow trench isolation (STI) feature formed in the semiconductor substrate. The STI feature includes a first portion disposed in the first region and having a first thickness T1 and a second portion disposed in the second region and having a second thickness T2 greater than the first depth, the first portion of the STI feature being recessed from the second portion of the STI feature. The semiconductor structure also includes a plurality of fin active regions on the semiconductor substrate; and a plurality of conductive features disposed on the fin active regions and the STI feature, wherein one of the conductive features covers the first portion of the STI feature in the first region.
    Type: Application
    Filed: September 8, 2014
    Publication date: December 25, 2014
    Inventors: Chia-Hsin Hu, Sun-Jay Chang
  • Patent number: 8860148
    Abstract: The present disclosure provides one embodiment of a semiconductor structure that includes a semiconductor substrate having a first region and a second region; a shallow trench isolation (STI) feature formed in the semiconductor substrate. The STI feature includes a first portion disposed in the first region and having a first thickness T1 and a second portion disposed in the second region and having a second thickness T2 greater than the first depth, the first portion of the STI feature being recessed from the second portion of the STI feature. The semiconductor structure also includes a plurality of fin active regions on the semiconductor substrate; and a plurality of conductive features disposed on the fin active regions and the STI feature, wherein one of the conductive features covers the first portion of the STI feature in the first region.
    Type: Grant
    Filed: April 11, 2012
    Date of Patent: October 14, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Hsin Hu, Sun-Jay Chang