Abstract: A sputtering method of depositing a titanium nitride film on a titanium film in contact with a silicon at a bottom of a contact hole is provided, wherein the sputtering method is carried out at a temperature of the silicon region of not less than 450° C., so that the titanium nitride film has a compressive stress of not higher than 5×109 dyne/cm2 whereby the titanium film has such a high stability as preventing any crack upon changing the compressive stress to a tensile stress by a heat treatment.

Abstract: This invention allows storage electric power to be secured at a maximum by reducing variation in potential between a plurality of capacitors constituting an electric power storage device as follows. A plurality of capacitor banks are provided, in parallel, in the electric power storage device. A part of the respective capacitor banks is halted depending on the current flowing through the electric power storage device. Electric charge of the respective capacitor parallel circuits is individually discharged in the halted capacitor bank, thereby, the terminal voltage of the respective capacitor parallel circuits are equalized.

Abstract: An apparatus for sucking a function liquid droplet ejection head has an ejector and an arrangement for supplying the ejector with a working fluid. A cap is brought into close contact with a nozzle surface of the function liquid droplet ejection head, and the ejector is operated to thereby suck the nozzle surface through the cap by means of the working fluid.

Abstract: A liquid drop ejecting device is provided with liquid drop ejecting heads having different specifications from each other and plural dummy load circuits which apply electric loads to the liquid drop ejecting heads, and analogue switches for switching the dummy load circuit which is connected to the liquid drop ejecting heads according to the liquid drop ejecting head to be driven. By doing this, it is possible to provide a liquid drop ejecting device and a method therefor, a layer forming device and a method for forming a layer, a method for manufacturing a device, and an electronic apparatus without deteriorating a quality of the printed image.

Abstract: In a multiplexing repeater a transmitting part is provided with: GbE receiving circuits 101 and 102 of two channels for receiving GbE signals; FIFO memories 105 and 106 which are connected thereto, respectively, and which can be written and read out by independent clocks of two channels; a multiplexing circuit 109 for multiplexing read-out signals of two channels; an OTU frame generating circuit 111 for mapping the multiplexed two-channel signals over an OTU payload of an OTU frame; and an optical transmitting circuit 115 for transmitting a transmission signal of an OTU frame structure.

Abstract: A liquid droplet ejection apparatus in which a function liquid droplet is selectively ejected toward a workpiece while carrying out a relative movement between a function liquid droplet ejection head and the workpiece is made up of: a plurality of function liquid droplet ejection heads; a carriage for mounting thereon the plurality of function liquid droplet ejection heads; a head stocker for stocking the plurality of function liquid droplet ejection heads; and a head transfer mechanism for transferring each of the plurality of function liquid droplet ejection heads between the carriage and the head stocker. The function liquid droplet ejection heads are automatically replaced, so that the liquid droplet ejection apparatus can perform the workpiece processing efficiently.

Abstract: A liquid droplet ejection apparatus in which a function liquid droplet is selectively ejected toward a workpiece while carrying out a relative movement between a function liquid droplet ejection head and the workpiece is made up of: a plurality of function liquid droplet ejection heads; a carriage for mounting thereon the plurality of function liquid droplet ejection heads; a head stocker for stocking the plurality of function liquid droplet ejection heads; and a head transfer mechanism for transferring each of the plurality of function liquid droplet ejection heads between the carriage and the head stocker. The function liquid droplet ejection heads are automatically replaced, so that the liquid droplet ejection apparatus can perform the workpiece processing efficiently.

Abstract: In a hybrid drive device which drives an electrical motor with electrical power from a storage device and/or from a generator driven by an engine, a secondary battery is generally used as the storage device. However, the storage device must be replaced at fixed intervals due to a short battery life. In addition, the low charging/discharging efficiency of a secondary battery limits improvements in fuel economy of the drive device. The present invention avoids these shortcomings by providing a storage device that includes a condenser bank with a plurality of condenser cells connected in series, parallel monitors which are connected in parallel to each condenser cell and which bypasses the charging current when the respective terminal voltages exceed a fixed value, and a switching converter with fixed current output characteristics which controls the charging electrical power to the condenser bank.

Abstract: The present invention provides a head drive unit capable of discharging a required amount of viscous body from a head having a pressure generating element, such as a piezoelectric element, and a method of the same, a droplet discharge unit having the head drive unit, a head drive program, and a device manufacturing method having a process of discharging the viscous body by the method as one of manufacturing processes. In the invention, a driving signal is a signal to be applied to a pressure generating element, such as a piezoelectric element, provided to a head and is generated in synchronization with a clock signal. The driving signal has a period to vary the voltage and a period to hold the voltage.

Abstract: An ink jet head 22 of linear form which consists of a plurality of nozzles 27 arranged as a nozzle row 28 is provided in an ink jet device for manufacture of a color filter. Filter element material 13 from the nozzles 27 which differ from the motherboard 12 is discharged four superimposed times by the plurality of nozzles 27, and is formed to a predetermined film thickness upon a single filter element 3. It is possible to prevent the occurrence of undesirable deviations in film thickness between different ones of the filter elements 3, so that it is possible to flatten and make even the optical transparency characteristic of the resulting color filter 1.

Abstract: A semiconductor device with satisfactory bonding ability of a plasma SiOF oxide layer on a wiring and satisfactory burying ability for burying wiring space portions. The semiconductor substrate, forming an anti-reflection layer of a refractory metal or compound thereof, on the metal layer, and forming an insulation layer on the anti-reflection layer. There after, the insulation layer is patterned and a wiring is formed by etching the anti-reflection layer and the metal layer while taking the patterned insulation layer as a mask and leaving the anti-reflection layer and the insulation layer on the wiring. Subsequently, the patterned wiring is buried with an SiOF layer as an Si oxide layer containing fluorine, together with the anti-reflection layer and the insulation layer on the upper surface thereby.

Abstract: In an ink jet apparatus for manufacturing a color filter 1, ink jet heads 22 having a plurality of nozzle 27 are disposed in a linear manner. Filter element member is ejected to a motherboard 12 from a plurality of nozzles 27 four times so as to form the filter element 3 in a predetermined thickness. By doing this, it is possible to prevent difference in the thickness in a plurality of the filter elements 3 and to equalize light transparency in planar manner. Thus, in an ejecting apparatus, a color filter can be formed in more common way at low cost and more efficiently. Also, it is possible to provide an ejecting apparatus which can equalize factors such as electrooptical characteristics of the electrooptical members, color displaying characteristics by the liquid crystal apparatuses, and illuminating characteristics by an EL surface.

Abstract: In an ink jet apparatus for manufacturing a color filter 1, ink jet heads 22 having a plurality of nozzle 27 are disposed in a linear manner. Filter element member is ejected to a motherboard 12 from a plurality of nozzles 27 four times so as to form the filter element 3 in a predetermined thickness. By doing this, it is possible to prevent difference in the thickness in a plurality of the filter elements 3 and to equalize light transparency in planar manner. Thus, in an ejecting apparatus, a color filter can be formed in more common way at low cost and more efficiently. Also, it is possible to provide an ejecting apparatus which can equalize factors such as electrooptic characteristics of the electrooptic members, color displaying characteristics by the liquid crystal apparatuses, and illuminating characteristics by an EL surface.

Abstract: In a chromatograph comprising a pump, a sample injecting unit, a column, a photo-diode array detector and a data processing unit having a spectrum library of registered spectrums of known components, a spectrum selected in advance from the spectrum library is compared with a spectrum of each of peaks in an actual sample. Thereby, it is possible to reduce the number of spectrum comparisons required for identification, and it is further possible to perform identification quickly since the identification can be performed during analysis.

Abstract: An apparatus for assembling a head unit has a carriage, a recognition apparatus for image-wise recognizing a position of each of liquid droplet ejection heads, a moving apparatus for moving the carriage, a correction apparatus for slightly moving head holding members, a fixing apparatus for fixing each of the head holding members, and a controller. The controller drives the moving apparatus based on a result of recognition by the recognition apparatus, and then positions each of the liquid droplet ejection heads to the carriage, and then each of the liquid droplet ejection heads is fixed to the head holding members.

Abstract: A member to be recognized for alignment is disposed in an object to be set in position and having formed therein a mark for image-wise recognition. The member is made up of a member main body formed substantially in a columnar shape and having a mirror-finished front end surface. The mark is formed into a depressed shape in substantially central part of the front end surface of the member main body.

Abstract: A liquid droplet ejection head has a liquid introduction part, a pump part which is in communication with the liquid introduction part, and a nozzle forming plate in which a nozzle port is formed in an overlapped manner with the pump part. The nozzle forming plate is formed substantially into a rectangle as seen from a liquid ejection side. A resin is molded in at least one of side surface portions along at least long sides of the nozzle forming plate.

Abstract: A vehicle has a power extraction mechanism 8, 9, 10a, 10b, 10c, which transmits the rotation of the power transmission mechanism to the auxiliary machines 20, 21, a solenoid clutch 11, which enables or disables the transmission of rotation to the auxiliary machines by the power extraction mechanism, and a determination device 30, 31, 32, which determines whether a control system of the motor 22 for auxiliary machines is operating abnormally or normally. The solenoid clutch 11 is maintained in a disengaged state when the control system of the motor 22 for the auxiliary machines is operating normally. In contrast, when an abnormality is detected in the control system, the auxiliary machines are driven by the rotational force of the power transmission mechanism because the solenoid clutch 11 is engaged at that time. In this manner, it is possible to maintain normal operation of the vehicle by driving the auxiliary machines even when there is an abnormality in the control system.

Abstract: An inputting device, an electronic instrument using this inputting device, and an inputting method thereof, in which displacement of an operating section in the direction slanting for the X or the Y direction is detected and the movement of a moving object such as a cursor on a display can be controlled easily and precisely, are provided. The operating section is displaced about in the horizontal direction and the vertical direction for a plane being almost parallel to the surface of a cabinet. In case that orthogonal coordinates having the X axis and the Y axis are set on the plane being almost parallel to the surface of the cabinet, horizontal direction sensors detect the displacement of the operating section in the direction slanting for the X or Y direction, in addition to in the X or Y direction. The cursor moves on the display based on the displacement of the operating section about in the horizontal direction.

Abstract: A substrate processing apparatus for providing predetermined processing to wafers brought in through the load port door comprises in the front of the load port door a load port table on which a wafer carrier accommodating a plurality of wafers is placed, and a shield plate is provided so as to surround the load port table.