Abstract: A quartz jig of this invention is such as being provided inside a semiconductor manufacturing apparatus allowing therein growth of an epitaxial layer on a main surface of a semiconductor wafer, capable of supporting a soaking jig which keeps, during epitaxial growth, uniform temperature of a susceptor allowing thereon placement of the semiconductor wafer, and has the top surface thereof aligned almost at the same level of height with the top surface of the susceptor, and is characterized as being composed of transparent quartz at least in a portion thereof brought into contact with the soaking jig. This configuration successfully provides a quartz jig supporting the soaking jig in the semiconductor manufacturing apparatus while suppressing generation of particles, and a semiconductor manufacturing apparatus provided with this sort of quartz jig.

Abstract: The paper object processing device comprises a take-out roller which feeds tickets where one surface side is a heat-sensitive surface and the other surface side is a non heat-sensitive surface, a conveying path which conveys the fed ticket, a bar-code reader which reads the bar-code recorded on the heat-sensitive surface of the ticket conveyed, stacking sections which stack the tickets whose bar-codes have been read, a sealing device which seals a band on the stacked tickets which have been stacked, and a thermal head which heat-prints control information on the heat-sensitive surface of the stacked tickets which have been sealed.

Abstract: A paper sheet positioning apparatus includes a pair of conveying belts which convey banknotes along a conveyance path, an optical sensor array which measures a shift amount of the banknotes conveyed by the pair of conveying belts on the conveyance path, and two units of shift correction devices which correct the shift amount measured by the optical sensor array.

Abstract: A controller displays a setting screen of printing contents for a paper band used for sealing the preset number of banknotes on a display unit. Various information items to be printed on the paper band are displayed in different colors or information items indicating edge positions when the paper band is wrapped around a preset number of banknotes are displayed in different colors for respective types of banknotes as the layout of information items to be printed on the paper band on the setting screen. Thus, the controller sets the contents to be printed on the paper band in the above display state.

Abstract: In a vapor phase growth apparatus for performing a vapor phase growth of a silicon epitaxial layer on a main surface of a silicon single crystal substrate while heating the silicon single crystal substrate placed on a pocket formed on a susceptor, from both sides, the pocket has an outer peripheral side part which supports a rear surface of the silicon single crystal substrate and an inner peripheral side part which is kept in a state of being more recessed than the outer peripheral side part in the inside of the outer peripheral side part, and the susceptor has a warped inverted U-shaped longitudinal sectional shape.

Abstract: A susceptor (2) in which a semiconductor substrate (W) is supported approximately horizontally in a pocket (2c) when performing a vapor phase growth of a single crystal thin film on a front surface of the semiconductor substrate (W), and in which the pocket (2c) comprises an outer peripheral pocket portion (20) to support the semiconductor substrate (W) and a central side pocket portion (21) which is formed inside the outer peripheral side pocket portion (20) to be concave from the outer peripheral side pocket portion (20), wherein the outer peripheral side pocket portion (20) comprises a substrate supporting surface (20a) which is inclined with respect to a horizontal surface to be lowered toward a central side from an outer peripheral side of the pocket (2c), and a region of the substrate supporting surface (20a) excluding at least an inner peripheral edge supports a portion of a rear surface of the semiconductor substrate (W) which is inside an outer peripheral edge of the semiconductor substrate (W).

Abstract: In a sheet processing apparatus which checks sheets and sorts the sheets for a plurality of cassettes on the basis of the check result and conditions for the sheets which are assigned to the respective cassettes, conditions for sheets such as bill types and bill states which are assigned to the respective cassettes are displayed on a display unit. When an instruction to save these setting contents is issued while a cassette and conditions for sheets which are displayed on the display unit are selected, the selected conditions for sheets are assigned to the selected cassette.

Abstract: A sheet processing apparatus including a table to be loaded a first and a second banknote group partitioned by a header card recording the bar code number in the piling direction of the banknotes, a take-in portion to take in the banknotes of the first and second banknote groups loaded on the table and the header card, a discrimination portion to count the banknotes taken in by the take-in portion and discriminate the kind thereof, a plurality of stackers to sort and stack the banknotes discriminated by the discrimination portion on the basis of the kink thereof, and a sensor to detect the header card taken in by the take-in portion. The sheet processing apparatus additionally includes a controller to control so as to stop the taking-in of the second banknote group on the basis of detection of the header card by the sensor and after a lapse of a predetermined time, to start the taking-in of the second banknote group.

Abstract: A sheet processing apparatus comprises an upper unit, a lower unit and a banding unit. When sheets being conveyed are jammed in the upper unit, the upper unit is stopped and the processes of the lower unit and the banding unit are continuously executed. After the upper unit is stopped, sheets that may possibly be conveyed into the lower unit by inertia are rejected in a safety pocket.

Abstract: A sheet processing apparatus comprises an upper unit, a lower unit and a banding unit. When sheets being conveyed are jammed in the upper unit, the upper unit is stopped and the processes of the lower unit and the banding unit are continuously executed. After the upper unit is stopped, sheets that may possibly be conveyed into the lower unit by inertia are rejected in a safety pocket.

Abstract: The paper object processing device comprises a take-out roller which feeds tickets where one surface side is a heat-sensitive surface and the other surface side is a non heat-sensitive surface, a conveying path which conveys the fed ticket, a bar-code reader which reads the bar-code recorded on the heat-sensitive surface of the ticket conveyed, stacking sections which stack the tickets whose bar-codes have been read, a sealing device which seals a band on the stacked tickets which have been stacked, and a thermal head which heat-prints control information on the heat-sensitive surface of the stacked tickets which have been sealed.

Abstract: A silicon epitaxial wafer manufacturing method, in which a vapor phase growth of a silicon epitaxial layer is performed on a front surface of a silicon single crystal substrate (W) arranged in the reaction chamber (12). A silicon deposit deposited in the reaction chamber (12) is removed by etching an inside of the reaction chamber (12) with a hydrogen chloride gas in a state that a silicon crystal substrate (W) is not introduced, and thereafter, a primary cooling is performed in the reaction chamber (12). Subsequently, a secondary cooling is performed after heating an inside of the reaction chamber (12), and thereafter, the vapor phase growth is performed to manufacture a silicon epitaxial wafer.

Abstract: There is disclosed a processing apparatus of sheets using an accumulation device of a vaned wheel system including a vaned wheel having a plurality of blades arranged at a predetermined interval in a rotation direction, and rotating, thereby allowing continuously feed sheets to enter between the blades, and guiding the sheets in a predetermined direction, so that the sheets guided by the vaned wheel are laminated/accumulated in an accumulation section, and synchronization is established between a supply timing of paper money by a paper money supply section and a rotation phase of the vaned wheel.

Abstract: A sheet processing apparatus comprises an upper unit, a lower unit and a banding unit. When sheets being conveyed are jammed in the upper unit, the upper unit is stopped and the processes of the lower unit and the banding unit are continuously executed. After the upper unit is stopped, sheets that may possibly be conveyed into the lower unit by inertia are rejected in a safety pocket.

Abstract: A banknote receiving machine conveys inserted banknotes on a conveying path and corrects their conveying posture by a posture correction device. Downstream of the posture correction device, sensors detect features of banknotes from feature portions thereof. Kinds and directions of the front/back and the top/bottom of banknotes are detected by posture detecting sensors that are provided in front of the posture correction device. Position correction amounts are acquired corresponding to the kinds and the directions of the banknotes from a memory. Conveying postures are corrected based on position correction amounts and the feature portions of the banknotes in alignment with the conveying posture correcting sensors.

Abstract: A bank note processing apparatus comprises an insert port into which plural sheets of rectangular shaped bank notes having front/back and top/bottom extending in a longitudinal direction, a take-out portion for taking out the bank notes from the insert port with the top or bottom laid ahead one by one, a conveying path which then conveys the bank notes, a detector which detects information relative to the front/back and top/bottom of the bank notes being conveyed, a front/back reversing portion which selectively reverses the front/back of the bank notes based on the result of detection, first and second stackers which stack the selectively reversed bank notes, a sorter which sorts the bank notes being conveyed to the first or second stacker, and first and second banding portions which band the stacked bank notes for every prescribed number of sheets at the same position of one side of the longitudinal direction of the notes.

Abstract: The paper-like material processing apparatus having backups for loading stacked paper-like materials respectively in the two stackers that the stacked paper-like materials on the backups are transferred to one carrier and conveyed to a single banding mechanism, wherein the apparatus has a temporarily holding mechanism for receiving and holding the stacked paper-like materials from the backups when the carrier is in use and a delivery mechanism for transferring the stacked paper-like materials of the temporarily holding mechanism to the carrier and transfers the stacked paper-like materials to the carrier when the carrier becomes usable.

Abstract: The present invention relates to a monitor device for a control system having a serial-parallel converter for receiving inputs of serial signals transmitted from a unit control section via serial lines and converting them into parallel signals, a synchronization signal-receiving section for receiving inputs of predetermined signals transmitted from the unit control section via the serial lines and specifying addresses at which the parallel signals are stored, based on states of the predetermined signals, a data buffer for storing at least the parallel signals at the addresses specified by the synchronization signal-receiving section, and a CPU for providing control such that predetermined displays are provided on a CRT based on the stored signals.

Abstract: The paper-like material processing apparatus having backups for loading stacked paper-like materials respectively in the two stackers that the stacked paper-like materials on the backups are transferred to one carrier and conveyed to a single banding mechanism, wherein the apparatus has a temporarily holding mechanism for receiving and holding the stacked paper-like materials from the backups when the carrier is in use and a delivery mechanism for transferring the stacked paper-like materials of the temporarily holding mechanism to the carrier and transfers the stacked paper-like materials to the carrier when the carrier becomes usable.

Abstract: A banknote receiving machine conveys inserted banknotes on a conveying path and corrects their conveying posture by a posture correction device. At the downstream side of the posture correction device, there are sensors provided for detecting features of banknotes from the feature portions of the banknotes. Kinds and directions of the front/back and the top/bottom of banknotes are detected by posture detecting sensors that are provided in front of the posture correction device, acquires correction amounts corresponding to the kinds and the directions of the banknotes from a memory, corrects conveying postures of the banknotes based on correction amounts and brings the feature portions of the banknotes to oppose to the conveying posture correcting sensors.