Abstract: A physical quantity sensor detects physical quantity. The sensor includes a plurality of springs, which have different spring constants, respectively. The sensor has a wide detection range of the physical quantity without assembling multiple sensors. Therefore, the sensor can be minimized. Further, since the sensor has an excellent linearity of the output characteristics, the sensor has a wide dynamic range and a high sensitivity.

Abstract: An angular rate sensor includes: a circuit board; a package including an angular rate sensor chip and a connection terminal; and a conductive member. The angular rate sensor chip is accommodated in the package. The package is disposed on the circuit board through the conductive member. The package further includes a first electrode disposed on a bottom of the package, the first electrode connecting to the connection terminal. The circuit board includes a second electrode disposed on a top of the circuit board. The angular rate sensor chip in the package is electrically connected to the circuit board through the connection terminal, the first and the second electrodes and the conductive member. The circuit board and the package are electrically and elastically connected by the conductive member.

Abstract: An angular velocity mount arrangement includes an angular velocity sensor and a mount member. The angular velocity sensor includes an oscillator, an angular velocity sensing element, a package, and a plurality of lead frames. The angular velocity sensing element senses an angular velocity based on an oscillation of the oscillator in a first axis direction. The mount member is arranged relative to the angular velocity sensor in a second axis direction, which is generally orthogonal to the first axis direction. The angular velocity sensor is mounted to the mount member through the plurality of lead frames. At least one extending segment is a middle segment of each of the plurality of lead frames and extends toward the mount member in the second axis direction. The at least one extending segment of each of the plurality of lead frames is able to oscillate in the first axis direction.

Abstract: A circuit board is mounted on a package via an adhesive agent as an elastic member. A sensor element is stacked in fixed relation onto the circuit board. The sensor element, the circuit board, and the package are wired with bonding wires. A magnetic member made of a ferromagnetic material is disposed between the adhesive agent and the circuit board.

Abstract: An acceleration sensor is formed on a top surface of a laminated silicon-on-insulator substrate. The acceleration sensor is composed of first and second capacitors each including a movable electrode that moves according to acceleration imposed thereon. The first and the second capacitors are so made that their capacitances change differently when the same acceleration is imposed and that the capacitance difference represents an amount of acceleration imposed thereon. A third capacitor having an output electrode solidly connected to the base substrate via the insulation layer is also formed on the same silicon-on-insulator substrate. An output representing amount of acceleration is taken out from the output electrode of the third capacitor.

Abstract: The angular velocity sensor includes a container, a sensing element in the container and a viscous fluid between the container and the sensing element. The sensing element is supported by the viscous fluid such as an ER fluid or an MR fluid. The angular velocity sensor detects acceleration of the body in which the angular velocity sensor is installed. The angular velocity sensor controls the viscosity of the viscous fluid depending on the acceleration of a body, by changing a voltage applied to the viscous fluid.

Abstract: A sensor includes: a first chip; a second chip disposed on the first chip through an adhesive member; and a stopper. The second chip is connected to the first chip through a bonding wire. The stopper limits a displacement of the second chip when the adhesive member is deformed. The stopper is disposed around the second chip. Since the displacement of the second chip is restricted, deformation of the bonding wire between the first and the second chips is also restricted.

Abstract: A physical quantity sensor includes a package, a circuit chip disposed and held in the package, a sensor chip stacked and fixed on the circuit chip, and a wiring member having flexibility, through which the circuit chip and the package are electrically and mechanically bonded together. In the physical quantity sensor, unwanted external vibrations transmitted to the sensor chip are reduced without an external vibration dumping system such as a rubber pad, because the wiring member weakens the vibrations.

Abstract: An angular rate sensor includes: a circuit board; a package including an angular rate sensor chip and a connection terminal; and a conductive member. The angular rate sensor chip is accommodated in the package. The package is disposed on the circuit board through the conductive member. The package further includes a first electrode disposed on a bottom of the package, the first electrode connecting to the connection terminal. The circuit board includes a second electrode disposed on a top of the circuit board. The angular rate sensor chip in the package is electrically connected to the circuit board through the connection terminal, the first and the second electrodes and the conductive member. The circuit board and the package are electrically and elastically connected by the conductive member.

Abstract: An angular rate sensor includes a sensor chip having an oscillator vibrating at a predetermined frequency and detecting an angular velocity applied to this oscillator around a predetermined rotation axis. A circuit chip, laminated with the sensor chip, has a circuit formed on a surface thereof to detect the angular velocity based on a signal obtained from the sensor chip. The sensor chip and the circuit chip are bonded with an adhesive film. A resonance frequency of the sensor chip is smaller than (½)1/2 times a driving frequency of the oscillator in a condition that adjustment is applied to at least one of configuration or elastic coefficient of the adhesive film.

Abstract: A sensor chip (100) includes comb-toothed movable electrodes (24) displaceable in a Y-direction, and comb-toothed stationary electrodes (30, 31, 40, 41) arranged to confront those movable electrodes (24), on one face side of a semiconductor substrate (10). The sensor chip (100) detects acceleration on the basis of a capacity change accompanying an acceleration application in the Y-direction between the movable electrodes (24) and the stationary electrodes (30, 31, 41, 42). The stationary electrodes (30, 31, 41, 42) are individually disposed to confront each other on one and other sides of the direction taken along the Y-direction in the individual movable electrodes (24). The individual electrode pads (25a, 30a, 31a, 40a, 41a) and the circuit chip (200) are electrically connected by bump electrodes (300) so that one face of the substrate (10) confronts the circuit chip (200).

Abstract: An acceleration sensor is formed on a top surface of a laminated silicon-on-insulator substrate. The acceleration sensor is composed of first and second capacitors each including a movable electrode that moves according to acceleration imposed thereon. The first and the second capacitors are so made that their capacitances change differently when the same acceleration is imposed and that the capacitance difference represents an amount of acceleration imposed thereon. A third capacitor having an output electrode solidly connected to the base substrate via the insulation layer is also formed on the same silicon-on-insulator substrate. An output representing amount of acceleration is taken out from the output electrode of the third capacitor.

Abstract: A capacitance type dynamic quantity sensor device includes a sensor chip having movable electrodes and sensor-chip side fixed electrodes disposed to confront the movable electrodes in a substrate surface horizontal direction X and a circuit chip disposed to confront the sensor chip. The movable electrodes are joined to the substrate through spring portions having degrees of freedom in the substrate surface horizontal direction X and the substrate surface vertical direction Z, so that the movable electrodes are displaceable in both the directions X and Z. A circuit-chip side fixed electrode is equipped at the site corresponding to the movable electrodes. The sensor chip and the circuit chip are electrically connected to each other through bump electrodes.

Abstract: A capacitance type dynamic quantity sensor device includes a sensor chip having movable electrodes and sensor-chip side fixed electrodes disposed to confront the movable electrodes in a substrate surface horizontal direction X and a circuit chip disposed to confront the sensor chip. The movable electrodes are joined to the substrate through spring portions having degrees of freedom in the substrate surface horizontal direction X and the substrate surface vertical direction Z, so that the movable electrodes are displaceable in both the directions X and Z. A circuit-chip side fixed electrode is equipped at the site corresponding to the movable electrodes. The sensor chip and the circuit chip are electrically connected to each other through bump electrodes.

Abstract: A sensor chip (100) includes comb-toothed movable electrodes (24) displaceable in a Y-direction, and comb-toothed stationary electrodes (30, 31, 40, 41) arranged to confront those movable electrodes (24), on one face side of a semiconductor substrate (10). The sensor chip (100) detects acceleration on the basis of a capacity change accompanying an acceleration application in the Y-direction between the movable electrodes (24) and the stationary electrodes (30, 31, 41, 42). The stationary electrodes (30, 31, 41, 42) are individually disposed to confront each other on one and other sides of the direction taken along the Y-direction in the individual movable electrodes (24). The individual electrode pads (25a, 30a, 31a, 40a, 41a) and the circuit chip (200) are electrically connected by bump electrodes (300) so that one face of the substrate (10) confronts the circuit chip (200).

Abstract: A physical quantity sensor detects physical quantity. The sensor includes a plurality of springs, which have different spring constants, respectively. The sensor has a wide detection range of the physical quantity without assembling multiple sensors. Therefore, the sensor can be minimized. Further, since the sensor has an excellent linearity of the output characteristics, the sensor has a wide dynamic range and a high sensitivity.

Abstract: In a capacitive semiconductor sensor, a sensor chip and a circuit chip are contained in a package. First bump members are mounted on second electrodes disposed on a second surface of the circuit chip, respectively. The sensor chip is mounted at its first surface on the second surface of the circuit chip so that first electrodes disposed on the first surface of the sensor chip are electrically mechanically connected to the second electrodes through the first bump members, respectively. Second bump members are mounted on third electrodes disposed on the second surface of the circuit chip, respectively. The third electrodes are electrically mechanically connected to lead electrodes disposed to the package through the second bump members, respectively.

Abstract: A surface mount type semiconductor package is mounted on a printed board by bonding, by means of solder bumps signal electrodes, electrically connected to respective terminals of a semiconductor chip incorporated in the package, with lands provided on the printed board. On a mount surface of the package, there are provided auxiliary electrodes formed as electrodes which are not electrically connected to the respective terminals of the semiconductor chip and have a thickness greater than that of the signal electrodes. As a result, solder thickness is secured for the solder bumps between each signal electrode and corresponding land by the difference in thickness between the auxiliary electrode and the signal electrode.

Abstract: An acceleration sensor device includes a molded package mounted on a circuit board and first and second leads protruding from the molded package and joined to the circuit board. The molded package retains an island portion of a lead frame in a state where a chip mounting surface of the island portion is perpendicular to the circuit board. An acceleration sensor is mounted on the chip mounting surface of the island portion. After attaching the acceleration sensor chip to the island portion, the island portion is bent up in the lead frame. Then, the island portion, the acceleration sensor chip, and the first and second leads are integrally molded to make the molded package. Accordingly, a detection axis of the acceleration sensor device can be arbitrary set, and the molded package is stably mounted on the circuit board.

Abstract: A package body holding an acceleration sensor circuit therein has signal electrodes and four dummy electrodes insulated from the signal electrode on a mounted surface thereof. The signal electrodes are electrically connected to the sensor circuit element. The mounted surface of the package body has chamfered portions on verge portions thereof, and auxiliary electrodes are formed on the chamfered portions to be integrally connected to the signal electrodes. The thus constructed package body is mounted on a circuit board by a reflow method using a solder paste so that the signal, dummy, and auxiliary electrodes are connected to a wiring pattern on the circuit board through solder portions. In this process, the solder paste on the dummy electrodes in a fused state generate an internal pressure to retain a clearance between the package body and the circuit board.