PRESSURE TRANSMITTER FOR A SEMICONDUCTOR PROCESSING ENVIRONMENT
Embodiments related to measuring process pressure in low-pressure semiconductor processing environments are provided. In one example, a semiconductor processing module for processing a substrate with a process gas in a vacuum chamber is provided. The example module includes a reactor positioned within the vacuum chamber for processing the substrate with the process gas and a pressure-sensitive structure operative to transmit a pressure transmission fluid pressure to a location exterior to the vacuum chamber. In this example, the pressure transmission fluid pressure varies in response to the process gas pressure within the vacuum chamber.
Latest ASM AMERICA, INC. Patents:
- Apparatus and method for adjusting a pedestal assembly for a reactor
- System for rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow
- Reaction system for growing a thin film
- Pulsed valve manifold for atomic layer deposition
- Selective etching of reactor surfaces
Measuring process pressure in semiconductor processing tools can be challenging. For example, process gases and byproducts present in some film deposition processes may restrict gas flow in sampling ports used by some pressure measurement devices. Consequently, pressure gauges connected to such ports may make inaccurate pressure measurements, potentially leading to poor process control and substrate quality excursions.
SUMMARYVarious embodiments are disclosed herein that relate to transmitting pressure from a vacuum chamber of semiconductor processing module to an external location via a pressure transmission fluid. For example, one embodiment provides a semiconductor processing module for processing a substrate with a process gas in vacuum chamber. The example semiconductor processing module comprises a reactor positioned within the vacuum chamber for processing the substrate with the process gas. Also included in the example module is a pressure-sensitive structure operative to transmit a pressure transmission fluid pressure to a location exterior to the vacuum chamber. In this example, the pressure transmission fluid pressure varies in response to the process gas pressure within the vacuum chamber.
This Summary is provided to introduce a selection of concepts in a simplified form that are further described below in the Detailed Description. This Summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter. Furthermore, the claimed subject matter is not limited to implementations that solve any or all disadvantages noted in any part of this disclosure.
Sensing pressure within a semiconductor substrate processing environment can be important for controlling the substrate processing conditions. Pressure in low-pressure substrate processing environments has long been sensed with capacitance manometers. Such devices typically include a measurement cell configured to sense pressure by sampling process gases via a small diameter tap. The measurement cell is separated from a reference cell by a thin membrane held under a radial tension. The reference cell is maintained at a known vacuum condition, typically by a getter. As a result, changes in pressure in the processing environment cause the membrane to deflect, generating electrical signals that are translated into pressure values.
However, capacitance manometers may be sensitive to fouling resulting from substrate processing. For example, film deposition processes may cause the tap to be clogged with film and/or film deposition byproducts, potentially restricting gas flow to the measurement cell. Further, the membrane may become fouled over time, potentially changing the deflection characteristics of the membrane. Such scenarios may alter the ability of a capacitance manometer to sense pressure within the processing environment accurately.
Some approaches to address these issues include locating capacitance manometers outside of the substrate processing environment, such as in a process exhaust foreline. However, relocating the capacitance manometer outside of the substrate processing environment may not provide an accurate measurement of local pressure within the processing environment. Pressure differences between the processing environment and the capacitance manometer location may be introduced by plumbing hardware, such as pressure control valves, pipe bends, and restriction orifices, located between the processing environment and the capacitance manometer. Further, because capacitance manometers determine pressure based on the reference cell vacuum level, reference cell drift that may result from degradation of the getter may also affect the accuracy of the device.
Further still, in some substrate deposition processes, even relocating the capacitance manometer outside of the substrate processing environment may not prevent the clogging and fouling issues described above. For example, in some atomic layer deposition (ALD) processes, thin layers of film are deposited by alternately adsorbing two reactants to the substrate without supplying the reactants to the substrate processing environment concurrently. By supplying each reactant separately, only deposited film layers and the surface active species of one reactant chemisorbed to those film layers are present on the substrate when the other reactant is supplied. Consequently, highly conformal films may be formed on the substrate surface, even in high aspect ratio structures.
However, the layer-by-layer nature of ALD processes may present challenges to substrate throughput during high-volume manufacturing. One approach to speeding throughput includes supplying the substrate with a quantity of reactant suitable to provide acceptable substrate coverage of surface active species in a short duration, high concentration pulse. Because some reactants used in ALD processes may have low vapor pressures, condensation within the small diameter taps used in some capacitance manometers may aggravate clogging. Further, in some of such ALD processes, reactants may be supplied in excess to provide suitable coverage of the process surface of the substrate. Consequently, comparatively large amounts of reactant may adsorb and react elsewhere, potentially within the tap of a capacitance manometer.
The disclosed embodiments relate to detecting pressure in a semiconductor processing environment via a pressure transmission fluid. For example, a semiconductor processing module is disclosed, the processing module including a pressure-sensitive structure. The pressure-sensitive structure is operative to transmit, fluidically, a pressure transmission fluid pressure to a location exterior to the vacuum chamber within suitable range of operating conditions for the example semiconductor processing module. It will be appreciated that any suitable operating conditions may be employed without departing from the scope of the present disclosure. In one non-limiting embodiment, the semiconductor processing module may be configured to process substrates in a range of temperatures between 150 Celsius and 400 Celsius and in a range of pressures between 0 and 10 Torr, both within an acceptable tolerance. Further, it will be appreciated that the semiconductor processing module may be configured to operate at a range of conditions outside of substrate processing conditions, such as during maintenance routines. In one non-limiting embodiment, the semiconductor processing module may be configured to operate at between 5 mTorr and 760 Torr.
As explained in more detail below, movement of the pressure-sensitive structure causes the pressure transmission fluid, a fluid that is suitably incompressible within an acceptable tolerance at a selected temperature, to transmit process pressure information to the external location where the pressure information may be collected by a suitable sensor. It will be appreciated that process pressure information may be transmitted at any suitable level of sensitivity without departing from the present disclosure. In one non-limiting embodiment, the pressure-sensitive structure may cause transmission of pressure information accurate to within 0.075% of a measurement span over which process pressure is to be measured. For example, in a system configured to measure process pressure over a range of 0 to 77.6 Torr, process pressure changes may be detected with an accuracy of +/−0.06 Torr.
In some embodiments, the pressure-sensitive structure may comprise one or more displaceable diaphragms disposed within one or more of a process feed plenum, a reactor, and a process exhaust collector included within the vacuum chamber. In such embodiments, the displaceable diaphragms may be directly exposed to process fluids and/or may be disposed directly within the substrate processing environment. Thus, the disclosed embodiments offer the potential advantage of being able to measure pressure and/or pressure changes within the vacuum chamber of the semiconductor processing module without the potential disadvantages arising from small orifice taps, such as the potentially clogging and fouling issues discussed above. Further, because the pressure transmission fluid pressure in the disclosed embodiments is a suitably incompressible fluid, the disclosed embodiments may avoid the potential inaccuracies described above that may result from reference cell drift, and thus may offer the potential advantage of comparatively longer-term service life relative to some capacitance manometers.
Reactor 106 includes a top plate 114 coupled to a bottom plate 116. As shown in
As shown in
Substrate 102 is supported in the low-pressure substrate processing environment by susceptor 128. Susceptor 128 includes a heater 130 used to adjust a temperature of substrate 102 before, during, and/or after substrate processing. Susceptor 128 is mounted on an elevator 132 so that substrate 102 may be raised and lowered within vacuum chamber 108 to facilitate substrate transfer in and out of vacuum chamber 108 and to facilitate sealing susceptor 128 to bottom plate 116 during substrate processing.
One or more pressure-sensitive structures are also provided in the embodiments of the semiconductor processing modules described herein. Any suitable pressure-sensitive structure may be employed without departing from the present disclosure. In the embodiment shown in
Each pressure-sensitive structure shown in
Any suitable pressure transmission fluid that is incompressible within an acceptable tolerance under suitable operating conditions for semiconductor processing module 100 may be employed without departing from the scope of the present disclosure. Example pressure transmission fluids include, but are not limited to liquid inorganic substances, such as a suitable silicone oil and a suitable liquid metal such as mercury, and liquid organic substances, such as suitable aromatic compounds, napthenic compounds, and paraffinic compounds. In some embodiments, the pressure transmission fluid may include a single constituent, such as glycerine or nitrobenzene, free of contaminants within an acceptable tolerance. In some other embodiments, the pressure transmission fluid may include a blend of compounds, such as those used in suitable lubricating fluids and/or heat exchange fluids. Non-limiting example lubricating fluids may include olive oil, mineral oil, and/or linseed oil. One non-limiting example heat exchange fluid may include a blend of diphenyl oxide and biphenyl. In some embodiments where blends of compounds are provided, it will be appreciated that the relative concentrations of various constituents may be selected to adjust one or more thermodynamic properties of the pressure transmission fluid, such as thermal expansion, over a range of operating conditions.
In some embodiments, the pressure sensor may include a suitable pressure sensor diaphragm configured to couple fluidically with an opposite end of the pressure transmission fluid line from the pressure-sensitive structure (shown in
In the embodiment shown in
In some embodiments, the pressure transmission fluid line may include a purge valve (illustrated in
As introduced above, a pressure-sensitive structure is exposed to process gases so that process pressure information may be transmitted to a location external to the vacuum chamber.
It will be appreciated that the displaceable diaphragm may be formed into any suitable shape; for simplicity, the example embodiments shown and described herein are generally circular. Displaceable diaphragm 202 may be formed from any material suited for use with the operating conditions at which the semiconductor processing module is used and suitably impermeable within an acceptable tolerance to the process gases and the pressure transmission fluid used therewith. Non-limiting examples include metals and low-volatility polymer materials.
As shown in
The embodiment of displaceable diaphragm 202 shown in
The embodiment of displaceable diaphragm 202 shown in
Because the pressure transmission fluid is suitably incompressible, displaceable diaphragm 202, the pressure transmission fluid, and the pressure sensor diaphragm form a closed hydraulic system. Consequently, movement of displaceable diaphragm 202 responsive to changes in process gas pressure transmits process pressure information to the pressure sensor in proportion to the effective areas of displaceable diaphragm 202 and the pressure sensor diaphragm. It will be appreciated that any suitable size relationship of between the effective area of displaceable diaphragm 202 and the pressure sensor diaphragm may be employed without departing from the scope of the present disclosure. For example, in some embodiments, displaceable diaphragm 202 may be sized larger than a corresponding pressure sensor diaphragm, so that a smaller movement of the displaceable diaphragm may lead to a larger movement at the pressure sensor diaphragm. This may have the potential benefit of enhancing the sensitivity of the pressure sensor to small changes in pressure.
Further, displaceable diaphragm 202 may also have any suitable size. In some non-limiting embodiments, a circularly shaped displaceable diaphragm 202 may have a diameter of 2 inches. Further still, it will be appreciated that the structural characteristics of displaceable diaphragm 202 may vary according to the thickness and/or construction material. Because comparatively thicker diaphragms may be more robust in some applications, displaceable diaphragm 202 may be sized in consideration of an area-to-thickness ratio for a selected sensitivity and construction material in some embodiments. For example, in an embodiment where displaceable diaphragm 202 flexes in response to process gas pressure changes, a larger displaceable diaphragm may be comparatively more robust than a smaller one for a given area-to-thickness ratio.
In some embodiments, the pressure-sensitive structure may include a reservoir of pressure transmission fluid positioned so that pressure transmission fluid contacts the pressure-sensitive structure. In the embodiment shown in
Alternatively, in some embodiments, reservoir 212 may be sized so the pressure transmission fluid wets only a portion of transmission side 210. For example, reservoir 212 may be sized so that the pressure transmission fluid only wets a portion of an extension projecting from transmission side 210. This may provide the potential benefit of reducing a volume of pressure transmission fluid included within the pressure transmission fluid line and/or potentially reducing a transient response time of pressure transmission via the pressure transmission fluid.
Because the pressure-sensitive structure is positioned within a vacuum environment, the portions of the pressure-sensitive structure exposed to the pressure transmission fluid are sealed to prevent loss of the pressure transmission fluid to the vacuum chamber. For example, in some embodiments, the displaceable diaphragm and the reservoir may be welded together or may be formed from a single piece of material. In some other embodiments, the displaceable diaphragm and the reservoir may be removably sealed together. For example, a deformable metal gasket held by a suitable vacuum-tight edge, such as a knife-edge disposed on each of the diaphragm and the reservoir, may be used to form a suitable seal in some embodiments. Similar approaches may be used to seal the pressure-sensitive structure to the pressure fluid transmission line. For example, in the embodiment shown in
One or more pressure-sensitive structures may be positioned at any suitable location within vacuum chamber 108 to measure a pressure of process gas. For example, as shown in
It will be appreciated that any suitable number of pressure-sensitive structures may be provided within the low-pressure substrate processing environment. While the example shown in
As shown in the embodiment of
While the embodiments shown in
One or more pressure-sensitive structures may also be located outside of the low-pressure substrate processing environment. In some embodiments, another pressure-sensitive structure may be located outside of the low-pressure substrate processing environment in addition to a first pressure-sensitive structure located within the low-pressure substrate processing environment. In some other embodiments, a pressure-sensitive structure may be located outside of the low-pressure substrate processing environment in place of a pressure-sensitive structure located within the low-pressure substrate processing environment. For example, a pressure-sensitive structure may not be included within the low-pressure substrate processing environment in process conditions where the risk of potential particle generation by the pressure-sensitive structure may be undesirable.
An example of a pressure-sensitive structure positioned outside of the low-pressure substrate processing environment is illustrated by the embodiment shown in
In still other embodiments, one or more pressure-sensitive structures may be located upstream of the low-pressure substrate processing environment to monitor pressure within the process feed plenum. For example, the pressure of a process feed plenum may be monitored to check for a potential chemical vapor deposition (CVD) reaction that may initiate therein. CVD reactions occurring within the process feed plenum may have deleterious effects on substrate process conditions, including small particle generation and substrate process thickness profile non-uniformity effects. Such effects may be especially harmful during ALD processing, where uncontrolled CVD reactions may lead to unwanted film deposition and/or particle decoration.
In some ALD processes, CVD reactions may result from transient reactant concentration and/or reactor temperature conditions at process gas injection ports and process gas feed plenums. Some of such CVD reactions may be indicated by pressure information related to these gas phase processes. However, because ALD processes frequently employ pulsed doses of low vapor pressure process gases, potential condensation of the process gases within a capacitance manometer may make pressure measurement within the process feed plenum difficult. Because some embodiments of the disclosed pressure-sensitive structures may be directly exposable to such environments without using sampling ports or taps, the potential clogging and fouling problems that may result from condensation within sampling ports may be avoided.
It will be understood that the hardware described above may be used to measure pressure in a semiconductor processing module and, in turn, use the pressure information to process a substrate within the module.
Method 600 comprises, at 602, supporting a substrate with a susceptor within a vacuum chamber. In some embodiments, 602 may comprise, at 604, sealing the susceptor against a bottom plate of a reactor within the vacuum chamber so that the substrate is positioned in a low-pressure substrate processing environment within the vacuum chamber.
At 606, method 600 comprises supplying a process gas to the vacuum chamber. For example, in an ALD process, the process gas may be supplied to the vacuum chamber so that a suitable coverage of surface active species derived from the process gas is generated on a process surface of the substrate. In some embodiments, 606 may comprise, at 608, supplying the process gas upstream of a process surface of the substrate so that the process gas flows across the process surface before flowing across a pressure-sensitive structure.
At 610, method 600 comprises transmitting to a location exterior to the vacuum chamber a pressure transmission fluid pressure with a pressure-sensitive structure, the pressure transmission fluid pressure varying in response to a process gas pressure within the vacuum chamber. In some embodiments, 610 may comprise, at 612, transmitting the pressure transmission fluid pressure via a movement of a displaceable diaphragm included in the pressure-sensitive structure. In such embodiments, the pressure-sensitive structure may be included in the bottom plate of the reactor and may be flush with a top surface of a lower shelf of the bottom plate so as not to disturb a flow of process gas flowing across the lower shelf within the reactor.
At 614, method 600 comprises detecting the process gas pressure via the pressure transmission fluid pressure, and at 616, adjusting a pressure control device responsive to the pressure transmission fluid pressure. For example, in some embodiments, one or more of a pressure control valve or a process gas feed flow rate may be adjusted in response to the pressure transmission fluid pressure.
System process controller 722 is a computing system that includes a data-holding subsystem 724 and a logic subsystem 726. Data-holding subsystem 724 may include one or more physical, non-transitory, devices configured to hold data and/or instructions executable by logic subsystem 726 to implement the methods and processes described herein. Logic subsystem 726 may include one or more physical devices configured to execute one or more instructions stored in data-holding subsystem 724. Logic subsystem 726 may include one or more processors that are configured to execute software instructions. For example, instructions held in data-holding subsystem 724 and executed by logic subsystem 726 may be used to perform various method described herein, and may further be used to control semiconductor processing tool 700.
For example, such instructions may control the execution of process recipes. Generally, a process recipe includes a sequential description of process parameters used to process a substrate, such parameters including time, temperature, pressure, and concentration, etc., as well as various parameters describing electrical, mechanical, and environmental aspects of the tool during substrate processing. The instructions may also control the execution of various maintenance recipes used during maintenance procedures and the like. Further, such instructions may be configured to operate various semiconductor processing tool control subsystems, such as gas control subsystems, pressure control subsystems, temperature control subsystems, electrical control subsystems, and mechanical control subsystems. Such control subsystems may receive various signals provided by sensors, relays, and controllers and make suitable adjustments in response.
It is to be understood that the configurations and/or approaches described herein are exemplary in nature, and that these specific embodiments or examples are not to be considered in a limiting sense, because numerous variations are possible. The specific routines or methods described herein may represent one or more of any number of processing strategies. Thus, the various acts illustrated may be performed in the sequence illustrated, in other sequences, or omitted in some cases.
The subject matter of the present disclosure includes all novel and nonobvious combinations and subcombinations of the various processes, systems and configurations, and other features, functions, acts, and/or properties disclosed herein, as well as any and all equivalents thereof.
Claims
1. A semiconductor processing module for processing a substrate with a process gas in a vacuum chamber, the semiconductor processing module comprising:
- a reactor positioned within the vacuum chamber for processing the substrate with the process gas; and
- a pressure-sensitive structure operative to transmit a pressure transmission fluid pressure to a location exterior to the vacuum chamber, such pressure transmission fluid pressure varying in response to a pressure of the process gas.
2. The semiconductor processing module of claim 1, the reactor comprising a top plate and a bottom plate coupled to the top plate.
3. The semiconductor processing module of claim 2, further comprising:
- a susceptor moveably sealable to the bottom plate so that the substrate is supported in a low-pressure substrate processing environment when the susceptor is sealed to the bottom plate;
- a process feed plenum coupled to the reactor for supplying the process gas to the low-pressure substrate processing environment upstream of a substrate positioned in the low-pressure substrate processing environment; and
- a process exhaust collector coupled to the reactor for collecting the process gas downstream of the substrate;
- wherein the process feed plenum and the process exhaust collector are arranged to direct the process gas across a process surface of the substrate.
4. The semiconductor processing module of claim 3, the pressure-sensitive structure being positioned downstream of the process surface of the substrate.
5. The semiconductor processing module of claim 3, wherein the pressure-sensitive structure has a process side being exposed to the low-pressure substrate processing environment, the process side being mounted flush with a surface of the bottom plate.
6. The semiconductor processing module of claim 3, the pressure-sensitive structure being included in the process exhaust collector.
7. The semiconductor processing module of claim 3, the pressure-sensitive structure being included in the process feed plenum.
8. The semiconductor processing module of claim 1, wherein the pressure-sensitive structure includes a displaceable diaphragm having a process side exposable to the process gas and a transmission side opposite the process side.
9. The semiconductor processing module of claim 8, further comprising:
- a pressure sensor adapted to detect the pressure transmission fluid pressure at the location exterior to the vacuum chamber; and
- a pressure transmission fluid line for fluidically coupling the pressure sensor to the displaceable diaphragm with a pressure transmission fluid that is in contact with the transmission side of the displaceable diaphragm so as to transmit process pressure information, responsive to movement of the displaceable diaphragm, from the process gas to the pressure sensor.
10. The semiconductor processing module of claim 9, the pressure sensor including a pressure sensor diaphragm for transmitting process pressure information to the pressure sensor via movement of the pressure sensor diaphragm; and
- the pressure transmission fluid line including a purge valve for purging the pressure transmission fluid line.
11. The semiconductor processing module of claim 9, the pressure-sensitive structure comprising a reservoir formed below the transmission side, the reservoir fluidically coupled with the pressure transmission fluid line, wherein the reservoir, the pressure transmission fluid line, and the displaceable diaphragm are sealably coupled.
12. The semiconductor processing module of claim 1, further comprising:
- a second pressure-sensitive structure operative to transmit a second pressure transmission fluid pressure to a second location exterior to the vacuum chamber.
13. A reactor defining a low-pressure substrate processing environment for processing a substrate, the reactor comprising:
- a top plate;
- a bottom plate coupled to the top plate;
- a susceptor moveably sealable to the bottom plate so that the substrate is supported in the low-pressure substrate processing environment when the susceptor is sealed to the bottom plate; and
- a displaceable diaphragm included in the bottom plate, the displaceable diaphragm adapted to transmit process pressure information for the low-pressure substrate processing environment responsive to movement of the displaceable diaphragm.
14. The reactor of claim 13, further comprising an inlet for receiving process gas from a process feed plenum upstream of a process surface of the substrate and an outlet for expelling the process gas to a process exhaust collector downstream of the process surface of the substrate, the inlet and the outlet being arranged to direct the process gas across the process surface of the substrate and wherein the displaceable diaphragm is positioned downstream of the process surface of the substrate.
15. The reactor of claim 13, the displaceable diaphragm including a process side that is flush with a top surface of the bottom plate, the top surface being exposed to the low-pressure substrate processing environment.
16. The reactor of claim 13, the displaceable diaphragm further including a reservoir formed below a transmission side of the displaceable diaphragm.
17. The reactor of claim 16, wherein the displaceable diaphragm and the reservoir are sealably coupled.
18. The reactor of claim 16, further comprising a pressure transmission fluid line for fluidically coupling the reservoir to a pressure sensor with a pressure transmission fluid that is in contact with the transmission side of the displaceable diaphragm.
19. At a process controller of a semiconductor processing module, a method for processing a substrate in a vacuum chamber of the semiconductor processing module, the method comprising:
- supporting a substrate with a susceptor within the vacuum chamber;
- supplying a process gas to the vacuum chamber; and
- transmitting to a location exterior to the vacuum chamber a pressure transmission fluid pressure with a pressure-sensitive structure, the pressure transmission fluid pressure varying in response to a process gas pressure within the vacuum chamber.
20. The method of claim 19, wherein supplying the process gas comprises supplying the process gas upstream of a process surface of the substrate so that the process gas flows across the process surface of the substrate before flowing across the pressure-sensitive structure.
Type: Application
Filed: Jul 20, 2011
Publication Date: Jan 24, 2013
Applicant: ASM AMERICA, INC. (Phoenix, AZ)
Inventor: Joseph Charles Reed (North Plains, OR)
Application Number: 13/187,300
International Classification: H01L 21/30 (20060101); C23C 16/52 (20060101); C23C 16/455 (20060101);