Flow rate controller
Latest Fujikin Incorporated Patents:
- ELECTROSTATIC CAPACITIVE PRESSURE SENSOR AND PRESSURE DETECTION METHOD USING THE CAPACITIVE PRESSURE SENSOR
- Driving device provided with piezoelectric element deterioration detection circuit and deterioration detection method
- CONTROLLER AND VAPORIZATION SUPPLY DEVICE
- Fluid control device, abnormality detection method of fluid control device, abnormality detection device, and abnormality detection system
- Abnormality detection method for flow rate control device, and flow rate monitoring method
Any indicia shown in broken lines in the drawings form no part of the design to be patented.
The present article relates to a design of a flow rate controller, which controls fluid including process gas used for fluid supply lines at semiconductor manufacturing facilities, chemical plants, nuclear power plants, petroleum refinery plants and the like.
A flow rate controller is easily connected to a cable by changing the position and direction of the connector even when it is found difficult to connect a cable to a connector because of the relative position of other devices to the controller.
Claims
The ornamental design for a flow rate controller, as shown and described.
4276904 | July 7, 1981 | Jackson |
D439312 | March 20, 2001 | Fukano |
D446738 | August 21, 2001 | Fukano |
6491659 | December 10, 2002 | Miyamoto |
6516707 | February 11, 2003 | Elberson |
6619613 | September 16, 2003 | Akamatsu et al. |
6874404 | April 5, 2005 | Elberson |
7290567 | November 6, 2007 | Hirakuni et al. |
7328721 | February 12, 2008 | Kytola |
D616965 | June 1, 2010 | Miyazoe et al. |
Type: Grant
Filed: Nov 5, 2008
Date of Patent: Feb 22, 2011
Assignee: Fujikin Incorporated (Osaka)
Inventors: Tsutomu Shinohara (Osaka), Michio Yamaji (Osaka), Tomokazu Imai (Osaka)
Primary Examiner: Cathron C. Brooks
Assistant Examiner: Maurice Stevens
Attorney: Griffin & Szipl, P.C.
Application Number: 29/327,405