Abstract: A dry cleaning apparatus includes a chamber, a substrate support supporting a substrate within the chamber, a shower head arranged in an upper portion of the chamber to supply a dry cleaning gas toward the substrate, the shower head including an optical window transmitting a laser light therethrough toward the substrate support, a plasma generator generating plasma from the dry cleaning gas, and a laser irradiator irradiating the laser light on the substrate through the optical window and the plasma to heat the substrate.

Abstract: An apparatus for controlling an MDPS system may include an MDPS-basic logic unit determining a first auxiliary command current for driving an MDPS motor in a manual driving mode, based on column torque applied to a steering column of a vehicle and a vehicle speed, an autonomous driving steering controller determining a second auxiliary command current for driving the MDPS motor in an autonomous driving mode, and a mode change controller determining a driver's steering intervention using a variable reference time variably determined based on the column torque in the manual driving mode, determining a mode change time from the autonomous driving mode to the manual driving mode based on the column torque, and determining a final auxiliary command current for driving the MDPS motor upon mode change, by applying, to the first and second auxiliary command currents, a weight into which the mode change time is incorporated.

Abstract: An MDPS (Motor Driven Power Steering) system may include: a vehicle speed sensor configured to sense vehicle speed; a yaw rate sensor configured to sense a tilted state of the vehicle, and output a yaw rate value; a lateral acceleration sensor configured to sense lateral acceleration which acts in a lateral direction of the vehicle; and an MDPS controller configured to receive the vehicle speed, the yaw rate value and the lateral acceleration from the vehicle speed sensor, the yaw rate sensor and the lateral acceleration sensor, respectively, and calculate assist torque by estimating column torque.

Abstract: A steering control apparatus includes: a command steering angle acceleration detector configured to detect a command steering angle acceleration, in an autonomous driving mode, using a command steering angle inputted from an autonomous driving system; an autonomous driving determiner configured to determine whether to cancel the autonomous driving mode using any one or any combination of any two or more of a column torque of a steering shaft, a vehicle speed of a vehicle, and the command steering angle acceleration; and a steering angle controller configured to control a steering angle, in the autonomous driving mode, by adjusting a gain according to a steering angle error between the command steering angle and a current steering angle, based on an output from the command steering angle acceleration detector.

Abstract: A motor-driven power steering apparatus includes an auxiliary output generation unit configured to generate an auxiliary output of a motor by using at least one of a vehicle speed, a steering angle and a column torque; a compensation gain generation unit configured to generate a compensation gain for compensating for a steering pull of a vehicle by a rapid acceleration during a turn, by using at least one of the vehicle speed, the steering angle and the column torque; and an auxiliary output compensation unit configured to compensate for an auxiliary output by applying the compensation gain outputted by the compensation gain generation unit to the auxiliary output.

Abstract: A dry cleaning apparatus includes a chamber, a substrate support supporting a substrate within the chamber, a shower head arranged in an upper portion of the chamber to supply a dry cleaning gas toward the substrate, the shower head including an optical window transmitting a laser light therethrough toward the substrate support, a plasma generator generating plasma from the dry cleaning gas, and a laser irradiator irradiating the laser light on the substrate through the optical window and the plasma to heat the substrate.

Abstract: A steering feel control apparatus of a motor driven power steering (MDPS) system may include: a filter configured to filter a motor current inputted to a motor, in order to remove a vibration component which generates vibration on a steering wheel; and a controller configured to control the filter to remove the vibration component of the motor current when the MDPS is driven.

Abstract: An apparatus for controlling an motor-driven power steering (MDPS) may include: a driving information input unit configured to receive driving information; a steering angle position control unit configured to receive a command steering angle and a current motor steering angle of a driving motor, and output an autonomous driving command; and an MDPS control unit configured to drive the driving motor based on the autonomous driving command in an autonomous driving mode, determine whether a driver intervenes in steering, calculate a driver command by the driver's steering according to whether the driver intervenes in steering, and change an operation mode from the autonomous driving mode to a driver mode while driving the driving motor with a compensation output between the driver command and the autonomous driving command.

Abstract: Disclosed herein are an apparatus and method of controlling a motor-driven power steering system. The apparatus may include: a sensor configured to detect at least one of a steering angle, an angular speed, and a column torque in the motor-driven power steering system; and a controller configured to determine whether a reverse steering operation has been performed based on the steering angle or the angular speed, and configured to output, when non-reverse steering, a high-frequency compensation gain (a second gain) based on the column torque, as a final compensation gain, and output, when reverse steering, a value obtained by applying an additional compensation gain (a first gain) optimized corresponding to an angular acceleration to the high-frequency compensation gain (the second gain), as the final compensation gain.

Abstract: An example print medium loading device includes a loading unit on which a print medium is loadable, a transporting roller unit to transport a print medium toward the loading unit, and a moving gate between the loading unit and the transporting roller unit. The loading gate moves according to locations to which the print medium is transported. In an example, when a first print medium is loaded on the loading unit and the transporting roller unit transports a second print medium toward the loading unit, the moving gate is positioned at the first location to overlap a trailing end of the first print medium toward the moving gate. When the leading end of the second print medium is past the moving gate and the second print medium is loaded on the loading unit, the moving gate sequentially moves through the first through fourth positions.

Abstract: Disclosed are an apparatus for and a method of compensating for a steering error in an advanced driving assistance system, and the apparatus includes a command steering angle correction module that corrects a command steering angle according to whether or not the command steering angle input from the advanced driving assistance system satisfies a preset error compensation condition; and a motor control unit that controls a motor of a motor-driven power steering system according to the command steering angle corrected by the command steering angle correction module.

Abstract: A cleaning method includes supplying, to a substrate by a dual nozzle, a first chemical liquid and a first spray, the first spray including a first liquid dissolving the first chemical liquid, and moving the dual nozzle in a first direction. The the dual nozzle comprises a first nozzle and a second nozzle, the first nozzle supplies the first spray to the substrate and the second nozzle supplies the first chemical liquid to the substrate while the dual nozzle moves in the first direction, the first nozzle proceeds ahead of the second nozzle in the first direction while the dual nozzle moves in the first direction, and the first nozzle has a distance 3 cm to 7 cm from the second nozzle.

Abstract: An apparatus may include a driving information input unit for receiving driving information generated while a vehicle travels, a steering angle location control unit for receiving a command steering angle for autonomous driving and a current motor steering angle of a driving motor and outputting an autonomous driving command through location control, and a motor-driven power steering control unit for driving the driving motor based on the autonomous driving command in an autonomous driving mode, determining whether a driver intervenes in steering, based on the driving information during the autonomous driving, computing a driver command according to the driver' steering based on a result of the determination, computing a compensation output between the autonomous driving command and the driver command by applying a weighting according to a steering angular speed, and making a mode transition from the autonomous driving mode to a driver mode while driving the driving motor.

Abstract: A wafer cleaning apparatus is provided. The wafer cleaning apparatus includes comprising a chamber configured to be loaded with a wafer, a nozzle on the wafer and configured to provide liquid chemicals on an upper surface of the wafer, a housing under the wafer, a laser module configured to irradiate laser on the wafer, a transparent window disposed between the wafer and the laser module, and a controller configured to control on/off of the laser module, wherein the controller is configured to control repetition of turning the laser module on and off, and retain temperature of the wafer within a temperature range, and a ratio of time when the laser module is on in one cycle including on/off of the laser module is 30% to 50%.

Abstract: A stapling apparatus includes a stapler, a driver to move the stapler, and a guide part to define a moving path along which the stapler is to move in response to selection of the moving path among a plurality of moving paths along which the stapler is movable.

Abstract: A damping reduction apparatus for a motor driven power steering (MDPS) may include: a natural vibration frequency detection unit configured to detect a natural vibration frequency from a motor current by variably controlling a bandwidth according to a steering condition; a damping compensation unit configured to additionally compensate for a damping value outputted from a damping unit according to a vehicle speed; and a compensation output unit configured to inversely compensate for an output of the MDPS according to the natural vibration frequency outputted from the natural vibration frequency output unit, and add the compensation to an output of the damping compensation unit.

Abstract: An electric steering apparatus may include: a column torque sensor configured to detect column torque; a vehicle speed sensor configured to detect vehicle speed of the vehicle; an autonomous driving control unit configured to determine a second command current in an autonomous driving mode; a driver steering intervention determination unit configured to determine whether a driver intervenes in steering; an MDPS logic unit configured to determine a first command current based on the column torque and the vehicle speed, when the driver's steering intervention occurs in the autonomous driving mode; and an output control unit configured to determine a final weight based on a steering angular velocity and the column torque, when the driver's steering intervention occurs in the autonomous driving mode, and determine a final command current by applying the determined final weight to the first and second command currents.

Abstract: A package including a package substrate; an interposer electrically coupled to the package substrate and including a metal layer; a die including an integrated voltage regulator and electrically coupled to the interposer by solder features; and an inductor formed by a magnetic material disposed between two of the solder features electrically coupled to each other by a portion of the metal layer of the interposer, the inductor electrically coupled to the integrated voltage regulator.

Abstract: The present invention relates to a steer-by-wire system for a vehicle, and the system may include a reaction motor generating reaction torque based on the turning of a steering wheel, a steering motor implementing a steering manipulation, a motor location detector measuring a current steering angle by detecting a rotation location of the steering motor, a location controller calculating a target steering angle by applying the amount of a location control error to a vehicle speed, command steering angle and current steering angle, a steering controller driving the steering motor based on the target steering angle, and a reaction controller generating the reaction torque according to a driver's steering state based on the vehicle speed and a steering angular velocity, compensating for the reaction torque based on the amount of the location control error, and driving the reaction motor based on the final reaction torque.

Abstract: An apparatus for estimating a column torque in a motor-driven power steering system includes a vehicle speed sensing unit configured to sense a vehicle speed; a steering sensing unit configured to sense a steering state of a driver; a yaw rate sensor configured to output a measured yaw rate by sensing a tilted state of a vehicle; and a column torque estimation unit configured to calculate a self-aligning torque and an estimated yaw rate based on the vehicle speed and the steering state inputted from the vehicle speed sensing unit and the steering sensing unit, estimate a column torque by adjusting angular velocity compensation gains with respect to a steering angular velocity for each of the estimated yaw rate and the vehicle speed, and output a final column torque by adjusting the estimated column torque according to a difference between the measured yaw rate and the estimated yaw rate.