Abstract: The piezoelectric actuator comprises: a supporting substrate; a thermal stress controlling layer which is formed on the supporting substrate; and a piezoelectric body which is formed as a film onto the thermal stress controlling layer on the supporting substrate at a higher temperature than room temperature, wherein the thermal stress controlling layer reduces a film stress induced by formation of the piezoelectric body.

Abstract: The driving method includes a first drive step of applying a specified drive voltage to a piezoelectric film to drive a piezoelectric device during a first drive period, a standby step of suspending a drive of the piezoelectric device to keep the piezoelectric device on standby during a drive standby period and a second drive step of applying the specified drive voltage to the piezoelectric film to drive the piezoelectric device during a second drive period that follows the first drive period. During the drive standby period between the first drive period and the second drive period, a reverse electric field with respect to a drive electric field formed in the piezoelectric film by the specified drive voltage routinely applied during a drive of the piezoelectric device is applied to the piezoelectric film for a specified period of time.

Abstract: The piezoelectric actuator comprises: a supporting substrate; a thermal stress controlling layer which is formed on the supporting substrate; and a piezoelectric body which is formed as a film onto the thermal stress controlling layer on the supporting substrate at a higher temperature than room temperature, wherein the thermal stress controlling layer reduces a film stress induced by formation of the piezoelectric body.

Abstract: A piezoelectric film poling method in which, with respect to an unpoled piezoelectric film formed on a substrate by a vapor phase growth method and having a Curie point Tc not higher than 300° C., an electric field greater than a coercive electric field of the film is applied in a predetermined direction under a temperature condition not higher than 0° C. to orient spontaneous polarization of the film in the predetermined direction.

Abstract: The piezoelectric actuator comprises: a supporting substrate; a thermal stress controlling layer which is formed on the supporting substrate; and a piezoelectric body which is formed as a film onto the thermal stress controlling layer on the supporting substrate at a higher temperature than room temperature, wherein the thermal stress controlling layer reduces a film stress induced by formation of the piezoelectric body.

Abstract: The piezoelectric device includes a substrate, a first electrode formed on the substrate, a piezoelectric film formed on the first electrode and a second electrode formed on a second side of the piezoelectric film which is away from a first side where the first electrode is formed. The first electrode is composed of a first layer in contact with the substrate and a second layer in contact with the piezoelectric film. The first layer is formed of a material that is wet etched at a different rate than the substrate. The in %-jet head includes the piezoelectric device, a liquid droplet storing/ejecting member for ejecting ink droplets through a ink spout and provided on the piezoelectric device and a diaphragm for vibrating in response to expansion or contraction of the piezoelectric device and provided between the piezoelectric device and the liquid droplet storing/ejecting member.

Abstract: The liquid discharge head comprises: a three-dimensional structure which defines a space including a pressure chamber filled with liquid and a flow channel for supplying the liquid to the pressure chamber, at least a part of the three-dimensional structure being formed by depositing layers composed of at least two different composition materials on a substrate according to a deposition method; and a drive element which causes discharge of the liquid from the pressure chamber through a nozzle.

Abstract: The driving method includes a first drive step of applying a specified drive voltage to a piezoelectric film to drive a piezoelectric device during a first drive period, a standby step of suspending a drive of the piezoelectric device to keep the piezoelectric device on standby during a drive standby period and a second drive step of applying the specified drive voltage to the piezoelectric film to drive the piezoelectric device during a second drive period that follows the first drive period. During the drive standby period between the first drive period and the second drive period, a reverse electric field with respect to a drive electric field formed in the piezoelectric film by the specified drive voltage routinely applied during a drive of the piezoelectric device is applied to the piezoelectric film for a specified period of time.

Abstract: A liquid discharge apparatus includes a liquid storage-discharge member having a liquid storage chamber for storing liquid and a liquid outlet for discharging the liquid from the liquid storage chamber to the outside of the liquid storage chamber, a vibration plate formed on the liquid storage-discharge member and a piezoelectric element having a lower electrode, a piezoelectric body and an upper electrode, which are sequentially formed on the vibration plate. The piezoelectric body includes an edge portion including at least a portion of the piezoelectric body, the portion positioned on the outside of the wall position of the liquid storage chamber, and a main portion, which is the remaining portion of the piezoelectric body. Further, the edge portion and the main portion are formed on different base layers from each other and the fracture stress of the edge portion is higher than that of the main portion.

Abstract: A method of manufacturing an orientation film which method is suitable for manufacturing an orientation film containing a ceramic at low cost. The method includes the steps of: (a) forming a ceramic film on a seed substrate in which crystal orientation is controlled at least on a surface thereof by using an aerosol deposition method of injecting powder toward a substrate and depositing the powder on the substrate; and (b) heat-treating the ceramic film formed at step (a) to form an orientation film in which crystal grains contained in the ceramic film is oriented.

Abstract: The piezoelectric actuator comprises: a supporting substrate; a thermal stress controlling layer which is formed on the supporting substrate; and a piezoelectric body which is formed as a film onto the thermal stress controlling layer on the supporting substrate at a higher temperature than room temperature, wherein the thermal stress controlling layer reduces a film stress induced by formation of the piezoelectric body.

Abstract: The piezoelectric actuator comprises: a substrate; a constraint force buffering layer which is formed on the substrate and made of a hardness control material having low hardness; and a piezoelectric element which is formed directly on the constraint force buffering layer.

Abstract: The liquid discharge head has a three-dimensional structure which defines a space including a pressure chamber filled with liquid and a flow channel for supplying the liquid to the pressure chamber, the three-dimensional structure being formed by depositing a composition material on a substrate according to a deposition method, and a drive element which causes discharge of the liquid from the pressure chamber through a nozzle.

Abstract: The piezoelectric actuator comprises: a substrate; a constraint force buffering layer which is formed on the substrate and made of a hardness control material having low hardness; and a piezoelectric element which is formed directly on the constraint force buffering layer.

Abstract: A photosensitive resist layer is formed on one surface of a single-polarized ferroelectric substance having nonlinear optical effects. The resist layer has properties such that, when light is irradiated to the resist layer, only exposed areas of the resist layer or only unexposed areas of the resist layer become soluble in a developing solvent. The resist layer is then exposed to near-field light in a periodic pattern with a device, which receives exposure light and produces the near-field light in the periodic pattern. The resist layer is then developed to form a periodic pattern. A periodic electrode is then formed on the one surface of the ferroelectric substance by utilizing the periodic pattern of the resist layer as a mask, the periodic electrode being formed at positions corresponding to opening areas of the mask.

Abstract: A method of manufacturing an orientation film which method is suitable for manufacturing an orientation film containing a ceramic at low cost. The method includes the steps of: (a) forming a ceramic film on a seed substrate in which crystal orientation is controlled at least on a surface thereof by using an aerosol deposition method of injecting powder toward a substrate and depositing the powder on the substrate; and (b) heat-treating the ceramic film formed at step (a) to form an orientation film in which crystal grains contained in the ceramic film is oriented.

Abstract: A pattern electrode having a predetermined pattern and a connecting electrode connected to the pattern electrode are formed on one surface of a single-polarized ferroelectric substance crystal. An electric field is applied across the ferroelectric substance crystal with corona charging or electron beam irradiation from the side of the other surface of the ferroelectric substance crystal. A polarization inversion region having a shape corresponding to the predetermined pattern is thus formed in the ferroelectric substance crystal. The electric field is applied in a state, in which an electrical insulating material is located on the other surface of the ferroelectric substance crystal and at a position corresponding to at least a position of a certain area of the connecting electrode.

Abstract: The piezoelectric actuator comprises: a supporting substrate; a thermal stress controlling layer which is formed on the supporting substrate; and a piezoelectric body which is formed as a film onto the thermal stress controlling layer on the supporting substrate at a higher temperature than room temperature, wherein the thermal stress controlling layer reduces a film stress induced by formation of the piezoelectric body.

Abstract: A photosensitive resist layer is formed on one surface of a single-polarized ferroelectric substance having nonlinear optical effects. The resist layer has properties such that, when light is irradiated to the resist layer, only exposed areas of the resist layer or only unexposed areas of the resist layer become soluble in a developing solvent. The resist layer is then exposed to near-field light in a periodic pattern with a device, which receives exposure light and produces the near-field light in the periodic pattern. The resist layer is then developed to form a periodic pattern. A periodic electrode is then formed on the one surface of the ferroelectric substance by utilizing the periodic pattern of the resist layer as a mask, the periodic electrode being formed at positions corresponding to opening areas of the mask.

Abstract: In a method for displaying an image: a polarization inversion pattern is produced in a ferroelectric member in accordance with image information so as to produce a surface charge pattern corresponding to the polarization inversion pattern; and an image contrast is produced in a contrast production member by the influence of the surface charge pattern, where the contrast production member is joined to the ferroelectric member. The polarization inversion pattern may be produced by heating the ferroelectric member so as to produce a heat distribution corresponding to the image information in the ferroelectric member. Further, the ferroelectric member may be heated by applying infrared light carrying the image information to the ferroelectric member.