Patents by Inventor Takahiro Togashi
Takahiro Togashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 11018403Abstract: An electromagnetic wave transmission cable for transmitting an electromagnetic wave comprises a hollow waveguide tube and a foamed resin member. The hollowing waveguide tube includes a hollow dielectric layer formed in a tubular shape. The foamed resin member is provided over a predetermined length in a longitudinal direction of the hollow waveguide tube and covers a surface of the dielectric layer to surround an outer periphery of the hollow waveguide tube.Type: GrantFiled: October 18, 2017Date of Patent: May 25, 2021Assignee: PIONEER CORPORATIONInventors: Yasuo Hosoda, Tomoyuki Miyamoto, Katsunori Obata, Takahiro Togashi, Takao Tagiri
-
Publication number: 20190296416Abstract: An electromagnetic wave transmission cable for transmitting an electromagnetic wave comprises a hollow waveguide tube and a foamed resin member. The hollowing waveguide tube includes a hollow dielectric layer formed in a tubular shape. The foamed resin member is provided over a predetermined length in a longitudinal direction of the hollow waveguide tube and covers a surface of the dielectric layer to surround an outer periphery of the hollow waveguide tube.Type: ApplicationFiled: October 18, 2017Publication date: September 26, 2019Inventors: Yasuo HOSODA, Tomoyuki MIYAMOTO, Katsunori OBATA, Takahiro TOGASHI, Takao TAGIRI
-
Patent number: 8289507Abstract: A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.Type: GrantFiled: May 27, 2011Date of Patent: October 16, 2012Assignee: Hitachi High-Technologies CorporationInventors: Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno, Hiroyuki Nakano, Takahiro Jingu, Hisashi Hatano, Yukihisa Mohara, Seiji Otani, Takahiro Togashi
-
Patent number: 8094298Abstract: A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.Type: GrantFiled: October 6, 2009Date of Patent: January 10, 2012Assignee: Hitachi High-Technologies CorporationInventors: Takahiro Togashi, Shigeru Matsui
-
Publication number: 20110228258Abstract: A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.Type: ApplicationFiled: May 27, 2011Publication date: September 22, 2011Inventors: Akira HAMAMATSU, Minori NOGUCHI, Yoshimasa OHSHIMA, Sachio UTO, Taketo UENO, Hiroyuki NAKANO, Takahiro JINGU, Hisashi HATANO, Yukihisa MOHARA, Seiji OTANI, Takahiro TOGASHI
-
Patent number: 7952700Abstract: A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.Type: GrantFiled: October 19, 2010Date of Patent: May 31, 2011Assignee: Hitachi High-Technologies CorporationInventors: Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno, Hiroyuki Nakano, Takahiro Jingu, Hisashi Hatano, Yukihisa Mohara, Seiji Otani, Takahiro Togashi
-
Publication number: 20110032515Abstract: A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.Type: ApplicationFiled: October 19, 2010Publication date: February 10, 2011Inventors: Akira HAMAMATSU, Minori Noguchi, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno, Hiroyuki Nakano, Takahiro Jingu, Hisashi Hatano, Yukihisa Mohara, Seiji Otani, Takahiro Togashi
-
Patent number: 7817261Abstract: A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.Type: GrantFiled: May 2, 2008Date of Patent: October 19, 2010Assignee: Hitachi High-Technologies CorporationInventors: Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno, Hiroyuki Nakano, Takahiro Jingu, Hisashi Hatano, Yukihisa Mohara, Seiji Otani, Takahiro Togashi
-
Publication number: 20100020315Abstract: A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.Type: ApplicationFiled: October 6, 2009Publication date: January 28, 2010Applicant: Hitachi High-Technologies CorpInventors: Takahiro Togashi, Shigeru Matsui
-
Patent number: 7619729Abstract: A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.Type: GrantFiled: November 6, 2008Date of Patent: November 17, 2009Assignee: Hitachi High-Technologies CorporationInventors: Takahiro Togashi, Shigeru Matsui
-
Publication number: 20090066941Abstract: A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.Type: ApplicationFiled: November 6, 2008Publication date: March 12, 2009Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Takahiro TOGASHI, Shigeru Matsui
-
Patent number: 7456948Abstract: A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.Type: GrantFiled: July 5, 2007Date of Patent: November 25, 2008Assignee: Hitachi High-Technologies CorporationInventors: Takahiro Togashi, Shigeru Matsui
-
Publication number: 20080218751Abstract: An inspection device of an object, comprising: a laser beam source for oscillating a laser beam and irradiating the laser beam onto a surface of an object to be inspected, a rotary table for loading and rotating the object, a moving mechanism for moving the rotary table in a transfer direction of the object, a plurality of light receptors disposed above the object for receiving a scattering light scattered from the surface of the object when the laser beam irradiated from the laser beam source onto the surface of the object loaded on the rotary table, and a data processor for performing operations on the basis of received signals of the scattering light received by the plurality of light receptors and discriminating a boundary position between a flat plane area of the surface of the object which is irradiated with the laser beam and a predetermined area corresponding to an edge portion outside the plane area.Type: ApplicationFiled: March 4, 2008Publication date: September 11, 2008Inventors: Takahiro Togashi, Shigeru Matsui
-
Publication number: 20080204724Abstract: A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.Type: ApplicationFiled: May 2, 2008Publication date: August 28, 2008Inventors: Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno, Hiroyuki Nakano, Takahiro Jingu, Hisashi Hatano, Yukihisa Mohara, Seiji Otani, Takahiro Togashi
-
Patent number: 7369223Abstract: An apparatus for inspecting a pattern to detect a small pattern defect has an illuminating light source, as illuminating optical system having a plurality of illuminating portions for switching an optical path of illuminating light flux to a surface of board constituting the inspected object from a plurality of directions different from each other, a detecting optical system having a variable magnification using an object lens for condensing reflected diffracted light from the illuminated board, a focusing optical system having a variable magnification capable of focusing an optical image by converged reflected diffracted light with a desired focusing magnification and an optical detector for detecting the optical image focused by the focusing optical system to convert it into an image signal, an A/D converter for converting the image signal into a digital image signal, and an image signal processor for processing the digital image signal to detect the defect.Type: GrantFiled: March 23, 2005Date of Patent: May 6, 2008Assignee: Hitachi High-Technologies CorporationInventors: Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno, Hiroyuki Nakano, Takahiro Jingu, Hisashi Hatano, Yukihisa Mohara, Seiji Otani, Takahiro Togashi
-
Publication number: 20080007725Abstract: A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.Type: ApplicationFiled: July 5, 2007Publication date: January 10, 2008Inventors: Takahiro Togashi, Shigeru Matsui
-
Patent number: 7038382Abstract: First electrodes each having a first bus electrode extending in the row direction are arranged regularly in the column direction on the rear-facing face of a front glass substrate, and covered with a first dielectric layer. On the rear-facing face of the first dielectric layer, second electrodes each having a second electrode body extending in the column direction are arranged regularly in the row direction and covered with a second dielectric layer. A first transparent electrode projecting from the first bus electrode and a second transparent electrode projecting from the second electrode body face each other at a required interval when viewed from the front glass substrate. A recess is formed in a portion of the second dielectric layer covering the first transparent electrode and facing toward the discharge space.Type: GrantFiled: April 26, 2004Date of Patent: May 2, 2006Assignee: Pioneer CorporationInventors: Hirokazu Hashikawa, Takahiro Togashi
-
Patent number: 6992444Abstract: In the PDP, a discharge cell is formed in the vicinity of an intersection of a row electrode pair and a column electrode. The column electrode is formed in a different plane within a dielectric layer from that in which the row electrode pair is formed. Each of the discharge cells is surrounded and defined by a partition wall member, and divided by a second transverse wall into a display discharge cell for producing a sustain discharge and an addressing discharge cell for producing a reset discharge and an addressing discharge. The display discharge cell and the addressing discharge cell communicate by means of a clearance.Type: GrantFiled: May 3, 2004Date of Patent: January 31, 2006Assignee: Pioneer CorporationInventors: Hirokazu Hashikawa, Takahiro Togashi
-
Patent number: RE44840Abstract: A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.Type: GrantFiled: January 16, 2013Date of Patent: April 15, 2014Assignee: Hitachi High-Technologies CorporationInventors: Takahiro Togashi, Shigeru Matsui
-
Patent number: RE44977Abstract: A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.Type: GrantFiled: January 16, 2013Date of Patent: July 1, 2014Assignee: Hitachi High-Technologies CorporationInventors: Takahiro Togashi, Shigeru Matsui