Patents by Inventor Takayuki Fujiwara

Takayuki Fujiwara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11604411
    Abstract: A resist composition comprising a base polymer and a sulfonium salt of a carboxylic acid having an iodine or bromine-substituted hydrocarbyl group offers a high sensitivity, minimal LWR and improved CDU, independent of whether it is of positive or negative tone.
    Type: Grant
    Filed: May 11, 2020
    Date of Patent: March 14, 2023
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Jun Hatakeyama, Masaki Ohashi, Takayuki Fujiwara
  • Publication number: 20230023593
    Abstract: A positive resist composition is provided comprising (A) a specific sulfonium salt as quencher, (B) a sulfonium salt consisting of a fluorinated sulfonate anion and a sulfonium cation as acid generator, and (C) a base polymer comprising repeat units having an acid labile group. The resist composition has a high sensitivity and resolution, improved LWR or CDU, and a broad process window and forms a pattern of good profile after exposure.
    Type: Application
    Filed: June 10, 2022
    Publication date: January 26, 2023
    Applicant: Shin-Etsu Chemical Co., Ltd.
    Inventors: Jun Hatakeyama, Takayuki Fujiwara
  • Publication number: 20230019681
    Abstract: The present invention is a positive resist material containing: an acid generator being a sulfonium salt of a sulfonate ion bonded to a polymer main chain; and a quencher being a sulfonium salt shown by the following general formula (1). R1 represents a fluorine atom, phenyl group, phenyloxycarbonyl group, alkyl group, alkoxy group, alkenyl group, alkynyl group, or alkoxycarbonyl group. Hydrogen atoms of these groups are optionally substituted. R2 to R4 each independently represent a halogen atom or hydrocarbyl group. R2 and R3, or R2 and R4, are optionally bonded with each other to form a ring with a sulfur atom that is bonded thereto. Thus, the present invention provides: a positive resist material having higher sensitivity than conventional positive resist materials, and having little edge roughness (LWR) and dimensional variation (CDU) in an exposure pattern; and a patterning process using the positive resist material.
    Type: Application
    Filed: May 19, 2022
    Publication date: January 19, 2023
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Jun HATAKEYAMA, Takayuki FUJIWARA
  • Patent number: 11505666
    Abstract: The present invention addresses the problem of providing a prepreg that has excellent short-time and low-pressure handling properties, during pasting and layering work. In order to solve the problem, this invention has the following configuration. The prepreg includes reinforcing fibers and an epoxy resin composition, has a fiber content of 90 mass % or less, and satisfies conditions (a) and (b) below. (a) When the average thickness of the prepreg is set as D (D being 3 ?m or greater), the viscosity at 25° C. of the epoxy resin composition at a site (I) located at a depth of D/4 to 3D/4 from the surface on one side of the prepreg is 50,000 to 300,000 Pa·s inclusive. (b) From among sites (II) located at a depth of up to 0.5 ?m from each surface on both sides of the prepreg, the viscosity at 25° C. of the epoxy resin composition at least at a site (II) on the one side is 10,000 to 40,000 Pa·s inclusive.
    Type: Grant
    Filed: March 13, 2019
    Date of Patent: November 22, 2022
    Assignee: TORAY INDUSTRIES, INC.
    Inventors: Tomoki Mizusawa, Takayuki Fujiwara
  • Patent number: 11506977
    Abstract: A positive resist composition comprising a base polymer comprising recurring units (a) having the structure of an ammonium salt of N-carbonylsulfonamide having an iodized aromatic ring, and recurring units (b1) having an acid labile group-substituted carboxyl group and/or recurring units (b2) having an acid labile group-substituted phenolic hydroxyl group exhibits a high sensitivity, high resolution, low edge roughness and dimensional uniformity, and forms a pattern of good profile after exposure and development.
    Type: Grant
    Filed: May 4, 2020
    Date of Patent: November 22, 2022
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Jun Hatakeyama, Masaki Ohashi, Takayuki Fujiwara
  • Patent number: 11493843
    Abstract: A resist composition comprising a base polymer and a quencher in the form of an ammonium salt consisting of an ammonium cation having an iodized aromatic ring bonded to the nitrogen atom via a C1-C20 hydrocarbylene group which may contain an ester bond or ether bond and a carboxylate anion having an iodized or brominated hydrocarbyl group offers a high sensitivity and minimal LWR or improved CDU, independent of whether it is of positive or negative tone.
    Type: Grant
    Filed: July 2, 2020
    Date of Patent: November 8, 2022
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Jun Hatakeyama, Takayuki Fujiwara
  • Publication number: 20220351641
    Abstract: A content presentation system includes: a trainee terminal that presents training content to the trainee; a worker terminal used by a worker; a tool recognition device that acquires a work video of the worker and recognizes the tool being used by the worker; a determination device that determines success or failure of the work at a specific stage based on the information about the work tool recognized by the tool recognition device; and a content creation device that creates and updates the training content based on the determination result of the determination device. When the determination result is determined to be the failure of the work by the determination device, the content creation device identifies a portion of the training content corresponding to the specific stage in the work procedure and updates the portion of the training content so as to suppress a factor of the failure.
    Type: Application
    Filed: May 18, 2022
    Publication date: November 3, 2022
    Applicant: Hitachi Systems, Ltd.
    Inventors: Shintaro Tsuchiya, Takayuki Fujiwara, Kentarou Oonishi, Katsuro Kikuchi, Yoshihito Narita
  • Patent number: 11480875
    Abstract: A resist composition comprising a base polymer and a quencher in the form of an ammonium salt consisting of an ammonium cation having an iodized aromatic ring bonded to the nitrogen atom via a C1-C20 hydrocarbylene group and an anion derived from an iodized or brominated phenol offers a high sensitivity and minimal LWR or improved CDU, independent of whether it is of positive or negative tone.
    Type: Grant
    Filed: July 21, 2020
    Date of Patent: October 25, 2022
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Jun Hatakeyama, Takayuki Fujiwara
  • Patent number: 11460773
    Abstract: A resist composition comprising a base polymer and a quencher in the form of an amine compound having an iodized aromatic ring and a tertiary ester structure offers a high sensitivity and minimal LWR or improved CDU, independent of whether it is of positive or negative tone.
    Type: Grant
    Filed: December 30, 2019
    Date of Patent: October 4, 2022
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Jun Hatakeyama, Takayuki Fujiwara, Masaki Ohashi
  • Publication number: 20220303184
    Abstract: A collection unit (132) collects information about at least either of user accommodation status and resource consumption status from plural communications devices accommodating users who receive communications services. An estimation unit (131) estimates an amount of resource consumption of a first user for whom an accommodation device is to be determined. A judgment unit (133) judges whether each of the communications devices satisfies a predetermined restricting condition, based on the information collected by the collection unit (132) and the amount of resource consumption of the first user estimated by the estimation unit (131). A determination unit (134) determines a communications device judged by the judgment unit (133) to satisfy the restricting condition among the communications devices, as the accommodation device for the first user.
    Type: Application
    Filed: September 5, 2019
    Publication date: September 22, 2022
    Inventors: Hiroki IWAHASHI, Takayuki FUJIWARA, Yuta WATANABE
  • Patent number: 11448962
    Abstract: A resist composition comprising a sulfonium salt having formula (1) as PAG, a base polymer, and an organic solvent, when processed by lithography, has light transmittance, acid diffusion suppressing effect, and excellent lithography performance factors such as DOF, LWR and MEF. A lithography process for forming a resist pattern from the composition is also provided.
    Type: Grant
    Filed: January 15, 2020
    Date of Patent: September 20, 2022
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Takayuki Fujiwara, Kenichi Oikawa, Masaki Ohashi, Tomohiro Kobayashi
  • Patent number: 11448961
    Abstract: A novel carboxylic acid iodonium salt and a resist composition comprising the same as a quencher are provided. When resist composition is processed by photolithography using KrF or ArF excimer laser, EB or EUV, there is formed a resist pattern which is improved in rectangularity, MEF, LWR, and CDU.
    Type: Grant
    Filed: September 5, 2019
    Date of Patent: September 20, 2022
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Takayuki Fujiwara, Masaki Ohashi, Kazuhiro Katayama, Kenji Yamada
  • Patent number: 11435665
    Abstract: A resist composition comprising a base polymer and an onium salt of N-carbonylsulfonamide having iodized benzene ring offers a high sensitivity, minimal LWR and improved CDU, independent of whether it is of positive or negative tone.
    Type: Grant
    Filed: May 30, 2019
    Date of Patent: September 6, 2022
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Jun Hatakeyama, Masaki Ohashi, Takayuki Fujiwara
  • Patent number: 11431636
    Abstract: A communication system includes a programmable switch configured to perform packet transfer and queuing, a plurality of VNFs configured to execute network functions on packets, and a controller configured to control the programmable switch including a queue distribution unit configured to distribute input packets to any of the plurality of VNFs according to an instruction of the controller with respect to a queue group, the plurality of VNFs each include a load measurement unit configured to measure an amount of consumption of server resources and notify the controller of a load status, and the controller includes a load analysis unit configured to analyze a load of each of the plurality of VNFs based on a certain rule, and a queue control unit configured to change a queue distribution rule.
    Type: Grant
    Filed: July 29, 2019
    Date of Patent: August 30, 2022
    Assignee: Nippon Telegraph and Telephone Corporation
    Inventors: Satoshi Nishiyama, Masayuki Nishiki, Takayuki Fujiwara, Yuki Takei
  • Patent number: 11415887
    Abstract: A resist composition comprising a base polymer and a quencher in the form of a salt of a cyclic ammonium cation with a carboxylate, sulfonamide, halogenated phenoxide or halide anion offers a high sensitivity and minimal LWR or improved CDU, independent of whether it is of positive or negative tone.
    Type: Grant
    Filed: February 11, 2020
    Date of Patent: August 16, 2022
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Jun Hatakeyama, Masaki Ohashi, Takayuki Fujiwara
  • Publication number: 20220249386
    Abstract: There is provided a drug delivery composition containing an acid-resistant cell that encloses a drug in the cell. In addition, there is provided an acid-resistant cell in which a drug is enclosed in the cell, where the drug is localized in the sac-shaped membrane structure included in the acid-resistant.
    Type: Application
    Filed: March 27, 2020
    Publication date: August 11, 2022
    Inventors: Takayuki FUJIWARA, Shunsuke HIROOKA, Shin-ya MIYAGISHIMA, Tsutomu OMATSU
  • Patent number: 11409194
    Abstract: A resist composition comprising a base polymer and a quencher in the form of an amine compound having an iodized aromatic ring bonded to the nitrogen atom via a divalent hydrocarbon group offers a high sensitivity and minimal LWR or improved CDU, independent of whether it is of positive or negative tone.
    Type: Grant
    Filed: August 2, 2019
    Date of Patent: August 9, 2022
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Jun Hatakeyama, Masaki Ohashi, Takayuki Fujiwara
  • Publication number: 20220236643
    Abstract: A resist composition containing: (A) a resin containing a repeating unit having an acid-labile group and further containing at least one repeating unit having an aromatic substituent; (B) a photo-acid generator shown by a general formula (B-1); and (C) a solvent, where W1 represents a cyclic divalent hydrocarbon group having 4 to 12 carbon atoms with a heteroatom; W2 represents a cyclic monovalent hydrocarbon group having 4 to 14 carbon atoms without a heteroatom; Rf represents a divalent organic group shown by the following general formula; and M+ represents an onium cation. This provides a resist composition and a patterning process of using it that show a particularly favorable mask dimension dependency and CDU in photolithography where a light source is a high-energy beam such as a KrF excimer laser beam, an electron beam, or an extreme ultraviolet ray.
    Type: Application
    Filed: January 21, 2021
    Publication date: July 28, 2022
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Teppei Adachi, Tomohiro Kobayashi, Kenichi Oikawa, Masaki Ohashi, Takayuki Fujiwara
  • Patent number: 11367365
    Abstract: A content presentation system includes: a training content distribution function 431 that presents the training content to the trainee; a work content delivery function 331 that presents a work procedure based on augmented reality; a user operation detection unit 120 that detects a three-dimensional operation of the site worker; a work record analysis function 338 that determines success or failure of the work based on the evaluation reference information; and a content creation/updating function 342 that updates the training content based on the determination result. When a predetermined body motion of the worker is detected, the work record analysis function determines whether the work has failed based on the measurement information of the model worker up to the body motion. When the work is determined to have failed, the content creation/updating function updates the training content so as to suppress the factor of the failure.
    Type: Grant
    Filed: August 24, 2018
    Date of Patent: June 21, 2022
    Assignee: Hitachi Systems, Ltd.
    Inventors: Shintaro Tsuchiya, Takayuki Fujiwara, Kentarou Oonishi, Katsuro Kikuchi, Yoshihito Narita
  • Patent number: 11357970
    Abstract: The present invention provides a biomedical electrode composition capable of forming a living body contact layer for a biomedical electrode that is excellent in conductivity and biocompatibility, is light-weight, can be manufactured at low cost, and can control significant reduction in conductivity even though the biomedical electrode is soaked in water or dried. The present invention was accomplished by a biomedical electrode composition including a polymer compound having both the ionic repeating unit “a” and the repeating unit “b” of (meth)acrylate, in which the ionic repeating unit “a” is a repeating unit of sodium salt, potassium salt, or ammonium salt including a partial structure represented by the following general formula (1), and the repeating unit “b” of (meth)acrylate is a repeating unit represented by the following general formula (2).
    Type: Grant
    Filed: December 28, 2017
    Date of Patent: June 14, 2022
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Jun Hatakeyama, Takayuki Fujiwara, Osamu Watanabe, Motoaki Iwabuchi