Patents by Inventor Witold P. Maszara

Witold P. Maszara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5073506
    Abstract: A method for making a lateral bipolar transistor using SOI technology. A base mask is formed on the surface of a silicon island and its sidewalls coated with a layer of silicon dioxide. After local oxidization of the silicon island, emitter and collector regions are implanted using the base mask and the silicon dioxide deposited on the sidewalls of the base mask as a mask. The base mask is then removed and a shallow base contact region is implanted in the base region previously shielded by the base mask. The remaining silicon dioxide deposited on the sidewalls of the base mask form vertical spacers which are used as a self-aligned mask for forming silicide contacts on the emitter, collector and base contact regions. These remaining silicon dioxide vertical spacers physically separate emitter-base and base collector junctions from the highly doped base contact area and electrically isolate the silicide contacts.
    Type: Grant
    Filed: February 14, 1991
    Date of Patent: December 17, 1991
    Assignee: Allied-Signal Inc.
    Inventors: Witold P. Maszara, Anthony L. Caviglia