Abstract: A vacuum processing apparatus with excellent processing uniformity and capable of effectively performing routine and non-routine maintenance even when an object to be processed has an increased diameter is provided. In the vacuum processing apparatus having a vacuum transfer chamber, this apparatus comprises a lower vessel having a cylindrical shape, a sample stage unit including a sample stage and a ring-shaped sample stage base having support beams disposed axisymmetric with respect to a central axis of the sample stage, an upper vessel having a cylindrical shape, and a moving mechanism which is fixed to the sample stage base and is capable to move the sample stage unit movable in a vertical direction and in a horizontal direction.

Abstract: A heat treatment apparatus includes a heat treatment chamber to conduct heat treatment of a heated sample, a planar first electrode disposed in the heat treatment chamber, a planar second electrode to create plasma in a space between the first and second electrodes and to heat the heated sample, a radio-frequency power source to supply the first electrode with radio-frequency power to create the plasma, and a sample stage opposing the first electrode with the second electrode placed between the first electrode and the sample stage, to mount thereon the heated sample, wherein the first electrode is lower in thermal emissivity than the second electrode.

Abstract: A heat treatment apparatus, for enabling stable plasma discharge, with preventing desorption of silicon from silicon carbonite suppressing an amount of discharge of thermions therefrom, comprises a treatment chamber for heating a heating sample therein, a plate-shaped upper electrode, being disposed in the treatment chamber, a plate-shaped lower electrode, facing to the upper electrode and for producing plasma between the upper electrode, and a gas supplying means for supplying a gas into the treatment chamber, wherein the upper electrode and the lower electrode are made of a base material of silicon carbonite, and each being covered by a carbon film around thereof.

Abstract: Provided is a method for producing a nonaqueous-electrolyte battery. A positive-electrode body 1 is prepared that includes a positive-electrode active-material layer 12 including a powder-molded body, and a positive-electrode-side solid-electrolyte layer 13 that is amorphous and formed by a vapor-phase process. A negative-electrode body 2 is prepared that includes a negative-electrode active-material layer 22 including a powder-molded body, and a negative-electrode-side solid-electrolyte layer 23 that is amorphous and formed by a vapor-phase process. The positive-electrode body 1 and the negative-electrode body 2 are bonded together by subjecting the electrode bodies 1 and 2 being arranged such that the solid-electrolyte layers 13 and 23 are in contact with each other, to a heat treatment under application of a pressure to crystallize the solid-electrolyte layers 13 and 23.

Abstract: A plasma heat treatment apparatus, provided for enabling a control of temperature distribution within electrode surfaces, without accompanying an increase of an electric power to be inputted therein, even in case when heating is made on a sample to be heated, having a large diameter thereof, with applying plasma, comprises a treatment chamber 100 for heat the sample 101 to be treated therein, a first electrode 102, which is disposed within the treatment chamber, a plate-shaped second electrode 103, which is disposed opposing to the first electrode 102, a radio-frequency power supply 111 for supplying radio-frequency electric power to the first electrode 102 or the second electrode 103, and a gas introducing means 113 for supplying a gas within the treatment chamber, wherein the first electrode 102 has an opening portion therein.

Abstract: In a vacuum processing apparatus including a plurality of vacuum transfer vessels arranged back and forth at the back of a lock chamber, an intermediate chamber arranged between them and capable of accommodating wafers, and processing units connected to respective vacuum transfer vessels, a wafer processed in a pre-processing vessel out of the processing units connected to the respective vacuum transfer vessels is transferred to a post-processing vessel connected to the same vacuum transfer vessel and post-processing is performed.

Abstract: In order to provide a heat treatment apparatus that is high in thermal efficiency, and can reduce a surface roughness of a specimen surface even when a specimen is heated at 1200° C. or higher, in a heat treatment apparatus that conducts a heat treatment by the aid of plasma, a heat treatment chamber includes a heating plate that heats a specimen by the aid of the plasma, and an electrode that is applied with a plasma generation radio-frequency power. The heating plate includes a beam, and is connected to the heat treatment chamber through the beam and the thermal expansion absorption member, and the thermal expansion absorption member has an elastic member.

Abstract: Provided is a nonaqueous electrolyte battery that has a high capacity and a high volume power density and can have an enhanced charge-discharge cycle capability. The nonaqueous electrolyte battery includes a positive-electrode layer, a negative-electrode layer, and a solid-electrolyte layer disposed between these layers. The negative-electrode layer contains a powder of a negative-electrode active material and a powder of a solid electrolyte. In the negative-electrode active material, a charge-discharge volume change ratio is 1% or less and the powder has an average particle size of 8 ?m or less. The solid-electrolyte layer is formed by a vapor-phase process. Examples of the negative-electrode active material having a charge-discharge volume change ratio of 1% or less include Li4Ti5O12 and non-graphitizable carbon.

Abstract: There is provided a method for plasma heat treatment that can suppress the degradation of thermal efficiency even in the case where plasma is used to heat a sample at a temperature of 1,200° C. or more. In a method for plasma heat treatment that a sample to be processed is heated by plasma, the method including the steps of: preheating in which a heat treatment chamber is exhausted while preheating an upper electrode and a lower electrode using plasma generated between the upper electrode and the lower electrode; and heat treatment in which the sample to be processed is heated after the preheating step. The upper electrode and the lower electrode are electrodes containing carbon.

Abstract: A leaf spring supports a pillar shaped movable portion disposed in a center portion with respect to a cylindrical fixed portion disposed around the movable portion in the direction of a center axis shiftably so as to position the movable portion in a radial direction. The leaf spring is made of stainless steel having relative magnetic permeability which is not less than 1.1.

Abstract: A leaf spring supports a pillar shaped movable portion disposed in a center portion with respect to a cylindrical fixed portion disposed around the movable portion in the direction of a center axis shiftably so as to position the movable portion in a radial direction. The leaf spring is made of a material having Vickers hardness which is not less than 500 (HV).

Abstract: A gas generating device includes a housing and a squib. The housing includes a housing body which accommodates a gas generating agent, a holder which holds a squib, and a connector which connects the housing and the holder to each other. A housing body is connected to the holder so that an annular contact portion is pressed toward the holder. The holder includes a holder body and a resinous molding portion which is interposed between the holder body and the squib. The resinous molding portion includes a flange portion with which the annular contact portion comes into contact. The holder body includes a support portion capable of supporting the flange portion when the housing body and the holder are connected to each other by the connector.

Abstract: Provided is a heat treatment apparatus that is high in thermal efficiency and can reduce surface roughness of a substrate to be treated even when a specimen is heated at 1200° C. or higher. The heat treatment apparatus heating the specimen includes a heating plate heated by plasma formed in an area of a gap to heat the specimen.

Abstract: The present invention provides a heat treatment apparatus which can reduce a surface roughing of a processed substrate while keeping a heat efficiency high, even in the case of heating a sample to be heated to 1200° C. or higher. The present invention is a heat treatment apparatus carrying out a heat treatment of a sample to be heated, wherein a plasma generated by a glow electric discharge is used as a heating source, and the sample to be heated is indirectly heated.

Abstract: A solventless laminating adhesive comprising a polyisocyanate component and a polyol component, both of which are free from polyol components exhibiting crystalline properties at ordinary temperatures. The adhesive exhibits an initial viscosity of 500 to 1000 mPa s three minutes after mixing of the polyisocyanate component with the polyol component and a viscosity increase of 100 to 350% based on the initial viscosity 20 minutes after the mixing. In a coater which is provided with a pair of opposed rolls and in which the rolls rotates in the directions contrary to each other at the opposition site, the adhesive is applied to a film passing between the rolls.

Abstract: A solid-electrolyte battery is provided that includes a LiNbO3 film serving as a buffer layer between a positive-electrode active material and a solid electrolyte and has a sufficiently low electrical resistance. The solid-electrolyte battery includes a positive-electrode layer, a negative-electrode layer, and a solid-electrolyte layer that conducts lithium ions between the electrode layers, wherein a buffer layer that is a LiNbO3 film is disposed between a positive-electrode active material and a solid electrolyte, and a composition ratio (Li/Nb) of Li to Nb in the LiNbO3 film satisfies 0.93?Li/Nb?0.98. The buffer layer may be disposed between the positive-electrode layer and the solid-electrolyte layer or on the surface of a particle of the positive-electrode active material. The buffer layer may have a thickness of 2 nm to 1 ?m.

Abstract: Provided is a nonaqueous electrolyte battery having a high charge-discharge cycle capability in which the battery capacity is less likely to decrease even after repeated charge and discharge. The nonaqueous electrolyte battery includes a positive-electrode layer 1, a negative-electrode layer 2, a solid electrolyte layer 3 interposed between the positive-electrode layer 1 and the negative-electrode layer 2, and a boundary layer 4 between the negative-electrode layer 2 and the solid electrolyte layer 3, the boundary layer 4 maintaining the bond between the negative-electrode layer 2 and the solid electrolyte layer 3. The negative-electrode layer 2 at least contains Li. The boundary layer 4 at least contains a group 14 element in the periodic table. The boundary layer 4 has a thickness of 50 nm or less.

Abstract: A lithium battery includes a substrate, a positive electrode layer, a negative electrode layer, and a sulfide solid electrolyte layer disposed between the positive electrode layer and the negative electrode layer, the positive electrode layer, the negative electrode layer, and the sulfide solid electrolyte layer being provided on the substrate. In this lithium battery, the positive electrode layer is formed by a vapor-phase deposition method, and a buffer layer that suppresses nonuniformity of distribution of lithium ions near the interface between the positive electrode layer and the sulfide solid electrolyte layer is provided between the positive electrode layer and the sulfide solid electrolyte layer. As the buffer layer, a lithium-ion conductive oxide, in particular, LixLa(2?x)/3TiO3 (x=0.1 to 0.5), Li7+xLa3Zr2O12+(x/2) (?5?x?3, preferably ?2?x?2), or LiNbO3 is preferably used.