Abstract: A substrate processing method of the present invention includes the steps of placing a substrate inside a vacuum container containing particles and processing the substrate inside the container while moving the substrate at a predetermined relative velocity of the substrate to the container. In this case, an allowable upper limit of the number or density of defects produced at the substrate due to the particles in the process for the substrate is determined, and the predetermined relative velocity is set at a value equal to or smaller than the relative velocity obtained when the number or density of defects reaches the upper limit.

Abstract: A process for preparing 3,6-dichloropyridazine-1-oxide which comprises reacting 3,6-dichloropyridazine with an acid anhydride and hydrogen peroxide of a concentration of 60% or less or a urea hydrogen peroxide addition compound.

Abstract: A substrate processing method of the present invention includes the steps of placing a substrate inside a vacuum container containing particles and processing the substrate inside the container while moving the substrate at a predetermined relative velocity of the substrate to the container. In this case, an allowable upper limit of the number or density of defects produced at the substrate due to the particles in the process for the substrate is determined, and the predetermined relative velocity is set at a value equal to or smaller than the relative velocity obtained when the number or density of defects reaches the upper limit.

Abstract: A thermally recording sheet which has high sensitivity in color development, satisfactory background heat resistance, and a satisfactory background color. The sheet contains a dihydroxydiphenylsulfone compound represented by general formula (1) as a color developer and a sulfonamide represented by general formula (2). In the formula, R1 and R2 each represents C1-8 alkyl, alkenyl, or halogeno; and a and b each is an integer of 0 to 3. In the formula, R3 represents C1-66 alkyl or electron-attracting group; and n is an integer of 0 to 2.

Abstract: A method for transferring water upwardly and distilling it and/or of generating electricity by harnessing the heat of sunrays. The method includes placing a panel or a sheet which permits sunrays to pass therethrough near a water surface, evaporating the sea or lake water by heating it with sunrays passing through the panel or sheet, then, letting the steam thus produced rise up to a higher level due to its pressure. The steam is then cooled down to produce distilled water and/or, it is used to generate electricity.

Abstract: A thermal recording sheet provided with a thermal color developing layer containing colorless or pale colored basic chromogenic dye, a color developer of Formula (I) and at least one of o-xylylene-bis-(phenylether) and 4-(m-methylphenoxymethyl) bisphenyl as a sensitizer. ##STR1## (wherein R is propyl, isopropyl, or butyl.

Abstract: A thermal recording sheet having a thermal color developing layer containing a color developer and a colorless or pale colored basic chromogenic dye, which further contains a stabilizer of Formula (I) and a sensitizer of Formula (II) or Formula (III), thereby obtaining a high sensitivity and improved image stability: ##STR1## wherein A indicates ##STR2## R.sup.1 and R.sup.2 individually indicate hydrogen or methyl; .alpha. is 0 or an integer from 1 to 5; .beta. and .gamma.

Abstract: This invention relates to an apparatus for analyzing cells in a biological liquid sample, such as blood, in which apparatus a flow passage in a sample pretreatment system can be shortened with a simple construction. A sample metering chamber, a mixing chamber and a measurement liquid extracting chamber are formed in a rotary sliding member of a pretreatment portion. The rotary sliding member is intermittently rotated so as to shift a sample from one chamber to another to perform a necessary treatment. Fluorescence or scattering light with respect to the sample, mixed with a reagent in the pretreatment portion, is detected by a flow cell.

Abstract: A lithographic method and a lithographic apparatus ar disclosed in which the height of a silicon wafer making up an object of lithography is accurately measured. A lithographic apparatus such as an electron beam apparatus having a height-measuring instrument built therein is effectively used for forming a pattern on the order of submicrons.

Abstract: A heat-sensitive recording sheet of this invention comprises in a heat-sensitive color-developing layer both bis(4-hydroxyphenyl)butylacetate as an organic color-developing agent and a particular fluorane-leuco dye. This sheet provides an intense clear image less discoloration and superior heat-resistant preservability.

Abstract: A pipetter capable of mixing liquids and dispensing the mixed liquid has a pipetting tube, an actuating device connected to the tube for sucking liquid into and discharging liquid from the tube, and a flow disturbance device in the tube spaced from the discharge and suction end thereof and adapted to cause longitudinal mixing of liquid in the tube when liquid is moved along the tube in at least one direction. Mixing is effected in the tube by causing a liquid body to move repeatedly to and fro along the tube so that during each such movement at least a portion of the liquid body passes the flow disturbance device and the liquid body is not discharged from the first end of the tube. The pipetter is useful for example in mixing a suspension of blood cells with a reagent prior to analysis.

Abstract: According to the present invention, the accuracy of particle size histograms produced from data relating to an impedance variation (Coutler Counter Method) caused by particles passing between electrodes disposed on either side of an orifice through which the particles pass is improved by excluding false data from the data used in producing the histograms, the false data resulting from more than one particle being resident in the orifice at a given data collection time. The preferred embodiment employs a light detecting method and apparatus to detect false readings and to provide correction information used to correct data obtained by the Coulter Counter Method and apparatus.

Abstract: An apparatus for counting and analyzing sample particles such as cells suspended in a fluid by applying an irradiation beam such as a laser beam to the sample particles in a flow cell. The apparatus includes a device for supplying a flow cell with suspension of sample particles, an optical system for applying a laser beam to the sample particles in the above-mentioned suspension, a light gathering device for forming image of the above-mentioned sample particles, a light sensing device for sensing light from the above-mentioned formed image of the sample particles, and an analysis for analyzing the above-metnioned sample particles on the basis of the above-mentioned sensed light. The optical system may include a polarizing beam splitter and such convergent lenses having mutually different magnifications relative to two directions perpendicular to the optical axis of the laser beam.

Abstract: An optical device for illuminating an object with a rectangular pattern having a uniform light intensity distribution includes n (n.gtoreq.1) polarization separating elements which a laser beam emitted from a laser source enters and each of which separates the laser beam into two beams in two directions. The angle of separation by the polarization separating element is set to be 2.sup.(n-1) times of the smallest one of the separation angles of the polarization separating elements used. At least one quarter-wave or half-wave plate is combined with the polarization separating elements. An imaging lens is provided for forming 2.sup.n beam spots on the object such as an optical laser disk plate.

Abstract: A heat-sensitive recording material has a support and a color-developing layer which comprises as an organic color-developing agent 4-hydroxy-4'-n-propoxydiphenylsulfone and as a stabilizer a particular stabilizer.This heat-sensitive recording material is suitable for a high density-and speed-recording and is superior in the thermal preservability.

Abstract: A heat-sensitive recording sheet has on a support a color-developing layer which comprises a colorless or pale colored basic chromogenic dye and an organic color-developing agent, wherein the organic color-developing agent comprises both 4-hydroxy-4'-n-propoxydiphenylsulfone and a particular phenolic substance. The sheet of this invention provides excellent writing quality and superior thermal responsibility.

Abstract: A thermosensitive recording sheet comprising a support and a thermosensitive color developer layer thereon containing a basic leuco dye and an organic color developer, said layer containing a bis-phenyl sulfone compound selected from bis-(3-phenyl-4-hydroxyphenyl)sulfone and bis-(2-methyl-4-hydroxy-5-cyclohexylphenyl)sulfone as the organic color developer.

Abstract: Particles contained in a liquid sample are analyzed by moving the particles along a detection passage past a detector using a liquid flow in the detection passage. To reduce the time required for analysis of each sample, the sample is delivered at an input location at the upstream end of the detection passage by movement of a movable container carrying the sample to the input location. Immediately after the commencement of the delivery of the liquid sample, liquid flow is caused to occur in the detection passage. Washing liquid is supplied to the input location by a liquid supplier different from the movable container which carries the sample.

Abstract: A heat-sensitive recording sheet of this invention comprises in a heat-sensitive color-developing layer both 4-hydroxy-4'-n-propoxydiphenylsulfone as an organic color-developing agent and a particular fluorane-leuco dye. This sheet provides an intense, clear image, less discoloration, and stable brightness.

Abstract: A filter and filtering apparatus for measuring the deformability of a blood cell passing through a flow passage formed as a space between a surface of a groove formed in a first substrate and a surface of a second substrate with which the groove is sealed. The filtering apparatus includes electrodes mounted at the inlets and outlets of the flow passages, or optical elements to enable cell deformity measurements.