Abstract: Described herein are articles, systems and methods where a halogen resistant coating is deposited onto a surface of a chamber component using an atomic layer deposition (ALD) process. The halogen resistant coating has an optional amorphous seed layer and a transition metal-containing layer. The halogen resistant coating uniformly covers features of the chamber component, such as those having an aspect ratio of about 3:1 to about 300:1.

Abstract: A ground shield of a processing chamber includes a ceramic body including a ground shield plate, a raised edge extending from an upper surface of the ground shield plate, and a hollow shaft that extends from a lower surface of the ground shield plate. An electrically conductive layer is formed on and conforms to at least the upper surface of the ground shield plate and an interior surface of the hollow shaft. A first protective layer is formed on at least the electrically conductive layer. A heater plate of a heater first within the raised edge and on the ground shield plate such that the heater plate is disposed on top of the first protective layer, the electrically conductive layer, and the upper surface of the ground shield plate.

Abstract: The present disclosure relates to the neutral amino acid salts of polyunsaturated fatty acid (PUFAs), and a process for producing same comprising mixing one or more PUFA in an acid form, an alkali base and a neutral amino acid in a mixture of a first organic solvent and water, adding a second organic solvent to the mixture in an amount effective for precipitating the salts of PUFAs, and evaporating the first and second organic solvents and water to recover the neutral amino acid salts of PUFAs.

Abstract: The present disclosure relates to the basic amino acid salts of polyunsaturated fatty acids (PUFAs), and a process for producing same comprising mixing one or more PUFAs in an acid form and a basic amino acid in a mixture of a first organic solvent and water at a temperature of between about above 0° C. to about the boiling point of said first organic solvent; adding a second organic solvent to said mixture of said first organic solvent and water, in an amount effective for precipitating said basic amino acid salts of PUFAs; and evaporating said first and second organic solvents and water to recover said basic amino acid salts of PUFAs.

Abstract: A substrate support assembly includes a ground shield and a heater that is surrounded by the ground shield. The ground shield includes a plate. In one embodiment, the ground shield is composed of a ceramic body and includes an electrically conductive layer, a first protective layer on the upper surface of the plate. In another embodiment, the ground shield is composed of an electrically conductive body and a first protective layer on the upper surface of the plate.

Abstract: The disclosure relates to a magnesium salt of one or more polyunsaturated fatty acids (PUFAs), a process for preparing same and a composition comprising said magnesium salt of one or more PUFAs and at least one stability enhancer.

Abstract: In devices with flexible displays, multilayer adhesive stacks may be included. A multilayer adhesive may attach a flexible display panel to the display cover layer in an electronic device. Including multiple layers of adhesive in the adhesive stack (as opposed to a single layer) provides more degrees of freedom for the tuning and optimization of the properties of the adhesive stack. The multilayer adhesive stack therefore has better performance than if only a single layer of adhesive is used. The multilayer adhesive stack may include one or more layers of soft adhesive, hard adhesive, hard elastomer, hard polymer, and/or glass to optimize the mechanical and optical performance of the multilayer adhesive stack. Soft adhesive layers may be included to optimize lateral decoupling (e.g., during folding and unfolding) of the adhesive stack. Harder layers may be included to provide rigidity and prevent denting during impact events.

Abstract: The disclosure is directed to compounds of Formula I pharmaceutical compositions comprising compounds of Formula I, as well as methods of their use and preparation, are also described.

Abstract: Methods of forming nanoceramic materials and components. The methods may include performing atomic layer deposition to form a plurality of nanoparticles, including forming a thin film coating over core particles, or sintering the nanoparticles in a mold. The nanoparticles can include a first material selected from a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride or combinations thereof.

Abstract: Described herein are articles, systems and methods where a plasma resistant coating is deposited onto a surface of an article using an atomic layer deposition (ALD) process. The plasma resistant coating has a first layer and a second layer including a solid solution of Y2O3-ZrO2 and uniformly covers features, such as those having an aspect ratio of length to width of about 3:1 to about 300:1.

Abstract: The disclosure is directed to compounds of Formula I Pharmaceutical compositions comprising compounds of Formula I, as well as methods of their use and preparation, are also described.

Abstract: Nanopowders containing nanoparticles having a core particle with a thin film coating. The core particles and thin film coatings are, independently, formed from at least one of a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride or combinations thereof. The thin film coating may be formed using a non-line of sight technique such as atomic layer deposition (ALD). Also disclosed herein are nanoceramic materials formed from the nanopowders and methods of making and using the nanopowders.

Abstract: Certain embodiments of the present disclosure relate to methods of forming coated articles. In one embodiment, a method comprises depositing one or more rare earth metal-containing ceramic compounds on an article by atomic layer deposition, for example, to coat surfaces of high aspect ratio internal channels.

Abstract: Described herein are articles, systems and methods where a plasma resistant coating is deposited onto a surface of a chamber component using an atomic layer deposition (ALD) process. The plasma resistant coating has a stress relief layer and a layer comprising a solid solution of Y2O3—ZrO2 and uniformly covers features, such as those having an aspect ratio of about 3:1 to about 300:1.

Abstract: The present disclosure relates to spheroidal organosiloxane sub-micron/nanoparticle comprising a network consisting of organosiloxane, and a process to make them.

Abstract: Certain embodiments of the present disclosure relate to coated articles and methods of coating articles. In one embodiment, a coated article comprises an article adapted for use in a processing chamber, and a coating formed on exterior and interior surfaces of the article. In one embodiment, the coating comprises a rare earth metal-containing ceramic, and the coating is substantially uniform, conformal, and porosity-free.

Abstract: A lid or other chamber component for a process chamber comprises a) at least one surface comprising a first ceramic material, wherein the first ceramic material comprises Y3Al5O12 and b) an internal region beneath the at least one surface comprising a second ceramic material, wherein the second ceramic material comprises a combination of Al2O3 and ZrO2.

Abstract: The present disclosure relates to hydrophobicity/hydrophilicity-tunable organosiloxane nano-/microspheres with or without actives/payloads and a one-pot surfactant-free versatile process to make them. The release can be controlled by adjusting the hydrophobicity/hydrophilicity of the organosiloxane nano-/microspheres. The process of preparation comprising i0) separately hydrolyzing one or more silica precursor in a hydrolytic media; i1) combining the pre-hydrolyzed precursors or i2) removing a part of or totality of volatile solvents or i3) preparing a dispersed phase comprising a hydrophilic solvent to provide a dispersed phase; emulsifying, in absence of a surfactant, the dispersed phase of the step i1), i2) or i3) in a continuous phase to provide a water in oil emulsion; i5) adding a condensation catalyst to the emulsion to provide said nano-/microspheres.

Abstract: The application provides an air handling unit, comprising: an air flow path having an outdoor air inlet on the upstream side of the air flow path and an indoor air outlet on the downstream side of the air flow path; an high efficient filtering portion disposed in the air flow path and covering at least a part of a cross section of the air flow path; a bypassing portion disposed in the air flow path in parallel with the high efficient filtering portion and covering the other part of the cross section of the air flow path; a data sensing portion disposed upstream of the bypassing portion and used to sense air quality parameters of air flowing through the data sensing portion; and a controller controlling an open/close state of the bypassing portion based on the air quality parameter sensed by the data sensing portion.

Abstract: The present invention relates to device control for a predetermined area of space and belongs to the technical field of intelligent control of devices. A control system provided by the present invention comprises: a sensing component installed in the predetermined area of space and used for sensing the predetermined area of space to at least determine density information of living beings in the predetermined area of space, and an HVAC control and management unit of an HVAC system, wherein the sensing component is interactively connected with the HVAC control and management unit in a wireless communication mode, and the HVAC control and management unit is configured to control one or more air end devices at least based on the determined density information of living beings.