Abstract: An overlay alignment mark, a method for measuring overlay error, and a method for overlay alignment are provided in the embodiments of the present disclosure.

Abstract: An image capture device, a control method and a machine readable storage medium are disclosed. The image capture device includes: a processor, an infrared lamp, and a white light lamp. The processor in the image capture device is used to control the infrared lamp and white light lamp. The processor obtains current acquisition parameters of the image capture device, compares the magnification in the current acquisition parameters with a preset first magnification threshold and a preset second magnification threshold to obtain a comparison result, and controls switching states of the infrared lamp and the white light lamp according to the comparison result, the brightness of the environment and the gain, wherein, the first magnification threshold is less than the second magnification threshold.

Abstract: A variable magnification method, apparatus and a computer-readable storage medium is disclosed. The method comprises: acquiring angle parameters for the current position of a camera after receiving a variable magnification instruction; wherein, the variable magnification instruction is configured for instructing the camera to perform the variable magnification based on a target magnification ratio parameter; querying target historical focusing information based on the angle parameters for the current position, wherein, the target historical focusing information comprises a historical magnification ratio parameter and a historical in-focus parameter of the camera; querying a target variable magnification curve based on the historical magnification ratio parameter and the historical in-focus parameter; and controlling the camera to perform the variable magnification based on the target variable magnification curve.

Abstract: Methods and apparatuses are provided for data processing. The method includes receiving a first data packet and a second data packet; associating first codes with the first data packet and second codes with the second data packet to generate a combined data packet after receiving the first data packet and the second data packet, wherein the first codes and the second codes specify processing to be performed to the a combined data packet; generating the combined data packet comprising the first data packet and the second data packet in response to determining that the first data packet and the second data packet are correlated; and performing the processing to the combined data packet in accordance with the first codes or the second codes.

Abstract: A variable magnification method, apparatus and a computer-readable storage medium is disclosed. The method comprises: acquiring angle parameters for the current position of a camera after receiving a variable magnification instruction; wherein, the variable magnification instruction is configured for instructing the camera to perform the variable magnification based on a target magnification ratio parameter; querying target historical focusing information based on the angle parameters for the current position, wherein, the target historical focusing information comprises a historical magnification ratio parameter and a historical in-focus parameter of the camera; querying a target variable magnification curve based on the historical magnification ratio parameter and the historical in-focus parameter; and controlling the camera to perform the variable magnification based on the target variable magnification curve.

Abstract: Methods and apparatuses are provided for data processing. The method includes receiving a data packet; associating codes with the data packet, wherein the codes specify processing to be performed to the data packet; and performing the processing to the data packet in accordance with the codes. The apparatus includes a receiver, configured to receive a data packet; a processor; and a memory coupled to the processor, the memory configured to store instructions which when executed by the processor become operational with the processor to: associate codes with the data packet, wherein the codes specify processing to be performed to the data packet; and perform the processing to the data packet in accordance with the codes.

Abstract: The embodiments of the present application provides an image capture device, a control method and a machine readable storage medium, the image capture device includes: a processor, an infrared lamp, and a white light lamp. The processor in the image capture device is used to control the infrared lamp and white light lamp. Specifically, the processor obtains current acquisition parameters of the image capture device, compares the magnification in the current acquisition parameters with a preset first magnification threshold and a preset second magnification threshold to obtain a comparison result, and controls switching states of the infrared lamp and the white light lamp according to the comparison result, the brightness of the environment and the gain, wherein, the first magnification threshold is less than the second magnification threshold.

Abstract: Provided in an embodiment of the present application are an anti-shake method for a camera and a camera. The method comprises: obtaining current shake data of a camera, wherein the shake data comprises position change data of the camera when the camera shakes, and the shake data is detected by a shake detector; determining, according to a preset relationship between position change of an anti-shake lens for shake compensation and shake data, movement data of the anti-shake lens; and adjusting a position of the anti-shake lens according to the movement data, so that an image sensor captures a shake-compensated image. By applying the embodiment of the present application, anti-shake processing can be performed for the higher or lower frequency shake, improving anti-shake performance.

Abstract: Methods, apparatuses, and systems for image-based abnormality detection for periodic patterns are provided. The method includes receiving an image pattern T determined from an inspection image, wherein T comprises multiple periodic segments along a spatial direction; determining, by a processor, a first reference pattern R1 by rearranging the multiple periodic segments of T in a first manner and a second reference pattern R2 by rearranging the multiple periodic segments of T in a second manner; determining whether an abnormality exists in T by comparing a part of T with a part of R1 and a part of R2; and determining that the abnormality exists in T based on a determination that the part of T is different from the part of R1 and the part of R2.

Abstract: Methods, apparatuses, and systems for image-based abnormality detection for periodic patterns are provided. The method includes receiving an image pattern T determined from an inspection image, wherein T comprises multiple periodic segments along a spatial direction; determining, by a processor, a first reference pattern R1 by rearranging the multiple periodic segments of T in a first manner and a second reference pattern R2 by rearranging the multiple periodic segments of T in a second manner; determining whether an abnormality exists in T by comparing a part of T with a part of R1 and a part of R2; and determining that the abnormality exists in T based on a determination that the part of T is different from the part of R1 and the part of R2.

Abstract: Embodiments of the present application provide an automatic focusing method and a PTZ camera. The method is applicable to the PTZ camera and comprises: calculating a current target object distance from a lens of the PTZ camera to a monitored target monitoring plane based on a pre-established spatial object distance parameter; wherein, the spatial object distance parameter contains a spatial plane equation of a reference monitoring plane; the reference monitoring plane is an equivalent plane of the target monitoring plane; searching in a preset relation table based on the current target object distance, a current magnification of the PTZ camera, determining a position information corresponding to a focus motor of the PTZ camera, the preset relation table including the relationship of the object distance, the magnification and the position information of the focus motor, and driving the focus motor to a position corresponding to the determined position information.

Abstract: Embodiments of the present application provide an automatic focusing method and a PTZ camera. The method is applicable to the PTZ camera and comprises: calculating a current target object distance from a lens of the PTZ camera to a monitored target monitoring plane based on a pre-established spatial object distance parameter; wherein, the spatial object distance parameter contains a spatial plane equation of a reference monitoring plane; the reference monitoring plane is an equivalent plane of the target monitoring plane; searching in a preset relation table based on the current target object distance, a current magnification of the PTZ camera, determining a position information corresponding to a focus motor of the PTZ camera, the preset relation table including the relationship of the object distance, the magnification and the position information of the focus motor, and driving the focus motor to a position corresponding to the determined position information.

Abstract: Provided in an embodiment of the present application are an anti-shake method for a camera and a camera. The method comprises: obtaining current shake data of a camera, wherein the shake data comprises position change data of the camera when the camera shakes, and the shake data is detected by a shake detector; determining, according to a preset relationship between position change of an anti-shake lens for shake compensation and shake data, movement data of the anti-shake lens; and adjusting a position of the anti-shake lens according to the movement data, so that an image sensor captures a shake-compensated image. By applying the embodiment of the present application, anti-shake processing can be performed for the higher or lower frequency shake, improving anti-shake performance.

Abstract: Methods and apparatuses are provided for data processing. The method includes receiving a data packet; associating codes with the data packet, wherein the codes specify processing to be performed to the data packet; and performing the processing to the data packet in accordance with the codes. The apparatus includes a receiver, configured to receive a data packet; a processor; and a memory coupled to the processor, the memory configured to store instructions which when executed by the processor become operational with the processor to: associate codes with the data packet, wherein the codes specify processing to be performed to the data packet; and perform the processing to the data packet in accordance with the codes.

Abstract: Techniques for yield management in semiconductor inspection systems are described. According to one aspect of the present invention, columns of sensing mechanism in an inspection station are configured with different functions, weights and performances to inspect a sample to significantly reduce the time that would be otherwise needed when all the columns were equally applied.

Abstract: Methods, apparatuses and systems for classifying defects for a defect inspection system are disclosed. The defect inspection system can be used to inspect and manage wafer or reticle defects. The method includes receiving a defect record based on an inspection of a target specimen, the defect record comprising a defect image associated with an unknown defect, selecting, by a computing device using a first processing unit, components ranked by significance from the defect image using a first learning technique, and determining, by the computing device using the first processing unit, whether the defect image is associated with a known defect type based on the components ranked by significance using a second learning technique.

Abstract: A method for reference image contour generation includes generating a mask pattern based on design target information, generating a reference image based on a simulation of photolithographic effects on the mask pattern, generating a reference image contour pattern based on edge detection in the reference image, and generating a scanned image contour pattern as a function of the reference image contour pattern and a scanned image of an integrated circuit.

Abstract: Techniques for yield management in semiconductor inspection systems are described. According to one aspect of the present invention, an electron beam inspection system includes multiple stages or multiple chambers, where the chambers/stages (N?2) are organized to form one or more paths for wafer/mask inspection. An inspection procedure in each chamber (or at each stage) is determined by its order in the path and the relative columns used. For a system with N chambers/stages, a maximum number of N wafers/masks can be processed simultaneously.

Abstract: The present invention relates to the field of video camera image processing. Disclosed are an intelligent adjustment method when a video camera performs automatic exposure and an apparatus therefor. In the present invention, a first corresponding relationship between a rate and an aperture is pre-set. The first corresponding relationship records corresponding upper and lower aperture limits required by each rate for achieving the best depth of field of an image. The method comprises the following steps: acquiring the current rate of a video camera; searching for upper and lower aperture limits corresponding to the current rate in a first corresponding relationship; if the current aperture value exceeds the range of the searched upper and lower aperture limits corresponding to the current rate, adjusting the current aperture value to be within the range of the upper and lower aperture limits; and according to the adjusted aperture value, adjusting exposure time and gain to satisfy the need of image brightness.