Abstract: This invention relates, particularly, to a plating method and apparatus for a substrate for uses, such as the filling of a metal, e.g., copper (Cu), into a fine interconnection pattern (recesses) formed in a semiconductor substrate.

Abstract: This invention relates to a semiconductor substrate processing apparatus and method for forming interconnects by filling a circuit pattern groove and/or a hole formed in a semiconductor substrate with a plated metal film, and removing the plated metal film while leaving the metal film at the filled portion. The apparatus comprises a carry-in and carry-out section for carrying in and carrying out a semiconductor substrate, which has a circuit formed on a surface thereof, in a dry state; a plated metal film forming unit for forming a plated metal film on the semiconductor substrate which has been carried in; a bevel etching unit for etching a peripheral edge portion of the semiconductor substrate; a polishing unit for polishing at least part of the plated metal film on the semiconductor substrate; and a transport mechanism for transporting the semiconductor substrate between the above units.

Abstract: A liquid crystal display apparatus, in which a backlight unit is mounted on one surface side thereof, and in which a liquid crystal is sealed between a pair of transparent substrates, includes a conductive film made of a high-resistance conductive agent and formed on an outer surface of a polarizing plate adhered to an outer surface of one of the pair of transparent substrates which is mounted on the side of the backlight unit so as to secure a surface resistance of from 1×109 ohm to 1×1012 ohm for the polarizing plate.

Abstract: A switching type FM-CW radar, the type of FM-CW radar improved to reduce FM-AM conversion noise, is further improved to reduce interference by radar waves from other vehicles and echo waves returned from them. A switching circuit is provided at the transmitter side, and its switching frequency is set at a different value for each individual vehicle. Furthermore, the switching frequency of an interfering wave is measured, in accordance with which the switching frequency of the switching circuit is changed.