Patents by Inventor Vandana Krishnamurthy

Vandana Krishnamurthy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermosetting anti-reflective coatings at deep ultraviolet
    Patent number: 5919599
    Abstract: Anti-reflective coating compositions having improved etch rate, inter alia, are prepared from certain high molecular weight polymers and copolymers, particularly glycidyl methacrylate with grafted dyes.
    Type: Grant
    Filed: September 30, 1997
    Date of Patent: July 6, 1999
    Assignee: Brewer Science, Inc.
    Inventors: Jim Meador, Douglas J. Guerrero, Xie Shao, Vandana Krishnamurthy
  • Non-subliming mid-UV dyes and ultra-thin organic arcs having differential solubility
    Patent number: 5892096
    Abstract: Mid-UV dyes enabling ultra thin antireflection coatings for multi-layer i-line photoetching are produced from bichalcones; bis-a-cyanoacrylates/bis-cyanoacrylamides; and 1.4 divinylbenzenes. The dyes are nonsubliminal and differentially insoluble in standard photoresist solvents.
    Type: Grant
    Filed: February 8, 1996
    Date of Patent: April 6, 1999
    Assignee: Brewer Science, Inc.
    Inventors: Jim D. Meador, Xie Shao, Vandana Krishnamurthy, Earnest C. Murphy, Tony D. Flaim, Terry Lowell Brewer
  • Non-subliming Mid-UV dyes and ultra-thin organic arcs having differential solubility
    Patent number: 5688987
    Abstract: Mid-UV dyes enabling ultra thin antireflection coatings for multi-layer i-line photoetching are produced from bichalcones; bis-a-cyanoacrylates/bis-cyanoacrylamides; and 1.4 divinylbenzenes. The dyes are nonsubliminal and differentially insoluble in standard photoresist solvents.
    Type: Grant
    Filed: November 9, 1994
    Date of Patent: November 18, 1997
    Assignee: Brewer Science, Inc.
    Inventors: Jim D. Meador, Xie Shao, Vandana Krishnamurthy, Earnest C. Murphy, Tony D. Flaim, Terry Lowell Brewer