Abstract: A storage system in a ceiling space includes overhead traveling vehicles and a traveling route for the same, a shuttle carriage configured to transport goods to and from processing devices and a traveling route for the same, an OHT port to and from which the overhead traveling vehicles and the shuttle carriage both transport goods, and buffers that are provided in the ceiling space above the processing device and are for the placement of goods by the shuttle carriage. The traveling route for the shuttle carriage enables delivery and reception of goods by the shuttle carriage between the load port of the processing devices, the buffers, and the OHT port.

Abstract: In a transport system, overhead travelling vehicles each including a hoist travel along an overhead travelling vehicle travelling route. A local vehicle travelling route is disposed under the overhead travelling vehicle travelling route and over load ports at a position higher than the load ports. Local vehicles each including hoist travel along the local vehicle travelling route. Buffers are disposed along the local vehicle travelling route. The local vehicle travelling route includes a plurality of local vehicle travelling routes that are provided in parallel, and the local vehicles are configured to diverge and merge from one local vehicle travelling route to another local vehicle travelling route. The local vehicles transport articles between a load port and a buffer under control of a controller.

Abstract: A system for transporting an article between a plurality of processing devices includes a track extending above load ports of the processing devices, and an overhead travelling vehicle that travels along the track and has a hoist. A local track disposed lower than the track extends at least to a position under the track, and is oriented perpendicular to the track when viewed from above. A local carriage travels along the local track and has a hoist for vertically moving the article. A buffer disposed below the local track delivers and receives the article to and from the local carriage, and extends at least to a position under the track.

Abstract: An automated warehouse includes an apparatus main body a transfer device. The apparatus main body includes a plurality of stationary shelves arranged horizontally and vertically, and having upper surfaces on which cassettes can be placed. The transfer device transfers the cassette by holding a flange of the cassette. The transfer device includes a vertical rail and a transfer head. The vertical rail includes an upper end adjacent to a supporting surface of a top stationary shelf. The transfer head is a member vertically movable along the vertical rail. The transfer head includes a vertical arm having a length such that the vertical arm can hold the flange of the cassette placed on the top stationary shelf.

Abstract: A transfer device transfers an object stored on one of a plurality of shelf plates of a shelf. The transfer device includes two pillars vertically standing in front of the shelf, an upper rail attached to upper front surfaces of the two pillars so as to tie the two pillars together, a vertical rail provided in a plane including the two pillars and slidably connected to a side surface of the upper rail, a lower rail provided under the vertical rail, attached to lower portions of the two pillars, and connected to the vertical rail in a manner which allows the vertical rail to slide, and a holding unit slidably connected to a side surface of the vertical rail and arranged to detachably hold the object.

Abstract: The front automatic storage system includes a plurality of shelves, a transferring apparatus, and a moveable frame. The shelves are arranged facing a semiconductor processing apparatus and at least one of the shelves is positioned above a transfer port of the semiconductor processing apparatus. The transferring apparatus is contrived to move among the shelves and transfer cassettes C between any shelf and the transfer port. The frame is contrived such that it can move the transferring apparatus and the at least one shelf positioned above the transfer port. The frame is also contrived such that it can move in a first horizontal direction toward and away from a first position where the at least one shelf is arranged above the transfer section.

Abstract: A drawer device and a storage device improving workability are provided. A drawer device 1 includes supporting members 2a, 2b configured to be inserted in a gap under a FOUP 120 loaded on a shelf 134 and to be fixed to the shelf 134, and lifting members configured to switch between a first height position and a second height position where the first height position enables insertion of the supporting members 2a, 2b into the gap and the second height position allows the lifting member to lift the FOUP 120 higher than the first height position, and configured to allow the FOUP 120 to slide toward the front of the shelf 134 at the second height position.

Abstract: A system for transporting an article between a plurality of processing devices includes a track extending above load ports of the processing devices, and an overhead travelling vehicle that travels along the track and has a hoist. A local track disposed lower than the track at least to a position under the track, and is oriented perpendicular to the track when viewed from above. A local carriage travels along the local track and has a hoist for vertically moving the article. A buffer disposed below the local track delivers and receives the article to and from the local carriage, and extends at least to a position under the track.

Abstract: A transfer device transfers an object stored on one of a plurality of shelf plates of a shelf. The transfer device includes two pillars vertically standing in front of the shelf, an upper rail attached to upper front surfaces of the two pillars so as to tie the two pillars together, a vertical rail provided in a plane including the two pillars and slidably connected to a side surface of the upper rail, a lower rail provided under the vertical rail, attached to lower portions of the two pillars, and connected to the vertical rail in a manner which allows the vertical rail to slide, and a holding unit slidably connected to a side surface of the vertical rail and arranged to detachably hold the object.

Abstract: An automated warehouse includes an apparatus main body transfer device. The apparatus main body includes a plurality of stationary shelves arranged horizontally and vertically, and having upper surfaces on which cassettes can be placed. The transfer device transfers the cassette by holding a flange of the cassette. The transfer device includes a vertical rail and a transfer head. The vertical rail includes an upper end adjacent to a supporting surface of a top stationary shelf. The transfer head is a member vertically movable along the vertical rail. The transfer head includes a vertical arm having a length such that the vertical arm can hold the flange of the cassette placed on the top stationary shelf.

Abstract: In a transport system, a local track is disposed so as to be below an overhead travelling vehicle track in parallel or substantially in parallel therewith, and furthermore above a loading port of a processing device from upstream of the loading port to downstream of the loading port. A local vehicle including a hoist travels along the local track. Below the local track, a first buffer is disposed upstream of the loading port of the processing device, and a second buffer is disposed downstream of the loading port of the processing device, and the overhead travelling vehicle and the local vehicle can both perform delivery and receipt of the article with the first buffer and the second buffer.

Abstract: The front automatic storage system includes a plurality of shelves, a transferring apparatus, and a moveable frame. The shelves are arranged facing a semiconductor processing apparatus and at least one of the shelves is positioned above a transfer port of the semiconductor processing apparatus. The transferring apparatus is contrived to move among the shelves and transfer cassettes C between any shelf and the transfer port. The frame is contrived such that it can move the transferring apparatus and the at least one shelf positioned above the transfer port. The frame is also contrived such that it can move in a first horizontal direction toward and away from a first position where the at least one shelf is arranged above the transfer section.

Abstract: A conveyor 4 for transporting a reticle cassette 18 is provided. A lifter 16 of a rail vehicle 14 lifts the reticle cassette 18 for transferring the reticle cassette 18 between the inside of a dummy FOUP 22 and the conveyor 4.

Abstract: During traveling of an overhead traveling vehicle, an ID reader reads an ID provided at a lower position on a back surface of a cassette, while moving the cassette in a lateral direction.

Abstract: An overhead traveling vehicle travels along a rail suspended from an upper position. Further, a buffer is suspended from an upper position. The buffer can be retracted from a storage space for an article, or the buffer is foldable compactly.

Abstract: The present invention provides an overhead travelling carriage with a hoist which suppresses transmission of vibration to an article during conveyance. A chuck mechanism 10 is provided in a hoist 7 to support the top of an article 4. A fall preventing mechanism 14 is provided to prevent the article 4 supported by the chuck mechanism 14 from falling. Movable members 18 are provided which can move in a horizontal direction so as to advance toward and retreat from the housed article 4. Each of the movable members 18 has an L-shaped side cross section that extends so as to cross the direction in which it advances and retreats. A horizontal portion 18a of the movable portion 18 acts as means for preventing the article from falling. Rubber dampers 19 are provided on that surface of a vertical portion 18a of the movable member which is closer to the article 4, so as to constitute members pressed against the article 4.

Abstract: A storage shelf 4 is provided which has, for example, two rotatable mounts 18, 19. A notch 41 is formed in the mount 18 so that a cassette 34 can be freely transferred between the lower mount 19 and an overhead travelling carriage 8. ID readers 6 are provided on poles 16, 17 of the mounts 18, 19, respectively. Thus, the ID 36 of the cassette is read and memorized in a storage shelf file 13. The IDs of stored articles can be managed, resulting in advanced operations.

Abstract: An overhead traveling vehicle travels along a rail suspended from an upper position. Further, a buffer is suspended from an upper position. The buffer can be retracted from a storage space for an article, or the buffer is foldable compactly.

Abstract: During traveling of an overhead traveling vehicle, an ID reader reads an ID provided at a lower position on a back surface of a cassette, while moving the cassette in a lateral direction.

Abstract: A conveyor 4 for transporting a reticle cassette 18 is provided. A lifter 16 of a rail vehicle 14 lifts the reticle cassette 18 for transferring the reticle cassette 18 between the inside of a dummy FOUP 22 and the conveyor 4.