Patents by Inventor Yusheng Bian

Yusheng Bian has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230408763
    Abstract: The disclosure relates to a PIC structure including a photonic component on a semiconductor substrate. A passive optical guard is composed of a light absorbing material and is in proximity to the photonic component. The passive optical guard includes at least a portion in an active semiconductor layer of the semiconductor substrate and may be entirely below a first metal layer. The passive optical guard may include at least one of: a germanium body positioned at least partially in a silicon element in the active semiconductor layer, a silicon body having a high dopant concentration in the active semiconductor layer, and a polysilicon body having a high dopant concentration over the silicon body.
    Type: Application
    Filed: June 16, 2022
    Publication date: December 21, 2023
    Inventors: Zhuojie Wu, Yusheng Bian, Andreas D. Stricker
  • Patent number: 11846804
    Abstract: Structures including an optical component and methods of fabricating a structure including an optical component. The structure includes an optical component having a waveguide core, and multiple features positioned adjacent to the waveguide core. The waveguide core contains a first material having a first thermal conductivity, and the features contain a second material having a second thermal conductivity that is greater than the first thermal conductivity.
    Type: Grant
    Filed: February 24, 2022
    Date of Patent: December 19, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Yusheng Bian, Hemant Dixit, Theodore Letavic
  • Publication number: 20230400633
    Abstract: Structures including a waveguide core and methods of fabricating a structure including a waveguide core. The structure comprises a photonics chip including a first chip region, a first waveguide core in the first chip region, a second chip region, and a second waveguide core in the second chip region. The first chip region adjoins the second chip region along a boundary, the first waveguide core includes a first tapered section and the second waveguide core includes a second tapered section adjacent to the first tapered section. The first tapered section has a first longitudinal axis aligned substantially parallel to the boundary, and the second tapered section has a second longitudinal axis aligned substantially parallel to the boundary.
    Type: Application
    Filed: June 8, 2022
    Publication date: December 14, 2023
    Inventor: Yusheng Bian
  • Patent number: 11841533
    Abstract: Disclosed is a structure including a first waveguide core with a first end portion and a second waveguide core with a second end portion, which overlays and is physically separated from the first end portion. The structure includes a coupler configured for interlayer waveguide coupling. Specifically, the coupler includes an additional waveguide core stacked vertically between and physically separated from the first end portion and the second end portion. Optionally, the coupler includes multiple additional waveguide cores. The shapes of the various waveguide cores are configured in order to achieve mode matching so that optical signals pass between the first end portion of the first waveguide core and the second end portion of the second waveguide core through each additional waveguide core in sequence. Also disclosed is a structure including a crossing array implemented using couplers.
    Type: Grant
    Filed: March 31, 2022
    Date of Patent: December 12, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventor: Yusheng Bian
  • Patent number: 11841534
    Abstract: Structures including a waveguide core and methods of fabricating a structure including a waveguide core. The structure comprises a substrate, a waveguide core, and a grating disposed in a vertical direction between the waveguide core and the substrate. The grating includes a first plurality of layers and a second plurality of layers that alternate in the vertical direction with the first plurality of layers. The first plurality of layers comprise a first material having a first refractive index, and the second plurality of layers comprise a second material having a second refractive index that is greater than the first refractive index.
    Type: Grant
    Filed: June 2, 2022
    Date of Patent: December 12, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Adam Rosenfeld, Yusheng Bian, Francis Afzal, Bob Mulfinger
  • Publication number: 20230393341
    Abstract: Structures including a ring resonator and methods of fabricating a structure including a ring resonator. The structure comprises an optical component, a first ring resonator positioned adjacent to the optical component, and a second ring resonator spaced in a vertical direction from the first ring resonator. The first ring resonator and the second ring resonator have an overlapping relationship.
    Type: Application
    Filed: June 2, 2022
    Publication date: December 7, 2023
    Inventor: Yusheng Bian
  • Publication number: 20230393339
    Abstract: Structures including stacked photonics chips and methods of fabricating a structure including stacked photonics chips. The structure comprises a first chip including a first waveguide core, a ring resonator adjacent to a portion of the first waveguide core, and a first dielectric layer over the first waveguide core and the ring resonator. The first dielectric layer has a first surface. The structure further comprises a second chip including a second waveguide core and a second dielectric layer over the second waveguide core. The second dielectric layer has a second surface adjacent to the first surface of the first dielectric layer, and the second waveguide core is positioned adjacent to the ring resonator.
    Type: Application
    Filed: June 7, 2022
    Publication date: December 7, 2023
    Inventors: Bartlomiej Jan Pawlak, Michal Rakowski, Yusheng Bian
  • Publication number: 20230393340
    Abstract: IC chips for photonics applications are disclosed. An example IC chip includes a substrate, an optical component above the substrate, and a first connection level above the substrate. The first connection level includes the optical component and a first cladding structure, in which the optical component is covered by the first cladding structure. The IC chip also includes a second connection level on the first connection level. The second connection level includes a first interlayer dielectric material. The IC chip further includes a second cladding structure directly above the optical component. The second cladding structure has at least a section within the second connection level. The second cladding structure is on the first cladding structure. The second cladding structure is laterally adjacent to and in direct contact with the first interlayer dielectric material. The second cladding structure includes a material different from the first interlayer dielectric material.
    Type: Application
    Filed: June 6, 2022
    Publication date: December 7, 2023
    Inventors: RYAN SPORER, KAREN NUMMY, KEITH DONEGAN, THOMAS HOUGHTON, YUSHENG BIAN, TAKAKO HIROKAWA, KENNETH GIEWONT
  • Publication number: 20230393334
    Abstract: Structures including a waveguide core and methods of fabricating a structure including a waveguide core. The structure comprises a substrate, a waveguide core, and a grating disposed in a vertical direction between the waveguide core and the substrate. The grating includes a first plurality of layers and a second plurality of layers that alternate in the vertical direction with the first plurality of layers. The first plurality of layers comprise a first material having a first refractive index, and the second plurality of layers comprise a second material having a second refractive index that is greater than the first refractive index.
    Type: Application
    Filed: June 2, 2022
    Publication date: December 7, 2023
    Inventors: Adam Rosenfeld, Yusheng Bian, Francis Afzal, Bob Mulfinger
  • Patent number: 11837547
    Abstract: A photonic integrated circuit (PIC) die includes a silicon nitride optical component over an active region. Multiple interconnect layers are over the silicon nitride optical component, each of the multiple interconnect layers including a metal interconnect therein. At least one optical deflector is over the multiple interconnect layers and over the silicon nitride optical component. The optical deflector(s) may also include a contact passing therethrough to the interconnect layers, but do not include any other electrical interconnects. Each optical deflector may deflect light within an ambient light range of less than 570 nanometers (nm) to protect the silicon nitride optical component from light-induced degradation.
    Type: Grant
    Filed: October 8, 2021
    Date of Patent: December 5, 2023
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Roderick Alan Augur, Yusheng Bian, Robert John Fox, III
  • Patent number: 11837851
    Abstract: A laser structure, including: a dielectric matrix formed of a first material; a laser source formed within the dielectric matrix and formed of a semiconductor material; and a plurality of side confining features formed within the dielectric matrix and extending parallel to and along a length of the laser source. The plurality of side confining features are formed of the semiconductor material.
    Type: Grant
    Filed: September 14, 2022
    Date of Patent: December 5, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Yusheng Bian, Roderick A. Augur, Michal Rakowski, Kenneth J. Giewont, Karen A. Nummy
  • Patent number: 11835764
    Abstract: Waveguide structures and methods of fabricating a waveguide structure. The structure includes a first waveguide core, a second waveguide core, and a third waveguide core adjacent to the first waveguide core and the second waveguide core. The third waveguide core is laterally separated from the first waveguide core by a first slot, and the third waveguide core is laterally separated from the second waveguide core by a second slot. The first waveguide core and the second waveguide core comprise a first material, and the third waveguide core comprises a second material that is different in composition from the first material.
    Type: Grant
    Filed: January 31, 2022
    Date of Patent: December 5, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Shesh Mani Pandey, Yusheng Bian, Judson Holt
  • Publication number: 20230384518
    Abstract: Structures for an edge coupler and methods of fabricating a structure for an edge coupler. The structure comprises an edge coupler including a first waveguide core and a second waveguide core adjacent to the first waveguide core in a lateral direction. The first waveguide core includes a first section with a first thickness and a first plurality of segments projecting in a vertical direction from the first section. The second waveguide core includes a second section with a second thickness and a second plurality of segments projecting in the vertical direction from the second section.
    Type: Application
    Filed: May 31, 2022
    Publication date: November 30, 2023
    Inventor: Yusheng Bian
  • Patent number: 11828984
    Abstract: Structures including an optical component and methods of fabricating a structure including an optical component. The structure includes a substrate, an optical component including a waveguide core, and a back-end-of-line stack including a heat spreader layer. The optical component is positioned in a vertical direction between the substrate and the back-end-of-line stack. The waveguide core contains a first material having a first thermal conductivity, and the heat spreader layer contains a second material having a second thermal conductivity that is greater than the first thermal conductivity of the first material.
    Type: Grant
    Filed: February 24, 2022
    Date of Patent: November 28, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Theodore Letavic, Yusheng Bian, Hemant Dixit
  • Patent number: 11822122
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to waveguide structures with metamaterial structures and methods of manufacture. The structure includes: at least one waveguide structure; and metamaterial structures separated from the at least one waveguide structure by an insulator material, the metamaterial structures being structured to decouple the at least one waveguide structure to simultaneously reduce insertion loss and crosstalk of the at least one waveguide structure.
    Type: Grant
    Filed: August 31, 2021
    Date of Patent: November 21, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Yusheng Bian, Ajey Poovannummoottil Jacob, Steven M. Shank
  • Patent number: 11822120
    Abstract: Structures including an optical component and methods of fabricating a structure including an optical component. The structure includes a waveguide core and a back-end-of-line stack including a first metallization level, a second metallization level, and a heat sink having a metal feature in the second metallization level. The heat sink is positioned adjacent to a section of the waveguide core. The first metallization level including a dielectric layer positioned between the metal feature and the section of the waveguide core.
    Type: Grant
    Filed: February 24, 2022
    Date of Patent: November 21, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Hemant Dixit, Yusheng Bian, Theodore Letavic
  • Publication number: 20230367067
    Abstract: Structures for an edge coupler and methods of fabricating such structures. The structure comprises a substrate and a back-end-of-line edge coupler including a waveguide core and a grating positioned in a vertical direction between the substrate and the waveguide core. The first waveguide core includes a first longitudinal axis, the grating includes a second longitudinal axis and a plurality of segments positioned with a spaced-apart arrangement along the second longitudinal axis, and the second longitudinal axis is aligned substantially parallel to the first longitudinal axis.
    Type: Application
    Filed: May 11, 2022
    Publication date: November 16, 2023
    Inventors: Yusheng Bian, Rod Augur
  • Patent number: 11815717
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a photonic chip security structure and methods of manufacture. The structure includes an optical component and a photonic chip security structure having a vertical wall composed of light absorbing material surrounding the optical component.
    Type: Grant
    Filed: November 12, 2021
    Date of Patent: November 14, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Vibhor Jain, Nicholas A. Polomoff, Yusheng Bian
  • Patent number: 11810989
    Abstract: A photodetector disclosed herein includes an N-doped waveguide structure defined in a semiconductor material, wherein the N-doped waveguide structure comprises a plurality of first fins. Each adjacent pair of the plurality of first fins is separated by a trench formed in the semiconductor material. The photodetector also includes a detector structure positioned on the N-doped waveguide structure, wherein a portion of the detector structure is positioned laterally between the plurality of first fins. The detector structure comprises a single crystal semiconductor material. The photodetector also includes a first diffusion region that extends from the bottom surface of the trench into the semiconductor material, wherein the first diffusion region comprises atoms of the single crystal semiconductor material of the detector structure.
    Type: Grant
    Filed: October 19, 2021
    Date of Patent: November 7, 2023
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Ajey Poovannummoottil Jacob, Yusheng Bian, Steven Shank
  • Patent number: 11808996
    Abstract: Photonics structures for a waveguide or an edge coupler and methods of fabricating a photonics structure for a waveguide or an edge coupler. The photonics structure includes a waveguide core having a first section, a second section longitudinally adjacent to the first section, first segments projecting in a vertical direction from the first section, and second segments projecting in the vertical direction from the second section. The first section of the waveguide core has a first thickness, and the second section of the waveguide core has a second thickness that is greater than the first thickness.
    Type: Grant
    Filed: April 26, 2022
    Date of Patent: November 7, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventor: Yusheng Bian