Abstract: A dry cleaning apparatus includes a chamber, a substrate support supporting a substrate within the chamber, a shower head arranged in an upper portion of the chamber to supply a dry cleaning gas toward the substrate, the shower head including an optical window transmitting a laser light therethrough toward the substrate support, a plasma generator generating plasma from the dry cleaning gas, and a laser irradiator irradiating the laser light on the substrate through the optical window and the plasma to heat the substrate.

Abstract: A wafer cleaning apparatus is provided. The wafer cleaning apparatus includes comprising a chamber configured to be loaded with a wafer, a nozzle on the wafer and configured to provide liquid chemicals on an upper surface of the wafer, a housing under the wafer, a laser module configured to irradiate laser on the wafer, a transparent window disposed between the wafer and the laser module, and a controller configured to control on/off of the laser module, wherein the controller is configured to control repetition of turning the laser module on and off, and retain temperature of the wafer within a temperature range, and a ratio of time when the laser module is on in one cycle including on/off of the laser module is 30% to 50%.

Abstract: Disclosed are apparatuses and methods for controlling the steering of an autonomous vehicle.

Abstract: A four-wheel independent steering system and a method of controlling the four-wheel independent steering system. The four-wheel independent steering system includes a front/rear-wheel-angle-ratio calculation unit to calculate a ratio Kss between front and rear wheel angles that allows a body slip angle to converge to ‘0’ and allows a yaw angle and a yaw rate to maintain target values, and a control unit to perform four-wheel steering control based on the ratio Kss between the front and rear wheel angles.

Abstract: An apparatus for four-wheel independent steering. The apparatus may include: a rear wheel angle computation unit configured to compute a rear wheel angle (?r) resulting by multiplying a front wheel angle (?f) by a predetermined front/rear wheel angle ratio (Kss) corresponding to a vehicle speed (V); a gain computation unit configured to compute a gain (A) corresponding to a steering angle acceleration and the vehicle speed and then to output a final rear wheel angle (?r) resulting by multiplying the rear wheel angle (?r) computed by the rear wheel angle computation unit by the computed gain (A); and a control unit configured to perform rear wheel steering control based on the front wheel angle (?f) and the final rear wheel angle (?r).

Abstract: An apparatus for controlling an MDPS system including: an autonomous driving cancellation determination unit configured to determine whether to cancel autonomous driving, using column torque passed through a band stop filter, under an autonomous driving condition; and a signal processing unit configured to calculate command steering angle acceleration information using command steering angle information outputted from an autonomous driving system. When the steering angle acceleration information is equal to or greater than a predetermined reference value, the autonomous driving cancellation determination unit may determine that urgent steering is performed by the autonomous driving system, and forbid cancellation of the autonomous driving.

Abstract: A wafer cleaning apparatus is provided. The wafer cleaning apparatus includes comprising a chamber configured to be loaded with a wafer, a nozzle on the wafer and configured to provide liquid chemicals on an upper surface of the wafer, a housing under the wafer, a laser module configured to irradiate laser on the wafer, a transparent window disposed between the wafer and the laser module, and a controller configured to control on/off of the laser module, wherein the controller is configured to control repetition of turning the laser module on and off, and retain temperature of the wafer within a temperature range, and a ratio of time when the laser module is on in one cycle including on/off of the laser module is 30% to 50%.

Abstract: An apparatus and method for controlling motor driven power steering system, the apparatus including: a column torque sensor detecting column torque applied to a steering column of a vehicle; an MDPS logic unit deciding a first command current based on the column torque and vehicle speed; a steering angle position control unit outputting a second command current for driving an MDPS motor in an autonomous driving mode, based on a command steering angle and a current steering angle inputted from an autonomous driving system and a steering angle sensor, respectivley; a driver steering intervention determination unit monitoring the column torque of the column torque sensor in an autonomous driving mode, and determining whether a driver has intervened in steering; and an output control unit deciding a final command current by applying the weight decided by the driver steering intervention determination unit to the first and second command currents.

Abstract: The present invention relates to a steer-by-wire system for a vehicle, and the system may include a reaction motor generating reaction torque based on the turning of a steering wheel, a steering motor implementing a steering manipulation, a motor location detector measuring a current steering angle by detecting a rotation location of the steering motor, a location controller calculating a target steering angle by applying the amount of a location control error to a vehicle speed, command steering angle and current steering angle, a steering controller driving the steering motor based on the target steering angle, and a reaction controller generating the reaction torque according to a driver's steering state based on the vehicle speed and a steering angular velocity, compensating for the reaction torque based on the amount of the location control error, and driving the reaction motor based on the final reaction torque.

Abstract: A wafer cleaning equipment includes a housing to be positioned adjacent to a wafer, a hollow region in the housing, a laser module that outputs a laser beam having a profile of the laser beam includes a first region having a first intensity and a second region having a second intensity greater than the first intensity, the laser beam being output into the hollow region, and a transparent window that covers an upper part of the hollow region and transmits the laser beam to be incident on an entirety of a lower surface of the wafer.

Abstract: An apparatus for estimating a column torque in a motor-driven power steering system includes a vehicle speed sensing unit configured to sense a vehicle speed; a steering sensing unit configured to sense a steering state of a driver; a yaw rate sensor configured to output a measured yaw rate by sensing a tilted state of a vehicle; and a column torque estimation unit configured to calculate a self-aligning torque and an estimated yaw rate based on the vehicle speed and the steering state inputted from the vehicle speed sensing unit and the steering sensing unit, estimate a column torque by adjusting angular velocity compensation gains with respect to a steering angular velocity for each of the estimated yaw rate and the vehicle speed, and output a final column torque by adjusting the estimated column torque according to a difference between the measured yaw rate and the estimated yaw rate.

Abstract: A four-wheel steering control device for independently controlling steering of each of first to fourth wheels disposed in a vehicle. A commanded steering angle acquiring part acquires first to fourth commanded steering angles for first to fourth wheels of a vehicle. A four-wheel turning control rate calculating part determines first to fourth residual angles, by which the first to fourth wheels realize the first to fourth commanded steering angles, from current steering angles and calculate first to fourth turning control rates of the first to fourth wheels on basis of the first to fourth residual angles determined. A control part independently controls steering of each of the first to fourth wheels using the first to fourth turning control rates calculated.

Abstract: A steering control method for a redundant steering system. The method includes: receiving, by a first steering controller and a second steering controller, a first command signal and a second command signal, respectively; and synchronizing control outputs of the first steering controller and the second steering controller in a way that at least one of the first steering controller and the second steering controller compensates a control timing according to the first command signal and the second command signal so that the control outputs are synchronized.

Abstract: An apparatus may include a command steering angle control portion removing noise of a first command steering angle and outputting a second command steering angle, a steering angle position control portion compensating for a first steering angle error corresponding to a difference between the second command steering angle and a first current steering angle, and outputting a first command current, a first responsiveness improving portion compensating for a second steering angle error corresponding to a difference between the second command steering angle and a second current steering angle, calculating a first compensation value, and applying the first compensation value to the steering angle position control portion, and a second responsiveness improving portion deriving a compensation gain, calculating a second compensation value on the basis of the first steering angle error and the compensation gain, and applying the second compensation value to the steering angle position control portion.

Abstract: An apparatus for controlling an MDPS system may include an MDPS-basic logic unit determining a first auxiliary command current for driving an MDPS motor in a manual driving mode, based on column torque applied to a steering column of a vehicle and a vehicle speed, an autonomous driving steering controller determining a second auxiliary command current for driving the MDPS motor in an autonomous driving mode, and a mode change controller determining a driver's steering intervention using a variable reference time variably determined based on the column torque in the manual driving mode, determining a mode change time from the autonomous driving mode to the manual driving mode based on the column torque, and determining a final auxiliary command current for driving the MDPS motor upon mode change, by applying, to the first and second auxiliary command currents, a weight into which the mode change time is incorporated.

Abstract: An apparatus for enlarging and displaying the screen and relaying the enlarged screen in real time include a reception unit that receives the entire screen of a provider from a relay server, a display unit that displays the received entire screen, a recognition unit that detects a user input on the displayed entire screen, and a controller that detects a change in input state of the user input and zooms in on a region corresponding to the user input, on the entire screen based on the change in input state. According to an embodiment, the apparatus has an effect capable of simultaneously receiving screen enlargement and a real-time relay service at the same time by means of only a simple operation using the portable electronic device. Furthermore, the apparatus has an effect capable of simply providing a screen enlargement real-time relay service for blind people with low vision.

Abstract: An electronic steering control apparatus to which a redundancy system is applied and which includes a first position controller and a second position controller. When communication is established between the first and second position controllers, the first position controller controls the position of a first motor based on command steering angles ?1 and ?2 from a control unit and feedback steering angles ?m1 and ?m2 from the first motor and a second motor, and the second position controller controls the position of the second motor based on the command steering angles ?1 and ?2 from the control unit and the feedback steering angles ?m1 and ?m2 from the first motor and the second motor.

Abstract: A chip-to-chip process variation aware power efficiency optimization method that includes determining, using an adaptive voltage scaling (AVS) module of a processing unit in a system, an optimal voltage identification (VID) based on chip process variation. The method outputs the optimal VID from the AVS module to a voltage regulator of the system. The method adjusts a direct current (DC) load line setting based on the optimal VID of the processing unit in the system. The method regulates, using the voltage regulator of the system, a voltage supplied to the processing unit based on the DC load line setting.

Abstract: A terminal fastening structure of a connector for an electric vehicle includes a pair of tab terminals electrically connected to an electrical wire connector, a plug inner housing having an opening at a first end into which the tab terminals are inserted, and a pair of terminal holders fastened to the plug inner housing and fixing the tab terminals to the plug inner housing.

Abstract: Disclosed are an apparatus for and a method of compensating for a steering error in an advanced driving assistance system, and the apparatus includes a command steering angle correction module that corrects a command steering angle according to whether or not the command steering angle input from the advanced driving assistance system satisfies a preset error compensation condition; and a motor control unit that controls a motor of a motor-driven power steering system according to the command steering angle corrected by the command steering angle correction module.