Abstract: There is disclosed a light deflector in which both ends of a movable plate is supported to a support substrate by an elastic support portion, a reflection surface is formed on one surface of the movable plate, and the movable plate is torsion-oscillated about a torsion axis of the elastic support portion as a center to deflect an incident light that enters the reflection surface, wherein a recessed portion is formed on at least one side surface of both sides, which is a surface on which the reflection surface is not formed, and between which the torsion axis of the elastic support portion is interposed.

Abstract: There are provided a small optical deflector that can be driven at a high speed with a low voltage, provides a large angle of deflection, has a low distortion even in high speed operation and has a high static flatness of a reflective surface, and a method of producing the optical deflector. The optical deflector drives a movable plate relative to a supporting substrate to deflect a light incident on a reflective surface and has a configuration in which at least two recesses are formed in a surface of the movable plate on which the reflective surface is not formed, and a magnetic material is provided in the recesses.

Abstract: There is disclosed a light deflector in which both ends of a movable plate is supported to a support substrate by an elastic support portion, a reflection surface is formed on one surface of the movable plate, and the movable plate is torsion-oscillated about a torsion axis of the elastic support portion as a center to deflect an incident light that enters the reflection surface, wherein a recessed portion is formed on at least one side surface of both sides, which is a surface on which the reflection surface is not formed, and between which the torsion axis of the elastic support portion is interposed.

Abstract: An electromagnetic actuator includes a stationary member, a movable member magnetically coupled with the stationary member with a gap therebetween, and a support member for displaceably supporting the movable member relative to the stationary member. Both the stationary member and the movable member have a core section carrying a coil wound around its periphery. As the coil of the stationary member and that of the movable member are energized with electric current, the movable member is either attracted toward or repulsed from the stationary member. The electromagnetic actuator can be used for an optical scanner by providing a mirror and a lens on the movable member.

Abstract: A method for fabricating a microstructure array, such as a microlens array, and a mold for forming the microlens array, includes the steps of forming an array of microstructures with a curved profile in a discrete form on a substrate, and uniformly forming a continuous layer on the substrate and the discrete microstructures. Optically-unusable regions between the discrete microstructures, such as microlenses, can be readily reduced or eliminated by forming the continuous layer until flat portions between the microstructures disappear.

Abstract: An electron optical system has a plurality of electron lenses. The system includes a first electron optical system array having electrodes with a plurality of rectangular apertures, and a second electron optical system array having electrodes with a plurality of rectangular apertures. The first and second electron optical system arrays are arranged along an optical axis in which a long side of each aperture of the first electron optical system array is perpendicular to a long side of each aperture of the second electron optical system array.

Abstract: There are provided a small optical deflector that can be driven at a high speed with a low voltage, provides a large angle of deflection, has a low distortion even in high speed operation and has a high static flatness of a reflective surface, and a method of producing the optical deflector. The optical deflector drives a movable plate relative to a supporting substrate to deflect a light incident on a reflective surface and has a configuration in which at least two recesses are formed in a surface of the movable plate on which the reflective surface is not formed, and a magnetic material is provided in the recesses.

Abstract: Provided is a rocking member apparatus comprising torsion springs, a rocking member axially supported by the torsion spring, and a supporting substrate, the rocking member being rockable about the torsion spring, wherein a hard magnetic member is provided on one surface of the rocking member, a coil and a soft magnetic member, which are arranged so as to be spaced apart from the rocking member, the coil and the soft magnetic member are arranged at different positions in a direction vertical to the one surface, and the hard magnetic member is arranged at a position which is the same position as the soft magnetic member and the one surface in a direction vertical thereto, or a position which is on the side where the coil is arranged as seen from the soft magnetic member, whereby the apparatus can be made small and lightweight and allows increased deflection angle, high-speed scanning, and reduced power consumption.

Abstract: As a method of fabricating aspherical microstructures, a protruding microstructure is formed on a substrate, an aspherical-profile forming layer is formed on the substrate and the protruding microstructure, and the aspherical-profile forming layer is hardened. An aspherical profile is formed on the protruding microstructure due to a surface tension of the aspherical-profile forming layer in the step of forming the aspherical-profile forming layer, and the aspherical profile is maintained through the step of hardening the aspherical-profile forming layer.

Abstract: This invention relates to an electron optical system array having a plurality of electron lenses. The electron optical system array includes a plurality of electrodes arranged along the paths of a plurality of charged-particle beams. Each of the plurality of electrodes has a membrane in which a plurality of apertures are formed on the paths of the plurality of charged-particle beams, and a support portion which supports the membrane. At least two of the plurality of electrodes are arranged to form a nested structure.

Abstract: This invention relates to an electron optical system array having a plurality of electron lenses. The electron optical system array includes a plurality of electrode structures which are arranged along the paths of a plurality of charged-particle beams and have pluralities of apertures on the paths of the plurality of charged-particle beams. At least one of the plurality of electrode structures includes a substrate having a plurality of apertures for transmitting the plurality of charged-particle beams, and a plurality of electrodes extending from the side surfaces of the plurality of apertures to the peripheries of the plurality of apertures. At least the surface of the substrate is insulated.

Abstract: An electron optical system array has a plurality of electron lenses, the system array having at least two electrodes structures which respectively have membranes and are arranged along an optical axis, each of the membranes having a plurality of apertures through which charged-particle beams pass. There is also a spacer which is interposed between the facing membranes and adjacent to the aperture and which determines a gap between the facing membranes.

Abstract: An optical waveguide includes a partial cylindrical portion, and a plurality of end portions. The partial cylindrical portion has an elongated profile, and is formed of a material transparent to light propagating along the partial cylindrical portion. The end portion has an approximately partial spherical profile, smoothly joins the partial cylindrical portion, and is formed of the same material as the material of the partial cylindrical portion, so that the light propagates along the partial cylindrical portion and the end portions while repeating total reflections at a boundary surface contouring the partial cylindrical portion and the end portions.

Abstract: The tiltable-body apparatus including a frame member, a tiltable body, and a pair of torsion springs having a twisting longitudinal axis. The torsion springs are disposed along the twisting longitudinal-axis opposingly with the tiltable body being interposed, support the tiltable body flexibly and rotatably about the twisting longitudinal axis relative to the frame member, and include a plurality of planar portions, compliant directions of which intersect each other when viewed along a direction of the twisting longitudinal axis. A center of gravity of the tiltable body is positioned on the twisting longitudinal axis of the torsion springs.

Abstract: In a method of fabricating an array of microstructures, a substrate with an electrically-conductive portion is provided, an insulating mask layer is formed on the electrically-conductive portion of the substrate, a plurality of openings are formed in the insulating mask layer to expose the electrically-conductive portion, and a first plated or electrodeposited layer is deposited in the openings and on the insulating mask layer by electroplating or electrodeposition. A second plated layer is further formed on the first plated or electrodeposited layer and on the electrically-conductive portion by electroless plating to reduce a size distribution of microstructures over the array.

Abstract: A liquid discharging head for discharging liquid droplets utilizing generated bubbles by heating liquid to bubble comprises discharge port for discharging liquid droplets, bubbling chamber communicated with the discharge port for filling liquid; heat-generating member arranged in the bubbling chamber, being supported in a state of having gaps on both sides to the inner wall faces of the bubbling chamber; and supporting portion for supporting the heat-generating member. Then, after the generation of bubble in liquid by the heat-generating member, the sufrace temperature of the heat-generating member is made lower than the bubbling temperature at the time of bubble extinction by the heat radiation from the heat-generating member to the supporting portion side. In this way, it is made possible to prevent liquid from being heated again to generate bubble subsequent to the bubble extinction.

Abstract: In a method of fabricating an array of microstructures, a substrate with an electrically-conductive portion is provided, an insulating mask layer is formed on the electrically-conductive portion of the substrate, a plurality of openings are formed in the insulating mask layer to expose the electrically-conductive portion, and a first plated or electrodeposited layer is deposited in the openings and on the insulating mask layer by electroplating or electrodeposition. A second plated layer is further formed on the first plated or electrodeposited layer and on the electrically-conductive portion by electroless plating to reduce a size distribution of microstructures over the array.

Abstract: The tiltable-body apparatus including a frame member, a tiltable body, and a pair of torsion springs having a twisting longitudinal axis. The torsion springs are disposed along the twisting longitudinal axis opposingly with the tiltable body being interposed, support the tiltable body flexibly and rotatably about the twisting longitudinal axis relative to the frame member, and include a plurality of planar portions, compliant directions of which intersect each other when viewed along a direction of the twisting longitudinal axis. A center of gravity of the tiltable body is positioned on the twisting longitudinal axis of the torsion springs.

Abstract: The movable-body apparatus includes a support member, a movable body, an elastic supporting unit having a twisting longitudinal axis, and a driving unit for tilting the movable body in a tilting direction about the twisting longitudinal axis. The elastic supporting unit supports the movable body flexibly and rotatably about the twisting longitudinal axis relative to the support member. The driving unit includes a stationary portion provided apart from the movable body, and a moving core formed of a magnetic material, provided on a portion of the movable body, and has a face opposed to the stationary portion.

Abstract: A method for fabricating a mold for a microlens having a desired radius (R) of curvature by electroplating. In this method, a minimum radius (Rmin) of curvature is utilized to achieve the desired curvature radius.