Abstract: An ultrasonic sensor probe (100) and controller (109). The controller (109) is operationally configured to determine and display wet and dry status of each of a plurality of ultrasonic sensors (156) positioned in the barrel (123) of the probe (100). The controller (109) may change the status of a sensor (156) from wet to dry or dry to wet if certain conditions are met, such as the sensor (156) consistently indicates the new status over multiple readings or over a predetermined period of time. The controller (109) preferably includes a two-wire output capable of producing a stepped analog or digital signal that indicates the fluid level in a container in which the probe (100) is positioned.

Abstract: An ultrasonic sensor probe (100) and controller (109). The controller (109) is operationally configured to determine and display wet and dry status of each of a plurality of ultrasonic sensors (156) positioned in the barrel (123) of the probe (100). The controller (109) may change the status of a sensor (156) from wet to dry or dry to wet if certain conditions are met, such as the sensor (156) consistently indicates the new status over multiple readings or over a predetermined period of time. The controller (109) preferably includes a two-wire output capable of producing a stepped analog or digital signal that indicates the fluid level in a container in which the probe (100) is positioned.

Abstract: Described herein are aerosol-free vessels, delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The clogging of valves and piping as some precursors decompose vapor are minimized. This invention prevents mist from forming and thus preventing clogging or wafer contamination from aerosols.

Abstract: Described herein are delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The containers are designed with structures which allow a carrier gas to be delivered from a flow distributor. The flow distributor comprises a plurality of small openings (jets) through which the carrier gas enters the precursor chamber and impinges upon the surface of the chemical precursors to produce a vapor.

Abstract: A vessel for conveying a precursor-containing fluid stream from a precursor material contained within the vessel using a carrier gas. The vessel defines an interior volume segmented into an upper volume and a lower volume, the upper volume being in fluid communication with the lower volume, the lower volume containing substantially all of the precursor material and being separated from the upper volume by a separator. The vessel includes a diffuser tube that extends from an inlet port, through the separator and has a distal end having a plurality of openings formed therein and extends along the bottom interior wall of the vessel.

Abstract: An ultrasonic probe having ultrasonic sensors (e.g., piezoelectric crystals) for measuring the level of liquid within a sealed container and having features that make the probe more reliable and enable more precise liquid level readings as the container nears an empty state. Embodiments include spacing the ultrasonic sensors more closely at the lower end of the probe, offsetting the sensors to enable tighter vertical spacing, matched pairs of sensors for redundancy, and a downward facing sensor located at the lower end of the probe to decrease the minimum liquid level that can be accurately measured by the probe. A sump may also be provided to further decrease the minimum liquid level that can be accurately measured by the probe.

Abstract: An ultrasonic sensor probe (100) and controller (109). The controller (109) is operationally configured to determine and display wet and dry status of each of a plurality of ultrasonic sensors (156) positioned in the barrel (123) of the probe (100). The controller (109) may change the status of a sensor (156) from wet to dry or dry to wet if certain conditions are met, such as the sensor (156) consistently indicates the new status over multiple readings or over a predetermined period of time. The controller (109) preferably includes a two-wire output capable of producing a stepped analog or digital signal that indicates the fluid level in a container in which the probe (100) is positioned.

Abstract: Described herein are delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The containers are designed with structures which allow a carrier gas to be delivered from a flow distributor. The flow distributor comprises a plurality of small openings (jets) through which the carrier gas enters the precursor chamber and impinges upon the surface of the chemical precursors to produce a vapor.

Abstract: A vessel for conveying a precursor-containing fluid stream from a precursor material contained within the vessel, the vessel comprising: an interior volume defined by a top, one or more sidewalls, and a base; and at least one fluid outlet for vaporized precursor, and at least one particle barrier that defines at least one particle restricted space within the interior volume, wherein said particle barrier comprises at least one 3-dimensional filter. A method for using the apparatus is also disclosed.

Abstract: A vessel for conveying a precursor-containing fluid stream from a precursor material contained within the vessel, the vessel comprising: an interior volume defined by a top, one or more sidewalls, and a base; and at least one fluid outlet for vaporized precursor, and at least one particle barrier that defines at least one particle restricted space within the interior volume, wherein said particle barrier comprises at least one 3-dimensional filter. A method for using the apparatus is also disclosed.

Abstract: Embodiments of the present invention provide an ultrasonic probe having an increased number (e.g., twelve) of ultrasonic sensors for measuring the level of liquid within a sealed container. The ultrasonic probe includes a neck tube that enables the ultrasonic probe to be used with existing, standardized container fittings despite having an enlarged barrel to accommodate the increased number of ultrasonic sensors. Embodiments of the present invention also provide a system and method in which ultrasonic sensors within an ultrasonic probe are activated one at a time to reduce crosstalk between the ultrasonic sensors and their wiring.

Abstract: A vessel for conveying a precursor-containing fluid stream from a precursor material contained within the vessel using a carrier gas. The vessel defines an interior volume segmented into an upper volume and a lower volume, the upper volume being in fluid communication with the lower volume, the lower volume containing substantially all of the precursor material and being separated from the upper volume by a separator. The vessel includes a diffuser tube that extends from an inlet port, through the separator and has a distal end having a plurality of openings formed therein and extends along the bottom interior wall of the vessel.

Abstract: The present invention is a bubbler having a diptube inlet ending in a bubble size reducing outlet and at least one baffle disc positioned between the outlet of the diptube and the outlet of the bubbler to provide a narrow annular space between the baffle disc and the wall of the bubbler to prevent liquid droplets from entering the outlet to the bubbler. The bubble size reducing outlet is an elongated cylindrical porous metal frit situated in a sump of approximately the same dimensions. A metal frit is placed at the inlet of the outlet of the bubbler. The present invention is also a process of delivering a chemical precursor from a bubbler vessel having the above structure.

Abstract: Embodiments of the present invention provide an ultrasonic probe having an increased number (e.g., twelve) of ultrasonic sensors for measuring the level of liquid within a sealed container. The ultrasonic probe includes a neck tube that enables the ultrasonic probe to be used with existing, standardized container fittings despite having an enlarged barrel to accommodate the increased number of ultrasonic sensors. Embodiments of the present invention also provide a system and method in which ultrasonic sensors within an ultrasonic probe are activated one at a time to reduce crosstalk between the ultrasonic sensors and their wiring.

Abstract: Embodiments of the present invention provide an ultrasonic probe having an increased number (e.g., twelve) of ultrasonic sensors for measuring the level of liquid within a sealed container. The ultrasonic probe includes a neck tube that enables the ultrasonic probe to be used with existing, standardized container fittings despite having an enlarged barrel to accommodate the increased number of ultrasonic sensors. Embodiments of the present invention also provide a system and method in which ultrasonic sensors within an ultrasonic probe are activated one at a time to reduce crosstalk between the ultrasonic sensors and their wiring.

Abstract: An ultrasonic probe having ultrasonic sensors (e.g., piezoelectric crystals) for measuring the level of liquid within a sealed container and having features that make the probe more reliable and enable more precise liquid level readings as the container nears an empty state. Embodiments include spacing the ultrasonic sensors more closely at the lower end of the probe, offsetting the sensors to enable tighter vertical spacing, matched pairs of sensors for redundancy, and a downward facing sensor located at the lower end of the probe to decrease the minimum liquid level that can be accurately measured by the probe. A sump may also be provided to further decrease the minimum liquid level that can be accurately measured by the probe.

Abstract: A vessel for conveying a precursor fluid from the vessel, comprising: an interior volume having an upper volume and a lower volume, wherein the two volumes are in communication and the lower volume contains precursor; a lid comprising a fluid inlet directing carrier gas into the vessel, a “T” fluid outlet, a sidewall having an upper lip wherein the upper lip contacts the lid; a separator interposed between the lid and the sidewall wherein the separator resides adjacent the upper lip and segments the interior volume into the upper volume and a lower volume; and an inlet plenum in communication with the fluid inlet having a plenum chamber opening towards the separator to direct the carrier gas through the separator and towards the precursor. A method for using the apparatus is also disclosed.

Abstract: Embodiments of the present invention provide an ultrasonic probe having an increased number (e.g., twelve) of ultrasonic sensors for measuring the level of liquid within a sealed container. The ultrasonic probe includes a neck tube that enables the ultrasonic probe to be used with existing, standardized container fittings despite having an enlarged barrel to accommodate the increased number of ultrasonic sensors. Embodiments of the present invention also provide a system and method in which ultrasonic sensors within an ultrasonic probe are activated one at a time to reduce crosstalk between the ultrasonic sensors and their wiring.

Abstract: The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.

Abstract: Embodiments of the present invention provide an ultrasonic probe having an increased number (e.g., twelve) of ultrasonic sensors for measuring the level of liquid within a sealed container. The ultrasonic probe includes a neck tube that enables the ultrasonic probe to be used with existing, standardized container fittings despite having an enlarged barrel to accommodate the increased number of ultrasonic sensors. Embodiments of the present invention also provide a system and method in which ultrasonic sensors within an ultrasonic probe are activated one at a time to reduce crosstalk between the ultrasonic sensors and their wiring.