Abstract: A method of forming a semiconductor structure includes providing a material layer having a recess formed therein. A first tungsten metal layer is formed at a first temperature and fills the recess. An anneal process at a second temperature is then performed, wherein the second temperature is higher than the first temperature.

Abstract: A semiconductor structure for preventing row hammering issue in DRAM cell is provided in the present invention. The structure includes a trench with a gate dielectric, an n-type work function metal layer, a TiN layer conformally formed within, and a buried word line filled in the trench.

Abstract: The present invention provides a storage node contact structure of a memory device comprising a substrate having a dielectric layer comprising a recess, a first tungsten metal layer, and an adhesive layer on the first tungsten metal layer and a second tungsten metal layer on the adhesive layer, wherein the second tungsten metal layer is formed by a physical vapor deposition (PVD).

Abstract: A semiconductor structure for preventing row hammering issue in DRAM cell is provided in the present invention. The structure includes a trench with a gate dielectric, an n-type work function metal layer, a TiN layer conformally formed within, and a buried word line filled in the trench.

Abstract: A method of forming a bit line gate structure of a dynamic random access memory (DRAM) includes the following. A hard mask layer is formed on a metal stack by a chemical vapor deposition process importing nitrogen (N2) gases and then importing amonia (NH3) gases. The present invention also provides a bit line gate structure of a dynamic random access memory (DRAM) including a metal stack and a hard mask. The metal stack includes a polysilicon layer, a titanium layer, a titanium nitride layer, a first tungsten nitride layer, a tungsten layer and a second tungsten nitride layer stacked from bottom to top. The hard mask is disposed on the metal stack.

Abstract: A method for fabricating semiconductor device includes the steps of: forming a shallow trench isolation (STI) in a substrate; removing part of the STI to form a first trench; forming a cap layer in the first trench; forming a mask layer on the cap layer and the substrate; and removing part of the mask layer, part of the cap layer, and part of the STI to form a second trench.

Abstract: A method for fabricating a semiconductor device is disclosed. A substrate having a conductive region is provided. A metal layer is deposited on the conductive region. The metal layer reacts with the conductive region to form a first metal silicide layer. A TiN layer is deposited on the metal layer. A SiN layer is deposited on the TiN layer. An annealing process is performed to convert the first metal silicide layer into a second metal silicide layer.

Abstract: A semiconductor package is provided, which includes: a first dielectric layer having opposite first and second surfaces and a cavity penetrating the first and second surfaces; a first circuit layer embedded in the first dielectric layer and exposed from the first surface of the first dielectric layer; at least an adhesive member formed in the cavity and adjacent to the first surface of the first dielectric layer; an electronic element disposed on the adhesive member; a second dielectric layer formed on the second surface of the first dielectric layer and in the cavity to encapsulate the adhesive member and the electronic element; a second circuit layer formed on the second dielectric layer; and a plurality of conductive vias formed in the second dielectric layer for electrically connecting the second circuit layer and the electronic element, thereby reducing the package size and cost and increasing the wiring space and flexibility.

Abstract: A semiconductor package is provided, which includes: a first dielectric layer having opposite first and second surfaces and a cavity penetrating the first and second surfaces; a first circuit layer embedded in the first dielectric layer and exposed from the first surface of the first dielectric layer; at least an adhesive member formed in the cavity and adjacent to the first surface of the first dielectric layer; an electronic element disposed on the adhesive member; a second dielectric layer formed on the second surface of the first dielectric layer and in the cavity to encapsulate the adhesive member and the electronic element; a second circuit layer formed on the second dielectric layer; and a plurality of conductive vias formed in the second dielectric layer for electrically connecting the second circuit layer and the electronic element, thereby reducing the package size and cost and increasing the wiring space and flexibility.