Abstract: Disclosed is a substrate processing apparatus including: a substrate processing unit that performs substrate processing by supplying a processing liquid to a substrate to be processed; a positioning mechanism that contacts the sides of the substrate to determine the position of the substrate; a positioning driver that drives the positioning mechanism; a detector that detects the position of the positioning mechanism; a storage unit that stores the position of the positioning mechanism with respect to a reference substrate serving as a reference of the substrate as a reference position information; and an operator that calculates a difference between the reference position information and the position information of the positioning mechanism detected in the detector and calculates measurement information on the processed substrate based on the difference.

Abstract: A liquid processing apparatus comprises: a second housing 20; a first housing 10 capable of being brought into contact with the second housing 20; a holding part 1 configured to hold an object to be processed W; a rotation driving part 60 configured to rotate the object to be processed W held by the holding part 1; front-side process-liquid supply nozzles 51a and 52a configured to supply a process liquid onto a peripheral portion of a front surface of the object to be processed W held by the holding part 1; and a storage part 23 disposed on a side of a rear surface of the object to be processed W held by the holding part 1, the storage part 23 being configured to store the process liquid having been passed through the object to be processed W. The respective first housing 10 and the second housing 20 can be moved in one direction, so that the first housing 10 and the second housing 20 can be brought into contact with each other and separated apart from each other.

Abstract: Disclosed is a liquid processing apparatus and a liquid processing method, which can process an entire wafer at a sufficiently high temperature and can sufficiently suppress adhesion of particles on a surface of the wafer, when the peripheral portion of the wafer is processed. The liquid processing apparatus includes a holding part to hold the substrate, a rotation driving part to rotate the holding part, and a shield unit. The shield unit includes an opposed plate opposed to the substrate held by the holding part, a heating part to heat the substrate through the opposed plate, and a heated gas supplying part to supply heated gas to a surface of the substrate held by the holding part.

Abstract: A processing system 1 comprises: a processing vessel 30 configured to accommodate an object to be processed W in a processing space 83; a process-fluid generating part 41 configured to generate a process fluid of a predetermined temperature; and a main duct 56 arranged between the process-fluid generating part 41 and the processing vessel 30, the main duct 56 being configured to guide the process fluid supplied from the process-fluid generating part 41. A process-fluid supply duct 171 is arranged on a downstream side of the main duct 56 via a switching valve 70, the process-fluid supply duct 171 being configured to introduce the process fluid into the processing space 83 of the processing vessel 30. A process-fluid bypass duct 172 is arranged on the downstream side of the main duct 56 via the switching valve 70, the process-fluid bypass duct 172 being configured to guide a process fluid, which is not introduced to the process-fluid supply duct 171, so as to bypass the processing space 83.

Abstract: In a processing system adapted for processing an object to be processed, by supplying a processing fluid into a processing vessel, the supply of the processing fluid into the processing vessel is significantly stabilized. This processing system includes the processing vessel configured to contain the object to be processed, a processing fluid generating unit configured to generate the processing fluid, a processing-side fluid passage configured for supplying the processing fluid generated in the processing fluid generating unit into the processing vessel, and a discharge fluid passage configured for discharging the processing fluid from the processing vessel.

Abstract: The present invention is to provide an AC type PDP which can be manufactured by an inexpensive thick-film process without a thin-film process which is difficult to manufacture an MgO protection layer and the like and which has a panel structure that can be driven at a low voltage. Of a pair of discharge electrodes, one electrode is formed as a so-called AC type electrode in which a conducting electrode material is formed as an independent floating electrode separated at every pixel, this floating electrode being connected through a dielectric layer to a bus electrode in a capacity coupling fashion. The other discharge electrode is formed as a so-called DC type electrode in which a bus electrode is exposed to the discharge space as it is.

Abstract: Almost only choice by a secondary electron emission layer/protection layer covering the dielectric layer of an AC type PDP has been magnesium oxide (MgO) that is unstable during the production process and difficult to form, thus posing a serious production problem. An AC type PDP constructed such that, instead of covering the surface of a dielectric layer with a dielectric material such as MgO, an insular electrode is made by forming a conductive material such as nickel, aluminum, magnesium and lanthanum hexaboride into an insular shape, and the insular electrode is allowed to capacity-couple with a lower-layer bus electrode by means of an electrostatic capacity formed by a dielectric layer to operate the insular electrode as a sustained electrode.

Abstract: Almost only choice by a secondary electron emission layer/protection layer covering the dielectric layer of an AC type PDP has been magnesium oxide (MgO) that is unstable during the production process and difficult to form, thus posing a serious production problem. An AC type PDP constructed such that, instead of covering the surface of a dielectric layer (3) with a dielectric material such as MgO, an insular electrode (4) is made by forming a conductive material such as nickel, aluminum, magnesium and lanthanum hexaboride into an insular shape, and the insular electrode (4) is allowed to capacity-couple with a lower-layer bus electrode (9) by means of an electrostatic capacity formed by a dielectric layer (3) to operate the insular electrode (4) as a sustained electrode.

Abstract: According to the present invention, in a plasma display discharge tube in which a plurality of stripe-like anode electrodes (11) and a plurality of stripe-like cathode electrodes (9) are arranged at a predetermined interval to be crossed each other, to thereby constitute an X-Y matrix electrode with a space at each of the crossing portions thereof as a pixel and a plurality of pixels are selectively excited according to an image to display an image, there is provided a plasma display discharge tube in which there are provided an AC type memory electrode (1) arranged opposite to the X-Y matrix electrode (9) and (11) common to all the pixels, and an AC type auxiliary electrode (5) in contact with the AC type memory electrode (1) through an insulating layer and supplying an electric power through a coupling capacitor formed between the same and the AC type memory electrode (1), wherein a memory discharge display is performed between the X-Y matrix electrode (9) and (11) and the AC type memory electrode (1).

Abstract: The present invention is to provide a front glass substrate for a display tube in which a plurality of grooves (2) having similar cross-sections of approximately V-shapes and which also have approximately flat top portions are formed on one surface side of a glass substrate (1) in parallel to each other at a constant interval and in which fluorescent substance layers (3) are deposited on the top portions and the inner wall surfaces of a plurality of groove (2). According to the present invention, the amount in which the fluorescent substances are coated within the grooves can increase. In addition, since light of fluorescent substance can be efficiently radiated to the front surface side from the side surfaces of the grooves in which the coated amount of the fluorescent substances were increased, there can be obtained a front glass substrate for a display tube in which brightness and luminous efficiency can be improved.

Abstract: The present invention is to provide a planar discharge display device including projection-like structure members (8) respectively formed on spaces between a plurality of unit discharge display portions and unit discharge display portions adjoining to the respective unit discharge display portions of one and the other of a rear glass substrate (1) and a front glass substrate (12), recesses (11) engaged with the projection-like structure members (8) and glass frits (14), (13) respectively interposed on the surrounding portions of the rear glass substrate (1) and the front glass substrate (12) and between the respective projection-like structure members (8) and the recesses (11) engaged with the projection-like structure members (8) in which the rear glass substrate (1) and the front glass substrate (12) are joined with pressure under the condition in which the glass frits (14), (13) are being heated to thereby form a vacuum flat tube-assembly into which a discharge gas is filled.

Abstract: The present invention comprises: first electrodes (2) formed by a plurality of stripe-shaped electrodes formed in parallel to each other on a glass substrate (1); a first dielectric layer (3) formed on the glass substrate (1) so as to cover the first electrodes (2); an insulation layer (4) formed on the first dielectric layer (3), the insulation layer being made of a material that is lower in dielectric constant than the first dielectric layer (3); second electrodes (5) formed by a plurality of stripe-shaped electrodes formed on the insulation layer (4) in parallel to each other so as to cross the plurality of stripe-shaped electrodes forming the first electrodes (2); a plurality of through-holes (7) provided in such positions, in every space between the plurality of stripe-shaped electrodes forming the second electrodes (5), as to respectively correspond to the plurality of stripe-shaped electrodes forming the first electrodes (2) and bored in the insulation layer (4) so as to reach the surface of the first

Abstract: According to the present invention, in a driving method for an AC type discharge display device having one pair of discharge electrodes which are opposite to each other to cross through a discharge gas and each of which is constituted by a plurality of line-shaped electrodes, the plurality of line-shaped electrodes of at least one discharge electrode of the one pair of discharge electrodes being covered with a dielectric layer, an AC discharge keeping pulse Vxy to be applied across one pair of discharge electrodes is constituted by a first pulse and a second pulse having a polarity reverse to the polarity of the first pulse and generated next to the first pulse, the first pulse is made a narrow-width pulse having a pulse width set within a time in which a priming effect of charged particles or metastable atoms generated by the first pulse is kept in a discharge space, the second pulse is made a wide-width pulse which is generated before the priming effect obtained by the first pulse is disappeared and within

Abstract: A discharge display apparatus includes a plurality of first address electrodes (1) and a plurality of second address electrodes (2) both of which are disposed adjacent to each other so as to cross each other through a partition (6) and memory electrodes (3, 4) which have a plurality of apertures provided therethrough and are entirely covered with respective insulating layers (3a, 4a). The plurality of first and second address electrodes (1, 2) and the memory electrode (3, 4) are successively laminated and sealed into a tube body having discharge gas.

Abstract: A method of driving an indicator tube comprised of a pair of common memory electrode plates and independent address XY electrode groups separate therefrom comprises the steps of, in a case where an address discharge is to be carried out by the XY electrode groups from a state that no wall charge uniformly exists on wall surfaces of the pair of memory electrodes in all cells on a picture screen or on a line to be addressed, holding one of the pair of memory electrodes at a potential higher than a discharge space potential generated by an address discharge in a range such that a discharge is not caused on the low voltage side of the address electrode during an address period, holding the other of the pair of memory electrodes at a potential lower than the discharge space potential in a range such that a discharge is not caused on the high voltage side of the address electrode, selectively accumulating charged particles generated by the address discharge in cells disposed at the positions corresponding to an ima

Abstract: The present invention provides a method for measuring the amount of free sulfurous acid and bound sulfurous acid in a sample using a bacterium belonging to Thiobacillus thiooxidans or Thiobacillus ferrooxidans of in which the sample is treated with acid and/or alkali to give free sulfurous acid alone in the sample. Then, the total amount of free sulfurous acid in the sample is measured by an oxidation reaction of free sulfurous acid to sulfuric acid using a bacterium belonging to Thiobacillus thiooxidans or Thiobacillus ferrooxidans.

Abstract: The present invention is directed to a discharge tube for use with a display device which is simple in structure and which can be mass-produced satisfactorily. Further, the discharge tube for display device of the present invention can be increased in resolution and can be made large in size with ease. Furthermore, the discharge tube for use with a display device of the present invention can be made inexpensive with ease. A pair of memory elements (Ma), (Mb) having memory electrodes (3a), (3b) formed of conductive layers having a plurality of apertures (5a), (5b) arranged in an XY matrix form and in which the whole surface of the memory electrodes (3a), (3b) are covered with insulating layers (4a), (4b) are laminated such that corresponding apertures (5a), (5b) covered with the insulating layers (4a), (4b) are communicated with each other to thereby form discharge cells. all of which are sealed into a tube body in which a discharging gas is sealed.

Abstract: A flat panel display device which has first and second insulating plates with at least one of the plates being transparent and a first plurality of parallel extending electrodes mounted on one side of the first plate and at least a second electrode mounted on one side of the second plate and covered with an insulating layer and a third plurality of parallel extending electrodes mounted on the insulating layer at a predetermined angle to the first electrodes with the first electrodes being spaced from and opposed to the third electrodes so as to define a cross-conductor matrix and a plurality of parallel insulating barriers mounted between the first electrodes and trigger and sequence pulses connected to the various electrodes so as to produce display signals so as to substantially reduce the number of driving electrodes required and also to reduce the driving voltages.

Abstract: A flat panel display apparatus is disclosed which includes first and second insulating plates at least one of which is transparent, a first plurality of parallel electrodes mounted on one surface of the first plate, a second plurality of parallel electrodes mounted on one surface of the second plate to intersect at a predetermined angle to the first electrodes, the first electrodes being spaced with and opposed to the second electrodes to define a cross conductor matrix for locating glowing regions, and a plurality of parallel insulating barriers mounted on at least one surface of the first plate so as to extend in parallel with the first electrodes and project toward the second plate, the barriers having the same pattern, pitch and width as that of the first electrodes, and each of the barriers overlapping the respective one side edge portion of one of the first electrodes, and the first and second plates being joined together with their outer edges sealed and gas capable of glowing mounted between the plate

Abstract: A display apparatus includes a first panel having an electrode provided on one surface thereof, a second panel having an electrode provided on the surface thereof facing to the electrode of the first panel, display material intervened between the electrodes of the first and second panels and a spacer disposed between the first and second panels, the peripheral portions of the first and second panels being sealed by sealing material. In this case, one of the first and second panels comprises a substrate and an elastic plate which is sealed to the substrate with its periphery, and fluid is sealed into a space defined by the substrate and elastic plate with such a pressure that the elastic plate contacts the spacer.