Abstract: A teaching method of a robot which supports a transported matter with a hand and transports the transported matter between two or more reception spots, includes: a jig disposing process of disposing a positioning jig at the reception spot so as to have the same center axis as the transported matter when the transported matter is placed at the reception spot; and a teaching process of moving the hand to a position at which an abutting portion of the hand abuts the positioning jig at each of the reception spots and teaching the position of the hand to a controller.

Abstract: There is provided a substrate processing method, in which a throughput can be improved even in case the time for recovery processing for restoring the state of a processing chamber is longer than the time for predetermined processing to be performed in the processing chamber. Substrates are alternately transferred to two processing chambers C, D, and the same film forming processing is performed on the substrates in the processing chambers C, D in parallel with each other. When the number of substrates processed in the processing chamber C has reached a predetermined number (11 substrates), dummy sputtering processing in the film forming chamber C is started and also 23rd-25th substrates of the first lot are transferred to the film forming chamber D to thereby perform film forming processing until the dummy sputtering processing is finished.

Abstract: At the time of detecting a position of a shutter plate, a laser light, for instance, is radiated from a detector (an optical sensor). The radiated laser light reaches the shutter plate through a window of a chamber. Then, the laser light is reflected by the surface of the shutter plate and re-enters the detector. The detector detects the time required from the emission of the laser light to the entry of the reflected light.

Abstract: There is provided a robot hand for substrate transfer in which the robot hand is so arranged that, even in case a substrate (S) gives rise to warping, the substrate (S) can be stably supported. On an upper surface of the robot hand there is formed a first seating surface on which is seated a lower-surface peripheral portion of the substrate (S) and, on a periphery thereof, there is formed an upwardly extended step. The step is provided with a plurality of stair-shaped stages. On an upper surface of the robot hand inwardly away from the first seating surface there is provided a second seating surface which is inclined downward toward the center of the substrate (S) such that a lower surface of the substrate (S) is seated on the second seating surface when the substrate (S) is warped downward into a concave shape.

Abstract: There is provided a robot hand for substrate transfer in which the robot hand is so arranged that, even in case a substrate (S) gives rise to warping, the substrate (S) can be stably supported. On an upper surface of the robot hand there is formed a first seating surface on which is seated a lower-surface peripheral portion of the substrate (S) and, on a periphery thereof, there is formed an upwardly extended step. The step is provided with a plurality of stair-shaped stages. On an upper surface of the robot hand inwardly away from the first seating surface there is provided a second seating surface which is inclined downward toward the center of the substrate (S) such that a lower surface of the substrate (S) is seated on the second seating surface when the substrate (S) is warped downward into a concave shape.

Abstract: There is provided a method of detecting a stop of a transport means in which the stop of the transport means after operation can be quickly and easily detected and in which the throughput and the ratio of utilization can be improved without incurring an increase in the number of parts. An apparatus is used which is provided with a drive motor and a transport arm one side of which is mounted on a rotary shaft of the drive motor. As the drive motor there is used one in which an induced electromotive force is generated when a force in the direction of rotation is applied to the rotary shaft. Then, an article S to be transported is held on the other side of the transport arm. When the above-described drive motor is operated to drive the rotary shaft by a predetermined angle of rotation and then stopped, the above-described induced electromotive force to be generated due to the vibrations of the transport arm is detected.

Abstract: A method of controlling a transfer robot is provided, in which method the communication time of the transfer robot can be reduced and the transfer time of a substrate can be shortened. A series of actions of the transfer robot when a substrate that is present in a processing chamber is transferred to a predetermined position in a processing chamber, are performed by a single command. The series of actions may include a swap action in which, after having taken out by a robot hand the substrate that is present in the processing chamber, a substrate that is different from the substrate is handed over by a robot hand to a predetermined position on the processing chamber.

Abstract: In a processing apparatus having: moveable parts disposed to form a predetermined processing environment within a processing chamber in which a predetermined processing is performed on an object to be processed; and a control means for controlling the operation of each of the moveable parts, abnormality inclusive of deterioration with time of the moveable parts constituting the processing apparatus is made to be easily judged. There is provided a vibration detection means for detecting the waveforms of vibrations that occur accompanied by the operation of the moveable parts. When control is made from the control means in order to operate any one of the moveable parts, there are obtained event data corresponding to the control and the waveforms of vibrations of all the moveable parts that are operating simultaneously at the time in question.

Abstract: There is provided a teaching method for a transfer robot which is capable of quickly performing teaching at high reliability. Relative to a transfer robot which, in a state in which a substrate to be processed in a plurality of processing chambers is supported, transfers the substrate to a predetermined position by turning and telescopic action on the same plane, teaching is made of the transfer actions. At this time, by using at least one detection means that is disposed so as to detect the substrate when the substrate is transferred among the processing chambers, the transfer robot is caused to perform transfer action. At least one index part provided in advance on an operating part of the transfer robot is detected by the detection means. From this detection position, a reference position which serves as an origin of at least one of the turning action and the telescopic action is taught.

Abstract: A technology to resolve positional deviations without using a transport robot. An object to be transported placed on a holding stand is rotated, so as to make an error angle ? to be zero; and thereafter, a temporarily placing portion is made to move obliquely to move for an error distance in a horizontal component, thereby locating the center of the object to be transported on the central axis line of the holding stand; and the object to be transported is placed on holding stand. In a case where an orientation of a notch is definite, the holding stand is further rotated by a desired amount. Without using the transport robot, it is possible to resolve an error angle and an error distance.

Abstract: There is provided a robot hand for substrate transfer in which the robot hand is so arranged that, even in case a substrate (S) gives rise to warping, the substrate (S) can be stably supported. On an upper surface of the robot hand there is formed a first seating surface on which is seated a lower-surface peripheral portion of the substrate (S) and, on a periphery thereof, there is formed an upwardly extended step. The step is provided with a plurality of stair-shaped stages. On an upper surface of the robot hand inwardly away from the first seating surface there is provided a second seating surface which is inclined downward toward the center of the substrate (S) such that a lower surface of the substrate (S) is seated on the second seating surface when the substrate (S) is warped downward into a concave shape.

Abstract: Provided is a substrate transfer robot which can surely eliminate adhesion, shifting, dropping and the like of a substrate at the time of transferring the substrate. A vacuum processing apparatus provided with such substrate transfer robot is also provided. The substrate transfer robot is provided with a substrate receiving section for placing the substrate; a plurality of substrate slip preventing members, which are arranged on the upper surface of the substrate receiving section at intervals and are composed of an elastic material; and a extendable/retractable arm section whereupon the substrate receiving section is arranged at the leading end. On the upper end surface of the substrate slip preventing member, a protruding section is arranged. The vacuum processing apparatus is configured as a multi-chamber vacuum processing apparatus provided with the substrate transfer robot.

Abstract: The object of this invention is to provide an electrostatic chuck device which can properly and promptly diselectrify a substrate to be processed. In an electrostatic chuck device attracting a substrate to be processed on the surface of a susceptor electrically, a diselectrifying circuit is provided which includes diselectrifying electrode means facing the surface of the susceptor, a diselectrifying potential, and a diselectrifying resistance connected between the diselectrifying electrode means and the diselectrifying potential. The resistance value of the diselectrifying resistance is established such that it is lower than that of an insulating layer of the surface of the susceptor and the diselectrifying resistance can hold the potential of the substrate during an electrostatic chuck operation, such that the diselectrifying resistance can dissipate the potential of the substrate into the ground potential when the electrostatic chuck is canceled.

Abstract: There is provided a method of manufacturing an electrostatic chuck which is free from fluctuations in performance or incomplete detachment from the beginning of use, without being influenced by the impurities that remain on the surface of, or in the inside of, a dielectric layer at the time of manufacturing thereof, in case the dielectric layer which comes into contact with an article to be held by the electrostatic chuck is made of silicone rubber or resin. Before assembling the dielectric layer into the surface of a base having disposed thereon an electrode, or after the dielectric layer has been assembled into the surface of the base, a step is performed in which a heating plate that has been heated to a predetermined temperature is pressed against the contact surface of the dielectric layer.

Abstract: The object of this invention is to provide that an electrostatic chuck device which can properly and promptly diselectrify a substrate to be processed. In an electrostatic chuck device (11) attracting a substrate (W) to be processed on the surface of a susceptor (12) electrically, a diselectrifying circuit is provided which includes diselectrifying electrode means (16) facing the surface of the susceptor (12), a diselectrifying potential (19), and a diselectrifying resistance (17) connected between the diselectrifying electrode means (16) and the diselectrifying potential (19).

Abstract: There is provided a low-cost diagnosis system for a transport robot which is capable of improving the apparatus operating rate without incurring an increase in the number of parts. In case a robot arm is detected by any of detection means when a substrate (S) is transported by the robot arm among processing chambers (C), operation data of the robot arm to be detected by the detection means is obtained and reference value is prepared. Then, every time the robot arm is detected by the detection means, the operation data is obtained and compared with the reference value. In case a change exceeds a predetermined range, the transport robot is judged to be abnormal.

Abstract: A technology to resolve positional deviations without using a transport robot. An object to be transported placed on a holding stand is rotated, so as to make an error angle ? to be zero; and thereafter, a temporarily placing portion is made to move obliquely to move for an error distance in a horizontal component, thereby locating the center of the object to be transported on the central axis line of the holding stand; and the object to be transported is placed on holding stand. In a case where an orientation of a notch is definite, the holding stand is further rotated by a desired amount. Without using the transport robot, it is possible to resolve an error angle and an error distance.

Abstract: A substrate temperature measurement apparatus and a processing apparatus, whereby thermocouple wire reliability is improved, influence of infrared rays on the chip is reduced and the temperature of the substrate can be accurately measured. A chip (16) made of metal material reflecting infrared rays and electromagnetic waves, has an insertion opening (16a) for inserting thermocouple wires (20a, 20b) is crushed and deformed with the thermocouple wires inserted, and thereby united together with the thermocouple wires, and contacted with the substrate (13); and a supporting member or members (15b, 15c), made of material of lower thermal conductivity than said chip (16), are provided for supporting said chip (16).

Abstract: A packaging container according to the present invention is molded of a thin synthetic resin sheet. The outer peripheral edge of an opening of the packaging container 1, 18 has an outwardly extended flange 11. The outer peripheral edge 11a of the flange 11 is corrugated in the vertical or horizontal direction. By corrugating the outer peripheral edge 11a of the flange 11, the corrugated outer peripheral edge 11a can give a soft touch to user's hand or finger or a wrapping film contacting the same. As a result, user's hand or finger can be prevented from being hurt and the wrapping film can be prevented from being broken.

Abstract: A technology to resolve positional deviations without using a transport robot. An object to be transported placed on a holding stand is rotated, so as to make an error angle ? to be zero; and thereafter, a temporarily placing portion is made to move obliquely to move for an error distance in a horizontal component, thereby locating the center of the object to be transported on the central axis line of the holding stand; and the object to be transported is placed on holding stand. In a case where an orientation of a notch is definite, the holding stand is further rotated by a desired amount. Without using the transport robot, it is possible to resolve an error angle and an error distance.