Patents by Inventor Wanbing YI

Wanbing YI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11217496
    Abstract: A device and methods for forming the device is provided. The device includes a substrate and circuit elements thereon. The device further includes a metallization layer over the substrate. The metallization layer includes interconnects interconnecting the circuit elements. A test pad is disposed over an uppermost interconnect in the metallization layer. The test pad is coupled to one or more circuit elements via the interconnects. The test pad is configured for testing the one or more circuit elements. A crack stop protection seal surrounding the test pad is provided. The crack stop protection seal confines damage caused by probing at the test pad from propagating to an area beyond the crack stop protection seal.
    Type: Grant
    Filed: May 7, 2019
    Date of Patent: January 4, 2022
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Ramasamy Chockalingam, Juan Boon Tan, Wanbing Yi
  • Publication number: 20210407906
    Abstract: A semiconductor device may be provided, including a base layer, an insulating layer arranged over the base layer, a memory structure arranged at least partially within the insulating layer, where the memory structure may include a first electrode, a second electrode, and an intermediate element between the first electrode and the second electrode, and a resistor arranged at least partially within the insulating layer, where the resistor may be arranged in substantially a same horizontal plane with one of the first electrode and the second electrode.
    Type: Application
    Filed: June 24, 2020
    Publication date: December 30, 2021
    Inventors: Kai KANG, Yi JIANG, Curtis Chun-I HSIEH, Wanbing YI, Juan Boon TAN
  • Publication number: 20210384420
    Abstract: A memory device may be provided, including a base layer; an insulating layer arranged over the base layer, where the insulating layer may include a recess having opposing side walls; a first electrode arranged along the opposing side walls of the recess; a switching element arranged along the first electrode; a second electrode arranged along the switching element; and a capping layer arranged over the recess, where the capping layer may at least partially overlap the first electrode, the switching element and the second electrode.
    Type: Application
    Filed: June 5, 2020
    Publication date: December 9, 2021
    Inventors: Curtis Chun-I HSIEH, Wei-Hui HSU, Yi JIANG, Kai KANG, Wanbing YI, Juan Boon TAN
  • Publication number: 20210359203
    Abstract: The present disclosure generally relates to memory devices and methods of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices. The present disclosure provides a memory device including an opening in a dielectric structure, the opening having a sidewall, a first electrode on the sidewall of the opening, a spacer layer on the first electrode, a resistive layer on the first electrode and upon an upper surface of the spacer layer, and a second electrode on the resistive layer.
    Type: Application
    Filed: May 14, 2020
    Publication date: November 18, 2021
    Inventors: CURTIS CHUN-I HSIEH, WEI-HUI HSU, WANBING YI, YI JIANG, KAI KANG, JUAN BOON TAN
  • Publication number: 20210358544
    Abstract: The present disclosure generally relates to memory devices and methods of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices incorporating reference cells for achieving high sensing yield. The present disclosure provides a memory device including a main cell structure including a switching element arranged between a pair of conductors, and a reference cell structure electrically coupled to the main cell structure. The reference cell structure includes a switching element arranged between a pair of conductors, in which the switching element of the reference cell structure has a dimension that is different from a dimension of the switching element of the main cell structure.
    Type: Application
    Filed: July 28, 2021
    Publication date: November 18, 2021
    Inventors: CURTIS CHUN-I HSIEH, WEI-HUI HSU, WANBING YI, YI JIANG, KAI KANG, JUAN BOON TAN
  • Patent number: 11127784
    Abstract: Integrated circuits with embedded memory structures, and methods for fabricating integrated circuits are provided. An exemplary method for fabricating an integrated circuit includes forming from a first metallization layer a first lower conductive interconnect in a first region of a dielectric layer and a second lower conductive interconnect in a second region of the dielectric layer. The method includes forming a memory structure in the first region. Further, the method includes depositing an interlayer dielectric over the first region and over the second region. Also, the method includes forming from a second metallization layer a first upper conductive interconnect over the interlayer dielectric, wherein the first upper conductive interconnect is coupled to the memory structure.
    Type: Grant
    Filed: December 12, 2018
    Date of Patent: September 21, 2021
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Curtis Chun-I Hsieh, Wanbing Yi, Yi Jiang, Juan Boon Tan
  • Patent number: 11127459
    Abstract: The present disclosure generally relates to memory devices and methods of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices incorporating reference cells for achieving high sensing yield. The present disclosure provides a memory device including a main cell structure having a dimension, and a reference cell structure electrically coupled to the main cell structure. The reference cell structure has a dimension that is different from the dimension of the main cell structure, in which the main cell structure and the reference cell structure include a switching element arranged between a pair of conductors.
    Type: Grant
    Filed: March 16, 2020
    Date of Patent: September 21, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Curtis Chun-I Hsieh, Wei-Hui Hsu, Wanbing Yi, Yi Jiang, Kai Kang, Juan Boon Tan
  • Publication number: 20210287741
    Abstract: The present disclosure generally relates to memory devices and methods of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices incorporating reference cells for achieving high sensing yield. The present disclosure provides a memory device including a main cell structure having a dimension, and a reference cell structure electrically coupled to the main cell structure. The reference cell structure has a dimension that is different from the dimension of the main cell structure, in which the main cell structure and the reference cell structure include a switching element arranged between a pair of conductors.
    Type: Application
    Filed: March 16, 2020
    Publication date: September 16, 2021
    Inventors: CURTIS CHUN-I HSIEH, WEI-HUI HSU, WANBING YI, YI JIANG, KAI KANG, JUAN BOON TAN
  • Patent number: 11081523
    Abstract: A memory device may be provided, including a base layer, an insulating layer, a first electrode, a switching element, a capping element and a second electrode. The insulating layer may be arranged over the base layer and may include a recess having opposing side walls. The first electrode may be arranged at least partially within the recess of the insulating layer and along the opposing side walls of the recess of the insulating layer. The switching element may be arranged at least partially within the recess of the insulating layer and along the first electrode. The capping element and the second electrode may be arranged at least partially within the recess of the insulating layer. The capping element may be arranged between the second electrode and the switching element, and a part of the second electrode may extend across the capping element to contact the switching element.
    Type: Grant
    Filed: May 14, 2020
    Date of Patent: August 3, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Curtis Chun-I Hsieh, Wei-Hui Hsu, Yi Jiang, Wanbing Yi, Juan Boon Tan
  • Patent number: 11031251
    Abstract: A method of forming a uniform self-aligned low-k layer with a large process window for inserting a memory array with pillar/convex topography and the resulting device are provided. Embodiments include forming a substrate with a first region and a second region; forming a first low-K layer over the substrate; forming an oxide layer over the first low-K layer; forming a spacer over the oxide layer; etching the spacer to expose the oxide layer in the first region; removing the oxide layer and a portion of the first low-K layer in the first region and a portion of the oxide layer and a portion of the spacer in the second region; removing the spacer in the second region; cleaning the first low-K layer and the oxide layer, a triangular-like shaped portion of the oxide layer remaining; and forming a second low-K layer over the substrate.
    Type: Grant
    Filed: March 4, 2019
    Date of Patent: June 8, 2021
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Curtis Chun-I Hsieh, Wanbing Yi, Yi Jiang, Juan Boon Tan, Zhehui Wang
  • Patent number: 11018093
    Abstract: Methodologies and an apparatus for enabling magnetic shielding of stand alone MRAM are provided. Embodiments include placing MRAM dies and logic dies on a first surface of a mold frame; forming a top magnetic shield over top and side surfaces of the MRAM dies; forming a mold cover over the MRAM dies, FinFET dies and mold frame; removing the mold frame to expose a bottom surface of the MRAM dies and FinFET dies; and forming a bottom magnetic shield over the bottom surface of the MRAM dies.
    Type: Grant
    Filed: June 5, 2019
    Date of Patent: May 25, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Bharat Bhushan, Juan Boon Tan, Boo Yang Jung, Wanbing Yi, Danny Pak-Chum Shum
  • Patent number: 10978510
    Abstract: Methods of forming a MTJ dummy fill gradient across near-active-MRAM-cell periphery and far-outside-MRAM logic regions and the resulting device are provided. Embodiments include providing an embedded MRAM layout with near-active-MRAM-cell periphery logic and far-outside-MRAM logic regions; forming a MTJ structure within the layout based on minimum space and distance rules relative to a first metal layer, a second metal layer, and/or both the first and second metal layers; forming a high-density MTJ dummy structure in the near-active-MRAM-cell periphery logic region based on second minimum space and distance rules relative to a first metal layer, a second metal layer, and/or both the first metal layer and the second metal layer; and forming a low-density MTJ dummy structure in the far-outside-MRAM logic region based on third minimum space and distance rules relative to a first metal layer, a second metal layer, and/or both the first metal layer and the second metal layer.
    Type: Grant
    Filed: June 17, 2019
    Date of Patent: April 13, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Pinghui Li, Haiqing Zhou, Liying Zhang, Wanbing Yi, Ming Zhu, Danny Pak-Chum Shum, Darin Chan
  • Publication number: 20200357707
    Abstract: A device and methods for forming the device is provided. The device includes a substrate and circuit elements thereon. The device further includes a metallization layer over the substrate. The metallization layer includes interconnects interconnecting the circuit elements. A test pad is disposed over an uppermost interconnect in the metallization layer. The test pad is coupled to one or more circuit elements via the interconnects. The test pad is configured for testing the one or more circuit elements. A crack stop protection seal surrounding the test pad is provided. The crack stop protection seal confines damage caused by probing at the test pad from propagating to an area beyond the crack stop protection seal.
    Type: Application
    Filed: May 7, 2019
    Publication date: November 12, 2020
    Inventors: Ramasamy CHOCKALINGAM, Juan Boon TAN, Wanbing YI
  • Patent number: 10734572
    Abstract: A device including a capping layer over a portion of a top electrode, and method of production thereof. Embodiments include an MRAM cell in a first region and a logic area in a second region of a substrate, wherein the MRAM cell includes a MTJ pillar between a top electrode and a bottom electrode; and a capping layer over a portion of the top electrode.
    Type: Grant
    Filed: July 18, 2018
    Date of Patent: August 4, 2020
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Yi Jiang, Curtis Chun-I Hsieh, Wanbing Yi, Juan Boon Tan
  • Patent number: 10734444
    Abstract: Integrated circuits with integrated memory devices and high capacitors, and methods for fabricating such integrated circuits are provided. An exemplary method for fabricating an integrated circuit includes forming, from a lower conductive layer, a lower memory interconnect and a lower capacitor interconnects over a substrate. The method further includes forming a conductive memory via coupled to the lower memory interconnect and a conductive capacitor vias coupled to the lower capacitor interconnect. Also, the method includes forming a memory structure over the memory via and forming a capacitor dielectric layer over the memory structure and over the capacitor via. Further, the method includes forming, from an upper conductive layer, an upper memory interconnect coupled to the memory structure and an upper capacitor interconnects over the capacitor dielectric layer over the capacitor via. The capacitor via, capacitor dielectric layer, and upper capacitor interconnects form the high capacitor.
    Type: Grant
    Filed: January 28, 2019
    Date of Patent: August 4, 2020
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Yi Jiang, Curtis Chun-I Hsieh, Wanbing Yi, Juan Boon Tan
  • Publication number: 20200243602
    Abstract: Integrated circuits with integrated memory devices and high capacitors, and methods for fabricating such integrated circuits are provided. An exemplary method for fabricating an integrated circuit includes forming, from a lower conductive layer, a lower memory interconnect and a lower capacitor interconnects over a substrate. The method further includes forming a conductive memory via coupled to the lower memory interconnect and a conductive capacitor vias coupled to the lower capacitor interconnect. Also, the method includes forming a memory structure over the memory via and forming a capacitor dielectric layer over the memory structure and over the capacitor via. Further, the method includes forming, from an upper conductive layer, an upper memory interconnect coupled to the memory structure and an upper capacitor interconnects over the capacitor dielectric layer over the capacitor via. The capacitor via, capacitor dielectric layer, and upper capacitor interconnects form the high capacitor.
    Type: Application
    Filed: January 28, 2019
    Publication date: July 30, 2020
    Inventors: Yi Jiang, Curtis Chun-I Hsieh, Wanbing Yi, Juan Boon Tan
  • Patent number: 10720580
    Abstract: A device including a reduced top RRAM electrode structure, and method of production thereof. Embodiments include a bottom resistive random-access memory (RRAM) electrode structure over a plurality of lower metal level contacts formed laterally separated in a substrate; a resistive switching structure over the bottom RRAM electrode structure; a top RRAM electrode structure over the resistive switching structure; a protective structure over the top RRAM electrode structure; an encapsulation structure over the bottom RRAM electrode structure and on sidewalls of the resistive switching structure, the top RRAM electrode structure and the protective structure; and an Nblock layer over the substrate.
    Type: Grant
    Filed: October 22, 2018
    Date of Patent: July 21, 2020
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Curtis Chun-I Hsieh, Wei-Hui Hsu, Wanbing Yi, Yi Jiang, Juan Boon Tan
  • Patent number: 10707358
    Abstract: A semiconductor device having a substrate with at least one photo-detecting region and at least one bond pad is provided. A first passivation layer is deposited over the substrate and over step portions at the edges of the bond pad and a trench having sidewalls and a bottom surface is formed in the substrate. A light shielding layer is deposited over the first passivation layer and covering the trench sidewalls. The light shielding layer has end portions at the photo-detecting region, at step portions at the edges of the bond pad and at the bottom surface of the trench. A second passivation layer is deposited over the light shielding layer. A third passivation layer is deposited over the end portions of the light shielding layer at the photo-detecting region and at the step portions at edges of the bond pad.
    Type: Grant
    Filed: July 4, 2018
    Date of Patent: July 7, 2020
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Wanbing Yi, Juan Boon Tan, Kiok Boone Elgin Quek, Khee Yong Lim, Chim Seng Seet, Rajesh Nair
  • Patent number: 10693054
    Abstract: A method of forming a memory cell with a high aspect ratio metal via formed underneath a metal tunnel junction (MTJ) and the resulting device are provided. Embodiments include a device having a metal via formed underneath a metal tunnel junction (MTJ) in a memory cell, and the metal via has an aspect ratio smaller than 2.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: June 23, 2020
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Danny Pak-Chum Shum, Wanbing Yi, Curtis Chun-I Hsieh, Yi Jiang, Juan Boon Tan, Benfu Lin
  • Publication number: 20200194496
    Abstract: Integrated circuits with embedded memory structures, and methods for fabricating integrated circuits are provided. An exemplary method for fabricating an integrated circuit includes forming from a first metallization layer a first lower conductive interconnect in a first region of a dielectric layer and a second lower conductive interconnect in a second region of the dielectric layer. The method includes forming a memory structure in the first region. Further, the method includes depositing an interlayer dielectric over the first region and over the second region. Also, the method includes forming from a second metallization layer a first upper conductive interconnect over the interlayer dielectric, wherein the first upper conductive interconnect is coupled to the memory structure.
    Type: Application
    Filed: December 12, 2018
    Publication date: June 18, 2020
    Inventors: Curtis Chun-I Hsieh, Wanbing Yi, Yi Jiang, Juan Boon Tan