Patents by Inventor Thomas Andrew Steidl
Thomas Andrew Steidl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20140338442Abstract: Embodiments of the present invention provide an ultrasonic probe having an increased number (e.g., twelve) of ultrasonic sensors for measuring the level of liquid within a sealed container. The ultrasonic probe includes a neck tube that enables the ultrasonic probe to be used with existing, standardized container fittings despite having an enlarged barrel to accommodate the increased number of ultrasonic sensors. Embodiments of the present invention also provide a system and method in which ultrasonic sensors within an ultrasonic probe are activated one at a time to reduce crosstalk between the ultrasonic sensors and their wiring.Type: ApplicationFiled: January 24, 2014Publication date: November 20, 2014Applicant: AIR PRODUCTS AND CHEMICALS, INC.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl
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Publication number: 20140193578Abstract: The present invention is a bubbler having a diptube inlet ending in a bubble size reducing outlet and at least one baffle disc positioned between the outlet of the diptube and the outlet of the bubbler to provide a narrow annular space between the baffle disc and the wall of the bubbler to prevent liquid droplets from entering the outlet to the bubbler. The bubble size reducing outlet is an elongated cylindrical porous metal frit situated in a sump of approximately the same dimensions. A metal frit is placed at the inlet of the outlet of the bubbler. The present invention is also a process of delivering a chemical precursor from a bubbler vessel having the above structure.Type: ApplicationFiled: March 12, 2014Publication date: July 10, 2014Inventors: Charles Michael Birtcher, Thomas Andrew Steidl, Xinjian Lei
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Publication number: 20140191423Abstract: The present invention is a bubbler having a diptube inlet ending in a bubble size reducing outlet and at least one baffle disc positioned between the outlet of the diptube and the outlet of the bubbler to provide a narrow annular space between the baffle disc and the wall of the bubbler to prevent liquid droplets from entering the outlet to the bubbler. The bubble size reducing outlet is an elongated cylindrical porous metal frit situated in a sump of approximately the same dimensions. A metal frit is placed at the inlet of the outlet of the bubbler. The present invention is also a process of delivering a chemical precursor from a bubbler vessel having the above structure.Type: ApplicationFiled: March 12, 2014Publication date: July 10, 2014Inventors: Charles Michael Birtcher, Thomas Andrew Steidl, Xinjian Lei
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Patent number: 8708320Abstract: The present invention is a bubbler having a diptube inlet ending in a bubble size reducing outlet and at least one baffle disc positioned between the outlet of the diptube and the outlet of the bubbler to provide a narrow annular space between the baffle disc and the wall of the bubbler to prevent liquid droplets from entering the outlet to the bubbler. The bubble size reducing outlet is an elongated cylindrical porous metal frit situated in a sump of approximately the same dimensions. A metal frit is placed at the inlet of the outlet of the bubbler. The present invention is also a process of delivering a chemical precursor from a bubbler vessel having the above structure.Type: GrantFiled: November 13, 2007Date of Patent: April 29, 2014Assignee: Air Products and Chemicals, Inc.Inventors: Thomas Andrew Steidl, Charles Michael Birtcher, Xinjian Lei
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Publication number: 20130312855Abstract: A vessel for conveying a precursor-containing fluid stream from a precursor material contained within the vessel, the vessel comprising: an interior volume defined by a top, one or more sidewalls, and a base; and at least one fluid outlet for vaporized precursor, and at least one particle barrier that defines at least one particle restricted space within the interior volume, wherein said particle barrier comprises at least one 3-dimensional filter. A method for using the apparatus is also disclosed.Type: ApplicationFiled: May 20, 2013Publication date: November 28, 2013Applicant: AIR PRODUCTS AND CHEMICALS, INC.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl, Xinjian Lei, Sergei Vladimirovich Ivanov
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Publication number: 20130015594Abstract: The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.Type: ApplicationFiled: January 16, 2012Publication date: January 17, 2013Applicant: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl
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Patent number: 8162296Abstract: The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.Type: GrantFiled: March 19, 2009Date of Patent: April 24, 2012Assignee: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl
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Patent number: 8002247Abstract: The present invention is a quartz bubbler container with cross purge capability. This cross purge allows the user to easily purge air and chemical from the valve inlet and outlet by simply flowing inert gas, and avoids the requirement for a more complicated vacuum purging apparatus. The design incorporates two small footprint 3-way valves mounted on the bubbler container inlet and outlet connectors. The 3rd port of each valve is piped together between the valves with a crosspurge line. The valves are corrosion resistant, leak free, maintenance free, non-leaching of impurities, and can accommodate an optional breakseal crusher that will perforate quartz break seals (on the inlet and outlet of ampoule). Liquid out containers of various materials of construction are also contemplated.Type: GrantFiled: May 13, 2009Date of Patent: August 23, 2011Assignee: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl, John Eric Baker
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Publication number: 20100242835Abstract: The present invention is related to the field of semiconductor processing equipment and methods and provides, in particular, methods and equipment for the sustained, high-volume production of Group III-V compound semiconductor material suitable for fabrication of optic and electronic components, for use as substrates for epitaxial deposition, for wafers and so forth. In preferred embodiments, these methods and equipment are optimized for producing Group III-N (nitrogen) compound semiconductor wafers and specifically for producing GaN wafers. Specifically, the precursor is provided at a mass flow of at least 50 g Group III element/hour for a time of at least 48 hours to facilitate high volume manufacture of the semiconductor material. Advantageously, the mass flow of the gaseous Group III precursor is controlled to deliver the desired amount.Type: ApplicationFiled: June 8, 2007Publication date: September 30, 2010Inventors: Chantal Arena, Christiaan J. Werkhoven, Thomas Andrew Steidl, Charles Michael Birtcher, Robert Daniel Clark
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Publication number: 20100237085Abstract: The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.Type: ApplicationFiled: March 19, 2009Publication date: September 23, 2010Applicant: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl
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Publication number: 20100043918Abstract: The present invention is a quartz bubbler container with cross purge capability. This cross purge allows the user to easily purge air and chemical from the valve inlet and outlet by simply flowing inert gas, and avoids the requirement for a more complicated vacuum purging apparatus. The design incorporates two small footprint 3-way valves mounted on the bubbler container inlet and outlet connectors. The 3rd port of each valve is piped together between the valves with a crosspurge line. The valves are corrosion resistant, leak free, maintenance free, non-leaching of impurities, and can accommodate an optional breakseal crusher that will perforate quartz break seals (on the inlet and outlet of ampoule). Liquid out containers of various materials of construction are also contemplated.Type: ApplicationFiled: May 13, 2009Publication date: February 25, 2010Applicant: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl, John Eric Baker
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Publication number: 20080143002Abstract: The present invention is a bubbler having a diptube inlet ending in a bubble size reducing outlet and at least one baffle disc positioned between the outlet of the diptube and the outlet of the bubbler to provide a narrow annular space between the baffle disc and the wall of the bubbler to prevent liquid droplets from entering the outlet to the bubbler. The bubble size reducing outlet is an elongated cylindrical porous metal frit situated in a sump of approximately the same dimensions. A metal frit is placed at the inlet of the outlet of the bubbler. The present invention is also a process of delivering a chemical precursor from a bubbler vessel having the above structure.Type: ApplicationFiled: November 13, 2007Publication date: June 19, 2008Applicant: AIR PRODUCTS AND CHEMICALS, INC.Inventors: Thomas Andrew Steidl, Charles Michael Birtcher, Xinjian Lei
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Publication number: 20080092816Abstract: A vessel for conveying a precursor fluid from the vessel, comprising: an interior volume having an upper volume and a lower volume, wherein the two volumes are in communication and the lower volume contains precursor; a lid comprising a fluid inlet directing carrier gas into the vessel, a âTâ fluid outlet, a sidewall having an upper lip wherein the upper lip contacts the lid; a separator interposed between the lid and the sidewall wherein the separator resides adjacent the upper lip and segments the interior volume into the upper volume and a lower volume; and an inlet plenum in communication with the fluid inlet having a plenum chamber opening towards the separator to direct the carrier gas through the separator and towards the precursor. A method for using the apparatus is also disclosed.Type: ApplicationFiled: October 4, 2007Publication date: April 24, 2008Applicant: AIR PRODUCTS AND CHEMICALS, INC.Inventors: Charles Michael Birtcher, Thomas Andrew Steidl
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Patent number: 7334595Abstract: The present invention is an apparatus and process for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, e) a second manifold for delivering the process chemical from the process container to a process tool; f) a solvent recovery container for containing used solvent and removed process chemical, and, g) a solvent evaporator to differentially remove solvent from process chemical in the solvent recovery container by entrainment in a carrier gas, vacuum removal, heating or combinations thereof. The containers can be baffled on their inert gas inlets. The cabinet can be heated.Type: GrantFiled: April 12, 2005Date of Patent: February 26, 2008Assignee: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Martin Castaneda Martinez, Thomas Andrew Steidl, Gil Vivanco, David James Silva
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Patent number: 7261118Abstract: Vessel and method for the production and delivery of a precursor-containing fluid stream comprising the gaseous phase of a precursor material are disclosed herein. In one aspect, there is provided an vessel comprising: an interior volume wherein the interior volume is segmented into an upper volume and a lower volume wherein the upper volume and the lower volume are in fluid communication; a lid comprising a fluid inlet, a fluid outlet, an optional fill port, and an internal recess wherein at least a portion of the upper volume resides within the internal recess; a sidewall interposed between the lid and a base; and at least one protrusion that extends into the lower volume wherein the precursor is in contact with the at least one protrusion and wherein at least one protrusion extends from at least one selected from the lid, the sidewall, the base, and combinations thereof.Type: GrantFiled: August 2, 2004Date of Patent: August 28, 2007Assignee: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Richard J. Dunning, Robert Daniel Clark, Arthur Kenneth Hochberg, Thomas Andrew Steidl
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Patent number: 7124913Abstract: A transportable container for high purity, high cost, liquid chemicals capable of maximizing dispensing of the liquid chemical content of the container at deviations from an upright position, comprising; a top wall, a side wall and a bottom wall, the bottom wall having an internal surface contacting liquid chemical with a concave upward contour having a lowest most point axially central to the container, an inlet, an outlet comprising a diptube through which the liquid chemical can be dispensed from said container with an outlet end adjacent the top surface and an inlet terminal end adjacent the lowest most point, a level sensor assembly having an output end adjacent the top surface and a terminal end adjacent the lowest most point; the diptube and the level sensor assembly being more proximate to one another at their terminal ends than their ends adjacent the top surface.Type: GrantFiled: June 24, 2003Date of Patent: October 24, 2006Assignee: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Gildardo Vivanco, Thomas Andrew Steidl, Richard J. Dunning
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Patent number: 6966348Abstract: A container having two ports; first block valve having two diaphragm valves, each valve having a valve seat side and a diaphragm side, each valve seat side faces the other valve seat side, and connected to the first end of a dispense conduit, one diaphragm side connected to a first port, and another diaphragm side connected to vent and or vacuum; a second valve connected to a push gas conduit and a second port.Type: GrantFiled: September 24, 2003Date of Patent: November 22, 2005Assignee: Air Products and Chemicals, Inc.Inventors: Thomas Andrew Steidl, Gildardo Vivanco, Charles Michael Birtcher
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Patent number: 6953047Abstract: The present invention is an apparatus for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, and; e) a second manifold for delivering the process chemical from the process container to a process tool. A process for using the apparatus is also contemplated.Type: GrantFiled: January 14, 2002Date of Patent: October 11, 2005Assignee: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Martin Castaneda Martinez, Thomas Andrew Steidl, Gil Vivanco, David James Silva
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Publication number: 20040262327Abstract: A transportable container for high purity, high cost, liquid chemicals capable of maximizing dispensing of the liquid chemical content of the container at deviations from an upright position, comprising; a top wall, a side wall and a bottom wall, the bottom wall having an internal surface contacting liquid chemical with a concave upward contour having a lowest most point axially central to the container, an inlet, an outlet comprising a diptube through which the liquid chemical can be dispensed from said container with an outlet end adjacent the top surface and an inlet terminal end adjacent the lowest most point, a level sensor assembly having an output end adjacent the top surface and a terminal end adjacent the lowest most point; the diptube and the level sensor assembly being more proximate to one another at their terminal ends than their ends adjacent the top surface.Type: ApplicationFiled: June 24, 2003Publication date: December 30, 2004Inventors: Charles Michael Birtcher, Gildardo Vivanco, Thomas Andrew Steidl, Richard J. Dunning
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Patent number: 6648034Abstract: A manifold comprising a container having two ports; a conduit connecting the container to a source/dispense of chemical having a first end and a second end and a connector for the ends; first block valve having two diaphragm valves, each valve having a valve seat side and a diaphragm side, each valve seat side faces the other valve seat side, and connected to the first end of the conduit, one diaphragm side connected to a first port, and another diaphragm side connected to vent; a second block valve having two diaphragm valves, having a valve seat side and a diaphragm side, wherein each valve seat side faces the other valve seat side, and each valve seat side connected to the second end of the conduit, the diaphragm side of one valve connected to purge, and the diaphragm side of another valve connected to push gas or chemical outlet.Type: GrantFiled: May 23, 2002Date of Patent: November 18, 2003Assignee: Air Products and Chemicals, Inc.Inventors: Charles Michael Birtcher, Martin Castaneda Martinez, Thomas Andrew Steidl, Gil Vivanco, David James Silva