Abstract: An ion source for producing an ion beam utilized for fabrication and processing of semiconductors, thin films or the like includes a plasma producing chamber equipped with first magnetic means for limiting a plasma region and a plasma expansion chamber provided in combination with the plasma producing chamber on the side where a beam extracting electrode is disposed. The plasma expansion chamber is provided with second magnet array for confining and holding a plasma region therein which is of a larger area than that of the plasma region formed in the plasma producing chamber.

Abstract: A cylindrical coil electrode incorporated in a vacuum interrupter comprises a cylindrical body having an opening at one end thereof, two electrical connections provided between the edge surface of the opening of the cylindrical body and a main electrode, two arcuate slits formed on the cylindrical body between the two electrical connections, two arcuate current paths formed in the cylindrical body by the arcuate slits beginning as a respective electrical connection and ending at a rod, and two current blocking slits formed on the cylindrical body at positions where one end of each of the current paths laps the other end of the other current paths. Because of the above structure, one-turn current flows throughout the current paths so that a uniform axial magnetic field can be applied to the main electrode, and an arc current can be uniformly distributed over the entire surface of the main electrode, thereby improving the current interruption performance of the vacuum interrupter.

Abstract: A pair of separable disc shaped electrodes for a vacuum circuit breaker, each including an annular contact part formed around the outer circumferential portion of the electrode on the facing surface to the other electrode, a round recessed part formed on the inner portion thereof and surrounded by the annular contact part, an elastic support plate placed on the non-facing surface thereof and three straight grooves extending from the outer periphery of the annular contact part to the inner periphery thereof so that arcing on the round recessed part is prevented during a circuit breaking operation of the vacuum circuit breaker.

Abstract: A small-sized, light weighted vacuum circuit interrupter is provided. The interrupter comprises a vacuum container confining a vacuum atmosphere of a pressure less than 10.sup.-5 mmHg and a pair of electrodes at least one of which is a movable electrode for making and breaking an electric circuit including either a transformer of a rated surge voltage strength of less than 45 kV or a motor of a rated surge voltage strength of less than 25 kV. At least one of the electrodes has a contact made of a porous body of a refractory conductive material and an impregnate selected from the group consisting of silver telluride, silver selenide and mixtures thereof impregnated in the porous body in an amount sufficient to give the interrupter a chopping current of not more than 1A and an arc extinguishing capability at 1MHz of not more than 27 A/.mu.s when measured in a circuit of 6 kV.

Abstract: Disclosed is a vacuum switch having a container and a pair of contact electrodes, and a method of manufacturing the same, in which at least one of the contact electrodes is constituted by a member made up of a skeleton containing cobalt as its principal component with pores into which a copper alloy containing copper as its principal component, silver, and a low melting point and high vapor pressure element having substantially no or very low solid-solubility with respect to the copper at a room temperature is impregnated.

Abstract: A vacuum interrupter comprises a vacuum vessel, at least a pair of electrical conductor rods extending from interior to exterior of the vacuum vessel, and at least a pair of separable composite electrodes respectively connected to the tip of the electrical conductor rods. Each of the composite electrodes has a main electrode, a parallel magnetic field generator for generating a parallel magnetic field which acts on an arc created when one main electrode is separated from the other, and a magnetic field suppressor of high electrical conductivity embedded in a central portion of the main electrode for partly cancelling the parallel magnetic field. In the vacuum interrupter, when the parallel magnetic field permeates through the magnetic field suppressor, eddy current flow is caused therein. A magnetic field due to the eddy current has a polarity opposite to that of the parallel magentic field and partly cancels the parallel magnetic field.

Abstract: A vacuum interrupter of parallel magnetic field electrode type comprising a pair of separatable arc electrodes disposed within a vacuum vessel, with each being provided on its back side with a conductive rod extending outwardly of the vacuum vessel. Coil electrodes are electrically connected between the associated arc electrode and rod for applying parallel magnetic fields to arc, and slits are formed in the arc electrodes for suppressing eddy currents of the arc electrodes resulting from the parallel fields. A reinforcement member of an electric conductivity higher than a main surface portion of the arc electrode is provided on the back side of the arc electrode opposite to said main surface portion so that the resulting arc current flows uniformly through the reinforcement member so that a higher interruption efficiency can be obtained for the vacuum interrupter.

Abstract: A vacuum interrupter comprises a pair of electrodes separably arranged within a vacuum vessel and mounted on conductor rods respectively. Each of the electrodes includes a coil electrode and a main electrode. The coil electrode is adapted to branch the current in the conductor rod in different radial directions with respect to the conductor rod for generating magnetic fields in axial direction of said conductor rod in such a manner as to offset each other at points near to the conductor rod. The main electrode is electrically connected with the coil electrode for carrying an arc. The main electrode includes a plurality of first current paths for passing the current in different radial directions, a plurality of second current paths for passing the current from the coil electrode to the first current paths, and a plurality of third current paths for passing the current therein in opposite directions to the current in the second current paths.

Abstract: A pair of relatively movable opposed electrodes for use in a vacuum-type circuit interrupter, each electrode comprising an annular contact-making portion provided at its outer peripheral area, a recessed portion surrounded by this annular contact-making portion, first self-acting magnetically-driving means for driving an arc produced on the surface of the annular contact-making portion to impel the same in a circumferential direction, and second self-acting magnetically driving means for driving an arc produced on the surface of the recessed portion to impel the same toward and onto the surface of the contact-making portion.

Abstract: A vacuum interrupter comprises a pair of opposed conductor rods extending exteriorlly of a vacuum vessel, a pair of main electrodes mounted to ends of the paired conductor rods and separable from each other, and coil electrodes which induce axial magnetic flux acting on arc produced when one main electrode separates from the other main electrode. The coil electrode includes a first arm section connected to the conductor rod and passing the current coming from one portion of the conductor rod radially thereof, a branching section for branching the current from the first arm section in reverse directions, and a second arm section for passing the branched currents until they are totalized again at the other portion of the conductor rod separated from the one portion by a spacer interposed between the first and second arm sections, whereby magnetic flux induced by the branched currents is cancelled out at the conductor rod, preventing the generation of eddy current in the conductor rod.

Abstract: A vacuum interrupter with pressure monitoring means wherein a pair of separable electrodes are arranged within a highly evacuated envelope and are connected to a high voltage circuit provided with a vacuum pressure detector element which has a pair of detector electrodes insulated from each other and serving to detect the pressure of the vacuum within the evacuated envelope. The vacuum pressure detector element has a voltage applied thereto in such a manner that one of the detector electrodes is conductively connected to the one end of the evacuated envelope to which the high voltage circuit is connected and the other detector electrode is connected to ground potential through a series connection member consisting of different sorts of voltage allotment elements which are selected from a resistance, an inductance, and a capacitor and whose voltage allotment ratio varies in dependence on frequency. A vacuum pressure detector means detects the operation of the vacuum pressure detector element.