Abstract: The following invention relates to an apparatus and a method for improving the rate of cell fusion. Cells contained in chambers are prevented from adhering to the surface of the walls of a chamber in which they are contained by the pulse-like changes in fluid pressure, which causes the cells to separate from the surface of the chamber.

Abstract: In determining the effectiveness of parameters on cells, after treatment of the cells with one or more selected parameters, the results of the treatment can be quickly determined by measuring the number n.sub.0 of cells having a predetermined cell form, subsequently mechanically stressing the cells for a sufficient period of time t to change the cell form substantially, thereafter again measuring the number n of cells having the predetermined cell form, and determining the cell viability .tau.defined by .tau.=t/1n(n.sub.0 /n).

Abstract: Disclosed is a gas valve capable of switching gases to be introduced within a vacuum chamber with high speed thereby enhancing the controllability of the composion of a semiconducting thin film growing on a substrate and shortening the time required for growth of the thin film. The gas valve comprises a bendable film between a pair of parallel plate electrodes whereby operating the film by an electrostatic force and opening and closing a port for releasing gas to a substrate mounted on the wall surface of a gas chamber and a port for exhausting an unnecessary gas to an exhaust passage. The gas valve is mounted in the vicinity of the substrate within the vacuum chamber for supplying a working gas in a minimum amount required for the film growth.

Abstract: A method and an apparatus for the treatment of particles or biological cells are disclosed, wherein the particles or cells are precipitated or ascended depending on the specific gravity of a liquid used, and the particles or cells are handled with the aid of a holding plate. A method and an apparatus for the fusion of particles or cells are also disclosed, wherein an electric voltage is loaded on a position between electrodes in a microchamber to fuse the particles or cells held in the microchamber.

Abstract: A cell handling apparatus is provided with a device for moving cells which are held in chambers of the apparatus, at predetermined periods, preferably a device for generating pulse-like changes in fluid pressure of the chambers, so as to prevent the same portions of the cells from remaining in contact with the wall surfaces of the chambers over a predetermined period of time.

Abstract: Disclosed is a cell manipulating apparatus for conveying cells to a plurality of chambers provided in a chamber plate. The apparatus comprises a taking-up device adapted to take up cells to the respective taking up portions of a carrier plate placed in positions corresponding to those of said chambers in the chamber plate and a moving device adapted to move, relatively with respect to the chamber plate, the taking-up device to a position above the chamber plate. The taking-up portions may be effectively composed of pressure-controlled cavities or SiO.sub.2 films provided in the carrier plate.

Abstract: There are disclosed a chamber plate for use in cell fusion comprising a plate of single crystal silicon on which a plurality of chambers for holding at least a pair of unit cells are formed in array, said chamber having at the bottom a plate having slits which do not pass cells to be held; and a process for producing a chamber plate for use in cell fusion which comprises forming chambers for holding cells in a plate of single crystal silicon by anisotropic etching or isotropic etching by chemical etching.

Abstract: A lithography apparatus in which a charged particle ray such as an electron beam or an ion beam is controlled to scan a desired region of a sample and thereby draw a pattern, including a framing pattern memory for storing therein closed framing lines of a pattern to be drawn in the form of dot images, a framing pattern generator for writing the framing lines of the pattern to be drawn into said framing pattern memory in the form of dot images, and a raster scanning circuit for scanning the framing pattern memory having stored therein closed framing lines of the pattern to be drawn and for generating a beam deflection address for drawing the pattern and a beam blanking control signal.

Abstract: A pattern printing method includes a step of printing a pattern on a wafer on the basis of a target mark provided on the surface of the wafer which is opposite to the surface thereof on which the pattern is to be printed. Also disclosed is a pattern printing apparatus which comprises detecting means for detecting a target mark provided on the surface of a wafer which is opposite to the surface thereof on which a pattern is to be printed, and pattern printing means for printing the pattern on the pattern printing surface of the wafer on the basis of mark position data obtained by the detecting means.

Abstract: The specification discloses an angular velocity and acceleration sensor in which a tuning-fork oscillator is vibrated on the main driven vibrating axis and displacement on an axis which is parallel to the main driven vibrating axis or displacement which crosses it at right angles is detected so that at least one of angular velocity and acceleration on an axis which is parallel to the main driven vibrating axis or which crosses it at right angles may be detected. The sensor is characterized in that vibrating reeds of the tuning-fork oscillator are so formed that the spring constant of the vibrating reeds on the main driven vibrating axis is substantially equal to that on the axis which crosses the main driven vibrating axis at right angles.

Abstract: A pattern detector for precise position measurement of a wafer, used in a mask aligner used in manufacturing a semiconductor device is disclosed. A positioning pattern on the wafer is magnified and projected by a magnifying optical system and the magnified projected image is precisely detected to determine a position of the positioning pattern. As a light to form the magnified projected image, plurality of monochromatic lights of different wavelengths are available through optical filters and the magnifying optical systems are arranged one for each of the monochromatic lights. By selecting one of the optical filters, the magnified projected image of the positioning pattern is formed by the monochromatic light having an optimum wavelength to the wafer and the precise position of the positioning pattern on the wafer can be detected.

Abstract: A pattern detector according to the present invention adopts a processing method wherein means is provided anew with which the intensity distribution of light reflected from or transmitted through an illuminated specimen is photoelectrically converted, and a pattern position is detected at high speed from the ratio between the primary moment and integral value of a detection signal thus derived, whereupon a symmetry calculation is executed within a narrow range around the detected value, whereby the pattern position is found fast and precisely.

Abstract: Firstly, each of the cores of a multicore cable are connected at one end thereof to the respective contacts of one of two connectors at random. Then, using a detector for detecting the change of electrical conditions of the cores, detection is made in a random fashion for the other ends of the cores to determine to which line contact of the one connector the one end of the corresponding core has been connected. The other end of the detected core is connected to a contact of a desired line of the other connector. In this manner, the both ends of the cores are connected to contacts of desired lines of the two connectors.

Abstract: A fluidized bed combustor is adapted to deprive a combustion gas issuing therefrom of dust by bringing the combustion gas into contact with a filter medium which is a fluidizing solid discharged in conjunction with slagging ash out of the combustor.

Abstract: A pattern generator in which a workpiece to be machined into a desired pattern shape is held in vacuum and is irradiated with a laser beam condensed to be fine, while scanning the laser beam so as to depict the desired pattern shape, whereby the workpiece is directly machined in conformity with the desired pattern shape. As the workpiece, one in which a shading film (for example, chromium film) is deposited on a transparent glass substrate is employed, and it is irradiated with the laser beam in the vacuum, whereby the irradiated parts of the shading film are vaporized to fabricate a shading mask pattern of good quality.

Abstract: There is disclosed a pattern forming apparatus for projecting a pattern which is formed on a reticle upon a photoresist layer on a substrate which comprises an illumination system for illuminating the pattern for forming an optical image, a reduction lenses for reducing the optical pattern image at a certain reduction ratio and projecting the reduced optical pattern image upon the photoresist layer formed on the substrate for exposing the photoresist layer, and liquid sustaining means for filling a gap between at least a portion of the reduction lenses and the photoresist layer with an optically transparent liquid having a refractive index of more than 1 (one).

Abstract: An automatic focusing apparatus according to the present invention is constructed of a base on which a substrate is placed, detection means for detecting a pressure of air which is caused to flow out of an interspace between the substrate and an orifice by spurting the air from the orifice toward the substrate, reference pressure generation means for generating a reference pressure which is necessary for setting a standard distance between the substrate and the orifice, a pressure transducer which receives pressure signals from said detection means and said reference pressure generation means and which converts a pressure difference between these pressure signals into an electric signal, base drive means for moving the substrate in parallel with the orifice on the basis of the output signal from said pressure transducer, and offset signal generation means for generating a signal which, when superposed on the output signal from said pressure transducer, serves to shift the substrate from the standard distance.

Abstract: A pattern detecting apparatus is disclosed which comprises, in order to detect the center of a positioning pattern on a sample with high accuracy in a wide range, means for illuminating the positioning pattern, means for defining an illumination range in which the positioning pattern is illuminated, means for focusing reflected light from the positioning pattern on a predetermined image plane, means for electrically detecting a bright and dark image on the image plane in accordance with positions on the image plane, means for removing a signal corresponding to the outside of the illumination range from the output signal of the detecting means and for holding, in place of the removed signal, a level of the output signal produced within the illumination range, and means for detecting a position of the center of the positioning pattern from the output signal of the holding means.

Abstract: An air cleaner suitable for use with motor-bicycles particularly suitable for off-road travelling including an air cleaner element held between a fixed wall of a cleaner casing and an element holder plate mounted in the cleaner casing. The element holder plate is removably mounted in the casing and it is tiltable in the casing so that when the casing is closed by a lid, the element holder plate can be moved from a position in which it facilitates insertion of the air cleaner element to a position in which it positively holds same between it and the fixed wall. The air cleaner mounting structure of the aforesaid construction has the effects of enabling the air cleaner element to be readily and positively mounted and removed and allowing cleaning of the interior of the cleaner casing to be readily effected.

Abstract: A combustion apparatus is disclosed wherein a main combustion chamber is provided at one end thereof with an auxiliary combustion chamber adapted for the combustion gas produced therein to flow spirally into the main combustion chamber, air is supplied to the auxiliary combustion chamber in an amount approximating the theoretical value based on the amount of the fuel supplied so as to ensure complete combustion in the auxiliary chamber, the fuel supplied into the main combustion chamber is mixed with the combustion gas coming from the auxiliary combustion chamber so that the resultant mixture, on combustion, produces a reducing atmosphere and this atmosphere is forwarded in the direction of the downstream side of the main combustion chamber, and the reducing combustion gas is completely burned by air introduced on the downstream side.