Abstract: The present invention provides a method for manufacturing a bonded wafer comprising steps of forming an oxide film on at least a surface of a base wafer or a surface of a bond wafer; bringing the base wafer and the bond wafer into close contact via the oxide film; subjecting these wafers to a heat treatment under an oxidizing atmosphere to bond the wafers together; grinding and removing the outer periphery of the bond wafer so that the outer periphery has a predetermined thickness; subsequently removing an unbonded portion of the outer periphery of the bond wafer by etching; and then thinning the bond wafer so that the bond wafer has a desired thickness, wherein the etching is conducted by using a mixed acid at 30° C. or less at least comprising hydrofluoric acid, nitric acid, and acetic acid.

Abstract: A legged mobile robot and a control program for the robot cancel a spin force, which is generated by motions of a lower body (242), a leg (2) or the like, by a twisting motion of an upper body (241) relative to the lower body (242) and a swinging motion of an arm (80).

Abstract: The present invention provides a method for manufacturing a bonded wafer, which includes at least the steps of bonding a bond wafer and a base wafer, grinding an outer peripheral portion of the bonded bond wafer, etching off an unbonded portion of the ground bond wafer, and then reducing a thickness of the bond wafer, wherein, in the step of grinding the outer peripheral portion, the bonded bond wafer is ground so as to form a groove along the outer peripheral portion of the bond wafer to form an outer edge portion outside the groove; and in the subsequent step of etching, the outer edge portion is removed together with the groove portion of the bond wafer to form a terrace portion where the base wafer is exposed at the outer peripheral portion of the bonded wafer. Thus, it is possible to provide a method for manufacturing a bonded wafer, which can reduce the number of dimples formed in a terrace portion of a base wafer upon removing an outer peripheral portion of a bonded bond wafer.

Abstract: In a legged mobile robot having an electric motor installed at a location between a foot and each leg to drive the ankle joint, a force sensor installed at the location between the foot and each leg to detect a floor reaction force acting from a floor surface on which the foot lands, and a cushioning member attached to the foot sole to cushioning impact that occurs when the foot lands on the floor surface, conductive members are disposed in depressions formed at the cushioning member, such that the conductive members contact the floor surface when the cushioning member contracts, thereby discharging and removing static electric charge electrified on the foot.

Abstract: The present invention provides a method for manufacturing a bonded wafer prepared by bonding a base wafer and a bond wafer, comprising at least a step of etching an oxide film in a terrace region in an outer periphery of the bonded wafer wherein the oxide film in the terrace region is etched by spin-etching with holding and spinning the bonded wafer. Thereby, there is provided a method for manufacturing a bonded wafer in which an oxide film formed in a terrace region of a base wafer is efficiently etched without removing an oxide film on the back surface of the base wafer.

Abstract: A leg type mobile robot includes a foot joined to a distal end of a leg through a second joint. The foot includes a foot flat portion having a ground contact end of the foot, a movable portion joined to the second joint and configured to be movable in a first direction with respect to the foot flat portion, a shock absorber comprising first and second end portions allowed to move closer to or away from each other in a second direction, the first end portion of the shock absorber being joined to a first point of the movable portion, and a motion direction conversion mechanism configured to convert a motion of the movable portion in the first direction to a motion of the second end portion of the shock absorber in the second direction with respect to the first point of the movable portion.

Abstract: The present invention relates to a nitrogen-containing fused ring compound represented by the following formula [I] wherein each symbol is as defined in the specification, or a pharmaceutically acceptable salt thereof, and an anti-HIV agent containing such compound. The compound of the present invention has an HIV integrase inhibitory activity, and is useful as an agent for the prophylaxis or treatment of AIDS, or as an anti-HIV agent. In addition, by the combined use with other anti-HIV agents such as a protease inhibitor, a reverse transcriptase inhibitor and the like, it can be a more effective anti-HIV agent. Because it shows integrase-specific high inhibitory activity, the compound can be a pharmaceutical agent safe on human body, which causes only a fewer side effects.

Abstract: A bipedal robot of the present invention has a trunk consisting of an upper trunk and a lower trunk which are rotatable around a rotation axis relative to one another. The upper trunk has shoulders on the right and left sides. An arm is provided at each shoulder. A pair of right and left legs is attached to lower ends of the lower trunk. A storage battery is mounted to the back of the upper trunk, positioned within a shoulder width. The storage battery is positioned below the top of a head mounted on the upper trunk. When the robot walks a narrow passage or corridor having a width slightly larger than the width thereof, for example, this arrangement prevents the storage battery from interfering with the passage or the like.

Abstract: In a legged mobile robot having a body and legs connected to the body, a seating aid is provided at its body so as to enable to sit on a seat. With this, the space occupied by the robot can be decreased to reduce space during storage and transport, and also enhance safety in the course of transport. In addition, maintenance work is simplified because immobilization in the seated condition is possible. Still further, the range of works is expanded to enable deskwork and the like. Further, the seating aid is provided at a location that is rearward of a center of gravity of the robot when the robot is seated. With this, the moment acting on the robot about the center of gravity during seating does not operate to tilt the robot rearward and, therefore, the robot can be enabled to keep a stable posture from before to after sitting down.

Abstract: Disclosed are a phosphor, a phosphor paste, and a light-emitting device. The phosphor comprises a compound represented by the formula (1): CaaSrbEu1-a-bMgSi2O6??(1) wherein 0.4?a?0.7, 0.4?b?0.7, and a+b?0.990. The phosphor paste comprises the above phosphor and an organic compound. The light-emitting device comprises the above phosphor and an electrode.

Abstract: Disclosed is a phosphor containing a nitrogen atom, a compound having a garnet structure and an activating agent. The activating agent is composed of at least one element selected from the group consisting of Ce, Pr, Nd, Eu, Tb, Dy, Ho, Er, Tm, Yb and Mn.

Abstract: The legged mobile robot the foot comprises a foot main body connected to each leg, a toe provided at a fore end of the foot main body to be bendable with respect to the foot main body, and a bending angle holder capable of holding a bending angle of the toe in a bendable range of the toe. In addition, a legged mobile robot control system is configured to hold the bending angle of the toe at a first time point which is a liftoff time of the leg from a floor or earlier thereof, and to release the bending angle at a second time point after the leg has lifted off the floor to restore the toe to a initial position. With this, the bending angle at the time of liftoff can continue to be held after liftoff, whereby the robot can be prevented from becoming unstable owing to the toe contacting the floor immediately after liftoff. In addition, stability during tiptoe standing can be enhanced.

Abstract: A legged mobile robot leg structure is provided in which a lower leg part (24) is connected to the lower end of an upper leg part (23) through a knee joint (27), a foot part (25) having a six-axis force sensor (60) is connected to the lower end of the lower leg part (24) through an ankle joint (28), and the ankle joint (28) supports the foot part (25) so that the foot part (25) can pitch around a lateral axis (Ly) and roll around a fore-and-aft axis (Lx) relative to the lower leg part (24). A pitch motor (34) for making the foot part (25) pitch around the lateral axis (Ly) is supported on the lower leg part (24) at a position above the ankle joint (28), and a roll motor (35) for making the foot part (25) roll around the fore-and-aft axis (Lx) is supported on the lower leg part (24) at a position above the ankle joint (28).

Abstract: A process for producing a vacuum ultraviolet ray-excited light-emitting phosphor comprising the steps of mixing a phosphor with a aluminum-based coupling agent, and calcining the mixture.

Abstract: An object of the present invention is to provide fluorescence showing a peak wavelength of excited spectrum within the wavelength range of from 350 to 500 nm and suitable for a white LED emitting yellow light, and a white LED comprising this fluorescence. This object achieved by phosphor for white. LED comprising a silicate fluorescent material and a borate fluorescent material.

Abstract: A phosphor having small reduction in brightness when exposed to the plasma, a phosphor paste comprising the phosphor are provided. The phosphor comprises the following fluorescent substances I and II, wherein the fluorescent substance I contains silicate and Mn as an activator and the fluorescent substance II contains a compound represented by the formula (1) or a compound represented by the formula (2) and Tb as the activator. (M11?aM2a)(Mg1?b?cZnb)Al11?dMnc+dO19?(a+d)/2??(1) [In the formula (1), M1 is at least one selected from the group consisting of La, Y and Gd, M2 is at least one selected from the group consisting of Ca, Sr and Ba, a is not less than 0 and not more than 0.6, b is not less than 0 and not more than 1, c is not less than 0 and not more than 0.5, d is not less than 0 and not more than 0.5, b+c is not more than 1 and c+d is more than 0 and not more than 0.5.] M32O3.mAl2O3.

Abstract: The present invention relates to a nitrogen-containing fused ring compound represented by the following formula [I] wherein each symbol is as defined in the specification, or a pharmaceutically acceptable salt thereof, and an anti-HIV agent containing such compound. The compound of the present invention has an HIV integrase inhibitory activity, and is useful as an agent for the prophylaxis or treatment of AIDS, or as an anti-HIV agent. In addition, by the combined use with other anti-HIV agents such as a protease inhibitor, a reverse transcriptase inhibitor and the like, it can be a more effective anti-HIV agent. Because it shows integrase-specific high inhibitory activity, the compound can be a pharmaceutical agent safe on human body, which causes only a fewer side effects.

Abstract: A phosphor and a vacuum ultraviolet excited light-emitting device are disclosed. The phosphor comprises a compound represented by the following formula (1) Ca1?a?bSraEubMgSi2O6??(1) wherein 0.1<a?0.35 and 0.003?b?0.02. The phosphor is excited by vacuum ultraviolet and emits blue light with high brightness. The vacuum ultraviolet excited light-emitting device comprises the above phosphor.

Abstract: A phosphor having a high brightness after being exposed to plasma and a phosphor paste containing the phosphor. The phosphor comprises a fluorescent substance A1 containing a compound represented by the following formula (I) and at least one activator selected from the group consisting of Eu and Mn, and a fluorescent substance B1 containing an aluminate; mM1O.nM2O.2M3O2??(I) [in the formula (I), M1 is at least two selected from the group consisting of Ca, Sr and Ba, or Ca alone or Ba alone; M2 is at least one selected from the group consisting of Mg and Zn; M3 is at least one selected from the group consisting of Si and Ge; 0.5?m?3.5; and 0.5?n?2.5].

Abstract: The present invention provides a phosphor comprising at least one selected from the group consisting of Si and Ge, and Eu as an activator, and ratio R of not less than 40%, wherein the ratio R is calculated by entering value of [a] being peak amplitude derived from Eu2+ and value of [b] being peak amplitude derived from Eu3+ in primary differential pattern of an X-ray absorption near edge structure spectrum into the following equation (1).