Abstract: A method for managing defects for an augmented automatic defect classification (ADC) process is disclosed. The method includes receiving a defect record based on an inspection of a target specimen; extracting, from a design database, relevant design data associated with a patch surrounding a location of a defect from the defect record; performing, by a processor, lithographic simulation on the relevant design data associated with the patch to determine a context patch; comparing, by the processor, the context patch with an image of the defect from the defect record to determine whether there exists a match between the context patch and the image of the defect; and defining the defect as a systematic defect based on a determination that there exists a match between the context patch and the image of the defect.

Abstract: Methods, apparatuses and systems for classifying defects for a defect inspection system are disclosed. The defect inspection system can be used to inspect and manage wafer or reticle defects. The method includes receiving a defect record based on an inspection of a target specimen, the defect record comprising a defect image associated with an unknown defect, selecting, by a computing device using a first processing unit, components ranked by significance from the defect image using a first learning technique, and determining, by the computing device using the first processing unit, whether the defect image is associated with a known defect type based on the components ranked by significance using a second learning technique.

Abstract: A method for reference image contour generation includes generating a mask pattern based on design target information, generating a reference image based on a simulation of photolithographic effects on the mask pattern, generating a reference image contour pattern based on edge detection in the reference image, and generating a scanned image contour pattern as a function of the reference image contour pattern and a scanned image of an integrated circuit.

Abstract: A method for managing defects for an augmented automatic defect classification (ADC) process is disclosed. The method includes receiving a defect record based on an inspection of a target specimen; extracting, from a design database, relevant design data associated with a patch surrounding a location of a defect from the defect record; performing, by a processor, lithographic simulation on the relevant design data associated with the patch to determine a context patch; comparing, by the processor, the context patch with an image of the defect from the defect record to determine whether there exists a match between the context patch and the image of the defect; and defining the defect as a systematic defect based on a determination that there exists a match between the context patch and the image of the defect.

Abstract: Techniques for yield management in semiconductor inspection systems are described. According to one aspect of the present invention, an electron beam inspection system includes multiple stages or multiple chambers, where the chambers/stages (N?2) are organized to form one or more paths for wafer/mask inspection. An inspection procedure in each chamber (or at each stage) is determined by its order in the path and the relative columns used. For a system with N chambers/stages, a maximum number of N wafers/masks can be processed simultaneously.

Abstract: Techniques for yield management in semiconductor inspection systems are described. According to one aspect of the present invention, columns of sensing mechanism are configured with different functions, weights and performances to inspect a sample to significantly reduce the time that would be otherwise needed when all the columns were equally applied.

Abstract: The present invention relates to the field of video camera image processing. Disclosed are an intelligent adjustment method when a video camera performs automatic exposure and an apparatus therefor. In the present invention, a first corresponding relationship between a rate and an aperture is pre-set. The first corresponding relationship records corresponding upper and lower aperture limits required by each rate for achieving the best depth of field of an image. The method comprises the following steps: acquiring the current rate of a video camera; searching for upper and lower aperture limits corresponding to the current rate in a first corresponding relationship; if the current aperture value exceeds the range of the searched upper and lower aperture limits corresponding to the current rate, adjusting the current aperture value to be within the range of the upper and lower aperture limits; and according to the adjusted aperture value, adjusting exposure time and gain to satisfy the need of image brightness.

Abstract: Disclosed are methods and apparatus for inspecting a photolithographic reticle. A stream of defect data is received from a reticle inspection system, wherein the defect data identifies a plurality of defects that were detected for a plurality of different portions of the reticle. Before reviewing the defect data to determine whether the reticle passes inspection and as the stream of defect data continues to be received, some of the defects are automatically grouped with other most recently one or more received defects so as form groups of substantially matching defects. Before reviewing the defect data to determine whether the reticle passes inspection and after all of the defect data for the reticle is received, one or more of the groups of defects that have a number above a predetermined threshold are automatically filtered from the defect data so as to form filtered defect data. The filtered defect data may then be provided to a review station for determining whether the reticle passes.

Abstract: Disclosed are methods and apparatus for inspecting a photolithographic reticle. A stream of defect data is received from a reticle inspection system, wherein the defect data identifies a plurality of defects that were detected for a plurality of different portions of the reticle. Before reviewing the defect data to determine whether the reticle passes inspection and as the stream of defect data continues to be received, some of the defects are automatically grouped with other most recently one or more received defects so as form groups of substantially matching defects. Before reviewing the defect data to determine whether the reticle passes inspection and after all of the defect data for the reticle is received, one or more of the groups of defects that have a number above a predetermined threshold are automatically filtered from the defect data so as to form filtered defect data. The filtered defect data may then be provided to a review station for determining whether the reticle passes.

Abstract: A stream of defect data is received from a reticle inspection system. The defect data identifies defects that were detected for a plurality of different portions of a reticle. Before reviewing the defect data to determine whether the reticle passes inspection and as the stream of defect data continues to be received, some of the defects are automatically grouped with other most recently one or more received defects so as to form groups of substantially matching defects. Before reviewing the defect data to determine whether the reticle passes inspection and after all of the defect data for the reticle is received, one or more of the groups of defects that have a number above a predetermined threshold are automatically filtered from the defect data so as to form filtered defect data. The filtered defect data may then be provided to a review station for determining whether the reticle passes.

Abstract: A stream of defect data is received from a reticle inspection system. The defect data identifies defects that were detected for a plurality of different portions of a reticle. Before reviewing the defect data to determine whether the reticle passes inspection and as the stream of defect data continues to be received, some of the defects are automatically grouped with other most recently one or more received defects on as form groups of substantially matching defects. Before reviewing the defect data to determine whether the reticle passes inspection and after all of the defect data for the reticle is received, one or more of the groups of defects that have a number above a predetermined threshold are automatically filtered from the defect data on as to form filtered defect data. The filtered defect data may then be provided to a review station for determining whether the reticle passes.

Abstract: Methods and systems for selecting one or more charging profiles for a mobile data service session are disclosed. A method includes identifying one or more available sources of charging profiles that each provide a charging profile for a mobile data service user and selecting a charging profile to be used for at least a portion of the mobile data service session based on selection criteria that ranks the available sources of charging profiles. Access is provided to the selected charging profile for use in billing the mobile data service user.

Abstract: A method for classifying images from a set of test images, including comparing each of the test images to reference images. Each of the test images is grouped with one of the reference images. All of the images in each group can be classified with a single classification.

Abstract: A portable astronomical telescope includes the cylinder body, on which three telescopic legs are hinged through a joint to form a tripod stand. The bottom of aforementioned cylinder body is fixed by means of connection element and mounted with part box. On the bottom end of this part box, a bottom cover is insert-mounted. On the upper end of the part box, limit connection elements of the connected telescopic leg are hinged. Within the aforementioned cylinder body, a guide bush is fixed and installed, inside of which telescope base is mounted. On the side of this telescope base, a guide pin is established. On the side of the guide sleeve, an L-shaped feed-through slot is established to accommodate the guide sleeve. On the tail end of the above feed-through slot, one guide pin residence slot is connected. The aforementioned telescope base is activated by the lug and mounted with bellows. This product can be used without need for separate assembly, and eliminates the need for a separate package.

Abstract: Methods and systems for differential billing of services used during a mobile data service user session are disclosed. A method includes identifying a mobile data service user session and identifying a mobile data service user that is associated with the identified mobile data service user session. One or more services used by the mobile data service user during the mobile data service user session are identified. A service usage report is generated for each of the one or more services used by the mobile data service user. The usage reports are based on a measure of service usage of each of the identified one or more services and a billing profile that is associated with the user. Access is provided to the user service usage reports for storage as a part of billing records.

Abstract: Techniques and systems for server farm load balancing and resource allocation are disclosed. In one embodiment, a method of load balancing can include: arranging servers into service groups; receiving an access request with information related to a differentiation between the service groups; selecting one of the service groups based on a mapping comparison to the information; and selecting one of the servers within the selected service group based on a hardware utilization comparison. The servers can include GPRS (General Packet Radio Service) Gateway Support Node (GGSN) or Remote Authentication Dial In User Service (RADIUS) servers, for example. The information can include an Access Point Name (APN) or Calling Station ID, for example.

Abstract: Techniques and systems for server farm load balancing and resource allocation are disclosed. In one embodiment, a method of load balancing can include: arranging servers into service groups; receiving an access request with information related to a differentiation between the service groups; selecting one of the service groups based on a mapping comparison to the information; and selecting one of the servers within the selected service group based on a hardware utilization comparison. The servers can include GPRS (General Packet Radio Service) Gateway Support Node (GGSN) or Remote Authentication Dial In User Service (RADIUS) servers, for example. The information can include an Access Point Name (APN) or Calling Station ID, for example.