Patents by Inventor Young-chul Ko
Young-chul Ko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20070258120Abstract: A micro-electro mechanical system (MEMS) scanner. The MEMS scanner includes a first frame rotationally vibrated about an axle according to a low-frequency vertical scan function, a second frame supported coaxially with and rotationally on the first frame, a vibration member disposed between the first frame and the second frame so as to vibrate the second frame with respect to the first frame according to a high-frequency vertical scan function. A MEMS mirror which receives a vertical scan motion of the second frame and simultaneously operates in a rotational vibration mode about an axle according to a high-frequency horizontal scan function so as to two-dimensionally scan a screen with incident light. Therefore, scan lines are uniformly produced in a scanning direction and, thus, pixels can be uniformed arranged across a screen, increasing the vertical resolution of the screen and providing high-quality images.Type: ApplicationFiled: February 20, 2007Publication date: November 8, 2007Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Young-chul Ko, Jin-woo Cho, Yong-hwa Park
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Publication number: 20070241415Abstract: A micro-electro mechanical system (MEMS) device that uses an SOI wafer, and a method of manufacturing the same. The MEMS device includes an SOI wafer including a first silicon layer, a second silicon layer, and an insulating layer formed between the first and second silicon layers, and a protective substrate that is bonded to the first silicon layer, wherein grounding via holes are formed through the first silicon layer, the insulating layer and the protective substrate, and filled with a conductive material, and ventilation holes to be connected to the grounding via holes are formed in the second silicon layer.Type: ApplicationFiled: November 29, 2006Publication date: October 18, 2007Inventors: Young-chul Ko, Won-kyoung Choi, Seok-whan Chung
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Publication number: 20070236767Abstract: Provided is a one-axis driving optical scanner which includes a substrate, a stage separated from the substrate to a predetermined height and having an upper surface where an optical scanning surface is formed, a torsion spring supporting the stage from middle portions of both edge sides of the stage, a support portion fixed to the substrate to support the torsion spring, a driving portion rotating the stage with respect to the torsion spring forming a center axis, and a flat panel type tuning electrode arranged in an area of the substrate corresponding to the stage.Type: ApplicationFiled: June 5, 2007Publication date: October 11, 2007Applicant: Samsung Electronics Co., Ltd.Inventors: Young-chul Ko, Jin-ho Lee, Ju-hyun Lee, Yong-kweun Mun
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Publication number: 20070229932Abstract: An actuator which is actuated by an external input and also can remove noise caused by a high frequency by providing a low pass filter capable of preventing a particular high frequency through its mechanical structure. The actuator includes an external gimbal, an internal gimbal, and a connection axis which is disposed in an identical direction to an axis extended from the external gimbal. In this intake, the connection axis is provided between the external gimbal and internal gimbal whereby a not desired high frequency vibration may not be transmitted to a vibrated body provided in the internal gimbal. The actuator constructed as above does not need an electrical control and an additional part, and can be actuated by an external input, and also is highly productive and does not require an additional cost by providing a low pass filter with only comparatively simple change of a mechanical design.Type: ApplicationFiled: December 27, 2006Publication date: October 4, 2007Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jin Woo Cho, Young Chul Ko, Hee Moon Jeong
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Patent number: 7255768Abstract: Provided are an anodic bonding structure, a fabricating method thereof, and a method of manufacturing an optical scanner using the same. Provided anodic bonding structure having a substrate and a glass substrate arranged above the substrate, includes at least one dielectric and at least one metal layer deposited between the substrate and the glass substrate, with a dielectric arranged uppermost, wherein the uppermost dielectric and the glass substrate are anodic bonded. Provided method of fabricating an anodic bonding structure having a substrate and a glass substrate arranged above the substrate, includes an act of depositing at least one dielectric and at least one metal layer between the substrate and the glass substrate, with dielectric arranged uppermost, and an act of anodic bonding the uppermost dielectric with the glass substrate.Type: GrantFiled: December 6, 2004Date of Patent: August 14, 2007Assignee: Samsung Electronics Co., Ltd.Inventors: Young-chul Ko, Jin-ho Lee, Chang-soo Lee
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Patent number: 7257286Abstract: A dual comb electrode structure with spacing for increasing a driving angle of a micro mirror provided by MEMS (Micro-Electro-Mechanical system) structure and a microscanner adopting the same are provided. The dual comb electrode structure includes: a mirror unit for reflecting light; a plurality of movable comb electrodes protruded in both sides of the mirror unit; and a plurality of upper and lower static comb electrodes formed above and below the movable comb electrode so as to be alternated with the plurality of movable comb electrodes formed in both sides of the mirror unit, wherein a spacing between the upper static comb electrode and the movable comb electrode is different from a spacing between the lower static comb electrode and the movable comb electrode.Type: GrantFiled: May 25, 2005Date of Patent: August 14, 2007Assignee: Samsung Electronics Co., Ltd.Inventors: Young-chul Ko, Jin-woo Cho, Hyun-ku Jeong
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Patent number: 7242511Abstract: Provided is a one-axis driving optical scanner which includes a substrate, a stage separated from the substrate to a predetermined height and having an upper surface where an optical scanning surface is formed, a torsion spring supporting the stage from middle portions of both edge sides of the stage, a support portion fixed to the substrate to support the torsion spring, a driving portion rotating the stage with respect to the torsion spring forming a center axis, and a flat panel type tuning electrode arranged in an area of the substrate corresponding to the stage.Type: GrantFiled: October 14, 2004Date of Patent: July 10, 2007Assignee: Samsung Electronics Co., Ltd.Inventors: Young-chul Ko, Jin-ho Lee, Ju-hyun Lee, Yong-kweun Mun
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Publication number: 20070128824Abstract: A double-sided etching method using an embedded alignment mark includes: preparing a substrate having first and second alignment marks embedded in an intermediate portion thereof; etching an upper portion of the substrate so as to expose the first alignment mark from a first surface of the substrate; etching the upper portion of the substrate using the exposed first alignment mark; etching a lower portion of the substrate so as to expose the second alignment mark from a second surface of the substrate; and etching the lower portion of the substrate using the exposed second alignment mark.Type: ApplicationFiled: September 28, 2006Publication date: June 7, 2007Inventors: Young-chul Ko, Hyun-ku Jeong
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Publication number: 20070128757Abstract: A method of forming comb electrodes using self alignment etching is provided. A method of forming a stationary comb electrode and a movable comb electrode in first and second silicon layers of a SOI (Silicon-on-Insulator) substrate, respectively, using etching. The method involves sequentially etching the first silicon layer, the insulating layer, and the second silicon layer using an alignment mark formed in the first silicon layer. According to the method, the stationary comb electrode and the movable comb electrode are self-aligned for etching by patterning the first silicon layer.Type: ApplicationFiled: October 27, 2006Publication date: June 7, 2007Inventors: Young-chul Ko, Hyun-ku Jeong, Seok-whan Chung
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Publication number: 20070121188Abstract: Disclosed is a micro mirror having a structure improved to have an increased driving angle while being driven in high speed. The micro mirror comprises a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section comprising mobile combs arranged on the adjoining section, and a fixed comb provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without increasing rotational inertia moment so largely. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.Type: ApplicationFiled: January 30, 2007Publication date: May 31, 2007Inventors: Young-chul KO, Jin-ho Lee, Jin-woo Cho
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Publication number: 20070120207Abstract: A torsion spring for a micro-electro-mechanical system (MEMS) structure is provided. The torsion spring is connected between a pivoting member and a fixed member and supports the pivoting member so that the pivoting member can pivot about the torsion spring. The torsion spring includes: a horizontal beam; at least one vertical beam formed on the horizontal beam; and a plurality of auxiliary beams formed on the horizontal beam and parallel to the vertical beam.Type: ApplicationFiled: October 18, 2006Publication date: May 31, 2007Inventors: Hee-moon Jeong, Young-chul Ko
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Publication number: 20070108548Abstract: An optical scanner and a fabricating method thereof are provided. The optical scanner includes a base substrate, a frame, a H-shaped stage, supporters, and a stage driving structure. An interconnection layer having a predetermined pattern is formed on the base substrate. The frame has a rectangular frame shape which is formed on the base substrate. The H-shaped stage has a central area that performs a seesaw motion in the frame with respect to a uniaxial central axis and is positioned on the uniaxial central axis, and four extended areas that extend from two sides of the central area through which the uniaxial central axis passes, parallel the uniaxial central axis. The supporters have support beams that are positioned on the uniaxial central axis and connected to the frame and torsion bars that extend from the support beams and are connected to the central area of the stage.Type: ApplicationFiled: January 12, 2007Publication date: May 17, 2007Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jin-ho Lee, Young-chul Ko
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Patent number: 7185994Abstract: A micro mirror structure having an increased driving angle while being driven in high speed. The micro mirror includes a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section including mobile combs arranged on the adjoining section. A fixed comb is provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without largely increasing rotational inertia moment. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.Type: GrantFiled: December 1, 2004Date of Patent: March 6, 2007Assignee: Samsung Electronics Co., Ltd.Inventors: Young-chul Ko, Jin-ho Lee, Jin-woo Cho
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Patent number: 7180647Abstract: An optical scanner and a fabricating method thereof are provided. The optical scanner includes a base substrate, a frame, a H-shaped stage, supporters, and a stage driving structure. An interconnection layer having a predetermined pattern is formed on the base substrate. The frame has a rectangular frame shape which is formed on the base substrate. The H-shaped stage has a central area that performs a seesaw motion in the frame with respect to a uniaxial central axis and is positioned on the uniaxial central axis, and four extended areas that extend from two sides of the central area through which the uniaxial central axis passes, parallel the uniaxial central axis. The supporters have support beams that are positioned on the uniaxial central axis and connected to the frame and torsion bars that extend from the support beams and are connected to the central area of the stage.Type: GrantFiled: August 23, 2002Date of Patent: February 20, 2007Assignee: Samsung Electronics Co., Inc.Inventors: Jin-ho Lee, Young-chul Ko
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Publication number: 20060284514Abstract: An actuator having a vertical comb electrode structure is provided. The actuator includes: a stage seesawing in a first direction; a support unit supporting the seesawing motion of the stage; and a stage driving unit including vertical driving comb electrodes extending outward from opposite sides of the stage in the first direction, and vertical fixed comb electrodes disposed on a substrate to alternate with the driving comb electrodes, wherein the fixed comb electrodes include first fixed comb electrodes lower than the driving comb electrodes, insulation layers formed on the first fixed comb electrodes, and second fixed comb electrodes formed on the insulation layers to be higher than bottom surfaces of the driving comb electrodes.Type: ApplicationFiled: January 30, 2006Publication date: December 21, 2006Applicant: Samsung Electronics Co., Ltd.Inventors: Young-chul Ko, Jin-woo Cho
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Patent number: 7149022Abstract: An optical scanner and a method of manufacturing the same are provided. The optical scanner comprises a rectangular frame, a H-shaped stage, which is linearly driven in a second direction perpendicular to a first direction of a central axis inside the frame and includes a central area positioned in a direction of the central axis and four extended areas that extend from both opposite sides of the central area parallel to the central axis, a cylindrical mirror, which is disposed on the central area and scans a laser beam incident on the surface thereof in the second direction, torsion bars, which are disposed on the central axis and support the stage by connecting the frame and the central area of the stage, and a stage driving structure, which includes driving comb electrodes formed at both long sides of the stage and fixed comb electrodes formed at corresponding sides of the frame, parallel to the first direction.Type: GrantFiled: June 22, 2004Date of Patent: December 12, 2006Assignee: Samsung Electronics Co., Ltd.Inventors: Yong-kweun Mun, Ju-hyun Lee, Young-chul Ko, Jin-ho Lee
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Patent number: 7149023Abstract: Provided is an optical scanner capable of hermetic sealing with a round of flip-chip bonding. The optical scanner includes an upper substrate and a lower substrate, a mirror suspended between the upper substrate and the lower substrate to seesaw, a plurality of movable comb electrodes vertically formed at predetermined intervals at both sides of the mirror, a plurality of upper static comb electrodes and lower static comb electrodes respectively vertically installed on the upper substrate and the lower substrate to alternate with the plurality of movable comb electrodes, a plurality of electrode structures respectively transmitting external voltage to the upper and lower static comb electrodes and the movable comb electrodes, and an upper outer frame and a lower outer frame respectively formed along edges of the upper and lower substrates and bonded to each other to seal the mirror from the outside.Type: GrantFiled: August 24, 2005Date of Patent: December 12, 2006Assignee: Samsung Electronics Co., Ltd.Inventors: Young-chul Ko, Yong-kweun Mun, Won-kyoung Choi
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Publication number: 20060268383Abstract: Optical scanners having a multi-layered comb electrode structure and methods to increase driving force and angle are provided. The optical scanner includes: a stage which performs a seesaw motion in a first direction; a support unit which supports the seesaw motion of the stage; and a stage driving unit including driving comb electrodes extending outward from opposite sides of the stage in the first direction and fixed comb electrodes extending from the support unit facing the driving comb electrodes such that the driving comb electrodes and the fixed comb electrodes alternate with each other. Each of the stage, the support unit, and the stage driving unit is made of a plurality of conductive layers and insulation layers between the conductive layers.Type: ApplicationFiled: March 24, 2006Publication date: November 30, 2006Inventors: Jin-woo Cho, Young-chul Ko, Jin-ho Lee, Hyun-ku Jeong
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Publication number: 20060232840Abstract: A metal line structure of an optical scanner and a method of fabricating the same are provided. The metal line structure of the optical scanner includes: a glass substrate having a metal line region etched to a predetermined depth; a metal line formed in the metal line region; a diffusion barrier layer that is formed on the glass substrate and covers the metal line; and an optical scanner structure combined with the glass substrate.Type: ApplicationFiled: February 15, 2006Publication date: October 19, 2006Applicant: Samsung Electronics Co., Ltd.Inventors: Hyun-ku Jeong, Won-joo Kim, Young-chul Ko
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Publication number: 20060176539Abstract: Provided are a chip-scale optical scanner package with reduced noise, and a method of manufacturing the optical scanner package. The optical scanner package includes: an optical scanner device scanning an incident beam, the optical scanner device including a mirror portion, comb-electrode structures rotating the mirror portion, and a base substrate; and a cover glass protecting the mirror portion, the cover glass including support portions sealingly adhered to a top surface of the base substrate around the mirror portion and a transmission portion with first and second transmission surfaces formed on the support portions and sloped with respect to a top surface of the base substrate. Accordingly, the optical scanner package can be miniaturized, can be simply processed, and reduce packaging costs. Further, the brightness and contrast of an image can be enhanced, and background noise can be reduced by reducing a sub reflected beam that causes noise.Type: ApplicationFiled: February 3, 2006Publication date: August 10, 2006Applicant: Samsung Electronics Co., Ltd.Inventors: Won-kyoung Choi, Yong-kweun Mun, Young-chul Ko