Patents by Inventor Thomas R. Boussie

Thomas R. Boussie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20120001320
    Abstract: Methods for substrate processing are described. The methods include forming a material layer on a substrate. The methods include selecting constituents of a molecular masking layer (MML) to remove an effect of variations in the material layer as a result of substrate processing. The methods include normalizing the surface characteristics of the material layer by selectively depositing the MML on the material layer.
    Type: Application
    Filed: December 28, 2010
    Publication date: January 5, 2012
    Inventors: Zachary Fresco, Chi-I Lang, Sandra G. Malhotra, Tony P. Chiang, Thomas R. Boussie, Nitin Kumar, Jinhong Tong, Anh Duong
  • Patent number: 8084400
    Abstract: The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.
    Type: Grant
    Filed: February 10, 2006
    Date of Patent: December 27, 2011
    Assignee: Intermolecular, Inc.
    Inventors: Tony P. Chiang, David E. Lazovsky, Thomas R. Boussie, Alexander Gorer
  • Patent number: 8067340
    Abstract: The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.
    Type: Grant
    Filed: February 11, 2008
    Date of Patent: November 29, 2011
    Assignee: Intermolecular, Inc.
    Inventors: Tony P. Chiang, David E. Lazovsky, Thomas R. Boussie, Alexander Gorer
  • Publication number: 20110281402
    Abstract: A masking layer is formed on a dielectric region of an electronic device so that, during subsequent formation of a capping layer on electrically conductive regions of the electronic device that are separated by the dielectric region, the masking layer inhibits formation of capping layer material on or in the dielectric region. The capping layer can be formed selectively on the electrically conductive regions or non-selectively; in either case (particularly in the latter), capping layer material formed over the dielectric region can subsequently be removed, thus ensuring that capping layer material is formed only on the electrically conductive regions. Silane-based materials, such as silane-based SAMs, can be used to form the masking layer. The capping layer can be formed of an electrically conductive material (e.g.
    Type: Application
    Filed: July 28, 2011
    Publication date: November 17, 2011
    Applicant: INTERMOLECULAR, INC.
    Inventors: David E. Lazovsky, Sandra G. Malhotra, Thomas R. Boussie
  • Patent number: 8058154
    Abstract: The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.
    Type: Grant
    Filed: February 8, 2008
    Date of Patent: November 15, 2011
    Assignee: Intermolecular, Inc.
    Inventors: Tony P. Chiang, David E. Lazovsky, Thomas R. Boussie, Alexander Gorer
  • Patent number: 8039383
    Abstract: A masking layer is formed on a dielectric region of an electronic device so that, during subsequent formation of a capping layer on electrically conductive regions of the electronic device that are separated by the dielectric region, the masking layer inhibits formation of capping layer material on or in the dielectric region. The capping layer can be formed selectively on the electrically conductive regions or non-selectively; in either case (particularly in the latter), capping layer material formed over the dielectric region can subsequently be removed, thus ensuring that capping layer material is formed only on the electrically conductive regions. Silane-based materials, such as silane-based SAMs, can be used to form the masking layer. The capping layer can be formed of an electrically conductive material (e.g.
    Type: Grant
    Filed: June 14, 2010
    Date of Patent: October 18, 2011
    Assignee: Intermolecular, Inc.
    Inventors: David E. Lazovsky, Sandra G. Malhotra, Thomas R. Boussie
  • Patent number: 8030772
    Abstract: Devices are presented including: a substrate including a dielectric region and a conductive region; a molecular self-assembled layer selectively formed on the dielectric region; and a capping layer formed on the conductive region, where the capping layer is an electrically conductive material such as: an alloy of cobalt and boron material, an alloy of cobalt, tungsten, and phosphorous material, an alloy of nickel, molybdenum, and phosphorous. In some embodiments, devices are presented where the molecular self-assembled layer includes one or more of a polyelectrolyte, a dendrimer, a hyper-branched polymer, a polymer brush, a block co-polymer, and a silane-based material where the silane-based material includes one or more hydrolysable substituents of a general formula RnSiX4-n, where R is: an alkyl, a substituted alkyl, a fluoroalkyl, an aryl, a substituted aryl, and a fluoroaryl, and where X is: a halo, an alkoxy, an aryloxy, an amino, an octadecyltrichlorosilane, and an aminopropyltrimethoxysilane.
    Type: Grant
    Filed: May 20, 2008
    Date of Patent: October 4, 2011
    Assignee: Intermolecular, Inc.
    Inventors: David E. Lazovsky, Sandra G. Malhotra, Thomas R. Boussie
  • Publication number: 20110218318
    Abstract: Disclosed are compositions of matter comprising an adipic acid product of formula (1) wherein R is independently a salt-forming ion, hydrogen, hydrocarbyl, or substituted hydrocarbyl, and at least one constituent selected from the group consisting of formula (2) wherein R is as defined above and each of R1 is, independently, H, OH, acyloxy or substituted acyloxy provided, however, that at least one of R1 is OH, and formula (3) wherein R is as above defined and R1 is OH, acyloxy or substituted acyloxy. Also disclosed are compositions of matter comprising at least about 99 wt % adipic acid and least two constituents selected from the group consisting of formula (2) and formula (3), above.
    Type: Application
    Filed: December 13, 2010
    Publication date: September 8, 2011
    Applicant: RENNOVIA, INC.
    Inventors: Thomas R. Boussie, Eric L. Dias, Zachary M. Fresco, Vincent J. Murphy, James Shoemaker, Raymond Archer, Hong Jiang
  • Publication number: 20110101536
    Abstract: The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.
    Type: Application
    Filed: January 12, 2011
    Publication date: May 5, 2011
    Inventors: Tony P. Chiang, David E. Lazovsky, Thomas R. Boussie, Alexander Gorer
  • Patent number: 7902063
    Abstract: The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.
    Type: Grant
    Filed: February 10, 2006
    Date of Patent: March 8, 2011
    Assignee: Intermolecular, Inc.
    Inventors: Tony P. Chiang, David E. Lazovsky, Thomas R. Boussie, Alexander Gorer
  • Patent number: 7879710
    Abstract: Methods for substrate processing are described. The methods include forming a material layer on a substrate. The methods include selecting constituents of a molecular masking layer (MML) to remove an effect of variations in the material layer as a result of substrate processing. The methods include normalizing the surface characteristics of the material layer by selectively depositing the MML on the material layer.
    Type: Grant
    Filed: December 29, 2006
    Date of Patent: February 1, 2011
    Assignee: Intermolecular, Inc.
    Inventors: Zachary Fresco, Chi-I Lang, Sandra G. Malhotra, Tony P. Chiang, Thomas R. Boussie, Nitin Kumar, Jinhong Tong, Anh Duong
  • Publication number: 20110021015
    Abstract: A masking layer is formed on a dielectric region of an electronic device so that, during subsequent formation of a capping layer on electrically conductive regions of the electronic device that are separated by the dielectric region, the masking layer inhibits formation of capping layer material on or in the dielectric region. The capping layer can be formed selectively on the electrically conductive regions or non-selectively; in either case (particularly in the latter), capping layer material formed over the dielectric region can subsequently be removed, thus ensuring that capping layer material is formed only on the electrically conductive regions. Silane-based materials, such as silane-based SAMs, can be used to form the masking layer. The capping layer can be formed of an electrically conductive material (e.g.
    Type: Application
    Filed: June 14, 2010
    Publication date: January 27, 2011
    Inventors: David E. Lazovsky, Sandra G. Malhotra, Thomas R. Boussie
  • Patent number: 7871928
    Abstract: The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.
    Type: Grant
    Filed: May 4, 2009
    Date of Patent: January 18, 2011
    Assignee: Intermolecular, Inc.
    Inventors: Tony P. Chiang, David E. Lazovsky, Thomas R. Boussie, Alexander Gorer
  • Publication number: 20100317822
    Abstract: The present invention generally relates to processes for the chemocatalytic conversion of a carbohydrate source to an adipic acid product. The present invention includes processes for the conversion of a carbohydrate source to an adipic acid product via a furanic substrate, such as 2,5-furandicarboxylic acid or derivatives thereof. The present invention also includes processes for producing an adipic acid product comprising the catalytic hydrogenation of a furanic substrate to produce a tetrahydrofuranic substrate and the catalytic hydrodeoxygenation of at least a portion of the tetrahydrofuranic substrate to an adipic acid product. The present invention also includes products produced from adipic acid product and processes for the production thereof from such adipic acid product.
    Type: Application
    Filed: June 11, 2010
    Publication date: December 16, 2010
    Applicant: RENNOVIA, INC.
    Inventors: Thomas R. Boussie, Eric L. Dias, Zachary M. Fresco, Vincent J. Murphy
  • Publication number: 20100317823
    Abstract: The present invention generally relates to processes for the chemocatalytic conversion of a glucose source to an adipic acid product. The present invention includes processes for the conversion of glucose to an adipic acid product via glucaric acid or derivatives thereof. The present invention also includes processes comprising catalytic oxidation of glucose to glucaric acid or derivative thereof and processes comprising the catalytic hydrodeoxygenation of glucaric acid or derivatives thereof to an adipic acid product. The present invention also includes products produced from adipic acid product and processes for the production thereof from such adipic acid product.
    Type: Application
    Filed: June 11, 2010
    Publication date: December 16, 2010
    Applicant: RENNOVIA, INC.
    Inventors: Thomas R. Boussie, Eric L. Dias, Zachary M. Fresco, Vincent J. Murphy, James Shoemaker, Raymond Archer, Hong Jiang
  • Publication number: 20100317825
    Abstract: The present invention generally relates to processes for the chemocatalytic conversion of a pentose source to a glutaric acid product. The present invention includes processes for the conversion of pentose to a glutaric acid product via pentaric acid or derivatives thereof. The present invention also includes processes comprising the catalytic oxidation of pentose to pentaric acid and catalytic hydrodeoxygenation of pentaric acid or derivatives thereof to a glutaric acid product.
    Type: Application
    Filed: June 11, 2010
    Publication date: December 16, 2010
    Applicant: RENNOVIA, INC.
    Inventors: Thomas R. Boussie, Eric L. Dias, Zachary M. Fresco, Vincent J. Murphy
  • Patent number: 7749881
    Abstract: A masking layer is formed on a dielectric region of an electronic device so that, during subsequent formation of a capping layer on electrically conductive regions of the electronic device that are separated by the dielectric region, the masking layer inhibits formation of capping layer material on or in the dielectric region. The capping layer can be formed selectively on the electrically conductive regions or non-selectively; in either case (particularly in the latter), capping layer material formed over the dielectric region can subsequently be removed, thus ensuring that capping layer material is formed only on the electrically conductive regions. Silane-based materials, such as silane-based SAMs, can be used to form the masking layer. The capping layer can be formed of an electrically conductive material (e.g.
    Type: Grant
    Filed: May 18, 2005
    Date of Patent: July 6, 2010
    Assignee: Intermolecular, Inc.
    Inventors: David E. Lazovsky, Sandra G. Malhotra, Thomas R. Boussie
  • Publication number: 20100081577
    Abstract: A reactor system includes a housing and a plurality of reactors at least partially contained in the housing. The reactors each have a containment structure enclosing an internal space in the reactor. The containment structure including a circumferential sidewall having opposite ends and surrounding at least a portion of said internal space. The sidewall has a thermal mass and a sidewall heater adjacent an exterior surface of the sidewall. The ratio of the thermal mass of the sidewall to a volume of the portion of the internal space that is surrounded by the sidewall is relatively low.
    Type: Application
    Filed: September 30, 2008
    Publication date: April 1, 2010
    Applicant: SYMYX TECHNOLOGIES, INC.
    Inventors: Robbie Singh Sidhu, Thomas Harding McWaid, Gary M. Diamond, Keith Anthony Hall, Susan J. Schofer, Eric L. Dias, Thomas R. Boussie, Victor O. Nava-Salgado
  • Patent number: 7659415
    Abstract: New ligands and compositions with bridged bis-aromatic ligands are disclosed that catalyze the polymerization of monomers into polymers. These catalysts with metal centers have high performance characteristics, including higher comonomer incorporation into ethylene/olefin copolymers, where such olefins are for example, 1-octene, propylene or styrene. The catalysts also polymerize propylene into isotactic polypropylene.
    Type: Grant
    Filed: July 9, 2007
    Date of Patent: February 9, 2010
    Assignee: Symyx Solutions, Inc.
    Inventors: Thomas R. Boussie, Oliver Brummer, Gary M. Diamond, Christopher Goh, Anne M. LaPointe, Margarete K. Leclerc, James A. W. Shoemaker
  • Publication number: 20090227049
    Abstract: The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.
    Type: Application
    Filed: May 4, 2009
    Publication date: September 10, 2009
    Inventors: Tony P. Chiang, David E. Lazovsky, Thomas R. Boussie, Alexander Gorer