Patents by Inventor Tsutomu Shinohara
Tsutomu Shinohara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20120234406Abstract: A pressure type flow rate control reference allows the performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy. The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume.Type: ApplicationFiled: May 30, 2012Publication date: September 20, 2012Applicants: TOKYO ELECTRON LIMITED, FUJIKIN INCORPORATEDInventors: Shuji Moriya, Wataru Okase, Tsutomu Shinohara, Nobukazu Ikeda, Michio Yamaji, Yasutaka Hayashi, Toshihide Yoshida, Yasuyuki Omata
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Publication number: 20120230757Abstract: A bolt-locking apparatus includes a plurality of fitting members 2 and 3 which are relatively non-rotatably fitted to heads of a plurality of bolts 5, and an engaging member 4 fitted to the plurality of fitting members 2 and 3 such that the engaging member 4 straddles the fitting members 2 and 3. Outer peripheral surfaces 2b and 3b of the fitting members 2 and 3 are non-circular in shape. The engaging member 4 includes a plurality of engaging holes (non-circular engaging portions) 8a and 8b which correspond to the non-circular outer peripheral surfaces 2b and 3b of the plurality of fitting members 2 and 3.Type: ApplicationFiled: March 7, 2012Publication date: September 13, 2012Applicants: FUJIKIN INCORPORATED, TOKYO ELECTRON LIMITEDInventors: Norihiko Amikura, Satoshi Kagatsume, Masahiko Satoh, Yukio Naito, Satoshi Muto, Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
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Patent number: 8256115Abstract: Each of ridges 7 on respective opposite side surfaces of a gasket 4 has a trapezoidal cross sectional shape defined by an outer tapered face 7a providing an outer peripheral surface, an inner tapered face 7b providing an inner peripheral surface and a flat face 7c providing a top end surface. The hardness of the gasket 4, the angle between the tapered faces 7a, 7b of the ridge 7, the height of the ridge 7 and the area of the flat top end face 7c of the ridge are so determined that the value of thrust for tightening up the coupling is between a predetermined minimum value and a predetermined maximum value.Type: GrantFiled: June 26, 2008Date of Patent: September 4, 2012Assignee: Fujikin IncorporatedInventors: Shigeru Itoi, Michio Yamaji, Tsutomu Shinohara, Kenji Tsubota, Tadanobu Yoshida, Susumu Ozawa
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Patent number: 8246087Abstract: Coupling members each have a fluid channel having an opening passageway orthogonal to an abutting end face of the coupling member, and a slanting main passageway communicating with the opening passageway. The opening passageway has diameter equal to the inside diameter of a gasket holding annular ridge of the coupling member. A gasket has an inside diameter smaller than the diameter of the opening passageway.Type: GrantFiled: November 9, 1999Date of Patent: August 21, 2012Assignee: Fujikin IncorporatedInventors: Michio Yamaji, Tsutomu Shinohara, Nobukazu Ikeda
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Patent number: 8220495Abstract: There is provided a fluid control apparatus which can improve assembling operation efficiency. A screw insertion hole 29 extending in a front and rear direction have a stepped portion 29a which receives a head portion 18a of a male screw member 18, and the stepped portion 29a is positioned at a position closer to an inserted tip end side of a male screw member 28 in the front and rear direction than a position, in the front and rear direction, of male screw members 34 from above. By fastening the male screw member 18 in the front and rear direction at first and then fastening the male screw member 34 from above, it is possible to prevent the male screw member 18 in the front and rear direction and the male screw member 34 from above from interfering with each other.Type: GrantFiled: May 26, 2008Date of Patent: July 17, 2012Assignee: Fujikin IncorporatedInventors: Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
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Patent number: 8210022Abstract: A pressure type flow rate control reference allows the performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy. The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume.Type: GrantFiled: December 11, 2008Date of Patent: July 3, 2012Assignees: Fujikin Incorporated, Tokyo Electron LimitedInventors: Shuji Moriya, Wataru Okase, Tsutomu Shinohara, Nobukazu Ikeda, Michio Yamaji, Yasutaka Hayashi, Toshihide Yoshida, Yasuyuki Omata
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Publication number: 20110315905Abstract: A gasket type orifice includes a first orifice base having a through-type passage in a central area thereof, a second orifice base having in a central area thereof a through-type passage communicating with the passage of the first orifice base, and an orifice plate having an orifice hole formed in a central area thereof, wherein the orifice plate is mounted by insertion in an airtight manner between both orifice bases, and the gasket type orifice is installed in a fluid passage, in which the outer end faces of both orifice bases respectively serve as sealing faces, and an outer diameter of the second orifice base, located on the downstream side, is larger than an outer diameter of the first orifice base located on the upstream side, and an outer peripheral edge portion of an inner end face of the second orifice base serves as another sealing face.Type: ApplicationFiled: June 27, 2011Publication date: December 29, 2011Applicant: FUJIKIN INCORPORATEDInventors: Takashi HIROSE, Tsutomu SHINOHARA, Toshihide YOSHIDA, Kohei SHIGYOU, Michio YAMAJI
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Patent number: 8083267Abstract: Each of ridges 7 on respective opposite side surfaces of a gasket 4 has a trapezoidal cross sectional shape defined by an outer tapered face 7a providing an outer peripheral surface, an inner tapered face 7b providing an inner peripheral surface and a flat face 7c providing a top end surface. The hardness of the gasket 4, the angle between the tapered faces 7a, 7b of the ridge 7, the height of the ridge 7 and the area of the flat top end face 7c of the ridge are so determined that the value of thrust for tightening up the coupling is between a predetermined minimum value and a predetermined maximum value.Type: GrantFiled: October 31, 2003Date of Patent: December 27, 2011Assignee: Fujikin IncorporatedInventors: Shigeru Itoi, Michio Yamaji, Tsutomu Shinohara, Kenji Tsubota, Tadanobu Yoshida, Susumu Ozawa
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Patent number: 8042573Abstract: A fluid control device that can be miniaturized without reducing a bolt diameter and a path diameter is provided. A fluid controller 31 having an inlet port 31a and an outlet port 31b aligned in a line direction and a line-to-line connection port 31c positioned in the middle of the above ports in the line direction is supported by a pair of joint members 7, a stepped part 7a is formed at each upper surface of opposed parts of the joint members 7, and line-to-line connection path forming members 9 and 10 having line-to-line paths 13 and 18 each communicating with the line-to-line connection port 31c of the fluid controller 31, respectively and constituting line-to-line connecting means 8 are supported by the stepped parts 7a of the joint members 7.Type: GrantFiled: July 21, 2006Date of Patent: October 25, 2011Assignee: Fujikin IncorporatedInventors: Ichiro Tokuda, Michio Yamaji, Tsutomu Shinohara, Kenji Tsubota
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Publication number: 20110120566Abstract: A fluid flow rate control method is provided that uses a flow rate range variable type pressure type flow rate control device provided with at least two or more parallel fluid passages disposed between the downstream side of a control valve of the control device and a fluid supply pipe passage, and orifices having different fluid flow rate characteristics are respectively interposed in parallel fluid passages to pass fluid in a first flow rate region through one orifice for flow rate control, and to pass fluid in a second flow rate region through at least another orifice for flow rate control. Flow rate characteristics of the respective orifices are selected so that a maximum controllable flow rate of fluid in the first flow rate region at low flow rate is smaller than 10% of a maximum controllable flow rate in the second flow rate region at high flow rate.Type: ApplicationFiled: November 19, 2010Publication date: May 26, 2011Applicants: FUJIKIN INCORPORATED, NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY, TOKYO ELECTRON LIMITEDInventors: Tadahiro OHMI, Kouji NISHINO, Ryousuke DOHI, Masaaki NAGASE, Katsuyuki SUGITA, Kaoru HIRATA, Takashi HIROSE, Tsutomu SHINOHARA, Nobukazu IKEDA, Toshihide YOSHIDA, Hisashi TANAKA
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Patent number: 7896030Abstract: The present invention provides a joint member which suppresses the increase of the number of members and enables the provision of a further compactified integrated fluid control apparatus. A sensor-equipped joint member 10 includes a channel block 41 including a V-shaped channel 41a formed therein for communicating adjacent fluid control devices 16 and 20 to each other at their lower-end openings, and a pressure sensor 42 provided on a side surface of the channel block 41. The channel block 41 is provided with a branched channel 41b which is branched from the V-shaped channel 41a and is communicated to the pressure sensor 42.Type: GrantFiled: August 26, 2005Date of Patent: March 1, 2011Assignee: Fujikin IncorporatedInventors: Tsutomu Shinohara, Michio Yamaji, Shigeaki Tanaka, Mutsunori Koyomogi, Ichiro Mine, Ichiro Tokuda, Kenji Tsubota
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Publication number: 20100320408Abstract: The present invention provides a fluid controller which enables fine adjustments of low flow rates and enables a user to set desired low flow rates.Type: ApplicationFiled: January 30, 2008Publication date: December 23, 2010Applicant: FUJIKIN INCORPORATEDInventors: Tomohiro Nakata, Michio Yamaji, Tsutomu Shinohara, Akihiro Harada
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Patent number: 7841628Abstract: A rectangular parallelepipedal joint for use in fluid control apparatus comprises in its entirety two divided members which are a grooved connecting member having a groove in its center and provided in portions thereof on respective opposite sides of the groove with bolt holes each having a stepped portion for receiving therein a joint attaching bolt without permitting the head thereof to project from the joint and with female screw portions for respective male screw members to be screwed in for attaching an apparatus component; and a flat rectangular parallelepipedal communication member fitting in the groove of the connecting member and provided only with a U-shaped communication channel. The connecting member is made of stainless steel, while the communication member is made of polyamide 6. A positioning protrusion is formed on a bottom face defining the groove of the connecting member and is fitted in a positioning recessed portion formed in the bottom surface of the communication member.Type: GrantFiled: December 1, 2006Date of Patent: November 30, 2010Assignee: Fujikin IncorporatedInventors: Ichiro Tokuda, Michio Yamaji, Kenji Tsubota, Tsutomu Shinohara, Nobukazu Ikeda
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Patent number: 7802771Abstract: A fluid control device 71 includes a working member 75 in automatic opening and closing, which is moved vertically by introduction or discharge of compressed fluid to or from a compressed fluid inlet chamber 90 formed in a casing 73 to move a valve element holder 5 to an opening position against bias force of a compression coil spring 77, and an working member 74 in manual opening and closing, which is moved vertically by a manual operation and directly presses the valve element holder 5 downward when it is moved downward.Type: GrantFiled: November 30, 2004Date of Patent: September 28, 2010Assignee: Fujikin IncorporatedInventors: Kenji Tsubota, Michio Yamaji, Shigeru Itoi, Tsutomu Shinohara, Ichiro Tokuda
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Publication number: 20100139775Abstract: A pressure type flow control device enabling a reduction in size and an installation cost by accurately controlling the flow of a fluid in a wide flow range. Specifically, the flow of the fluid flowing in an orifice (8) is calculated as Qc=KP1 (K is a proportionality factor) or Qc=KP2m(P1?P2)n (K is a proportionality factor and m and n are constants) by using a pressure P1 on the upstream side of the orifice and a pressure P2 on the downstream side of the orifice. A fluid passage between the downstream side of the control valve of the flow control device and a fluid feed pipe is formed of at least two or more fluid passages positioned parallel with each other. Orifices with different fluid flow characteristics are interposed in the fluid passages positioned parallel with each other. For the control of the fluid in a small flow area, the fluid in the small flow area is allowed to flow to one orifice.Type: ApplicationFiled: June 22, 2006Publication date: June 10, 2010Applicants: FUJIKIN INCORPORATED, NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY, TOKYO ELECTRON LTD.Inventors: Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura, Kouji Nishino, Masaaki Nagase, Katsuyuki Sugita, Kaoru Hirata, Ryousuke Dohi, Takashi Hirose, Tsutomu Shinohara, Nobukazu Ikeda, Tomokazu Imai, Toshihide Yoshida, Hisashi Tanaka
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Publication number: 20100132808Abstract: There is provided a fluid control apparatus which can improve assembling operation efficiency. A screw insertion hole 29 extending in a front and rear direction have a stepped portion 29a which receives a head portion 18a of a male screw member 18, and the stepped portion 29a is positioned at a position closer to an inserted tip end side of a male screw member 28 in the front and rear direction than a position, in the front and rear direction, of male screw members 34 from above. By fastening the male screw member 18 in the front and rear direction at first and then fastening the male screw member 34 from above, it is possible to prevent the male screw member 18 in the front and rear direction and the male screw member 34 from above from interfering with each other.Type: ApplicationFiled: May 26, 2008Publication date: June 3, 2010Applicant: FUJIKIN INCORPORATEDInventors: Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
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Publication number: 20100132819Abstract: There is provided a fluid control apparatus which enables reducing widths of lines for further reducing space occupied by the apparatus. Support flow-channel blocks 9 and 10 are constituted by large block portions 25 and 27 which have openings of fluid flow channels 9a and 10a abutted against openings of fluid flow channels 11c and 11d in extended flow-channel blocks 11a and 11b with seal portions 20 interposed therebetween and, also, are abutted against lower surfaces of the extended flow-channel blocks 11a and 11b, and small block portions 26 and 28 which have lower surfaces flushed with the large block portions 25 and 27 and have heights smaller than those of the large block portions. The small block portions 26 and 28 are provided with male-screw-members insertion holes 26a and 28a for mounting the support flow-channel blocks 9 and 10 to a base member 30.Type: ApplicationFiled: May 26, 2008Publication date: June 3, 2010Applicant: FUJIKIN INCORPORATEDInventors: Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
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Publication number: 20100096031Abstract: There is provided a fluid control apparatus which can reduce the number of members and can improve the assembling operation efficiency. A pressure indication device 4 to be replaced with a relatively-higher frequency is coupled to a base block 5 existing thereunder through male screw members 17 from above. An on-off valve 6 to be replaced with a relatively-lower frequency has, at its lower portion, a block-shaped main body 6a formed integrally therewith. The main body 6a of the on-off valve 6 is coupled to the base block 5 through male screw members 18 in the forward and rearward directions.Type: ApplicationFiled: May 26, 2008Publication date: April 22, 2010Applicant: TOKYO ELECTRON LIMITEDInventors: Wataru Okase, Shuji Moriya, Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji
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Patent number: 7677528Abstract: A controller comprises power transmitting means (11) for amplifying the force applied on the operating shaft (6) and transmitting to the valve rod (4); and a slow start means (12) for slowly moving the operating shaft (6) upward are arranged.Type: GrantFiled: October 29, 2004Date of Patent: March 16, 2010Assignee: Fujikin IncorporatedInventors: Tsutomu Shinohara, Michio Yamaji
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Patent number: D633181Type: GrantFiled: November 5, 2008Date of Patent: February 22, 2011Assignee: Fujikin IncorporatedInventors: Tsutomu Shinohara, Michio Yamaji, Tomokazu Imai