Abstract: A method of manufacturing a micro-electrical-mechanical system (MEMS) assembly includes mounting a micro-electrical-mechanical system (MEMS) actuator to a metal plate. An image sensor assembly is mounted to the micro-electrical-mechanical system (MEMS) actuator. The image sensor assembly is electrically coupled to the micro-electrical-mechanical system (MEMS) actuator, thus forming a micro-electrical-mechanical system (MEMS) subassembly.

Abstract: An observation system and determination method for the re-suspension quantity of submarine sediments by deep-sea internal waves. The observation system comprises a submarine observation platform, a mooring rope, and an anchor mooring counterweight. Acoustic release transponder, a single-point current meter, a turbidity meter, a high-precision temperature and salinity detector, and a sediment catcher are mounted on the submarine observation platform. A main floating body and auxiliary floating bodies are arranged on the mooring rope, wherein the main floating body is located in the middle of the mooring rope and is equipped with acoustic Doppler current profilers, and the auxiliary floating bodies are equipped with turbidity meters and high-precision temperature and salinity detectors. The anchor mooring counterweight is a gravity anchor provided with a square clamping groove and a fixed ring.

Abstract: The present invention discloses a method for analyzing coalbed methane geological selection of a multi-coalbed high ground stress region, including the following steps: defining the concepts of a favorable area, a sweet spot area, and a sweet spot section; carrying out the selection process on the favorable area, the sweet spot area and the sweet spot section in sequence; selecting different indicators for the characteristics of each stage, explicitly presenting key indicators and reference indicators at each stage, and providing an indicator with one-vote veto rights in the key indicators; and carrying out comprehensive analysis to obtain favorable planar areas and vertical intervals of coalbed methane exploration and development in the multi-coalbed high ground stress region. The method of the present invention provides instructions on coalbed methane geological selection of a multi-coalbed high ground stress region, and is of great significance for the development of coalbed methane.

Abstract: A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including: an in-plane MEMS actuator, and an out-of-plane MEMS actuator including a multi-morph piezoelectric actuator; an optoelectronic device coupled to the in-plane MEMS actuator; and a lens barrel assembly coupled to the out-of-plane MEMS actuator.

Abstract: A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including: an in-plane MEMS actuator, and an out-of-plane MEMS actuator; and an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator; wherein the in-plane MEMS actuator includes an electromagnetic actuator portion.

Abstract: A micro-electrical-mechanical system (MEMS) actuator configured to provide multi-axis movement, the micro-electrical-mechanical system (MEMS) actuator including: a first portion, a second portion, wherein the first portion and the second portion are displaceable with respect to each other, and a locking assembly configured to releasably couple the first portion and the second portion to attenuate displacement between the first portion and the second portion.

Abstract: A temperature detecting and controlling integration device for the micro speaker is provided. After the filter receives an input signal, the power amplifier adjusts the power amplification, and the multi-frequency detection signal is generated with the waveform generator. The extracted signal is generated to drive the micro speaker to emit a sound signal. Afterwards, the voltage signals are extracted at two ends of the coil and the temperature signal is obtained by converting, capturing, and integrating to pass the temperature value to the external device, and the temperature value of the non-linear temperature-controlling unit is analyzed to adjust the compensation gain in real time. The smoothly control of speaker temperature and stable playback of the sound signals is played that can be achieved.

Abstract: A device may comprise a substrate formed of a first semiconductor material and a trench formed in the substrate. A second semiconductor material may be formed in the trench. The second semiconductor material may have first and second portions that are isolated with respect to one another and that are isolated with respect to the first semiconductor material.

Abstract: In one example, a camera is provided that includes: a plurality of MEMS electrostatic comb actuators, each actuator operable to exert a force on at least one lens; and an optical image stabilization (OIS) algorithm module operable to command the plurality of actuators to actuate the at least one lens responsive to motion of the camera.

Abstract: A temperature detecting and controlling integration device for the micro speaker is provided. After the filter receives an input signal, the power amplifier adjusts the power amplification, and the multi-frequency detection signal is generated with the waveform generator. The extracted signal is generated to drive the micro speaker to emit a sound signal. Afterwards, the voltage signals are extracted at two ends of the coil and the temperature signal is obtained by converting, capturing, and integrating to pass the temperature value to the external device, and the temperature value of the non-linear temperature-controlling unit is analyzed to adjust the compensation gain in real time. The smoothly control of speaker temperature and stable playback of the sound signals is played that can be achieved.

Abstract: A method of manufacturing a micro-electrical-mechanical system (MEMS) assembly includes mounting a micro-electrical-mechanical system (MEMS) actuator to a metal plate. An image sensor assembly is mounted to the micro-electrical-mechanical system (MEMS) actuator. The image sensor assembly is electrically coupled to the micro-electrical-mechanical system (MEMS) actuator, thus forming a micro-electrical-mechanical system (MEMS) subassembly.

Abstract: A comb drive includes an inactive comb finger array and an opposing active comb finger array positioned to oppose the inactive comb finger array and configured to move in a non-linear path relative to the inactive comb finger array, wherein each comb finger array includes a comb spine and a plurality of comb fingers extending from its comb spine, and each comb finger on the active comb finger array is shaped to match a non-parallel profile. The non-parallel profile may be tapered, curved, or selected to linearize the capacitance in a gap between adjacent comb fingers from the inactive comb finger array when a comb finger from the active comb finger array moves through the gap.

Abstract: A package for moving a platform in six degrees of freedom, is provided. The platform may include an optoelectronic device mounted thereon. The package includes an in-plane actuator which may be a MEMS actuator and an out-of-plane actuator which may be formed of a piezoelectric element. The in-plane MEMS actuator may be mounted on the out-of-plane actuator mounted on a recess in a PCB. The in-plane MEMS actuator includes a plurality comb structures in which fingers of opposed combs overlap one another, i.e. extend past each other's ends. The out-of-plane actuator includes a central portion and a plurality of surrounding stages that are connected to the central portion. The in-plane MEMS actuator is coupled to the out-of-plane Z actuator to provide three degrees of freedom to the payload which may be an optoelectronic device included in the package.

Abstract: Electric connection flexures for moving stages of microelectromechanical systems (MEMS) devices are disclosed. The disclosed flexures may provide an electrical and mechanical connection between a fixed frame and a moving frame, and are flexible in the moving frame's plane of motion. In implementations, the flexures are formed using a process that embeds the two ends of each flexure in the fixed frame and moving frame, respectively.

Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.

Abstract: A device may comprise a substrate formed of a first semiconductor material and a trench formed in the substrate. A second semiconductor material may be formed in the trench. The second semiconductor material may have first and second portions that are isolated with respect to one another and that are isolated with respect to the first semiconductor material.

Abstract: A multi-axis MEMS assembly includes a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement. The micro-electrical-mechanical system (MEMS) actuator includes: an in-plane MEMS actuator, and an out-of-plane MEMS actuator. An optoelectronic device is coupled to the micro-electrical-mechanical system (MEMS) actuator. The out-of-plane MEMS actuator includes a multi-morph piezoelectric actuator.

Abstract: A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement; and an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator.

Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.

Abstract: In one example, a camera is provided that includes: a plurality of MEMS electrostatic comb actuators, each actuator operable to exert a force on at least one lens; and an optical image stabilization (OIS) algorithm module operable to command the plurality of actuators to actuate the at least one lens responsive to motion of the camera.