Abstract: There are provided a small optical deflector that can be driven at a high speed with a low voltage, provides a large angle of deflection, has a low distortion even in high speed operation and has a high static flatness of a reflective surface, and a method of producing the optical deflector. The optical deflector drives a movable plate relative to a supporting substrate to deflect a light incident on a reflective surface and has a configuration in which at least two recesses are formed in a surface of the movable plate on which the reflective surface is not formed, and a magnetic material is provided in the recesses.

Abstract: As a method of fabricating aspherical microstructures, a protruding microstructure is formed on a substrate, an aspherical-profile forming layer is formed on the substrate and the protruding microstructure, and the aspherical-profile forming layer is hardened. An aspherical profile is formed on the protruding microstructure due to a surface tension of the aspherical-profile forming layer in the step of forming the aspherical-profile forming layer, and the aspherical profile is maintained through the step of hardening the aspherical-profile forming layer.

Abstract: An electromagnetic actuator comprising a stationary member, a movable member magnetically coupled with the stationary member with a gap therebetween, and a support member for displaceably supporting the movable member relative to the stationary member. Both the stationary member and the movable member have a core section carrying a coil wound around its periphery. As the coil of the stationary member and that of the movable member are energized with electric current, the movable member is attracted toward or repulsed from the stationary member. The electromagnetic actuator can be used for an optical scanner by providing a mirror or a lens on the movable member.

Abstract: An electromagnetic actuator includes a stationary member, a movable member magnetically coupled with the stationary member with a gap therebetween, and a support member for displaceably supporting the movable member relative to the stationary member. Both the stationary member and the movable member have a core section carrying a coil wound around its periphery. As the coil of the stationary member and that of the movable member are energized with electric current, the movable member is either attracted toward or repulsed from the stationary member. The electromagnetic actuator can be used for an optical scanner by providing a mirror and a lens on the movable member.

Abstract: A mold for a microlens includes a substrate at least a portion of which is electrically conductive, such as an electrically-conductive substrate or a substrate with an electrode layer, an insulating mask layer formed on the substrate and including an opening or plural openings, and a plated layer electroplated in the opening and on the mask layer. A first condition that a diameter or width (&phgr;) of the opening has a relation of &phgr;≦0.35R, wherein (R) is a radius of curvature of the plated layer right above the opening, or a second condition that the diameter or width (&phgr;) of the opening is &phgr;≦10 &mgr;m, is met.

Abstract: As a method of fabricating aspherical microstructures, a protruding microstructure is formed on a substrate, an aspherical-profile forming layer is formed on the substrate and the protruding microstructure, and the aspherical-profile forming layer is hardened. An aspherical profile is formed on the protruding microstructure due to a surface tension of the aspherical-profile forming layer in the step of forming the aspherical-profile forming layer, and the aspherical profile is maintained through the step of hardening the aspherical-profile forming layer.

Abstract: In a method of fabricating an array of microstructures, a substrate with an electrically-conductive portion is provided, an insulating mask layer is formed on the electrically-conductive portion of the substrate, a plurality of openings are formed in the insulating mask layer to expose the electrically-conductive portion, and a first plated or electrodeposited layer is deposited in the openings and on the insulating mask layer by electroplating or electrodeposition. A second plated layer is further formed on the first plated or electrodeposited layer and on the electrically-conductive portion by electroless plating to reduce a size distribution of microstructures over the array.

Abstract: In a method of fabricating an array of microstructures, a substrate with an electrically-conductive portion is provided, an insulating mask layer is formed on the electrically-conductive portion of the substrate, a plurality of openings are formed in the insulating mask layer to expose the electrically-conductive portion, and a first plated or electrodeposited layer is deposited in the openings and on the insulating mask layer by electroplating or electrodeposition. A second plated layer is further formed on the first plated or electrodeposited layer and on the electrically-conductive portion by electroless plating to reduce a size distribution of microstructures over the array.

Abstract: A liquid discharge head for discharging liquid droplets utilizing generated bubbles by heating liquid to bubble comprises discharge port for discharging liquid droplets, bubbling chamber communicated with the discharge port for filling liquid; heat-generating member arranged in the bubbling chamber, being supported in a state of having gaps on both sides to the inner wall faces of the bubbling chamber; and supporting portion for supporting the heat-generating member. Then, after the generation of bubble in liquid by the heat-generating member, the surface temperature of the heat-generating member is made lower than the bubbling temperature at the time of bubble extinction by the heat radiation from the heat-generating member to the supporting portion side. In this way, it is made possible to prevent liquid from being heated again to generate bubble subsequent to the bubble extinction.

Abstract: A correction electron optical system (3) has substrates in which apertures for constituting electron lenses are formed. Valves (14) whose opening degrees can be adjusted are used to relax the pressure difference between the upper and lower surfaces of each substrate caused when supply/exhaust pumps (51-56) adjust the internal pressure of a main body cover (80). The opening degrees are controlled based on outputs from differential pressure sensors (13). The pressure sensors (13) can be replaced with photosensors.

Abstract: Provided is a rocking member apparatus comprising torsion springs, a rocking member axially supported by the torsion spring, and a supporting substrate, the rocking member being rockable about the torsion spring, wherein a hard magnetic member is provided on one surface of the rocking member, a coil and a soft magnetic member, which are arranged so as to be spaced apart from the rocking member, the coil and the soft magnetic member are arranged at different positions in a direction vertical to the one surface, and the hard magnetic member is arranged at a position which is the same position as the soft magnetic member and the one surface in a direction vertical thereto, or a position which is on the side where the coil is arranged as seen from the soft magnetic member, whereby the apparatus can be made small and lightweight and allows increased deflection angle, high-speed scanning, and reduced power consumption.

Abstract: A bulb socket including a socket body from a synthetic resin and a contact member made from a conductive metal material in the socket body. The socket body is integrally formed by: a socket main portion constructed by axially connecting a bulb fitting section and a power connecting section, a flange portion outwardly extended from the outer surface of the socket main portion, and engaging blocks formed on the socket main portion. A plurality of arc-shaped slits and arc-shaped resilient insulative contact strips are formed in the flange portion so as to extend along the outer peripheral surface of the bulb fitting section, and contact protrusions are formed on the arc-shaped resilient insulative contact strips so as to provide resiliency of the arc-shaped resilient insulative contact strips to enable more secure mounting of the bulb socket at a mounting hole in a panel.

Abstract: A semispherical microstructure includes a substrate, an insulating mask layer, and an electrodeposition layer. The substrate has an electrically-conductive portion. The mask layer is formed on the electrode layer or electrically-conductive portion of the substrate and includes an opening formed in the mask layer to expose the electrically-conductive portion at the opening. The electrodeposition layer is formed of organic compound electrodeposited in the opening and on the mask layer around the opening.

Abstract: In a method of driving an electrostatic actuator which has a stator having driving electrodes in plural phases and a traveler moved along the stator by application of a driving voltage to the driving electrodes, the driving voltage applied to the driving electrodes is decided according to a voltage function employing as arguments a relative movement position of the traveler and/or a retention rigidity with which the traveler is retained at a standing position on the stator. An electrostatic actuator mechanism comprises a stator having driving electrodes in plural phases, a traveler relatively moved along the stator, a voltage applying means for applying a driving voltage to the driving electrodes, and a voltage function means for deciding the driving voltage applied to the driving electrodes according to a voltage function employing as argument a relative movement position of the traveler and/or a retention rigidity with which the traveler is retained at the standing position on the stator.

Abstract: In a method for fabricating an array of microstructures, a substrate with an electrically-conductive portion is provided, an insulating mask layer is formed on the electrically-conductive portion of the substrate, a plurality of openings are formed in the insulating mask layer to expose the electrically-conductive portion, and a first plated or electrodeposited layer is deposited in the openings and on the insulating mask layer by electro- or electroless-plating, or electrodeposition. At least a surface of the first plated or electrodeposited layer is made electrically conductive. After that, the insulating mask layer is removed, and a second plated layer is formed on the first plated or electrodeposited layer and on the electrically-conductive portion by electroplating to firmly fix the first plated or electrodeposited layer to the substrate.

Abstract: There is disclosed a light deflector in which both ends of a movable plate is supported to a support substrate by an elastic support portion, a reflection surface is formed on one surface of the movable plate, and the movable plate is torsion-oscillated about a torsion axis of the elastic support portion as a center to deflect an incident light that enters the reflection surface, wherein a recessed portion is formed on at least one side surface of both sides, which is a surface on which the reflection surface is not formed, and between which the torsion axis of the elastic support portion is interposed.

Abstract: In a method for fabricating an array of microstructures, a substrate with an electrically-conductive portion is provided, an insulating mask layer is formed on the electrically-conductive portion of the substrate, a plurality of openings are formed in the insulating mask layer to expose the electrically-conductive portion, and a first plated or electrodeposited layer is deposited in the openings and on the insulating mask layer by electro- or electroless-plating, or electrodeposition. At least a surface of the first plated or electrodeposited layer is made electrically conductive. After that, the insulating mask layer is removed, and a second plated layer is formed on the first plated or electrodeposited layer and on the electrically-conductive portion by electroplating to firmly fix the first plated or electrodeposited layer to the substrate.

Abstract: A bulb socket including a socket body made from a synthetic resin and a contact member made from a conductive metal material and installed in the socket body. The socket body is integrally formed by: a socket main portion constructed by axially connecting a bulb fitting section and a power connecting section, a flange portion outwardly extended from the outer surface of the socket main portion, and engaging blocks formed on the socket main portion so as to sandwich the edge of a bulb socket mounting hole of a lighting fixture in cooperation with the flange portion. A plurality of arc-shaped slits and arc-shaped resilient contact strips are formed in the flange portion so as to extend along the outer peripheral surface of the bulb fitting section, and contact protrusions are formed on the arc-shaped resilient contact strips so as to provide resiliency with the arc-shaped resilient contact strips.

Abstract: A liquid discharge head includes a pair of substrates mutually fixed in lamination, a plurality of liquid flow paths arranged on the bonded faces of the substrates, the leading end of the plural liquid flow paths being communicated with a plurality of discharge ports, a plurality of heat generating members arranged on at least one of the substrates corresponding to each of the liquid flow paths and a movable member having in the liquid flow path the free end thereof on the discharge port side, and a region between the heat generating member and the movable member, where liquid exists. In the liquid discharge head, a bubble is created by enabling thermal energy generated by the heat generating members to act upon the liquid, and the bubble is controlled by the movable member to discharge liquid in the liquid flow paths from the discharge ports to the outside.

Abstract: An electrostatic actuator includes a stator having a circular surface carrying a plurality of drive electrodes, a rotor arranged opposite to the surface of the stator and a drive circuit for applying a drive voltage to the drive electrodes. Each of the drive electrodes has an arcuate profile extending from the center toward the outer periphery of the circular surface. The rotor can be driven to rotate in either direction of rotation by changing the mode of applying voltages to the drive electrodes. The rotor is floated above the stator by dynamic pressure generated by an oscillator, typically a piezoelectric element, provided under the stator. The distance between the rotor and the stator can be adjusted by controlling drive voltages applied to the oscillator.