Abstract: An FET for malfunction check is connected between the gate and source of an FET for power-source output control, which is connected in series in a power output line from a battery used as a power source for a load. A malfunction determination circuit determines whether the FET for power-source output control is operating normally or not, by monitoring output voltage of the FET for malfunction check. Further, the malfunction determination circuit identifies malfunction of the FET for power-source output control due to short-circuiting during actual use.

Abstract: A molecular pump has a casing having a gas inlet port and a gas discharge port, a stator disposed within the casing, a shaft disposed in the casing concentrically with the stator, a bearing rotatably supporting the shaft for undergoing rotation relative to the stator in a preselected direction of rotation, a rotor mounted on the shaft for rotation therewith in the preselected direction of rotation, and a motor for rotationally driving the shaft. A flange is connected to the casing at the gas inlet port.

Abstract: A vacuum pump has a pump case having a gas suction port at an upper part of the pump case and a gas exhaust port at a lower part of the pump case. A stator column extends from a base of the pump case and has an outer circumferential surface. A rotor shaft is rotatably supported in the pump case by the stator column. A spacer is removably integrally connected to the outer circumferential surface of the stator column. The spacer has an outer circumferential surface spaced apart from an inner circumferential surface of the rotor and a through-hole extending form the outer circumferential surface to an inner circumferential surface thereof. A connecting member extends through the through-hole of the spacer and contacts the outer circumferential surface of the stator column to thereby removably integrally connect the spacer to the outer circumferential surface of the stator column.

Abstract: Also, a plurality of connecting portions are selected from these connecting portions, and the connection configuration shown in the first or second embodiment may be used in the selected connecting portions. For example, the connection configuration shown in the first or second embodiment may be used in the connecting portion between the vacuum vessel 2 and the casing 3 and the connecting portion between the casing 3 and the base 10, or may be used in the connecting portion between the vacuum vessel 2 and the casing 3 and the connecting portion between the casing 8 and the casing 9, or may be used in the connecting portion between the casing 8 and the casing 9 and the connecting portion between the casing 3 and the base 10. That is, the connection configuration shown in the first or second embodiment can be used by changing the combination of connecting portions to which the connecting configuration is applied.

Abstract: A turbo-molecular pump has components including a stator column, a rotary shaft, and a blade connected to the rotary shaft for rotation therewith. A radiation temperature measuring apparatus has a radiation thermometer for measuring a temperature of a preselected one of the components of the turbo-molecular pump disposed within a view angle range of the radiation thermometer and in accordance with heat energy radiated from the preselected component. A hood is connected to the radiation thermometer so as to not interfere with the view angle range of the radiation thermometer and is configured to block heat energy radiated from components of the turbo-molecular pump disposed outside of the view angle range of the radiation thermometer.

Abstract: A molecular pump for exhausting a chamber has a casing, a stator mounted in the casing, and a rotor mounted in the casing for undergoing rotation relative to the stator during exhaustion of the container. The rotor has a surface disposed opposite to and confronting a surface of the stator. A thread groove is formed in at least one of the opposite and confronting surfaces of the stator and the rotor. A clearance varying device varies a magnitude of a clearance between the opposite and confronting surfaces of the stator and the rotor. An exhaust controlling device controls a degree of exhaustion of the chamber by adjusting the magnitude of the clearance between the opposite and confronting surfaces of the stator and the rotor to a preselected target value during operation of the molecular pump.

Abstract: A vacuum pump adopts a positioning structure in which stator blades and spacers are arranged in the radial direction of a pump case by the contact between the outer peripheries portion of the stator blades and the inner periphery portion of the pump case and the contact between the outer periphery portions of the spacers and the inner periphery portion of the pump case. Accordingly, the spacer interposed between the upper and lower stator blades can have a simplified shape that serves a function of only setting the spacing between the stator blades to a prescribed length, thus decreasing the number of steps and costs of processing the spacer, and accordingly reducing the costs of the entire vacuum pump.

Abstract: An uninterruptible power supply comprises a rechargeable battery, such as a Li-ion battery and a Ni-MH battery, and is suitable for installation in electronic apparatus, such as a personal computer. The uninterruptible power supply appraises an operating state of a main body of the electronic apparatus on the basis of an output state of first DC power (standby power) necessary for standby operation of the main body and second DC power (operating power) necessary for normal operation of the main body, that are produced by a power supply unit, or on the basis of a power loading dose of the power supply unit, and supplies backup power to the main body only when the main body is in normal operation.

Abstract: A thread-groove pump mechanism portion PB employs a turn-back structure including a rotor formed of a multiple cylinder having an inner cylindrical rotor and an outer cylindrical rotor and a stator formed of a multiple cylinder having an inner cylindrical stator and on outer cylindrical stator. Gaps g1 and g3 defined by the outer walls of the rotor and the stator walls, and a gap g2 defined by the inner cylinder wall of the rotor and the stator wall during the rest of the pump are formed such that they increase with the distance from the rotor shaft center and g1>g2 and g1>g3 are satisfied. Thus, even if displacement occurs by the centrifugal force and thermal expansion during the operation of pump, predetermined gaps can be provided therebetween.

Abstract: A vacuum pump has a casing having an interior space, an inlet port for introducing gas molecules into the interior space, and an outlet port for discharging the gas molecules from the interior space. A rotor shaft extends into the interior space of the casing for undergoing rotation about a rotational axis. A stator is connected to the casing and has stator blades extending into the interior space of the casing. A rotor is disposed between the casing and the rotor shaft. The rotor has a preselected number of rotor blades disposed at an uppermost stage thereof and alternately disposed between the stator blades for undergoing rotation with the rotor shaft to direct gas molecules toward the outlet port. A rotational member is disposed between the inlet port and the rotor for undergoing rotation with the rotor shaft about the rotational axis. The rotational member has a generally conical-shaped surface gradually decreasing toward the inlet port.

Abstract: In a flange 61 provided at the suction port of a molecular pump, a hollow portion 72 is provided adjacently to a bolt hole 14. The hollow portion 72 is a through hole penetrating the flange 61. Thereby, a thin-walled portion 71 is formed between the bolt hole 14 and the hollow portion 72. If a shock in the direction of rotation of a rotor portion is provided to the molecular pump, for example, by the destruction of the rotor portion, the flange 61 slides in the direction of rotation of the rotor portion together with the molecular pump. Thereupon, a bolt fixing the flange 61 to a flange of a vacuum system hits the thin-walled portion 71, so that the thin-walled portion 71 is plastically deformed in the direction of arrow B. Thus, by the plastic deformation of the thin-walled portion 71, energy for rotating the molecular pump is consumed as energy for plastically deforming the thin-walled portion 71, so that the shock provided to the molecular pump is cushioned.

Abstract: To provide a small vacuum pump making it possible to efficiently perform evacuation from the atmosphere to a high vacuum (degree of vacuum: 10−5 Pa) by using a single pump unit. A turbo-molecular pump mechanism portion is arranged on the high-vacuum side, a volute pump mechanism portion is arranged on the atmosphere side, and a thread groove pump mechanism portion is arranged between the turbo-molecular pump mechanism portion and the volute pump mechanism portion. Further, rotor blades of the turbo-molecular pump mechanism portion, a rotor of the thread groove pump mechanism portion, and an impeller of the volute pump mechanism portion are integrally mounted to a single rotor shaft, which is rotated by a single motor.

Abstract: Provided are a turbo-molecular pump equipped with a radiation temperature measuring apparatus capable of measuring the temperature of a measurement object based on infrared rays constituting heat energy radiated from the measurement object and improved in terms of accuracy in temperature measurement, and a turbo-molecular pump equipped with the radiation temperature measuring apparatus. The radiation temperature measuring apparatus includes: a radiation thermometer for measuring the temperature of a measurement object based on infrared rays from the measurement object; and a hood arranged so as not to interfere with a view angle range of the radiation thermometer and adapted to block radiation heat from a non-measurement object. Further, a groove is formed in the measurement object so as to include a range enclosed through crossing of an imaginary line defined by imaginarily extending the leading edge of the hood and the measurement object.

Abstract: A vacuum pump adopts a positioning structure in which stator blades and spacers are arranged in the radial direction of a pump case by the contact between the outer peripheries portion of the stator blades and the inner periphery portion of the pump case and the contact between the outer periphery portions of the spacers and the inner periphery portion of the pump case. Accordingly, the spacer interposed between the upper and lower stator blades can have a simplified shape that serves a function of only setting the spacing between the stator blades to a prescribed length, thus decreasing the number of steps and costs of processing the spacer, and accordingly reducing the costs of the entire vacuum pump.

Abstract: A pump apparatus in accordance with the present invention is used to discharge a process gas from, for example, a semiconductor manufacturing system, and is constructed so that a rotor is pivotally supported by a magnetic bearing. To decrease the solidification and deposition of process gas in a tube of the pump apparatus, heat is generated in a bearing electromagnet of magnetic bearing to keep the temperature of tube at a high temperature. Heat is generated in the bearing electromagnet, for example, by causing a bias current to flow together with a control current, or by causing a high frequency current to flow. Also, a motor is heated by repeating the increase and decrease of rotational speed of motor, whereby the temperature of tube can be raised.

Abstract: A vacuum pump capable of controlling a gas sucking performance is provided. A conductance variable mechanism (50) is arranged at an inlet port (16) formed inside a flange (11). The conductance variable mechanism (50) allows the area of a cross-section of the inlet port to be increased or decreased relative to the direction where gas is fed, so that an amount of gas to be sucked from the inlet port (16) can be controlled.

Abstract: A vacuum pump is provided with a spacer so as to reduce the large gap formed between an inner wall of a rotor and an outer wall shape of a stator column into a predetermined small gap, when the rotor having a different diameter is mounted on the stator column. The predetermined small gap is achieved by detachably fixing the spacer having inner-wall and outer-wall shapes based on the outer-wall and inner-wall shapes of the stator column and the rotor, respectively, to the peripheral outer surface of the stator column.

Abstract: A thread-groove pump mechanism portion PB employs a turn-back structure including a rotor formed of a multiple cylinder having an inner cylindrical rotor and an outer cylindrical rotor and a stator formed of a multiple cylinder having an inner cylindrical stator and on outer cylindrical stator. Gaps g1 and g3 defined by the outer walls of the rotor and the stator walls, and a gap g2 defined by the inner cylinder wall of the rotor and the stator wall during the rest of the pump are formed such that they increase with the distance from the rotor shaft center and g1>g2 and g1>g3 are satisfied. Thus, even if displacement occurs by the centrifugal force and thermal expansion during the operation of pump, predetermined gaps can be provided therebetween.

Abstract: A multiple cylinder having a plurality of cylinders arranged concentrically and a rotor shaft rotatably disposed on the center axis of the multiple cylinder are provided in a pump casing. Each of the cylinders that constitute the multiple cylinder has a mounting portion, through which the cylinders are integrally fixed to the rotor shaft.

Abstract: A clearance between a rotor and a stator is adjusted by forming the outer peripheral surface of the rotor and the inner peripheral surface of the stator into a conical shape, and relatively moving the rotor and the stator in the thrust direction. When the rotor is rotatably supported by a magnetic bearing, the magnitude of the clearance between the rotor and the stator may be adjusted by offsetting the position at which the rotor is held in the thrust direction. The stator may be moved in the thrust direction by forming the bottom of the stator of electrostrictive material and expanding and contracting the electrostrictive member. When the outer peripheral surface of the rotor and the inner peripheral surface of the stator is cylindrical, the inner diameter of the stator may be increased and decreased by forming a part of the stator of electrostrictive material.