Patents by Inventor Yu-Chu Lin

Yu-Chu Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220216315
    Abstract: A method includes depositing a gate dielectric film over a substrate. A floating gate layer and a control gate layer are deposited over the gate dielectric film. The control gate layer is patterned to form a control gate over the floating gate layer. A top portion of the floating gate layer is patterned. A spacer structure is formed on a sidewall of the control gate and over a remaining portion of the floating gate layer. The remaining portion of the floating gate layer is patterned to form a bottom portion of a floating gate. A ratio of the bottom width of the bottom portion to the middle width of the bottom portion is in a range between about 103% and about 108%. The gate dielectric film is patterned form a gate dielectric layer.
    Type: Application
    Filed: March 18, 2022
    Publication date: July 7, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Chu LIN, Chi-Chung JEN, Chia-Ming PAN, Su-Yu YEH, Keng-Ying LIAO, Chih-Wei SUNG
  • Publication number: 20220216343
    Abstract: In some implementations, one or more semiconductor processing tools may deposit a first dielectric layer on a substrate of a semiconductor device. The one or more semiconductor processing tools may deposit a floating gate on the first dielectric layer. The one or more semiconductor processing tools may deposit a second dielectric layer on the floating gate and on the substrate of the semiconductor device. The one or more semiconductor processing tools may deposit a first control gate on a first portion of the second dielectric layer. The one or more semiconductor processing tools may deposit a second control gate on a second portion of the second dielectric layer, wherein a third portion of the second dielectric layer is between the first control gate and the floating gate and between the second control gate and the floating gate.
    Type: Application
    Filed: January 7, 2021
    Publication date: July 7, 2022
    Inventors: Yu-Chun SHEN, Chi-Chung JEN, Ya-Chi HUNG, Yu-Chu LIN, Wen-Chih CHIANG
  • Patent number: 11362185
    Abstract: A method for manufacturing a memory device is provided. The method includes depositing a floating gate electrode film over a semiconductor substrate; patterning the floating gate electrode film into at least one floating gate electrode having at least one opening therein; depositing a control gate electrode film over the semiconductor substrate to overfill the at least one opening of the floating gate electrode; and patterning the control gate electrode film into at least one control gate electrode over the floating gate electrode.
    Type: Grant
    Filed: January 17, 2020
    Date of Patent: June 14, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Chu Lin, Chi-Chung Jen, Yen-Di Wang, Jia-Yang Ko, Men-Hsi Tsai
  • Publication number: 20220165877
    Abstract: In some implementations, one or more semiconductor processing tools may form a first terminal of a semiconductor device by depositing a tunneling oxide layer on a first portion of a body of the semiconductor device, depositing a first volume of polysilicon-based material on the tunneling oxide layer, and depositing a first dielectric layer on an upper surface and a second dielectric layer on a side surface of the first volume of polysilicon-based material. The one or more semiconductor processing tools may form a second terminal of the semiconductor device by depositing a second volume of polysilicon-based material on a second portion of the body of the semiconductor device. A side surface of the second volume of polysilicon-based material is adjacent to the second dielectric layer.
    Type: Application
    Filed: January 28, 2022
    Publication date: May 26, 2022
    Inventors: Yu-Chu LIN, Chi-Chung JEN, Wen-Chih CHIANG, Ming-Hong SU, Yung-Han CHEN, Mei-Chen SU, Chia-Ming PAN
  • Patent number: 11282931
    Abstract: A memory device includes a floating gate, a control gate, a spacer structure, a dielectric layer, and an erase gate. The floating gate is above a substrate. The floating gate has a curved sidewall. The control gate is above the floating gate. The spacer structure is in contact with the control gate and the floating gate. The spacer structure is spaced apart from the curved sidewall of the floating gate. The dielectric layer is in contact with the spacer structure and the curved sidewall of the floating gate. The erase gate is above the dielectric layer.
    Type: Grant
    Filed: May 20, 2020
    Date of Patent: March 22, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Chu Lin, Chi-Chung Jen, Chia-Ming Pan, Su-Yu Yeh, Keng-Ying Liao, Chih-Wei Sung
  • Publication number: 20220059556
    Abstract: A MOSFET device and method of making, the device including a floating gate layer formed within a trench in a substrate, a tunnel dielectric layer located on sidewalls and a bottom of the trench, a control gate dielectric layer located on a top surface of the floating gate layer, a control gate layer located on a top surface of the control gate dielectric layer and sidewall spacers located on sidewalls of the control gate dielectric layer and the control gate layer.
    Type: Application
    Filed: August 24, 2020
    Publication date: February 24, 2022
    Inventors: Chi-Chung JEN, Yu-Chu LIN, Y.C. KUO, Wen-Chih CHIANG, Keng-Ying LIAO, Huai-Jen TUNG
  • Patent number: 11257963
    Abstract: In some implementations, one or more semiconductor processing tools may form a first terminal of a semiconductor device by depositing a tunneling oxide layer on a first portion of a body of the semiconductor device, depositing a first volume of polysilicon-based material on the tunneling oxide layer, and depositing a first dielectric layer on an upper surface and a second dielectric layer on a side surface of the first volume of polysilicon-based material. The one or more semiconductor processing tools may form a second terminal of the semiconductor device by depositing a second volume of polysilicon-based material on a second portion of the body of the semiconductor device. A side surface of the second volume of polysilicon-based material is adjacent to the second dielectric layer.
    Type: Grant
    Filed: November 20, 2020
    Date of Patent: February 22, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chu Lin, Chi-Chung Jen, Wen-Chih Chiang, Ming-Hong Su, Yung-Han Chen, Mei-Chen Su, Chia-Ming Pan
  • Publication number: 20220028993
    Abstract: A flash memory device includes a floating gate electrode formed within a substrate semiconductor layer having a doping of a first conductivity type, a pair of active regions formed within the substrate semiconductor layer, having a doping of a second conductivity type, and laterally spaced apart by the floating gate electrode, an erase gate electrode formed within the substrate semiconductor layer and laterally offset from the floating gate electrode, and a control gate electrode that overlies the floating gate electrode. The floating gate electrode may be formed in a first opening in the substrate semiconductor layer, and the erase gate electrode may be formed in a second opening in the substrate semiconductor layer. Multiple instances of the flash memory device may be arranged as a two-dimensional array of flash memory cells.
    Type: Application
    Filed: October 8, 2021
    Publication date: January 27, 2022
    Inventors: Yu-Chu Lin, Chia-Ming Pan, Chi-Chung Jen, Wen-Chih Chiang, Keng-Ying Liao, Huai-jen Tung
  • Patent number: 11195841
    Abstract: A method for manufacturing an integrated circuit is provided. The method includes depositing a floating gate electrode film over a semiconductor substrate; patterning the floating gate electrode film into at least one floating gate electrode having at least one opening therein; depositing a control gate electrode film over the semiconductor substrate to overfill the at least one opening of the floating gate electrode; and patterning the control gate electrode film into at least one control gate electrode over the floating gate electrode.
    Type: Grant
    Filed: January 16, 2020
    Date of Patent: December 7, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chi-Chung Jen, Yu-Chu Lin, Cheng-Hsiang Wang, Yi-Ling Liu
  • Patent number: 11183572
    Abstract: A flash memory device includes a floating gate electrode formed within a substrate semiconductor layer having a doping of a first conductivity type, a pair of active regions formed within the substrate semiconductor layer, having a doping of a second conductivity type, and laterally spaced apart by the floating gate electrode, an erase gate electrode formed within the substrate semiconductor layer and laterally offset from the floating gate electrode, and a control gate electrode that overlies the floating gate electrode. The floating gate electrode may be formed in a first opening in the substrate semiconductor layer, and the erase gate electrode may be formed in a second opening in the substrate semiconductor layer. Multiple instances of the flash memory device may be arranged as a two-dimensional array of flash memory cells.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: November 23, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Yu-Chu Lin, Chia-Ming Pan, Chi-Chung Jen, Wen-Chih Chiang, Keng-Ying Liao, Huai-jen Tung
  • Publication number: 20210328034
    Abstract: A flash memory device includes a floating gate electrode formed within a substrate semiconductor layer having a doping of a first conductivity type, a pair of active regions formed within the substrate semiconductor layer, having a doping of a second conductivity type, and laterally spaced apart by the floating gate electrode, an erase gate electrode formed within the substrate semiconductor layer and laterally offset from the floating gate electrode, and a control gate electrode that overlies the floating gate electrode. The floating gate electrode may be formed in a first opening in the substrate semiconductor layer, and the erase gate electrode may be formed in a second opening in the substrate semiconductor layer. Multiple instances of the flash memory device may be arranged as a two-dimensional array of flash memory cells.
    Type: Application
    Filed: April 20, 2020
    Publication date: October 21, 2021
    Inventors: Yu-Chu LIN, Chia-Ming PAN, Chi-Chung JEN, Wen-Chih CHIANG, Keng-Ying LIAO, Huai-jen TUNG
  • Publication number: 20210327945
    Abstract: A device is disclosed. The device includes a plurality of pixels disposed over a first surface of a semiconductor layer. The device includes a device layer disposed over the first surface. The device includes metallization layers disposed over the device layer. One of the metallization layers, closer to the first surface than any of other ones of the metallization layers, includes at least one conductive structure. The device includes an oxide layer disposed over a second surface of the semiconductor layer, the second surface being opposite to the first surface, the oxide layer also lining a recess that extends through the semiconductor layer. The device includes a spacer layer disposed between inner sidewalls of the recess and the oxide layer. The device includes a pad structure extending through the oxide layer and the device layer to be in physical contact with the at least one conductive structure.
    Type: Application
    Filed: April 17, 2020
    Publication date: October 21, 2021
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Keng-Ying Liao, Huai-jen Tung, Chih Wei Sung, Po-zen Chen, Yu-chien Ku, Yu-Chu Lin, Chi-Chung Jen, Yen-Jou Wu, S.S. Wang
  • Publication number: 20210327951
    Abstract: A method includes forming a dielectric layer over a first surface of a semiconductor layer, the dielectric layer including a metallization layer. The method includes forming an opening to expose a portion of the dielectric layer. The method includes forming a buffer oxide layer lining the opening. The method includes forming, according to a patternable layer, a recess in the buffer oxide layer partially extending from a second surface of the buffer oxide layer. The method includes removing the patternable layer. The method includes extending the recess through the buffer oxide layer and a portion of the dielectric layer to expose a portion of the metallization layer. The method includes filling the recess with a conductive material to form a pad structure configured to provide electrical connection to the metallization layer.
    Type: Application
    Filed: April 17, 2020
    Publication date: October 21, 2021
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Keng-Ying Liao, Huai-Jen Tung, Chih Wei Sung, Po-Zen Chen, Yu-Chien Ku, Yu-Chu Lin, Chi-Chung Jen, Yen-Jou Wu, Tsun-Kai Tsao, Y.L. Yang
  • Publication number: 20210225855
    Abstract: A method for manufacturing an integrated circuit is provided. The method includes depositing a floating gate electrode film over a semiconductor substrate; patterning the floating gate electrode film into at least one floating gate electrode having at least one opening therein; depositing a control gate electrode film over the semiconductor substrate to overfill the at least one opening of the floating gate electrode; and patterning the control gate electrode film into at least one control gate electrode over the floating gate electrode.
    Type: Application
    Filed: January 16, 2020
    Publication date: July 22, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chi-Chung JEN, Yu-Chu LIN, Cheng-Hsiang WANG, Yi-Ling LIU
  • Publication number: 20210226026
    Abstract: A method for manufacturing a memory device is provided. The method includes depositing a floating gate electrode film over a semiconductor substrate; patterning the floating gate electrode film into at least one floating gate electrode having at least one opening therein; depositing a control gate electrode film over the semiconductor substrate to overfill the at least one opening of the floating gate electrode; and patterning the control gate electrode film into at least one control gate electrode over the floating gate electrode.
    Type: Application
    Filed: January 17, 2020
    Publication date: July 22, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Chu LIN, Chi-Chung JEN, Yen-Di WANG, Jia-Yang KO, Men-Hsi TSAI
  • Publication number: 20210043774
    Abstract: A semiconductor device includes a substrate, a tunneling oxide layer, a floating gate, an isolation layer and a control gate. The tunneling oxide layer is over the substrate. The floating gate is over the tunneling oxide layer. The isolation layer covers a top of the floating gate and peripherally encloses the tunneling oxide layer and the floating gate. The control gate is over a top of the isolation layer.
    Type: Application
    Filed: October 23, 2020
    Publication date: February 11, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Lu HSU, Ping-Pang HSIEH, Szu-Hsien LU, Yu-Chu LIN
  • Publication number: 20210036118
    Abstract: A memory device includes a floating gate, a control gate, a spacer structure, a dielectric layer, and an erase gate. The floating gate is above a substrate. The floating gate has a curved sidewall. The control gate is above the floating gate. The spacer structure is in contact with the control gate and the floating gate. The spacer structure is spaced apart from the curved sidewall of the floating gate. The dielectric layer is in contact with the spacer structure and the curved sidewall of the floating gate. The erase gate is above the dielectric layer.
    Type: Application
    Filed: May 20, 2020
    Publication date: February 4, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Chu LIN, Chi-Chung JEN, Chia-Ming PAN, Su-Yu YEH, Keng-Ying LIAO, Chih-Wei SUNG
  • Patent number: 10877573
    Abstract: A handheld apparatus, a control method thereof of a presenting mode and a computer-readable recording medium are provided. The handheld apparatus includes at least one first sensor, a second sensor, a screen and a processor. The first sensor is disposed on the handheld apparatus. The second sensor detects orientation. The handheld apparatus has an auto-rotate screen function of automatically adjusting a presenting mode of the screen to a portrait mode or a landscape mode according to the orientation. The processor determines whether the handheld apparatus is in a hold state according to sensing data of the first sensor. In response to determining that the handheld apparatus is in the hold state, the processor locks the presenting mode according to the presenting mode currently performed by the handheld apparatus without adjusting the presenting mode according to the auto-rotate screen function. Accordingly, a convenient operation of the presenting mode is provided.
    Type: Grant
    Filed: September 3, 2018
    Date of Patent: December 29, 2020
    Assignee: HTC Corporation
    Inventors: Shuo-Fang Jeng, Yu-Cheng Hung, Shih-Lung Lin, Kuan-Wei Li, Pei-Chun Tsai, Yu-Chu Lin, Ching-Yung Wu
  • Patent number: 10818804
    Abstract: A semiconductor device includes a substrate, a tunneling oxide layer, a floating gate, an isolation layer and a control gate. The tunneling oxide layer is disposed on the substrate. The floating gate is disposed on the tunneling oxide layer. The isolation layer covers a top of the floating gate and peripherally encloses the tunneling oxide layer and the floating gate. The control gate is disposed over a top of the isolation layer.
    Type: Grant
    Filed: October 28, 2015
    Date of Patent: October 27, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Lu Hsu, Ping-Pang Hsieh, Szu-Hsien Lu, Yu-Chu Lin
  • Patent number: 10710203
    Abstract: A universal jig is provided for clamping wind turbine blades. The jig has a rectangle-like shape forming a space for clamping a blade at the blade root or the blade body. The jig comprises a set of vertically-moving parts; a set of horizontally-moving parts; a plurality of adjusted pads; and a plurality of positioning parts. The vertically-moving parts comprise two upper connecting posts and two lower connecting posts sheathed with each other separately to form two length sides of the jig. The horizontally-moving parts comprise two left connecting posts and two right connecting posts. The adjusted pads are locked on the left and the right connecting posts. The positioning parts are locked at the upper and the lower connecting posts of the length sides of the jig and are locked at the left and the right connecting posts of the width sides of the jig.
    Type: Grant
    Filed: April 11, 2018
    Date of Patent: July 14, 2020
    Assignee: INSTITUTE OF NUCLEAR ENERGY RESEARCH, ATOMIC ENERGY COUNCIL
    Inventors: Yu-Chu Lin, Yan-Ting Lin, Wei-Nian Su, Chin-Cheng Huang