Abstract: To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter. The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

Abstract: In an inert-gas circulating type EFEM, generation of any constraints on installation of incidental equipment, a maintenance door, or the like is inhibited, and the need for changing the placement position, etc. of a feedback path according to the specifications, etc. of a substrate processing device connected thereto is eliminated. An EFEM 1 is provided with: a transfer chamber 41 in which a wafer W is conveyed; a unit installation chamber 42 in which a FFU 44 for feeding nitrogen to the transfer chamber 41 is installed; and a return path 43 for feeding the nitrogen having flown through the transfer chamber 41, back to the unit installation chamber 42. A substrate processing apparatus 6 is connected to the rear-side end of the transfer chamber 41. The return path 43 is disposed at the front-side end of the transfer chamber 41.

Abstract: A wafer stocker capable of further improving an environment around wafers is provided. The wafer stocker includes a housing, a loading device provided on a front surface of the housing, a wafer cassette shelf arranged in the housing, a wafer transfer robot configured to move the wafers from a transfer container mounted on the loading device to a wafer cassette in the wafer cassette shelf, a wafer cassette delivery device configured to move the wafer cassette in the wafer cassette shelf to a stage having a different height, and a fan filter unit configured to generate a laminar flow in a wafer transfer space and in a wafer cassette transfer space.

Abstract: A vehicle control apparatus mounted on a vehicle including a DC-DC converter that supplies electric power from a first battery to a second battery and an auxiliary load includes an electronic control unit configured to control an operation of the converter, determine a state of a starter switch of the vehicle, detect a user operation to the vehicle, and acquire charging status information of the second battery. The electronic control unit is configured to, when the electronic control unit detects a first operation by the user and determines that the starter switch is off, drive the converter such that the converter charges the second battery, and, when an electric power amount charged in the second battery reaches a target amount of charge set based on an amount of electric power to be consumed by the auxiliary load while the starter switch is off, stop the converter.

Abstract: A vehicle control device for a vehicle includes a processor. The vehicle includes a first battery, a second battery, an auxiliary load powered by the second battery, and a DC-to-DC converter configured to supply electric power from the first battery to either the second battery or the auxiliary load, or to both of the second battery or the auxiliary load. The processor is configured to: determine the state of a start switch and the boarding state of the vehicle; acquire the voltage of the second battery; and when the processor determines that the vehicle is in a non-started on-board state, determine based on the voltage of the second battery an order in which the DC-to-DC converter and the auxiliary load are driven. The non-started on-board state is a state in which the start switch is off and a user is presumed to be in the vehicle.

Abstract: A vehicle control device mounted on a vehicle includes: an operation detection unit that detects an operation performed on the vehicle by a user; a power supply control unit that controls execution of power supply from a first battery involved in vehicle traveling to an auxiliary load powered by a second battery that is different from the first battery, with a start switch of the vehicle being off; and a prohibition control unit that prohibits the power supply to the auxiliary load by the power supply control unit, in response to the operation of the user detected by the operation detection unit.

Abstract: A battery cell short circuit detection device includes: a control unit that controls operation of a direct current-direct current converter; a first acquisition unit that acquires a storage rate of the battery; a second acquisition unit that acquires a current flowing into the battery and a current flowing out of the battery when the direct current-direct current converter is operating; a third acquisition unit that acquires a terminal voltage value that is a voltage that appears at a terminal of the battery when the direct current-direct current converter is not operating; and a determination unit that determines presence or absence of the short circuit between the battery cells based on an average storage rate indicating an average value of the storage rate of the battery, an average inflow current value indicating an average value of the current flowing into the battery, and the terminal voltage value.

Abstract: A battery state determination device that determines a state of a connection terminal of a battery includes: a current detection unit configured to detect a value of current flowing into or a value of current flowing out of the battery, and a determination unit configured to determine that the connection terminal of the battery is disconnected based on the current value detected by the current detection unit during charging of the battery without using voltage values of the battery.

Abstract: A double-row four-point contact ball bearing 100 according to the present invention includes an outer ring 102, an inner ring 104, and balls 106 and 108 that are arranged in two rows between the outer ring 102 and the inner ring 104 and each have four contact points. Inner side contact angles ? of the balls 106 and 108 arranged in the two rows are set such that lines of action L1 and L2 that extend respectively connecting center points of the balls 106 and 108 and contact points of the balls do not cross each other in the outer ring 102.

Abstract: Provided are a door opening/closing system which prevents the entry of atmospheric air into a front-opening unified pod (FOUP) and an equipment front end module (EFEM) when the FOUP and the EFEM are placed in communication with each other, and a load port equipped with the door opening/closing system.

Abstract: There is provided a gas injection device configured to prevent entry of atmospheric air when charging gas into a FOUP. In order to realize such a gas injection device, the gas injection device is structured so as to include: a gas supply port 72 through which inert gas is supplied; a nozzle main body 71 including a gas passage 77 communicating with the gas supply port 72; an opening/closing mechanism 92 configured to close the gas supply port 72; and an opener 96 configured to cause the opening/closing mechanism 92 to open the gas supply port 72 closed by the opening/closing mechanism 92.

Abstract: There is provided an EFEM, including: at least one load port; a housing closed by connecting the at least one load port to an opening provided on a side wall of the housing and configured to define, in the housing, a transfer chamber for transferring a substrate; a substrate transfer device disposed in the transfer chamber and configured to transfer the substrate; an inert gas supply unit configured to supply an inert gas to the transfer chamber; and a gas discharge unit configured to discharge a gas in the transfer chamber, wherein the at least one load port includes: an opening/closing mechanism capable of opening and closing a lid of a mounted FOUP; and an accommodation chamber kept in communication with the transfer chamber and configured to accommodate a part of the opening/closing mechanism.

Abstract: In the present disclosure, when a supply flow rate of an inert gas is changed, a pressure fluctuation in a circulation path is suppressed. An EFEM includes a supply valve configured to be capable of changing a supply flow rate of the inert gas supplied to the circulation path, a discharge valve configured to be capable of changing a discharge flow rate of a gas discharged from the circulation path, a concentration detection part configured to detect a change in an atmosphere inside the circulation path, a pressure detection part configured to detect a pressure in the circulation path, and a control part configured to control the supply valve and the discharge valve. The control part is configured to determine an opening degree of the discharge valve to a predetermined value based on a detection result obtained by the concentration detection part.

Abstract: In an inert-gas circulating type EFEM, generation of any constraints on installation of incidental equipment, a maintenance door, or the like is inhibited, and the need for changing the placement position, etc. of a feedback path according to the specifications, etc. of a substrate processing device connected thereto is eliminated. An EFEM 1 is provided with: a transfer chamber 41 in which a wafer W is conveyed; a unit installation chamber 42 in which a FFU 44 for feeding nitrogen to the transfer chamber 41 is installed; and a return path 43 for feeding the nitrogen having flown through the transfer chamber 41, back to the unit installation chamber 42. A substrate processing apparatus 6 is connected to the rear-side end of the transfer chamber 41. The return path 43 is disposed at the front-side end of the transfer chamber 41.

Abstract: A housing is made sealable even when the rigidity of a frame member and a cover member is not high. In an EFEM, a pressure difference having a predetermined value or less exists between an internal space of a housing and an external space of the housing. The housing includes a frame member assembled so as to form an opening, a cover member attached to the frame member so as to cover the opening, and a seal member sandwiched between the frame member and the cover member and configured to extend so as to surround the opening. The frame member and the cover member are formed of a sheet metal. The seal member is an elastic member having a hollow cross section orthogonal to an extension direction of the seal member.

Abstract: To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter. The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

Abstract: Provided is a double-row four-point contact ball bearing in which deformation of an outer ring can be suppressed while suppressing an increase in dimensions. A double-row four-point contact ball bearing 100 according to the present invention includes an outer ring 102, an inner ring 104, and balls 106 and 108 that are arranged in two rows between the outer ring 102 and the inner ring 104 and each have four contact points. Inner side contact angles ? of the balls 106 and 108 arranged in the two rows are set such that lines of action L1 and L2 that extend respectively connecting center points of the balls 106 and 108 and contact points of the balls do not cross each other in the outer ring 102.

Abstract: To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter. The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

Abstract: Provided are a door opening/closing system which prevents the entry of atmospheric air into a front-opening unified pod (FOUP) and an equipment front end module (EFEM) when the FOUP and the EFEM are placed in communication with each other, and a load port equipped with the door opening/closing system.

Abstract: It is an object of the present invention to provide an automotive differential gear and an automotive transmission in which torque is suppressed while maintaining rigidity and a lifespan derived from a bearing. A typical configuration of an automotive differential gear 100 according to the present invention is characterized in that a double-row angular ball bearing (a bearing 130) having a plurality of rows of balls having the same ball diameter and the same pitch circle diameter is disposed at least on a ring gear 106 side of a final shaft 120 extending from the ring gear 106 side to a driving wheel side.