Abstract: A method and apparatus for generating and controlling a plasma (130) formed in a capacitively coupled plasma system (100) having a plasma electrode (140) and a bias electrode in the form of a workpiece support member (170), wherein the plasma electrode is unitary and has multiple regions (Ri) defined by a plurality of RF power feed lines (156) and the RF power delivered thereto. The electrode regions may also be defined as electrode segments (420) separated by insulators (426). A set of process parameters A={n, ?i, ?i, Pi, S; Li} is defined; wherein n is the number of RF feed lines connected to the electrode upper surface at locations Li, ?i is the on-time of the RF power for the ith RF feed line, ?i is the phase of the ith RF feed line relative to a select one of the other RF feed lines, Pi is the RF power delivered to the electrode through the ith RF feed line at location Li, and S is the sequencing of RF power to the electrode through the RF feed lines.

Abstract: A method and system are provided for rapid temperature profile control of the upper surface of a substrate holder providing a specified uniformity or specified non-uniformity of the temperature profile on that surface. The substrate holder includes a first fluid channel positioned in a first thermal zone, utilizing a heat transfer fluid at a specified flow rate and at a specified temperature, to control the temperature profile of the first thermal zone of the surface of the substrate holder. A second fluid channel positioned in a second thermal zone of the substrate holder, utilizing a heat transfer fluid at a specified flow rate and at a specified temperature, is configured to control the temperature profile of the second thermal zone of the surface of the substrate holder.

Abstract: A method and apparatus for generating and controlling a plasma (130) formed in a capacitively coupled plasma system (100) having a plasma electrode (140) and a bias electrode in the form of a workpiece support member (170), wherein the plasma electrode is unitary and has multiple regions (Ri) defined by a plurality of RF power feed lines (156) and the RF power delivered thereto. The electrode regions may also be defined as electrode segments (420) separated by insulators (426). A set of process parameters A={n, &tgr;i, &PHgr;i, Pi, S; Li} is defined; wherein n is the number of RF feed lines connected to the electrode upper surface at locations Li, &tgr;i is the on-time of the RF power for the ith RF feed line, &PHgr;i is the phase of the ith RF feed line relative to a select one of the other RF feed lines, Pi is the RF power delivered to the electrode through the ith RF feed line at location Li, and S is the sequencing of RF power to the electrode through the RF feed lines.

Abstract: The present invention transmits, to an electronic board controller 14, click signals generated upon manipulating multiple switches provided on a coordinates-inputting pen 13, timing signals upon detecting infrared scanning beams 18a and 18b, and the like without using a connecting wire. Specifically, light-emitting elements are provided which can emit visible or infrared light to the coordinates-inputting pen 13. A timing signal upon detecting the infrared scanning beam with the pen and a click signal generated upon manipulating the switch on the pen are sent out on a modulated light 19 to be received by a light receiver 20 arranged at a fixed position and transmitted to the electronic board controller 14.

Abstract: A magneto-resistance effect (“MR”) type composite head includes a reproduction head with an MR element arranged between a first and a second magnetic shield; and a recording head arranged adjacent to the reproduction head so as to use the second magnetic shield as a first magnetic pole film and having a second magnetic pole film opposing to the first magnetic pole via a magnetic gap; the MR element includes a center region including a ferromagnetic tunnel junction magneto-resistance effect film having a first ferromagnetic layer and a second ferromagnetic layer for generating a magneto-resistance effect using the first and the second magnetic shields as electrodes so that a current flows in an almost vertical direction between the first and the second magnetic shields; a tunnel barrier layer provided between the first and the second ferromagnetic layer; and an end region arranged to sandwich the center region from both sides for /applying a bias magnetic field to the center region.

Abstract: A method and apparatus for generating and controlling a plasma (130) formed in a capacitively coupled plasma system (100) having a plasma electrode (140) and a bias electrode in the form of a workpiece support member (170), wherein the plasma electrode is unitary and has multiple regions (Ri) defined by a plurality of RF power feed lines (156) and the RF power delivered thereto. The electrode regions may also be defined as electrode segments (420) separated by insulators (426). A set of process parameters A={n, &tgr;i, &PHgr;i, Pi, S; Li} is defined, herein n is the number of RF feed lines connected to the electrode upper surface at locations Li, &tgr;i is the on-time of the RF power for the ith RF feed line, &PHgr;i is the phase of the ith RF feed line relative to a select one of the other RF feed lines, Pi is the RF power delivered to the electrode through the ith RF feed line at location Li, and S is the sequencing of RF power to the electrode through the RF feed lines.

Abstract: A magneto-resistance effect (“MR”) type composite head includes a reproduction head with an MR element arranged between a first and a second magnetic shield; and a recording head arranged adjacent to the reproduction head so as to use the second magnetic shield as a first magnetic pole film and having a second magnetic pole film opposing to the first magnetic pole via a magnetic gap; the MR element includes a center region including a ferromagnetic tunnel junction magneto-resistance effect film having a first ferromagnetic layer and a second ferromagnetic layer for generating a magneto-resistance effect using the first and the second magnetic shields as electrodes so that a current flows in an almost vertical direction between the first and the second magnetic shields; a tunnel barrier layer provided between the first and the second ferromagnetic layer; and an end region arranged to sandwich the center region from both sides for /applying a bias magnetic field to the center region.

Abstract: A content rental system is disclosed, that comprises a content producer for producing a content, a rental business server, disposed in a store managed by a rental business operator, for recording the content produced by the content producer and downloading the content to a record medium corresponding to a command issued by a customer, and a reproducing device, disposed in the house of the customer, for reproducing the content from the record medium.

Abstract: The present invention provides a magnetic tunnel junction device for an external magnetic field sensor. The device comprises a stack of multi-layers, which include a first antiferromagnetic pinning layer, a ferromagnetic free layer, a tunneling barrier layer, a ferromagnetic pinned layer, and a second antiferromagnetic pinning layer. The first pinning layer has a first pinning field, which pins a magnetization of the free layer in a track width direction. The second pinning layer has a second pinning field, which pins a magnetization of the pinned layer in a direction in the plane of the stacked layers of the magnetic tunnel junction, along the applied external magnetic field direction.

Abstract: The present invention provides a magneto-resistance effect (hereinafter, referred to as MR) type composite head.

Abstract: It is an object of the present invention to improve reliability to a dust or the like of a magnetic disk device. The magnetic disk device of the present invention comprises a magnetic disk 10, a levitation type magnetic head slider 12 and a controller 14 for controlling an operation of the magnetic head slider 12 and the controller 14. The controller 14 moves the magnetic head slider 12 to a CSS (Contact Start Stop) region of the magnetic disk 10 at a predetermined time interval and performs a CSS operation at least once.

Abstract: A digital contents rental system enables images which are desired by customers to be rented in a short period of time. A user takes a recording medium to the store of the rental agent and sets it to a download apparatus. Subsequently, when a content number or the like is specified by using a keyboard of the download apparatus, the specified contents are downloaded to the recording medium, and a rental fee is calculated and displayed. The user pays the displayed fee, and carries the recording medium back to his home. When the user sets the recording medium to the adaptor and presses the start button, the contents which were downloaded to the recording medium are displayed on a display device.

Abstract: A cable television broadcasting system has a set top box having a function of selecting a charging system among a plurality of charging systems depending on the viewing type for a chargeable program. If the viewer allows an advertisement program to be displayed during display of the chargeable program, the fee is lowered. If the viewer clicks the icon for the advertisement program to display the advertisement program, if the viewer makes an access to the advertisement data through the internet, and if the viewer buys a commodity through the internet, then the fee is stepwise lowered. The sponsors of the advertisements pay sponsor fees depending on the access frequency by the viewers.

Abstract: It is an object of the present invention to improve reliability to a dust or the like of a magnetic disk device. The magnetic disk device of the present invention comprises a magnetic disk 10, a levitation type magnetic head slider 12 and a controller 14 for controlling an operation of the magnetic head slider 12 and the controller 14. The controller 14 moves the magnetic head slider 12 to a CSS (Contact Start Stop) region of the magnetic disk 10 at a predetermined time interval and performs a CSS operation at least once.

Abstract: There is provided a method of fabricating a ferromagnetic tunnel junction device, including the steps of (a) forming a first ferromagnetic layer on a substrate, (b) forming a tunnel barrier layer on the first ferromagnetic layer, (c) forming a second ferromagnetic layer on the tunnel barrier layer, (d) mechanically polishing end surfaces of the first ferromagnetic layer, the tunnel barrier layer, and the second ferromagnetic layer, and (e) etching the surfaces of the first ferromagnetic layer, the tunnel barrier layer, and the second ferromagnetic layer. The method provides a ferromagnetic tunnel junction device having a height defined with high accuracy, and including a tunnel barrier layer keeping first and second ferromagnetic layers in electrical isolation with each other.

Abstract: A magnetic head slider has a protective film which forms, at a portion of an air bearing surface nearer to the air incoming side from the center, a hill-shaped crown of a desired height sufficient in terms of the mechanical durability of the protective film by a variation of the film thickness of the protective film and which is flat with a film thickness of 10 nm or less on the air outgoing side at which a magnetic head element is provided. This protective film may be a diamond-like carbon film (DLC) or a single layer structure of polycrystalline Si or else a layered structure of a combination of them.

Abstract: Disclosed is an etching apparatus for etching wafer W held on an electrostatic chuck 11 by using a plasma generated in a space between an upper electrode 21 and a susceptor 5 in a processing chamber 2. The plasma is generated by supplying a high frequency power from a high frequency power supply 43 via a power supply line 42. The etching apparatus includes a measuring electrode 18 made of silicon, attached to a focus-ring 17 provided around wafer W. The measuring electrode 18 can be electrically connected to a susceptor 5. A lead wire 44 is used, an end of which is connected to the power supply bar 42 and the other end of which is connected to a voltage indicator 46 for monitoring V.sub.DC via an RF filter 45. The V.sub.DC level having a constant correlation with the V.sub.DC generated on wafer W, can be detected through monitoring by the voltage indicator 46.

Abstract: A function of a switch apparatus is realized as an adapter. Signaling data which cannot be processed in the adapter, is output to a mainframe bus of a computer through an AAL controller, a RAM, and a bus controller. The computer processes the signaling data and sends it to a switch adapter through the mainframe bus. The signaling data is input to an 8.times.8 switch through the bus controller, the RAM, the AAL controller. Usual user information is switched by a PHY unit, a TC/ATM controller, an address converter, and the 8.times.8 switch. By connecting the switch adapter to the computer, it is possible for the computer to operate as a switch apparatus without damaging its function.

Abstract: The magnetic head disclosed has a slider which comprises a running surface where contact-sliding with respect to a magnetic recording medium occurs, and a polycrystalline silicon film which is provided on at least a portion of said running surface. The polycrystalline silicon film has a thickness of 3 to 10 nm. The running surface is formed of Al.sub.2 O.sub.3.TiC ceramic or silicon. This arrangement is effective in preventing an attraction phenomenon between the head and medium, reducing a frictional coefficient and suppressing damage to the medium.

Abstract: A magnetic disk has a magnetic medium or a protection film, and a solid lubrication film formed on the medium or the protection film and consisting of a fullerene C60, C 70 or C84 and an alkyl or allyl-chained fullerene. The lubrication film provides the disk with high mechanical durability and high linear recording density.