Patents by Inventor Yohei Nakamura

Yohei Nakamura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11335535
    Abstract: Provided is a charged particle beam apparatus capable of estimating an internal device structure of a sample. The charged particle beam apparatus includes an electron beam optical system, a detector, and a calculator. The electron beam optical system irradiates a plurality of irradiation points on a sample, which are different in position or time, with an electron beam. The detector detects electrons emitted from the sample in response to irradiation of the electron beam by the electron beam optical system. The calculator calculates a dependence relationship between the irradiation points based on the electrons detected by the detector at the plurality of irradiation points.
    Type: Grant
    Filed: July 6, 2020
    Date of Patent: May 17, 2022
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Yohei Nakamura, Takafumi Miwa, Heita Kimizuka, Natsuki Tsuno, Muneyuki Fukuda
  • Publication number: 20220108866
    Abstract: A method of detecting a defect in a device using a charged particle beam includes inputting a charged particle beam condition, a light condition, and electronic device circuit information, controlling a charged particle beam applied to a sample based on the electron beam condition, controlling light applied to the sample based on the light condition, detecting second electrons emitted from the sample by the application of the charged particle beam and the light, and generating a calculation netlist based on the electronic device circuit information, generating a light irradiation netlist based on the calculation netlist and the light condition, estimating a first irradiation result when the charged particle beam and the light are applied to the sample based on the light irradiation netlist and the charged particle beam condition, and comparing the first irradiation result with a second irradiation result when the charged particle beam and the light are actually applied to the sample based on the electron beam
    Type: Application
    Filed: December 17, 2021
    Publication date: April 7, 2022
    Inventors: Yasuhiro Shirasaki, Natsuki Tsuno, Minami Shouji, Yohei Nakamura, Muneyuki Fukuda
  • Publication number: 20220102108
    Abstract: A computing unit generates a to-be-used-in-computation netlist on the basis of a to-be-used-in-calculation device model corresponding to a correction sample, estimates a first application result, on the basis of the to-be-used-in-computation netlist and an optical condition, when a charged particle beam is applied to the correction sample under the optical condition, compares the first application result and a second application result based on a detection signal when the charged particle beam is applied to the correction sample under the optical condition, and corrects the optical condition when the first application result and the second application result differ from each other.
    Type: Application
    Filed: December 8, 2021
    Publication date: March 31, 2022
    Inventors: Takafumi Miwa, Yohei Nakamura, Natsuki Tsuno, Heita Kimizuka, Muneyuki Fukuda
  • Publication number: 20220102109
    Abstract: A charged particle beam apparatus includes a database that stores a to-be-used-in-calculation device model for use in estimation of a circuit of a sample and an optical condition under which a charged particle beam is applied to the sample, a charged particle beam optical system that controls the beam applied to the sample under the optical condition, a detector that detects secondary electrons emitted from the sample excited by the application of the beam and outputs a detection signal based on the secondary electrons, and a computing unit that generates a to-be-used-in-computation netlist based on the to-be-used-in-calculation device model, estimates a first application result when the beam is applied to the sample based on the to-be-used-in-computation netlist and the optical condition, and compares the first application result with a second application result when the beam is applied to the sample based on the optical condition.
    Type: Application
    Filed: December 8, 2021
    Publication date: March 31, 2022
    Inventors: Takafumi Miwa, Yohei Nakamura, Natsuki Tsuno, Heita Kimizuka, Muneyuki Fukuda
  • Patent number: 11284859
    Abstract: Provided is a probe which transmits an ultrasonic wave to a diagnostic site and receives a reception signal which is a reflected wave.
    Type: Grant
    Filed: March 22, 2019
    Date of Patent: March 29, 2022
    Assignee: FUJIFILM Healthcare Corporation
    Inventors: Yutaka Igarashi, Shinya Kajiyama, Yohei Nakamura, Kengo Imagawa, Kazuhiro Amino, Takayuki Iwashita
  • Patent number: 11285730
    Abstract: A liquid ejection apparatus includes a plurality of liquid ejection units ejecting different types of liquids. Each liquid ejection unit includes an ejection orifice which ejects a liquid, first and second liquid tanks which store the liquid, and a liquid flow path which connects the first liquid tank and the second liquid tank to each other across the ejection orifice. The liquid ejection apparatus further includes a cap member which covers of the ejection orifices of the plurality of liquid ejection units and forms a space sealed between the ejection orifices of the plurality of liquid ejection units and the cap member, and a pressure control mechanism which simultaneously pressurizes the first and second liquid tanks.
    Type: Grant
    Filed: March 6, 2020
    Date of Patent: March 29, 2022
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yohei Nakamura, Kazuhiro Yamada
  • Publication number: 20220041164
    Abstract: A vehicle control device controls a vehicle including a drive motor connected to a rotation shaft of wheels, a battery that supplies electricity to the drive motor, and an internal combustion engine connected to the drive motor. The vehicle is equipped with, as traveling modes, a normal mode, and an eco-mode having a larger regenerative braking force than the normal mode obtained such that rotational energy of the wheels is converted into electrical energy. A controller stops the internal combustion engine and switches from the normal mode to the eco-mode when detecting at least an abnormality in the internal combustion engine during traveling of the vehicle.
    Type: Application
    Filed: December 13, 2018
    Publication date: February 10, 2022
    Applicant: NISSAN MOTOR CO., LTD.
    Inventors: Kiyoshi HOSHI, Naoki NAKADA, Kenichi GOTOU, Takayuki SHIMIZU, Yohei NAKAMURA
  • Publication number: 20220013326
    Abstract: An object of the invention is to provide a charged particle beam device capable of specifying an irradiation position of light on a sample when there is no mechanism for forming an image of backscattered electrons. The charged particle beam device according to the invention determines whether an irradiation position of a primary charged particle beam and an irradiation position of light match based on a difference between a first observation image acquired when the sample is irradiated with only the primary charged particle beam and a second observation image acquired when sample is irradiated with the light in addition to the primary charged particle beam. It is determined whether the irradiation position of the primary charged particle beam and the irradiation position of the light match using the first observation image and a measurement result by a light amount measuring device.
    Type: Application
    Filed: December 6, 2018
    Publication date: January 13, 2022
    Inventors: Katsura Takaguchi, Yohei Nakamura, Masahiro Sasajima, Toshihide Agemura, Natsuki Tsuno
  • Publication number: 20210394525
    Abstract: A liquid ejection apparatus includes a liquid storing unit capable of storing liquid, a liquid ejection unit including an ejection port that is capable of ejecting the liquid, and a pressure control unit that receives the liquid from the liquid storing unit and allows the liquid having a pressure controlled to be within a predetermined pressure range to be supplied to the liquid ejection unit. Additionally, the liquid ejection apparatus includes a first circulation unit that supplies the liquid having the pressure controlled by the pressure control unit to the ejection port while circulating the liquid between the liquid ejection unit and the pressure control unit, and a second circulation unit that circulates the liquid between the liquid storing unit and the pressure control unit.
    Type: Application
    Filed: June 11, 2021
    Publication date: December 23, 2021
    Inventors: Kazuhiro YAMADA, Yohei NAKAMURA
  • Patent number: 11191527
    Abstract: Provided is a probe which transmits an ultrasonic wave to a diagnostic site and receives a reception signal which is a reflected wave.
    Type: Grant
    Filed: March 22, 2019
    Date of Patent: December 7, 2021
    Assignee: Hitachi, Ltd.
    Inventors: Yutaka Igarashi, Shinya Kajiyama, Yohei Nakamura, Kengo Imagawa, Kazuhiro Amino, Takayuki Iwashita
  • Patent number: 11179932
    Abstract: A liquid ejection head including a recording element substrate that ejects a liquid, a flow passage member provided with a flow passage that supplies the liquid to the recording element substrate, an elastic member having elasticity disposed between the recording element substrate and the flow passage member, and a fixing member that fixes the recording element substrate and the flow passage member. In the liquid ejection head, an area between the recording element substrate and the flow passage member through which the liquid flows is sealed by having the elastic member be deformed with the fixing member.
    Type: Grant
    Filed: November 4, 2019
    Date of Patent: November 23, 2021
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Akio Saito, Toru Nakakubo, Yohei Nakamura, Zentaro Tamenaga
  • Patent number: 11175332
    Abstract: A method for measuring current-voltage characteristics representing the relationship between the drain current and the drain-source voltage of a first transistor includes: a first step of setting the drain current and the drain-source voltage using a voltage source and a current source connected in series with the first transistor and a rectifying element connected in parallel with, with the reverse polarity to, an inductive load as the current source; a second step of measuring the gate-source voltage and the gate current in the switching transient state of the first transistor; and a third step of calculating the voltage applied to the gate oxide film of the first transistor using the results of the measurement of the gate-source voltage and the gate current and acquiring the current-voltage characteristics of the first transistor using the result of the calculation.
    Type: Grant
    Filed: January 16, 2019
    Date of Patent: November 16, 2021
    Assignee: Rohm Co., Ltd.
    Inventors: Yohei Nakamura, Tatsuya Yanagi
  • Patent number: 11084300
    Abstract: A liquid discharge head includes a recording element substrate. The recording element substrate includes a discharge aperture forming member defining a discharge aperture from which a liquid is discharged and a substrate having a pressure generating element that pressurizes the liquid so as to discharge the liquid. The liquid discharge head also includes a cover member that defines an opening through which the discharge aperture is exposed. The cover member is disposed on a side of the recording element substrate on which the discharge aperture is formed. In the liquid discharge head, the recording element substrate further includes an electrode disposed on a side of the substrate on which the discharge aperture forming member is formed and an insulation member that covers the electrode. In addition, the insulation member is covered by the cover member.
    Type: Grant
    Filed: October 17, 2019
    Date of Patent: August 10, 2021
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yohei Nakamura, Akio Saito, Zentaro Tamenaga, Toru Nakakubo
  • Patent number: 11043358
    Abstract: A measuring apparatus that irradiates a sample with a charged particle beam to observe the sample includes a particle source that outputs the charged particle beam, a lens that collects the charged particle beam, a detector that detects a signal of emitted electrons emitted from the sample which is irradiated with the charged particle beam, and a control device that controls the output of the charged particle beam and the detection of the signal of the emitted electrons in accordance with an observation condition, in which the control device sets, as the observation condition, a first parameter for controlling an irradiation cycle of the charged particle beam, a second parameter for controlling a pulse width of the pulsed charged particle beam, and a third parameter for controlling detection timing of the signal of the emitted electron within the irradiation time of the pulsed charged particle beam, and the third parameter is determined in accordance with a difference in intensity of signals of the plurality
    Type: Grant
    Filed: May 12, 2017
    Date of Patent: June 22, 2021
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Ryoko Araki, Natsuki Tsuno, Yohei Nakamura, Masahiro Sasajima, Mitsuhiro Nakamura, Toshihide Agemura
  • Patent number: 11043359
    Abstract: Provided are a charged particle beam apparatus and a charged particle beam inspection system capable of estimating electrical characteristics of a sample including capacitance characteristics. The charged particle beam apparatus estimates electrical characteristics of the sample using the correspondence data representing the correspondence between the node of the netlist and the coordinate on the sample and the pulsing condition when the sample is irradiated with the charged particle beam in a pulsed manner. The charged particle beam optical system irradiates a predetermined coordinate on the sample with a charged particle beam based on a pulsing condition, and the detector actually measures an emission amount of electrons.
    Type: Grant
    Filed: July 6, 2020
    Date of Patent: June 22, 2021
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Yohei Nakamura, Natsuki Tsuno, Heita Kimizuka, Takafumi Miwa, Muneyuki Fukuda, Junichi Tanaka
  • Publication number: 20210171037
    Abstract: At the time of starting a vehicle, if the vehicle is stopped even without an operation of braking the vehicle, a drive force to be generated before an actual start of the vehicle is limited to or below a predetermined maximum drive force.
    Type: Application
    Filed: December 15, 2017
    Publication date: June 10, 2021
    Applicant: NISSAN MOTOR CO., LTD.
    Inventors: Michihiko MATSUMOTO, Yohei NAKAMURA, Toshiyuki MURATA, Tetsuya IKEDA
  • Publication number: 20210162869
    Abstract: A regenerative braking control method and a regenerative braking control device of the present invention control a drive source that generates a regenerative brake force in such a manner that an upper limit of regenerative deceleration when a driver executes manual control becomes smaller than an upper limit of regenerative deceleration when automatic control is executed.
    Type: Application
    Filed: December 15, 2017
    Publication date: June 3, 2021
    Applicant: NISSAN MOTOR CO., LTD.
    Inventors: Yohei NAKAMURA, Masafumi KURODA, Yuji WADA, Michihiko MATSUMOTO
  • Publication number: 20210129553
    Abstract: A liquid ejection apparatus capable of suppressing the amount of liquid to discharge by recovery processing is provided. The liquid ejection apparatus includes: a first path fluidly connected to an ejection port unit and provided with a deformable region; and a second path fluidly connected to the first path via the ejection port unit and provided with a deformable region. Here, a flow of liquid is generated between the first path and the second path by a displacement unit.
    Type: Application
    Filed: October 27, 2020
    Publication date: May 6, 2021
    Inventors: Naozumi Nabeshima, Kazuhiro Yamada, Yohei Nakamura, Yoshiyuki Nakagawa
  • Patent number: 10971347
    Abstract: In order to provide a charged particle beam apparatus capable of stably detecting secondary particles and electromagnetic waves even for a non-conductive sample under high vacuum environment and enabling excellent observation and analysis, the charged particle beam apparatus includes a charged particle gun (12), scanning deflectors (17 and 18) configured to scan a charged particle beam (20) emitted from the charged particle gun (12) onto a sample (21), detectors (40 and 41) configured to detect a scanning control voltage input from an outside into the scanning deflectors, an arithmetic unit (42) configured to calculate, based on the detected scanning control voltage, irradiation pixel coordinates for the charged particle beam; and an irradiation controller (45) configured to control irradiation of the sample with the charged particle beam according to the irradiation pixel coordinates.
    Type: Grant
    Filed: June 23, 2016
    Date of Patent: April 6, 2021
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Mitsuhiro Nakamura, Hironori Itabashi, Hirofumi Satou, Tsutomu Saito, Masahiro Sasajima, Natsuki Tsuno, Yohei Nakamura
  • Publication number: 20210078410
    Abstract: A drive force control part 5 controls a drive force such that a force caused by a change in the drive force to rearwardly tilt a drive source 1 and push a mount member is made smaller than an external force threshold value. In a first region in which the drive force is equal to or above a predetermined lower limit value, the drive force control part 5 limits a change rate per unit time of the drive force to or below a predetermined maximum rate, and in a second region in which the drive force is smaller than the lower limit value, does not limit the change rate per unit time of the drive force to or below the maximum rate.
    Type: Application
    Filed: December 15, 2017
    Publication date: March 18, 2021
    Applicant: Nissan Motor Co., Ltd.
    Inventors: Yoshinori Seki, Yohei Nakamura, Takashi Nanjo