Patents by Inventor Yen-Ting Chen

Yen-Ting Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220130730
    Abstract: A semiconductor device including a fin field effect transistor (FinFET) with a cut metal gate (CMG) and a method of manufacturing the semiconductor device are described herein. The method includes forming a CMG protective helmet structure at a top portion of a CMG dummy gate plug formed within a semiconductor substrate. The CMG protective helmet structure prevents consumption and damage of a dummy filler material in a CMG region and prevents undesirable polymer/residue byproducts from forming on top surfaces of epitaxial regions of the FinFET during etching processes.
    Type: Application
    Filed: January 3, 2022
    Publication date: April 28, 2022
    Inventors: Cheng-Yu Yang, Feng-Cheng Yang, Wei-Yang Lee, Yen-Ming Chen, Yen-Ting Chen
  • Patent number: 11316283
    Abstract: A dual polarized antenna includes a first antenna unit and an isolated band gap. The first antenna unit is formed on the dielectric board, and the first antenna unit being conducted is configured to receive or transmit a signal with each of a first polarization direction and a second polarization direction. The isolated band gap is formed on the dielectric board and is disposed adjacent to the first antenna unit. It forms a first included angle which is neither 0° nor 90° between the first polarization direction and the isolated band gap.
    Type: Grant
    Filed: June 17, 2020
    Date of Patent: April 26, 2022
    Assignee: DELTA ELECTRONICS, INC.
    Inventors: Chieh-Tsao Hwang, Yen-Ting Chen
  • Publication number: 20220123126
    Abstract: In an embodiment, a structure includes: a semiconductor substrate; a fin extending from the semiconductor substrate; a gate stack over the fin; an epitaxial source/drain region in the fin adjacent the gate stack; and a gate spacer disposed between the epitaxial source/drain region and the gate stack, the gate spacer including a plurality of silicon oxycarbonitride layers, each of the plurality of silicon oxycarbonitride layers having a different concentration of silicon, a different concentration of oxygen, a different concentration of carbon, and a different concentration of nitrogen.
    Type: Application
    Filed: January 3, 2022
    Publication date: April 21, 2022
    Inventors: Chien-Chih Lin, Yen-Ting Chen, Wen-Kai Lin, Szu-Chi Yang, Shih-Hao Lin, Tsung-Hung Lee, Ming-Lung Cheng
  • Publication number: 20220122893
    Abstract: A method of manufacturing a semiconductor device includes forming a fin structure over a substrate, forming a sacrificial gate structure over the fin structure, and etching a source/drain (S/D) region of the fin structure to form an S/D recess. The fin structure includes first semiconductor layers and second semiconductor layers alternately stacked. The method further includes depositing an insulating dielectric layer in the S/D recess, depositing an etch protection layer over a bottom portion of the insulating dielectric layer, and partially removing the insulating dielectric layer. The method further includes growing an epitaxial S/D feature in the S/D recess. The bottom portion of the insulating dielectric layer interposes the epitaxial S/D feature and the substrate.
    Type: Application
    Filed: April 23, 2021
    Publication date: April 21, 2022
    Inventors: Bo-Yu Lai, Jyun-Chih Lin, Yen-Ting Chen, Wei-Yang Lee, Chia-Pin Lin, Wei Hao Lu, Li-Li Su
  • Patent number: 11296077
    Abstract: A method includes forming a semiconductor fin protruding higher than top surfaces of isolation regions. A top portion of the semiconductor fin is formed of a first semiconductor material. A semiconductor cap layer is formed on a top surface and sidewalls of the semiconductor fin. The semiconductor cap layer is formed of a second semiconductor material different from the first semiconductor material. The method further includes forming a gate stack on the semiconductor cap layer, forming a gate spacer on a sidewall of the gate stack, etching a portion of the semiconductor fin on a side of the gate stack to form a first recess extending into the semiconductor fin, recessing the semiconductor cap layer to form a second recess directly underlying a portion of the gate spacer, and performing an epitaxy to grow an epitaxy region extending into both the first recess and the second recess.
    Type: Grant
    Filed: June 3, 2019
    Date of Patent: April 5, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yen-Ting Chen, Bo-Yu Lai, Chien-Wei Lee, Hsueh-Chang Sung, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
  • Publication number: 20220080014
    Abstract: The present invention discloses a mangosteen pericarp extract and process for its preparation thereof. The mangosteen pericarp extract containing ?-mangostin and ?-mangostin which obtains from preparation steps comprising fragmentation, organic solvent soaking, aqueous solution, or acidic solution soaking, concentration, spray drying and grinding steps from the rind of the mangosteen. The present invention has advantages of simple preparation process to address efficiency issue, no need to have heating under reflux in extraction steps and the solvents which used are friendly to human body and environment.
    Type: Application
    Filed: July 20, 2021
    Publication date: March 17, 2022
    Inventors: CHIA-WEN CHEN, RONG-HONG HSIEH, YEN-TING CHEN, YIN-JUN CHEN
  • Publication number: 20220014243
    Abstract: The present disclosure relates to a beamforming device, including a transceiver circuit, a switch circuit and a beam former. The switch circuit is electrically connected to the transceiver circuit. The beam former contains a plurality of antenna units. The antenna units receive and send signals according to multiple radiation angles, and the radiation angle of each antenna unit is different. The switch circuit selectively conducts one of the antenna units to the transceiver circuit according to a control signal.
    Type: Application
    Filed: January 26, 2021
    Publication date: January 13, 2022
    Inventors: Chieh-Tsao HWANG, Yen-Ting CHEN
  • Patent number: 11217679
    Abstract: In an embodiment, a structure includes: a semiconductor substrate; a fin extending from the semiconductor substrate; a gate stack over the fin; an epitaxial source/drain region in the fin adjacent the gate stack; and a gate spacer disposed between the epitaxial source/drain region and the gate stack, the gate spacer including a plurality of silicon oxycarbonitride layers, each of the plurality of silicon oxycarbonitride layers having a different concentration of silicon, a different concentration of oxygen, a different concentration of carbon, and a different concentration of nitrogen.
    Type: Grant
    Filed: April 1, 2020
    Date of Patent: January 4, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Chih Lin, Yen-Ting Chen, Wen-Kai Lin, Szu-Chi Yang, Shih-Hao Lin, Tsung-Hung Lee, Ming-Lung Cheng
  • Patent number: 11217486
    Abstract: A semiconductor device including a fin field effect transistor (FinFET) with a cut metal gate (CMG) and a method of manufacturing the semiconductor device are described herein. The method includes forming a CMG protective helmet structure at a top portion of a CMG dummy gate plug formed within a semiconductor substrate. The CMG protective helmet structure prevents consumption and damage of a dummy filler material in a CMG region and prevents undesirable polymer/residue byproducts from forming on top surfaces of epitaxial regions of the FinFET during etching processes.
    Type: Grant
    Filed: March 1, 2019
    Date of Patent: January 4, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Yu Yang, Feng-Cheng Yang, Wei-Yang Lee, Yen-Ming Chen, Yen-Ting Chen
  • Patent number: 11197366
    Abstract: A communication device includes a ground plane, an antenna array, and an EBG (Electromagnetic Band Gap) structure. The antenna array includes a plurality of antenna elements. The EBG structure includes a plurality of EBG units. The EBG units are coupled to the ground plane. The antenna array is surrounded by the EBG structure. The EBG structure is configured to suppress the front-to-back ratio of the radiation efficiency of the antenna array.
    Type: Grant
    Filed: September 12, 2019
    Date of Patent: December 7, 2021
    Assignee: DELTA ELECTRONICS, INC.
    Inventors: Chieh-Tsao Hwang, Yen-Ting Chen
  • Publication number: 20210327720
    Abstract: A chemical-mechanical polishing (CMP) system includes a head, a polishing pad, and a magnetic system. The slurry used in the CMP process contains magnetizable abrasives. Application and control of a magnetic field, by the magnetic system, allows precise control over how the magnetizable abrasives in the slurry may be drawn toward the wafer or toward the polishing pad.
    Type: Application
    Filed: June 30, 2021
    Publication date: October 21, 2021
    Inventors: Yen-Ting Chen, Chun-Hao Kung, Tung-Kai Chen, Hui-Chi Huang, Kei-Wei Chen
  • Publication number: 20210313441
    Abstract: In an embodiment, a structure includes: a semiconductor substrate; a fin extending from the semiconductor substrate; a gate stack over the fin; an epitaxial source/drain region in the fin adjacent the gate stack; and a gate spacer disposed between the epitaxial source/drain region and the gate stack, the gate spacer including a plurality of silicon oxycarbonitride layers, each of the plurality of silicon oxycarbonitride layers having a different concentration of silicon, a different concentration of oxygen, a different concentration of carbon, and a different concentration of nitrogen.
    Type: Application
    Filed: April 1, 2020
    Publication date: October 7, 2021
    Inventors: Chien-Chih Lin, Yen-Ting Chen, Wen-Kai Lin, Szu-Chi Yang, Shih-Hao Lin, Tsung-Hung Lee, Ming-Lung Cheng
  • Patent number: 11063369
    Abstract: An antenna array includes a plurality of antenna elements disposed on the same plane. The antenna elements are arranged to form a symmetrical pattern. The symmetrical pattern is neither square nor rectangular. The antenna elements have the same output power. The radiation pattern of the antenna array includes a main lobe and a side lobe. The main lobe is higher than the side lobe by at least 18 dB.
    Type: Grant
    Filed: September 13, 2019
    Date of Patent: July 13, 2021
    Assignee: DELTA ELECTRONICS, INC.
    Inventors: Chieh-Tsao Hwang, Yen-Ting Chen
  • Patent number: 11056352
    Abstract: A chemical-mechanical polishing (CMP) system includes a head, a polishing pad, and a magnetic system. The slurry used in the CMP process contains magnetizable abrasives. Application and control of a magnetic field, by the magnetic system, allows precise control over how the magnetizable abrasives in the slurry may be drawn toward the wafer or toward the polishing pad.
    Type: Grant
    Filed: December 3, 2018
    Date of Patent: July 6, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yen-Ting Chen, Chun-Hao Kung, Tung-Kai Chen, Hui-Chi Huang, Kei-Wei Chen
  • Publication number: 20210193534
    Abstract: A semiconductor device and methods of forming the semiconductor device are described herein and are directed towards forming a source/drain contact plug for adjacent finFETs. The source/drain regions of the adjacent finFETs are embedded in an interlayer dielectric and are separated by an isolation region of a cut-metal gate (CMG) structure isolating gate electrodes of the adjacent finFETs The methods include recessing the isolation region, forming a contact plug opening through the interlayer dielectric to expose portions of a contact etch stop layer disposed over the source/drain regions through the contact plug opening, the contact etch stop layer being a different material from the material of the isolation region. Once exposed, the portions of the CESL are removed and a conductive material is formed in the contact plug opening and in contact with the source/drain regions of the adjacent finFETs and in contact with the isolation region.
    Type: Application
    Filed: December 20, 2019
    Publication date: June 24, 2021
    Inventors: Yen-Ting Chen, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
  • Patent number: 11042190
    Abstract: A smart mobile device is disclosed. The proposed smart mobile device includes a foldable screen having a front and a back, and at least one lens configured on the back, wherein the foldable screen has a surrounding perimeter, and the surrounding perimeter has at least one cut area such that when the foldable screen is folded in a specific way, the at least one lens is revealed from the at least one cut area or surrounded by a plurality of the cut areas.
    Type: Grant
    Filed: June 23, 2020
    Date of Patent: June 22, 2021
    Assignee: Hannstouch Solution Incorporated
    Inventor: Yen-Ting Chen
  • Publication number: 20210143069
    Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary semiconductor device comprises a substrate, at least two gate structures disposed over the substrate, each of the at least two gate structures including a gate electrode and a spacer disposed along sidewalls of the gate electrode, wherein the spacer includes a refill portion and a bottom portion, the refill portion of the spacer has a funnel shape such that a top surface of the refill portion of the spacer is larger than a bottom surface of the refill portion of the spacer, and a source/drain contact disposed over the substrate and between the spacers of the at least two gate structures.
    Type: Application
    Filed: December 15, 2020
    Publication date: May 13, 2021
    Inventors: Cheng-Yu Yang, Yen-Ting Chen, Wei-Yang Lee, Fu-Kai Yang, Yen-Ming Chen
  • Publication number: 20210126104
    Abstract: A semiconductor device including a gaseous spacer and a method for forming the same are disclosed. In an embodiment, a method includes forming a gate stack over a substrate; forming a first gate spacer on sidewalls of the gate stack; forming a second gate spacer over the first gate spacer; removing a portion of the second gate spacer, at least a portion of the second gate spacer remaining; removing the first gate spacer to form a first opening; and after removing the first gate spacer, removing the remaining portion of the second gate spacer through the first opening.
    Type: Application
    Filed: December 14, 2020
    Publication date: April 29, 2021
    Inventors: Yen-Ting Chen, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
  • Patent number: 10992644
    Abstract: A network security system and method thereof are provided in this disclosure. The network security system includes a server and a client device. The client device is configured for running a firewall according to a first parameter corresponding to at least one setting category, and receiving a second parameters transmitted by the server within a periodic communication interval. The client device further includes a monitoring unit. The monitoring unit is configured for checking automatically whether a setting category of the second parameter matches the at least one setting category during a communication period between the server and the client device; if the setting category of the second parameter matches the at least one setting category, setting up the firewall according to the second parameter; and if the second parameter corresponding to setting category does not match the at least one setting category, omitting the second parameter.
    Type: Grant
    Filed: October 31, 2018
    Date of Patent: April 27, 2021
    Assignee: PEGATRON CORPORATION
    Inventors: Chun-Min Liao, Yen-Ting Chen
  • Publication number: 20210118744
    Abstract: A fin structure of a FinFET device is formed over a substrate. A first layer is formed over the fin structure. A gate layer is formed over the fin structure and over the first layer. The gate layer is patterned into a gate stack that wraps around the fin structure. A second layer is formed over the first layer and over the gate stack. A first etching process is performed to remove portions of the second layer formed over the fin structure, the first layer serves as an etching-stop layer during the first etching process. A second etching process is performed to remove portions of the first layer to expose a portion of the fin structure. A removal of the portions of the first layer does not substantially affect the second layer. A source/drain region is epitaxially grown on the exposed portion of the fin structure.
    Type: Application
    Filed: December 4, 2020
    Publication date: April 22, 2021
    Inventors: Yen-Ting Chen, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen