Patents by Inventor Thomas WIRNSBERGER
Thomas WIRNSBERGER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 9044794Abstract: A cleaning fluid including dispersed gas avoids using ultrasonic energy to induce cavitation by subjecting a liquid containing dissolved gas to a pressure reduction in a bubble machine, to generate a gas/liquid dispersion. The cleaning fluid can be used to clean articles such as semiconductor wafers using a device that includes a holder and a vibrator for supplying ultrasonic or megasonic energy to the article.Type: GrantFiled: December 31, 2009Date of Patent: June 2, 2015Assignee: LAM Research AGInventors: Frank Ludwig Holsteyns, Alexander Lippert, Thomas Wirnsberger
-
Publication number: 20150008632Abstract: A device for holding a wafer-shaped article comprises an annular chuck base body having a plurality of movable contact elements for securing a wafer-shaped article to the annular chuck base body, and a gear mechanism driving the contact elements in unison between a first position and a second position. The annular chuck base body comprises a housing formed from a material that is resistant to attack by strong inorganic acids. The annular chuck base body also comprises a reinforcing ring fitted within the housing and formed from a material whose coefficient of linear thermal expansion is substantially less than that of the housing material.Type: ApplicationFiled: July 3, 2013Publication date: January 8, 2015Inventors: Andreas GLEISSNER, Thomas WIRNSBERGER
-
Patent number: 8833380Abstract: A device for treating a disc-like article with a fluid, including elements for dispensing a fluid onto the article and a chuck for holding and rotating the article around an axis perpendicular thereto, the chuck including a base body, a drive ring, and gripping members for contacting the article at its edge. The gripping members are eccentrically movable with respect to the center of the article and driven by a drive ring rotatably mounted to the base body so that the drive ring is rotatable against the base body around the axis. The relative rotational movement of the drive ring against the base body is carried out by either holding the base body and rotating the drive ring or by holding the drive ring and rotating the base body, whereby the to-be-held-part (drive ring or base body) is held without touching the respective to-be-held-part by magnetic force.Type: GrantFiled: August 25, 2011Date of Patent: September 16, 2014Assignee: Lam Research AGInventors: Rainer Obweger, Franz Kumnig, Thomas Wirnsberger
-
Publication number: 20140209129Abstract: Improved removal of ion-implanted photoresist in a single wafer front-end wet processing station is achieved by dissolving gaseous ozone into relatively cool inorganic acid, dispensing the acid ozone mixture onto a wafer, and rapidly heating the surface of the wafer to a temperature at least 30° C. higher than the temperature of the acid ozone mixture.Type: ApplicationFiled: April 1, 2014Publication date: July 31, 2014Applicant: LAM RESEARCH ABInventors: Harald OKORN-SCHMIDT, Franz KUMNING, Rainer OBWEGER, Thomas WIRNSBERGER
-
Patent number: 8709165Abstract: Improved removal of ion-implanted photoresist in a single wafer front-end wet processing station is achieved by dissolving gaseous ozone into relatively cool inorganic acid, dispensing the acid ozone mixture onto a wafer, and rapidly heating the surface of the wafer to a temperature at least 30° C. higher than the temperature of the acid ozone mixture.Type: GrantFiled: December 3, 2010Date of Patent: April 29, 2014Assignee: Lam Research AGInventors: Harald Okorn-Schmidt, Franz Kumning, Rainer Obweger, Thomas Wirnsberger
-
Patent number: 8646767Abstract: A device for holding wafer-shaped articles, such as semiconductor wafers, is equipped with a series of pins that are brought into contact with a peripheral edge of the wafer-shaped article, under control of a common gear ring or a series of conjointly operated gear sectors. In the regions of the gear ring or gear sectors engaging the pin assemblies, those elements are designed to yield more readily than other regions of the gear ring or gear sectors, to accommodate differential thermal expansion of the chuck components in the vicinity of the pin assemblies.Type: GrantFiled: July 23, 2010Date of Patent: February 11, 2014Assignee: Lam Research AGInventors: Franz Kumnig, Thomas Wirnsberger, Rainer Obweger
-
Patent number: 8490634Abstract: A device for treating a disc-like article with a fluid, includes elements for dispensing a fluid onto the article and a chuck for holding and rotating the article around an axis perpendicular thereto. The chuck includes a base body, a drive ring, and gripping members for contacting the article at its edge. The gripping members are eccentrically movable with respect to the center of the article and driven by a drive ring rotatably mounted to the base body, so that the drive ring is rotatable against the base body around the axis. The relative rotational movement of the drive ring against the base body is carried out by either holding the base body and rotating the drive ring or by holding the drive ring and rotating the base body, whereby the to-be-held-part (drive ring or base body) is held without touching the respective to-be-held-part by magnetic force.Type: GrantFiled: March 25, 2010Date of Patent: July 23, 2013Assignee: Lam Research AGInventors: Rainer Obweger, Franz Kumnig, Thomas Wirnsberger
-
Publication number: 20130154203Abstract: A device for processing wafer-shaped articles comprises a rotary chuck having a series of pins adapted to hold a wafer shaped article on the rotary chuck. Each of the pins comprises a cylindrical body and a projecting gripping portion formed integrally therewith. The cylindrical body and gripping portion are made from a ceramic material. The gripping portion comprises cylindrical surfaces having a common generatrix with surfaces of the cylindrical body.Type: ApplicationFiled: December 16, 2011Publication date: June 20, 2013Applicant: LAM RESEARCH AGInventors: Ulrich TSCHINDERLE, Andreas GLEISSNER, Thomas WIRNSBERGER, Franz KUMNIG, Rainer OBWEGER
-
Publication number: 20130101372Abstract: A device for processing wafer-shaped articles comprises a closed process chamber. The closed process chamber has a side wall, a holder located within the closed process chamber adapted to receive a wafer shaped article, and a door for loading and unloading a wafer shaped article into and from the closed process chamber. The door in a first position blocks an opening in the side wall of the chamber and seals against an interior surface of the side wall of the chamber. The door is connected to an exterior of the chamber via a linkage that guides the door in a nonlinear translational movement between the first position and a second position in which the door is positioned interiorly of the chamber so as to permit loading and unloading of a wafer shaped article through the opening.Type: ApplicationFiled: October 19, 2011Publication date: April 25, 2013Applicant: LAM RESEARCH AGInventors: Ulrich TSCHINDERLE, Andreas GLEISSNER, Thomas WIRNSBERGER, Rainer OBWEGER
-
Publication number: 20130062839Abstract: A device for processing wafer-shaped articles comprises a closed process chamber. The closed process chamber comprises a housing providing a gas-tight enclosure, a rotary chuck located within the closed process chamber and adapted to hold a wafer shaped article thereon, and an interior cover disposed within said closed process chamber. The interior cover is movable between a first position in which the rotary chuck communicates with an outer wall of the closed process chamber, and a second position in which the interior cover seals against an inner surface of the closed process chamber adjacent the rotary chuck to define a gas-tight inner process chamber.Type: ApplicationFiled: September 9, 2011Publication date: March 14, 2013Applicant: LAM RESEARCH AGInventors: Ulrich TSCHINDERLE, Andreas GLEISSNER, Thomas WIRNSBERGER, Rainer OBWEGER
-
Publication number: 20120138097Abstract: Improved removal of ion-implanted photoresist in a single wafer front-end wet processing station is achieved by dissolving gaseous ozone into relatively cool inorganic acid, dispensing the acid ozone mixture onto a wafer, and rapidly heating the surface of the wafer to a temperature at least 30° C. higher than the temperature of the acid ozone mixture.Type: ApplicationFiled: December 3, 2010Publication date: June 7, 2012Applicant: LAM RESEARCH AGInventors: Harald OKORN-SCHMIDT, Franz KUMNIG, Rainer OBWEGER, Thomas WIRNSBERGER
-
Publication number: 20120018940Abstract: A device for holding wafer-shaped articles, such as semiconductor wafers, is equipped with a series of pins that are brought into contact with a peripheral edge of the wafer-shaped article, under control of a common gear ring or a series of conjointly operated gear sectors. In the regions of the gear ring or gear sectors engaging the pin assemblies, those elements are designed to yield more readily than other regions of the gear ring or gear sectors, to accommodate differential thermal expansion of the chuck components in the vicinity of the pin assemblies.Type: ApplicationFiled: July 23, 2010Publication date: January 26, 2012Applicant: LAM RESEARCH AGInventors: FRANZ KUMNIG, THOMAS WIRNSBERGER, RAINER OBWEGER
-
Publication number: 20110304107Abstract: A device for treating a disc-like article with a fluid, includes elements for dispensing a fluid onto the article and a chuck for holding and rotating the article around an axis perpendicular thereto. The chuck includes a base body, a drive ring, and gripping members for contacting the article at its edge. The gripping members are eccentrically movable with respect to the center of the article. The eccentric movement of the gripping members is driven by a drive ring rotatably mounted to the base body, so that the drive ring is rotatable against the base body around the axis. The relative rotational movement of the drive ring against the base body is carried out by either holding the base body and rotating the drive ring or by holding the drive ring and rotating the base body, whereby the to-be-held-part (drive ring or base body) is held without touching the respective to-be-held-part by magnetic force.Type: ApplicationFiled: August 25, 2011Publication date: December 15, 2011Applicant: LAM RESEARCH AGInventors: Rainer OBWEGER, Franz KUMNIG, Thomas WIRNSBERGER
-
Publication number: 20110253181Abstract: A device for treating a disc-like article with a fluid, includes elements for dispensing a fluid onto the article and a chuck for holding and rotating the article around an axis perpendicular thereto. The chuck includes a base body, a drive ring, and gripping members for contacting the article at its edge. The gripping members are eccentrically movable with respect to the center of the article. The eccentric movement of the gripping members is driven by a drive ring rotatably mounted to the base body, so that the drive ring is rotatable against the base body around the axis. The relative rotational movement of the drive ring against the base body is carried out by either holding the base body and rotating the drive ring or by holding the drive ring and rotating the base body, whereby the to-be-held-part (drive ring or base body) is held without touching the respective to-be-held-part by magnetic force.Type: ApplicationFiled: March 25, 2010Publication date: October 20, 2011Applicant: LAM RESEARCH AGInventors: Rainer Obweger, Franz Kumnig, Thomas Wirnsberger
-
Publication number: 20110155169Abstract: A cleaning fluid including dispersed gas avoids using ultrasonic energy to induce cavitation by subjecting a liquid containing dissolved gas to a pressure reduction in a bubble machine, to generate a gas/liquid dispersion. The cleaning fluid can be used to clean articles such as semiconductor wafers using a device that includes a holder and a vibrator for supplying ultrasonic or megasonic energy to the article.Type: ApplicationFiled: December 31, 2009Publication date: June 30, 2011Applicant: LAM RESEARCH AGInventors: Frank Ludwig HOLSTEYNS, Alexander LIPPERT, Thomas WIRNSBERGER