Abstract: A displacement sensor includes an emitting unit periodically emitting pulse signals; a receiving unit receiving reflection signals generated from the pulse signals and reflected by an object and outputs binary signals that indicate signal intensity of the received reflection signals; a waveform summation unit generating a summation waveform by accumulating temporal waveforms of the binary signals for the respective corresponding periods of time with reference to emission timings of the corresponding pulse signals; a distance calculation unit calculating a value that indicates a distance to the object on the basis of waveform features corresponding to waveform features of the pulse signals that appear in the summation waveform; and a reception signal amount calculation unit calculating a reception signal amount that is intensity of the reflection signals received by the receiving unit on the basis of feature amounts indicated by cumulative values that appear in the summation waveform.

Abstract: Provided are a sensor device and a detection method. The sensor device includes: a light emitting unit transmitting a transmission signal toward a target; a light receiving unit receiving a reflected signal of the transmission signal and generating a binarized signal; a TDC delay line measurement unit and a waveform integration unit generating waveform data indicating temporal changes in the binarized signal and integrating the waveform data to generate integrated waveform data; a stage number calculation unit and a distance conversion unit calculating a near-side distance value and a far-side distance value from intersections of the integrated waveform data and a high threshold value and a low threshold value, respectively; and a determination unit determining whether the target is present on the basis of a distance value calculated from the near-side distance value and the far-side distance value and on the basis of a predetermined distance threshold value.

Abstract: A scanning electron microscopy system that includes a primary electron beam radiation unit configured to irradiate a first pattern of a substrate having a second pattern formed in a peripheral region of the first pattern, a detection unit configured to detect back scattered electrons emitted from the substrate, an image generation unit configured to generate an electron beam image corresponding to a strength of the back scattered electrons, a designating unit configured to designate a depth measurement region in which the first pattern exists on the electron beam image, and a processing unit configured to obtain an image signal of the depth measurement region and a pattern density in the peripheral region where the second pattern exists, and to estimate a depth of the first pattern based on the obtained image signal of the depth measurement region and the pattern density in the peripheral region.

Abstract: The present invention provides a sensor system with which a change in the state of a workpiece which has occurred in a conveyance process can be detennined. The sensor system comprises: a plurality of sensors positioned along a line and measuring data indicating that a workpiece being conveyed upon the line has passed thereby; a plurality of slave units respectively connected to the plurality of sensors and acquiring the data measured by the plurality of sensors; and a master unit connected to the plurality of slave units. The master unit comprises: a storage part for storing the data in association with information which relates to the timing at which the data was measured; and a determination part for comparing the data transmitted from two or more of the plurality of slave units using the information which relates to the timing, and determining a change in the state of the workpiece.

Abstract: An electron microscope apparatus includes a detection unit that detects reflected electrons reflected from a sample when the sample is irradiated with primary electrons emitted by a primary electron generation unit (electron gun), an image generation unit that generates an image of a surface of the sample with the reflected electrons based on output from the detection unit, and a processing unit that generates a differential waveform signal of the image generated by the image generation unit, processes the image by using information of the differential waveform signal, and measures a dimension of a pattern formed on the sample.

Abstract: A sensor control device and a sensor system are provided through which it is possible to automatically detect whether mutual interference occurs for a plurality of sensor units, and it is possible to automatically set periodic light projection timings for preventing mutual interference. A sensor control device includes a light projection control part configured to instruct a light projection operation for each of a plurality of sensor units and a light projection timing setting part configured to set periodic light projection timings when each of the sensor units is periodically operated based on results of light projection control for each of the sensor units and detection results of each of the sensor units.

Abstract: A sensor device measuring a distance to an object includes: a light projection unit repeatedly emitting detection light toward the object; a light reception unit receiving reflected light of the detection light and outputting a binarized light reception signal (RT); a light projection oscillation unit controlling the emission of the detection light and outputting a start signal synchronized with the emission of the detection light; a counter measurement unit starting counting of the RT when receiving the RT and the start signal, and outputting a stop signal corresponding to a feature point of the RT; a delay line measurement unit outputting a delay line output signal corresponding to the delay time of the RT near the feature point of the RT when receiving the RT and the stop signal; and a distance calculation unit calculating the distance to the object based on the delay line output signal.

Abstract: A game device 10 includes: a keyboard display section 112 displaying a plurality of input regions corresponding to a plurality of input objects on a screen of a display device, receiving a first operation input on a rear touch pad, and displaying, in an enlarged state, a predetermined input region among the plurality of input regions; and an input receiving section 111 receiving a second operation input for determining an input object, and inputting the input object corresponding to an input region identified by the second operation input.

Abstract: A photosensor includes a light projection unit, a light receiving unit, a determination unit that determines a magnitude relation between a received light quantity of the light receiving unit and a threshold value set for the received light quantity; and a threshold value setting unit that sets the threshold value of the received light quantity. The threshold value setting unit calculates for each of a plurality of different wavelength regions, a contrast difference that is a difference between a received light quantity obtained when projection is performed on a detection target on a surface of a workpiece and a received light quantity obtained when projection is performed on a background on the surface of the workpiece, and updates the threshold value based on the contrast difference for a wavelength region among the plurality of wavelength regions in which the contrast difference has a maximum value.

Abstract: A displacement sensor includes an emitting unit periodically emitting pulse signals; a receiving unit receiving reflection signals generated from the pulse signals and reflected by an object and outputs binary signals that indicate signal intensity of the received reflection signals; a waveform summation unit generating a summation waveform by accumulating temporal waveforms of the binary signals for the respective corresponding periods of time with reference to emission timings of the corresponding pulse signals; a distance calculation unit calculating a value that indicates a distance to the object on the basis of waveform features corresponding to waveform features of the pulse signals that appear in the summation waveform; and a reception signal amount calculation unit calculating a reception signal amount that is intensity of the reflection signals received by the receiving unit on the basis of feature amounts indicated by cumulative values that appear in the summation waveform.

Abstract: Provided are an optical sensor and a detection method which can suppress an influence of an ambient light to detect a target. An optical sensor which detect a target includes: a light reception portion, in which multiple pixels respectively receive lights and a light reception distribution signal showing a light reception amount of each pixel is obtained; an A/D conversion portion, which converts the light reception distribution signal to a digital signal for each pixel; an integration portion, which integrates multiple converted light reception distribution signals for each pixel; and a determination portion, which determines the presence or absence of the target based on the integrated light reception distribution signal.

Abstract: A photosensor includes a light projection unit, a light receiving unit, a determination unit that determines a magnitude relation between a received light quantity of the light receiving unit and a threshold value set for the received light quantity; and a threshold value setting unit that sets the threshold value of the received light quantity. The threshold value setting unit calculates for each of a plurality of different wavelength regions, a contrast difference that is a difference between a received light quantity obtained when projection is performed on a detection target on a surface of a workpiece and a received light quantity obtained when projection is performed on a background on the surface of the workpiece, and updates the threshold value based on the contrast difference for a wavelength region among the plurality of wavelength regions in which the contrast difference has a maximum value.

Abstract: A sensor control device and a sensor system are provided through which it is possible to automatically detect whether mutual interference occurs for a plurality of sensor units, and it is possible to automatically set periodic light projection timings for preventing mutual interference. A sensor control device includes a light projection control part configured to instruct a light projection operation for each of a plurality of sensor units and a light projection timing setting part configured to set periodic light projection timings when each of the sensor units is periodically operated based on results of light projection control for each of the sensor units and detection results of each of the sensor units.

Abstract: In a sensor system including a plurality of photoelectric sensor units, a light projecting period arbitrarily determined in each type is provided and mutual interference is prevented between identical types. The sensor system includes the plurality of sensor units coupled by a connector unit while a signal can be transmitted. Each of the sensor units retains type information thereof, and sets a unique identification number by transmitting the signal to each other. Each sensor unit operates after a delay time determined according to the identification number thereof elapses with a synchronous signal as a starting point. The synchronous signal is transmitted with a predetermined period from the sensor unit having a specific identification number in the plurality of sensor units. The delay time of each sensor unit is determined such that an operating period is matched with a predetermined period determined in each piece of the type information.

Abstract: In accordance with an embodiment, a pattern inspection method includes applying a light to a substrate including an inspection target pattern in a plurality of optical conditions, detecting a reflected light from the substrate to acquire a pattern image for each of the optical conditions, outputting a gray value difference between the pattern image and a reference image for each of the optical conditions, and specifying a position of the defect in a stacking direction of the stacked film from a relation of the obtained gray value difference between the optical conditions. The pattern is formed by a stacked film, the optical conditions includes at least a first optical condition for detection of a defect on a surface of the stacked film.

Abstract: According to an embodiment, a defect detection method includes inspecting an inspection target, classifying the inspection target by a characteristic quantity of a signal in the inspection of the inspection target, producing an in-plane map of the inspection target based on the characteristic quantities of the signals in the inspection of the inspection target, calculating a characteristic quantity of an in-plane map of the inspection target, and classifying defects of the inspection target in accordance with an agreement rate between the in-plane map characteristic quantity of the inspection target and an in-plane map characteristic quantity of a reference target.

Abstract: A game device 10 includes: a keyboard display section 112 displaying a plurality of input regions corresponding to a plurality of input objects on a screen of a display device, receiving a first operation input on a rear touch pad, and displaying, in an enlarged state, a predetermined input region among the plurality of input regions; and an input receiving section 111 receiving a second operation input for determining an input object, and inputting the input object corresponding to an input region identified by the second operation input.

Abstract: The disclosure provides a photoelectric sensor that provides useful information to set measurement conditions. The photoelectric sensor includes a light emitting unit having a light emitting element configured to emit detection light toward a detection area, a light receiving unit having a light receiving element configured to receive the detection light from the detection area and to obtain a detection value corresponding to the amount of light received, and a display unit configured to display information about the detection value in the light receiving unit. When the detection value varies across a predetermined threshold, the display unit displays a transit time that is the time from when the detection value crosses the predetermined threshold until when it crosses the predetermined threshold again, and a variation amount of the detection value in the variation.

Abstract: In a measurement apparatus, higher-quality measurement is realized in measurement of measurement object displacement or imaging of a two-dimensional image. In a controller, a light receiving signal of a photodiode is supplied to a displacement measuring unit of a sensor head in order to measure a height of a measurement object, and the height of a surface of the measurement object is measured based on the light receiving signal. Then, in the controller, image obtaining timing is determined based on the height of the measurement object. Specifically, a focus adjustment value corresponding to the computed height of the measurement object is obtained from the table, and an image obtaining signal is transmitted to an imaging device at the timing the focus adjustment value is realized. Therefore, a length between two points on the measurement object is computed from the thus obtained image based on the height of the measurement object.

Abstract: Teaching processing using a model of a workpiece is performed by accepting at least one input of a target value for a response time and a tolerance value for a detection error as a parameter representing a condition for a displacement sensor to operate. A CPU during teaching processing determines a maximum exposure time while it causes repeated detection processing by a light projecting unit and a light receiving unit, calculates variation in measurement data of an amount of displacement, and derives the number of pieces of data of moving average calculation suitable for a value for the input parameter as a result of operation processing using the maximum exposure time and variation in measurement data. This number of pieces of data is registered in a memory and used for moving average calculation in a normal operation mode.