Abstract: According to an aspect of an embodiment of the invention, there is provided an electrostatic chuck including: a ceramic dielectric substrate including a first major surface for mounting a clamped target, a second major surface on opposite side from the first major surface, and a through hole provided from the second major surface to the first major surface; a metallic base plate supporting the ceramic dielectric substrate and including a gas feed channel communicating with the through hole; and an insulator plug including a ceramic porous body provided in the gas feed channel and a ceramic insulating film provided between the ceramic porous body and the gas feed channel and being denser than the ceramic porous body, the ceramic insulating film biting into the ceramic porous body from a surface of the ceramic porous body.

Abstract: According to an aspect of an embodiment of the invention, there is provided an AC-driven electrostatic chuck including: a dielectric substrate including protrusions formed on a major surface on a side of mounting a clamped object, and a bottom surface part formed around the protrusions; and an electrode provided on the dielectric substrate, the electrode including a plurality of electrode elements spaced from each other, the plurality of electrode elements being enabled to be applied with an AC voltage of mutually different phases, respectively, and the protrusions being arranged on the major surface with a prescribed spacing depending on shape of the plurality of electrode elements. The AC-driven electrostatic chuck is capable of suppressing local damage to part of the protrusions provided on the mounting surface side.

Abstract: According to an aspect of an embodiment of the invention, there is provided an AC-driven electrostatic chuck including: a dielectric substrate including protrusions formed on a major surface on a side of mounting a clamped object, and a bottom surface part formed around the protrusions; and an electrode provided on the dielectric substrate, the electrode including a plurality of electrode elements spaced from each other, the plurality of electrode elements being enabled to be applied with an AC voltage of mutually different phases, respectively, and the protrusions being arranged on the major surface with a prescribed spacing depending on shape of the plurality of electrode elements. The AC-driven electrostatic chuck is capable of suppressing local damage to part of the protrusions provided on the mounting surface side.

Abstract: A system and method is provided for using dynamic ultrasonic imaging to analyze a subject's carpal tunnel and generate risk factors indicative of the health of the subject's subsynovial connective tissue and the subject's risk of developing carpal tunnel syndrome. The system and method uses speckle imaging techniques to track dynamic structures within the carpal tunnel and statistical analysis techniques to compare the properties of these dynamic structures of the subject to those of normal subjects and subjects having carpal tunnel syndrome.

Abstract: A system and method is provided for using dynamic ultrasonic imaging to analyze a subject's carpal tunnel and generate risk factors indicative of the health of the subject's subsynovial connective tissue and the subject's risk of developing carpal tunnel syndrome. The system and method uses speckle imaging techniques to track dynamic structures within the carpal tunnel and statistical analysis techniques to compare the properties of these dynamic structures of the subject to those of normal subjects and subjects having carpal tunnel syndrome.