Abstract: Provided is a fuel-reforming device comprising: an ammonia tank (4); a reformer (5) for reforming ammonia and generating high-concentration hydrogen gas having a hydrogen content of at least 99%; a mixing tank (7) for mixing ammonia and hydrogen for temporary storage; and a control means (10) for controlling the respective supply amounts of ammonia and high-concentration hydrogen gas that are supplied to the mixing tank (7). The control means (10) calculates the combustion rate coefficient C of mixed gas with respect to a reference fuel on the basis of equation (1). Equation (1): S0=SH×C+SA×(1?C). In equation (1), S0 is the combustion rate of the reference fuel, SH is the combustion rate of hydrogen, SA is the combustion rate of ammonia, and C is the combustion rate coefficient of mixed gas. In addition, on the basis of equation (2), the control means (10) determines the volume fractions of ammonia and hydrogen that are supplied to the mixing tank. Equation (2): C=1?exp(?A×MB).

Abstract: Provided is a double-sided polishing method of a wafer in which the wafer, which has been set in a wafer loading hole of the carrier, is compressed and held along with the carrier with an upper platen and a lower platen and the upper platen and the lower platen are rotated while supplying slurry to the wafer. The method includes: previously measuring an inclination value of a main surface of each of a plurality of carriers in the vicinity of the edge of the wafer loading hole; selecting, from among the plurality of carriers, those for which the inclination value is equal to or smaller than a threshold based on the measurement results of the inclination value; and applying the double-sided polishing to a wafer using the selected carrier.

Abstract: Provided is a method of double-side polishing a semiconductor wafer, which can suppress variation in the polishing quality by providing for changes in the polishing environment during polishing.

Abstract: Provided are a hydrogen purification device and a hydrogen purification method whereby hydrogen having a high purity can be purified at a high yield from a starting gas. The hydrogen purification device comprises: a starting gas source that supplies a starting gas, said starting gas containing hydrogen molecules and/or a hydride, to a discharge space; a plasma reactor that defines at least a part of the discharge space; a hydrogen flow channel that is connected to the discharge space; and leads out purified hydrogen from the starting gas source; a hydrogen separation membrane that partitions the discharge space from the hydrogen flow channel defines at least a part of the discharge space by one surface thereof and defines at least a part of the hydrogen flow channel by the other surface thereof; an electrode that is positioned outside the discharge space; and an adsorbent that is filled in the discharge space and adsorbs the starting gas.

Abstract: Provided is a fuel-reforming device comprising: an ammonia tank (4); a reformer (5) for reforming ammonia and generating high-concentration hydrogen gas having a hydrogen content of at least 99%; a mixing tank (7) for mixing ammonia and hydrogen for temporary storage; and a control means (10) for controlling the respective supply amounts of ammonia and high-concentration hydrogen gas that are supplied to the mixing tank (7). The control means (10) calculates the combustion rate coefficient C of mixed gas with respect to a reference fuel on the basis of equation (1). Equation (1): S0=SH×C+SA×(1?C). In equation (1), S0 is the combustion rate of the reference fuel, SH is the combustion rate of hydrogen, SA is the combustion rate of ammonia, and C is the combustion rate coefficient of mixed gas. In addition, on the basis of equation (2), the control means (10) determines the volume fractions of ammonia and hydrogen that are supplied to the mixing tank. Equation (2): C=1?exp(?A×MB).

Abstract: Provided a method of producing a carrier which make it possible to prevent the reduction in the flatness of a semiconductor wafer even if the semiconductor wafer is subjected to repeated double-side polishing procedures. The method of producing a carrier including a metal portion and a ring-shaped resin portion includes: a preparation step of preparing the metal portion and the resin portion (Step S1); a placement step of placing the resin portion in the retainer opening in the metal portion (Step S2); and a resin portion polishing step of polishing both surface of the resin portion (Step S4). The method includes, prior to the resin portion polishing step (Step S4), a production stage swelling step of swelling the resin portion placed in the retainer opening in the metal portion by impregnating the resin portion with a first liquid (Step S3).

Abstract: Provided are a hydrogen recycle system and a hydrogen recycle method, whereby hydrogen can be purified to high purity at high yield from a gas, said gas being exhausted from a nitride compound production device, and recycled. The hydrogen recycle system comprises an exhaust gas supply path supplying a gas exhausted from a nitride compound production device, a hydrogen recycle means and a hydrogen supply path. The hydrogen recycle means of the hydrogen recycle system is characterized by comprising: a plasma reaction vessel that defines at least a part of a discharge space; a hydrogen separation membrane that divides the discharge space from a hydrogen flow path communicated with the hydrogen supply path, defines at least a part of the discharge space by one surface thereof and also defines at least a part of the hydrogen flow path by the other surface thereof; an electrode that is disposed outside the discharge space; and an adsorbent that is filled in the discharge space and adsorbs the supplied exhaust gas.

Abstract: Provided is a transportation device which is capable of continuously travelling without being supplied with hydrogen from the outside. According to the present invention, a transportation device is provided with an ammonia storage means, a hydrogen production device, a fuel cell, a motor, a battery and a control unit. The hydrogen production device produces hydrogen by decomposing ammonia; and the fuel cell is supplied with hydrogen from the hydrogen production device and generates electric power. The motor operates by being supplied with some or all of the electric power generated by the fuel cell. The battery is supplied with some or all of the electric power generated by the fuel cell, and supplies electric power to the motor and the hydrogen production device.

Abstract: Provided are a hydrogen purification device and a hydrogen purification method whereby hydrogen having a high purity can be purified at a high yield from a starting gas. The hydrogen purification device comprises: a starting gas source that supplies a starting gas, said starting gas containing hydrogen molecules and/or a hydride, to a discharge space; a plasma reactor that defines at least a part of the discharge space; a hydrogen flow channel that is connected to the discharge space; and leads out purified hydrogen from the starting gas source; a hydrogen separation membrane that partitions the discharge space from the hydrogen flow channel defines at least a part of the discharge space by one surface thereof and defines at least a part of the hydrogen flow channel by the other surface thereof; an electrode that is positioned outside the discharge space; and an adsorbent that is filled in the discharge space and adsorbs the starting gas.

Abstract: Provided a method of producing a carrier which make it possible to prevent the reduction in the flatness of a semiconductor wafer even if the semiconductor wafer is subjected to repeated double-side polishing procedures. The method of producing a carrier including a metal portion and a ring-shaped resin portion includes: a preparation step of preparing the metal portion and the resin portion (Step S1); a placement step of placing the resin portion in the retainer opening in the metal portion (Step S2); and a resin portion polishing step of polishing both surface of the resin portion (Step S4). The method includes, prior to the resin portion polishing step (Step S4), a production stage swelling step of swelling the resin portion placed in the retainer opening in the metal portion by impregnating the resin portion with a first liquid (Step S3).

Abstract: Provided is a hydrogen generating apparatus adaptable to fluctuating hydrogen demand, particularly by enabling large-scale hydrogen production, generating pure hydrogen at a high yield. The hydrogen generating apparatus 1 generates hydrogen gas from a source gas by decomposing the source gas through catalysis and transforming it into plasma through electric discharge. The hydrogen generating apparatus 1 includes a dielectric body 2 defining a source gas flow channel 13, a catalyst 10 that decomposes at least part of the source gas in the source gas flow channel 13 to generate hydrogen gas, an electrode 3 contacting the dielectric body 2, a hydrogen separation membrane 5 facing the electrode 3 across the dielectric body 2, a hydrogen flow channel 18 guiding hydrogen separated by the hydrogen separation membrane 5, and a high-voltage power supply 6 supplying power to cause electric discharge between the hydrogen separation membrane 5 and the electrode 3.

Abstract: Provided is a hydrogen generating apparatus adaptable to fluctuating hydrogen demand, particularly by enabling large-scale hydrogen production, generating pure hydrogen at a high yield. The hydrogen generating apparatus 1 includes a tabular dielectric body 2 having a first surface 11 with a source gas flow channel 13 formed as a recess and a second surface 12 approximately parallel to the first surface 11, a grounding electrode 3, a hydrogen flow channel plate 4 with a hydrogen flow channel 18 and a hydrogen outlet 19, being arranged on a first surface 11 side of dielectric body 2, a hydrogen separation membrane 5 between source gas flow channel 13 and hydrogen flow channel 18, and a high-voltage power supply 6 that causes electric discharge in source gas flow channel 13 between hydrogen separation membrane 5 and grounding electrode 3. Hydrogen separation membrane 5 transmits hydrogen generated by electric discharge in source gas flow channel 13 into hydrogen flow channel 18.

Abstract: Provided is a method of double-side polishing a semiconductor wafer, which can suppress variation in the polishing quality by providing for changes in the polishing environment during polishing.

Abstract: Provided is a transportation device which is capable of continuously travelling without being supplied with hydrogen from the outside. According to the present invention, a transportation device is provided with an ammonia storage means, a hydrogen production device, a fuel cell, a motor, a battery and a control unit. The hydrogen production device produces hydrogen by decomposing ammonia; and the fuel cell is supplied with hydrogen from the hydrogen production device and generates electric power. The motor operates by being supplied with some or all of the electric power generated by the fuel cell. The battery is supplied with some or all of the electric power generated by the fuel cell, and supplies electric power to the motor and the hydrogen production device.

Abstract: A compact fuel battery system is provided that has an integrated hydrogen generator. This fuel battery system 1 is provided with a hydrogen generator 10 and a fuel battery cell 20. The hydrogen generator 10 is provided with a plate-shape dielectric 2 having a raw material gas flow path surface 11 in which a raw material gas flow path 13 is formed. An electrode 3 faces the back surface 12 of the dielectric 2. A hydrogen separation membrane 5, which has a first surface 18 and the second surface 19, closes an opening of the raw material gas flow path 13. Furthermore, the hydrogen generator 10 is provided with a high-voltage power supply 6 which generates electric discharge between the hydrogen separation membrane 5 and the electrode 3. The fuel battery system is characterized in that the second surface 19 of the hydrogen separation membrane 5 of the hydrogen generator is arranged facing the fuel electrode 21 of the fuel battery cell 20.

Abstract: Provided is a hydrogen generating apparatus adaptable to fluctuating hydrogen demand, particularly by enabling large-scale hydrogen production, generating pure hydrogen at a high yield. The hydrogen generating apparatus 1 generates hydrogen gas from a source gas by decomposing the source gas through catalysis and transforming it into plasma through electric discharge. The hydrogen generating apparatus 1 includes a dielectric body 2 defining a source gas flow channel 13, a catalyst 10 that decomposes at least part of the source gas in the source gas flow channel 13 to generate hydrogen gas, an electrode 3 contacting the dielectric body 2, a hydrogen separation membrane 5 facing the electrode 3 across the dielectric body 2, a hydrogen flow channel 18 guiding hydrogen separated by the hydrogen separation membrane 5, and a high-voltage power supply 6 supplying power to cause electric discharge between the hydrogen separation membrane 5 and the electrode 3.

Abstract: A fuel battery system is provided which can start up without receiving an energy supply from the outside. This fuel battery system 1 is provided with an input unit 11 which is connected to a hydrogen source 41, a reformer 12 which produces a hydrogen-containing gas, a hydrogen storage container 13, a fuel battery 15 which generates power using the hydrogen-containing gas, and a control unit 18. The control unit 18 stores a threshold value of the hydrogen-containing gas necessary for start-up of the fuel battery 15, and controls the amount stored in the hydrogen storage container 13 to be greater than or equal to the amount necessary for start-up of the fuel battery 15. Further, when starting up, the fuel battery 15 generates power by receiving a supply of the hydrogen-containing gas stored in the hydrogen storage container 13 and supplies power to the reformer 12 from a first power supply path 16. The reformer 12 starts up and the necessary hydrogen is produced.

Abstract: A hydrogen-producing device is provided which can start up without receiving an energy supply from the outside. This hydrogen-producing device 1 is provided with an input unit 11 which is connected to a hydrogen source 41, a reformer 12 which produces a hydrogen-containing gas, a hydrogen storage container 13, a fuel battery 15 which generates power using the hydrogen-containing gas, and a control unit 18. The hydrogen storage container 13 is connected to a fuel hydrogen supply path 16 for supplying hydrogen to the fuel battery 15, and to an external supply path 17 which supplies hydrogen to an external load 42. The control unit 18 stores a threshold value of the hydrogen-containing gas necessary for start-up of the fuel battery 15, and controls the amount stored in the hydrogen storage container 13 to be greater than or equal to the amount necessary for start-up of the fuel battery 15.

Abstract: An energy carrier system is provided that produces ammonia with high efficiency and that further produces hydrogen as final product and uses the hydrogen as energy. An energy storage transportation method is further provided that is carried out by using energy carrier system. The energy carrier system includes nitric acid production device, an ammonia production device, and hydrogen production device. The nitric acid production device includes a photo-reactor, a gas supply unit that supplies photo-reactor with gas to be treated containing a nitrogen oxide, water, and oxygen, and light source disposed in the photo-reactor. The light source radiates light including ultraviolet of a wavelength shorter than 175 nm. The energy storage transportation method includes nitric acid production step of producing nitric acid from a nitrogen oxide, ammonia production step of producing ammonia through reduction of nitric acid, and hydrogen production step of producing hydrogen through decomposition of the ammonia.