MACHINE LEARNING & INTEGRATED METROLOGY FOR RUN-TO-RUN OPTIMIZATION OF CHIP-TO-WAFER ALIGNMENT ACCURACY
Methods, apparatuses and systems in an integrated bonding system for optimizing bonding alignment between dies and a substrates include bonding, using a bonder of the integrated bonding system, a first die to a first substrate using preset alignment settings, transferring, using a transfer arm/robot of the integrated bonding system, the bonded die-substrate combination to an on-board inspection tool of the integrated bonding system, inspecting, at the on-board inspection tool, an alignment of the bond between the die and the substrate of the bonded die-substrate combination to determine a misalignment measure representing a misalignment of the bond between the die and the substrate of the bonded die-substrate combination, determining from the misalignment measurement, using a machine learning process, a correction measurement to be communicated to the bonder, and bonding, in the bonder, a different die to a different substrate using the determined machine-learning based correction measurement.
Embodiments of the disclosure generally relate to methods, apparatuses and systems for processing substrates. More particularly, embodiments of the disclosure relate to methods, apparatus and systems for improving chip-to-wafer bonding alignment accuracy.
BACKGROUNDAccurate chip-to-wafer (C2W) alignment is crucial to ensure electrical connectivity. Currently, alignment optimization typically relies on post-bonding misalignment measurement on a stand-alone tool and manual input of a compensating offset into bonder. This process is slow, prone to human error, and limited in optimization rounds. Further, it is usually done only after part change to qualify the bonder alignment performance, but not performed on a timely run-to-run (R2R) basis.
SUMMARYA method in an integrated bonding system for optimizing bonding alignment between dies and a substrates includes bonding, using a bonder of the integrated bonding system, a first die to a first substrate using preset alignment settings, transferring, using a transfer arm/robot of the integrated bonding system, the bonded die-substrate combination to an on-board inspection tool of the integrated bonding system, inspecting, at the on-board inspection tool, an alignment of the bond between the die and the substrate of the bonded die-substrate combination to determine a misalignment measure representing a misalignment of the bond between the die and the substrate of the bonded die-substrate combination, determining from the misalignment measurement, using a machine learning process, a correction measurement to be communicated to the bonder, and bonding, in the bonder, a different die to a different substrate using the determined machine-learning based correction measurement.
In some embodiments the method can further include comparing the determined misalignment measure to a threshold to determine whether a determined misalignment of the bond between the die and the substrate of the bonded die-substrate combination is within an acceptable tolerance and if the determined misalignment is determined to not be within the acceptable tolerance, the correction measurement is determined and if the determined misalignment is determined to be within an acceptable tolerance and the determined misalignment is determined to be getting worse, the correction measurement can also be determined. A different die can then be bonded to a different substrate using the determined machine-learning based correction measurement.
An apparatus in an integrated bonding system for optimizing bonding alignment between a die and a substrate includes a processor and a memory coupled to the processor, the memory having stored therein at least one of programs or instructions. The programs or instructions when executed by the processor configure the apparatus to cause a bonder of the integrated bonding system to bond a first die to a first substrate using preset alignment settings, cause a transfer arm/robot of the integrated bonding system to transfer the bonded die-substrate combination to an on-board inspection tool of the integrated bonding system, cause the on-board inspection tool to inspect an alignment of the bond between the die and the substrate of the bonded die-substrate combination to determine a misalignment measure representing a misalignment of the bond between the die and the substrate of the bonded die-substrate combination, determine from the misalignment measurement, using a machine learning process, a correction measurement to be communicated to the bonder, and cause the bonder to bond a different die to a different substrate using the determined machine-learning based correction measurement.
In some embodiments the apparatus further compares the determined misalignment measure to a threshold to determine whether a determined misalignment of the bond between the die and the substrate of the bonded die-substrate combination is within an acceptable tolerance and if the determined misalignment is determined to not be within the acceptable tolerance, the correction measurement is determined. If the determined misalignment is determined to be within an acceptable tolerance and the determined misalignment is determined to be getting worse, a machine-learning based correction measurement can be determined and the bonder can bond a different die to a different substrate using the determined machine-learning based correction measurement.
An integrated bonding system for optimizing bonding alignment between a die and a substrate includes a bonder bonding a first die to a first substrate using preset alignment settings, a transfer arm/robot transferring the bonded die-substrate combination to an on-board inspection tool of the integrated bonding system, and an on-board inspection tool inspecting an alignment of the bond between the die and the substrate of the bonded die-substrate combination to determine a misalignment measure representing a misalignment of the bond between the die and the substrate of the bonded die-substrate combination and determining from the misalignment measurement, using a machine learning process, a correction measurement to be communicated to the bonder, in which the bonder bonds a different die to a different substrate using the determined machine-learning based correction measurement.
In some embodiments, the on-board inspection tool further compares the determined misalignment measure to a threshold to determine whether a determined misalignment of the bond between the die and the substrate of the bonded die-substrate combination is within an acceptable tolerance and if the determined misalignment is determined to not be within the acceptable tolerance, the correction measurement is determined. If the determined misalignment is determined to be within an acceptable tolerance and the determined misalignment is determined to be getting worse, a machine-learning based correction measurement can be determined and the bonder can bond a different die to a different substrate using the determined machine-learning based correction measurement.
Other and further embodiments of the present disclosure are described below.
Embodiments of the present disclosure, briefly summarized above and discussed in greater detail below, can be understood by reference to the illustrative embodiments of the disclosure depicted in the appended drawings. However, the appended drawings illustrate only typical embodiments of the disclosure and are therefore not to be considered limiting of scope, for the disclosure may admit to other equally effective embodiments.
To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. The figures are not drawn to scale and may be simplified for clarity. Elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation.
DETAILED DESCRIPTIONEmbodiments of methods, apparatus and systems for improving chip-to-wafer alignment accuracy are provided herein. For example, methods, apparatus and systems for improving chip-to-wafer alignment accuracy can comprise a bonder having an onboard inspection tool to enable inline measurement of any misalignment between dies and substrate(s). The measurements from the onboard inspection tool can be communicated to a machine learning process/database which provides feedback to the bonder to correct for any measured misalignment between a die(s) and a substrate(s) based on the feedback. In some embodiments, the measurements from the onboard inspection tool can be continually made or, in addition or alternatively, the measurements from the onboard inspection tool can be made at predetermined intervals or dynamically determined intervals.
In the flow diagram 100 of
As depicted in
Although specific numbers and types of optional chambers are depicted for the integrated bonding system 200 of
As described above with respect to
Embodiments of the present principles provide a method in an integrated bonding system for optimizing bonding alignment between at least one die and at least one substrate which can include at least bonding, using a bonder of the integrated bonding system, a first die to a first substrate using preset alignment settings, transferring, using a transfer arm/robot, the bonded die-substrate combination to an on-board inspection tool of the integrated bonding system, inspecting, at the on-board inspection tool, an alignment of the bond between the die and the substrate of the bonded die-substrate combination to determine a misalignment measure representing a misalignment of the bond between the die and the substrate of the bonded die-substrate combination, determining from the misalignment measurement, using a machine learning process, a correction measurement to be communicated to the bonder, and bonding a different die to a different substrate, in the bonder, using the new machine-learning based correction measurement.
For example, in some embodiments of the present principles, a model is trained using a machine learning process, the model representative of an acceptable (e.g., in tolerance) alignment between a die(s) and a substrate(s). That is, during training, a machine learning process can be exposed to example of acceptably aligned dies and substrates and unacceptably aligned dies and substrates. During the training, the machine learning process can learn to identify bonded dies and substrates that have an in-tolerance alignment, in some embodiments using a loss function. The machine learning process of the present principles can further train on an amount of adjustment to be made to, for example, a bonder to cause the bonder to improve an alignment between bonds between dies and substrates in a more accurate manner (i.e., without over-correcting or under correcting). Subsequently, during bonding of dies and substrates, neural networks can be used in the machine learning process of the present principles to identify bonds between dies and substrates that are acceptable (i.e., within tolerance) and dies that are not acceptable (i.e., out of tolerance).
At 304, the integrated bonding system of the present principles, such as the integrated bonding system 200 of
At 306, an on-board, integrated inspection tool of the present principles, such as the onboard metrology tool 204, inspects an alignment of the bond between the die and the substrate to determine if a misalignment (or, in some embodiments described below, an out of tolerance misalignment) exists between the die and the substrate to which the die was bonded. If a misalignment exists, the onboard metrology tool 204 measures the misalignment, the bonded first die/first substrate is discarded and the method 300 proceeds to 308. If no misalignment exists, the bonded fist die/first substrate is saved and the method 300 can proceed to 312.
At 308, a machine learning process of a computing device of an integrated inspection tool of the present principles, such as a machine learning process implemented by the computing device 800 of the onboard metrology tool 204, determines from the misalignment measurement, a correction signal/measurement to be communicated to a bonder of the present principles, such as the bonder 202, for enabling the bonder to correct for a misalignment between, for example, the first die and the first substrate. In some embodiments, a machine learning process of the computing device 800 takes into account previous and current measurements to determine a correction signal/measurement to be communicated to the bonder 202 to accurately adjust for any measured misalignment between the first die and the first substrate, for example, without over or under correction for more accuracy. In some embodiments, collected and determined data and machine-leaning data can be sent to an associated machine-learning database to be stored for future use. That is, in accordance with the present principles and as described above, data associated with the computing device (e.g., machine learning data) can be stored in a memory of the computing device (described in greater detail with respect to
At 310, the determined correction signal/measurement is communicated to a bonder of the present principles, such as the bonder 202 of the integrated bonding system 200 of
At 312 an integrated bonding system of the present principles, such as the integrated bonding system 200 of
At 314, a bonder of the present principles, such as the bonder 202 of the integrated bonding system 200 of
At 402, a bonder bonds a first die(s) of type A to a first substrate, S1, with preset/historical alignment settings.
At 404, the bonded die/substrate, S1-A, is transferred using, for example a transfer arm/robot of the main body 201 of the integrated bonding system 200 of
At 406, the onboard inspection tool of the present principles measures the misalignment between the bonded die(s), A, and the substrate, S1. A correction signal/measurement is determined to correct for a misalignment between the bonded die and substrate, using, in some embodiments, a machine learning process of the onboard metrology tool 204. Collected and determined data can be sent to an associated machine-learning database to be stored for future use.
In the embodiment of
At 408, the correction signal/measurement determined by the onboard metrology tool of the present principles is communicated to the bonder.
In the example of
At 410, the bonder offsets the misalignment of the bond between the die, A, and the substrate, S1, based on the received correction signal/measurement.
At 412, the bonder bonds a different die of the same type, A, to a different substrate, S2, with the new alignment setting based on the received correction signal/measurement.
At 414, a second on-board alignment inspection & machine learning cycle is then performed. That is, in the embodiment of
In the embodiment of
In the example of
At 418, the bonder bonds a different, third die of the same type, A, to a different, third substrate, S3, with the new alignment setting based on the received, second correction signal/measurement.
In some embodiments of the present principles, a misalignment measurement can be compared to at least one threshold measurement to determine if a misalignment needs to be corrected in accordance with the present principles or if a misalignment is within an acceptable tolerance for completing an electrical contact between a bonded die and a substrate. For example,
At 504, the integrated bonding system of the present principles, such as the integrated bonding system 200 of
At 506, an on-board, integrated inspection tool of the present principles, such as the onboard metrology tool 204, inspects an alignment of the bond between the first die and the first substrate to determine if a misalignment exists between the first die and the first substrate to which the first die was bonded. If a misalignment exists, the onboard metrology tool 204 measures the misalignment, the first bonded die/substrate is discarded and the method 500 proceeds to 508. If no misalignment exists, the bonded die/substrate, S1-A is saved and the method 500 can skip to 514.
At 508, the measured misalignment value can be compared to a threshold value representing a maximum acceptable misalignment measure. For example, in some embodiments of the present principles, a threshold value representing a maximum acceptable misalignment measure can be stored in a memory of, for example, a computing device of the present principles, such as the computing device 800 of the onboard metrology tool 204. That is, in accordance with the present principles, data associated with the computing device (e.g., threshold data) can be stored in a memory of the computing device (described in greater detail with respect to
At 508, if the misalignment measurement value is greater than the threshold value, the method 500 can proceed to 510. If the misalignment measurement value is less than the threshold value, the method 500 can skip to 514. In some embodiments, however, when the misalignment measurement value is less than the threshold value but misalignment amounts are trending up/worsening based on the stored data of a previous number of runs, the method 500 can take preventive action based on machine-learning/AI-enabled predictive analysis to provide a bonder with an updated corrective offset so that the misalignment measurement value can always be kept at a minimum. More specifically, in some embodiments, when the misalignment measurement value is less than the threshold value but misalignment amounts are trending up/worsening, the method 500 can proceed to 510 instead of skipping to 514.
At 510, a machine learning process of a computing device of an integrated inspection tool of the present principles, such as a machine learning process implemented by the computing device 800 of the onboard metrology tool 204, determines from the misalignment measurement (either out of threshold tolerance or in threshold tolerance but trending up/worsening), a correction signal/measurement to be communicated to the bonder 202, for enabling the bonder to correct for a misalignment between, for example, the first die and the first substrate. In some embodiments, the machine learning process of the computing device 800 takes into account previous and current measurements to determine a correction signal/measurement to be communicated to the bonder 202 to accurately adjust for any measured misalignment between the first die and the first substrate, for example, without over or under correction for more accuracy. The method 500 can proceed to 512.
At 512, the determined correction signal/measurement is communicated to a bonder of the present principles, such as the bonder 202 of the integrated bonding system 200 of
At 514, an integrated bonding system of the present principles, such as the integrated bonding system 200 of
At 516, a bonder of the present principles, such as the bonder 202 of the integrated bonding system 200 of
In some embodiments of the present principles, multiple dies can be bonded to a same or different substrates in a same or different bonders of the present principles, such as the bonder 202 of the integrated bonding system 200 of
The method 600 of
At 604, the integrated bonding system of the present principles, such as the integrated bonding system 200 of
At 606, an on-board, integrated inspection tool of the present principles, such as the onboard metrology tool 204, inspects an alignment of the bond between the first die and the first substrate to determine if a misalignment exists between the bonded first die/first substrate. If a misalignment exists, the onboard metrology tool 204 measures the misalignment, the bonded first die/first substrate is discarded and the method 600 proceeds to 608. If no misalignment exists, the bonded first die/first substrate is saved and the method 600 can proceed to 612 and in parallel to 616.
At 608, a machine learning process of a computing device of an integrated inspection tool of the present principles, such as a machine learning process implemented by the computing device 800 of the onboard metrology tool 204, determines from the misalignment measurement, a correction signal/measurement to be communicated to the first bonder for enabling the bonder to correct for a bonding misalignment in the bond between the first die and the first substrate. The method 600 can proceed to 610.
At 610, the determined correction signal/measurement is communicated to the first bonder. The method 600 can proceed to 612.
At 612, an integrated bonding system of the present principles, such as the integrated bonding system 200 of
At 614, the first bonder offsets the measured bonding misalignment based on the machine learning determined correction signal/measurement when bonding a remaining selected die of the first type to a different, selected substrate. For example, in some embodiments, the first bonder bonds a second die of the first type to a second substrate using the correction signal/measurement determined based on the machine learning. The method 600 can then return to 604 at which the bonded second die of the first type and the second substrate is transferred to the onboard metrology tool 204 and the method 600 can proceed as before.
At 616, the second bonder bonds a die of the second type to a substrate, having bonded thereon a die of the first type, with preset/historical alignment settings of the second bonder. That is, in some embodiments, the detection of misaligned dies of the first type on substrates bonded by the first bonder can serve as a gating to bonding of dies of the second type on substrates in the second bonder. The method 600 can proceed to 618.
At 618, the integrated bonding system of the present principles, such as the integrated bonding system 200 of
At 620, an on-board, integrated inspection tool of the present principles, such as the onboard metrology tool 204, inspects an alignment of the bond between the die of the second type and the substrate having bonded thereon the die of the first type to determine if a misalignment exists between the bonded die of the second type and the substrate having bonded thereon the die of the first type. If a misalignment exists, the measures the misalignment, the bonded first-second die type/substrate is discarded and the method 600 proceeds to 622. If no misalignment exists, the bonded first-second die substrate is saved and the method 600 can proceed to 626.
At 622, a machine learning process of a computing device of an integrated inspection tool of the present principles, such as a machine learning process implemented by the computing device 800 of the onboard metrology tool 204, determines from the misalignment measurement, a correction signal/measurement to be communicated to the second bonder for enabling the bonder to correct for a bonding misalignment in the bond between the second die and the substrate. The method 600 can proceed to 624.
At 624, the determined correction signal/measurement is communicated to the second bonder. The method 600 can proceed to 626.
At 626, an integrated bonding system of the present principles, such as the integrated bonding system 200 of
At 628, the second bonder offsets the measured bonding misalignment based on the machine learning determined correction signal/measurement when bonding a remaining selected die of the second type to a different, selected substrate. For example, in some embodiments, the second bonder bonds another, different die of the second type to a different substrate using the correction signal/measurement determined based on the machine learning. The method 600 can then return to 618 at which the bonded, different die of the second type and the different substrate is transferred to the onboard metrology tool 204 and the method 600 can proceed to 620 and on, as before.
Embodiments of the present principles for bonding multiple types of dies, such as the method 600 of
In addition, although the embodiment of
In the example of
At 704, an on-board, integrated inspection tool of the present principles, such as the onboard metrology tool 204, inspects an alignment of the bond between the die, A, and the first substrate, S1, and determines that a misalignment exists between the die, A, and the first substrate, S1, to which the die was bonded. As such, in the example of
In the example of
At 706, Bonder A offsets the measured bonding misalignment based on a machine learning determined correction signal/measurement determined from the measured misalignment and bonds another die of type A to a second substrate S2 using the new machine-learning based alignment settings.
In the example of
In the example of
In the example of
At 712, the process continues and the on-board, integrated inspection tool of the present principles, such as the onboard metrology tool 204, inspects an alignment of the bond between the die, A, and the third substrate, S3 to determine if any misalignment exists between the die of the first type, A, and the third substrate, S3.
In the example of
At 716, the on-board, integrated inspection tool of the present principles, such as the onboard metrology tool 204, inspects an alignment of the bond between the die of the second type, B, and the bonded substrate, S2-A, and determines that only a slight misalignment within an acceptable tolerance exists between the die, B, and the bonded substrate, S2-A, to which the die of the second type, B, was bonded. As such, in the example of
In the example of
In the example of
At 720, the process continues and the on-board, integrated inspection tool of the present principles, such as the onboard metrology tool 204, inspects an alignment of the bond between the die, B, and the bonded substrate, S3-A to determine if any misalignment exists between the die of the second type, B, and the bonded substrate, S3-A.
Although in the above-described embodiments of the present principles, the embodiments are described as if the bonding of every die on every substrate is inspected in accordance with the present principles for misalignment, the granularity of how often or how many of the bonds are inspected for misalignment is variable in accordance with the present principles. For example, in some embodiments, a granularity of how often or how many of the bonds are inspected for misalignment can be based on at least one of an amount of time available for performing a bonding process and an amount of processing/memory capability of a an integrated bonding system of the present principles. In some embodiments, a granularity of how often or how many of the bonds are inspected for misalignment can be based on a prediction of the machine learning process/artificial intelligence process of the present invention, which can predict, based on a trend of previous and current misalignment measurements, when changing misalignment measurements can become out of tolerance.
In some embodiments, an inspection granularity can be dynamic. For example, in some embodiments, a sampling rate can depend on the maturity and stability of a bonding process. That is, an initial sampling rate can be very high up to 100% (all dies inspected for all bonded substrates). Subsequently, for example, during manufacturing volume ramping, the sampling rate can be 20-80%. Then, during mass production of a very stable process of high proven yield, the sampling rate can be < 10%. The above-described inspection granularities are only exemplary and a frequency of bonding inspection can comprise substantially any frequency in accordance with the present principles.
In accordance with the present principles, die/substrate bonds can have multiple measurement points. For example, in some embodiments, for thin dies (< 200 um thick), measurement can be made at 4 points such as at die corners or even at 5 points (corners + center) to capture potential misalignment caused by die warpage. In other embodiments and for thicker dies (>200 um thick), measurement can be made at 4 points, however it would be possible to reduce measurement to 2 die corners for quick checking during high volume production, if Cu bonding pads are large (>10 um size) and specification/tolerance is not tight.
In some embodiments of the present principles, and as described above, some alignment measurements can include 5 measurements (4 corners and 1 center) sampled per die, and there can be as many as 500 dies per wafer. Therefore, the control system dimension can be as large as 2500 control loops (5 × 500). Since there are no interactions among each control loop, they can be treated as 2500 single-input and single-output control loops, considered by the inventors as Multiple Single-Input and Single-Output (MSISO). The inventors propose herein a MSISO control system which is designed on top of an Exponentially Weighted Moving Average (EWMA) Model. The MSISO control system of the present principles enables a configuration of multiple SISO parameters with same contexts. That is, a MSISO control model design of present principles simplifies configuring multiple SISO parameters by reducing strategy logic of multiple parameters in a single operation. The MSISO control system of the present principles supports a control system with large numbers of inputs and outputs, such as a 1000 input and 1000 output system. A benefit of a MSISO design of the present principles is that all 2500 control loops can be calculated in one shot, instead of looping each control loop one by one (2500 loops). The MSISO method of the present principles improves the calculation time (or reduce computational loading) significantly over currently available methods for processing control loops individually.
In some embodiments of the present principles, alignment measurements taken by an on-board, integrated inspection tool of the present principles, such as the onboard metrology tool 204 of the integrated bonding system 200 of
Embodiments of the present principles can further implement a moving horizon technology, which can be applied in each control loop. For example, an adjustment control loop for determining alignment of bonded dies and substrates can be based upon the last 10 data points (or moving window of 10). In the depicted example, the horizon length (e.g. 10) is a tuning parameter that can be adjusted by a user.
In the embodiment of
In different embodiments, the computing device 800 can be any of various types of devices, including, but not limited to, a personal computer system, desktop computer, laptop, notebook, tablet or netbook computer, mainframe computer system, handheld computer, workstation, network computer, a camera, a set top box, a mobile device, a consumer device, video game console, handheld video game device, application server, storage device, a peripheral device such as a switch, modem, router, or in general any type of computing or electronic device.
In various embodiments, the computing device 800 can be a uniprocessor system including one processor 810, or a multiprocessor system including several processors 810 (e.g., two, four, eight, or another suitable number). Processors 810 can be any suitable processor capable of executing instructions. For example, in various embodiments processors 810 may be general-purpose or embedded processors implementing any of a variety of instruction set architectures (ISAs). In multiprocessor systems, each of processors 810 may commonly, but not necessarily, implement the same ISA.
System memory 820 can be configured to store program instructions 822 and/or data 832 accessible by processor 810. In various embodiments, system memory 820 can be implemented using any suitable memory technology, such as static random-access memory (SRAM), synchronous dynamic RAM (SDRAM), nonvolatile/Flash-type memory, or any other type of memory. In the illustrated embodiment, program instructions and data implementing any of the elements of the embodiments described above can be stored within system memory 820. In other embodiments, program instructions and/or data can be received, sent or stored upon different types of computer-accessible media or on similar media separate from system memory 820 or computing device 800.
In one embodiment, I/O interface 830 can be configured to coordinate I/O traffic between processor 810, system memory 820, and any peripheral devices in the device, including network interface 840 or other peripheral interfaces, such as input/output devices 850. In some embodiments, I/O interface 830 can perform any necessary protocol, timing or other data transformations to convert data signals from one component (e.g., system memory 820) into a format suitable for use by another component (e.g., processor 810). In some embodiments, I/O interface 830 can include support for devices attached through various types of peripheral buses, such as a variant of the Peripheral Component Interconnect (PCI) bus standard or the Universal Serial Bus (USB) standard, for example. In some embodiments, the function of I/O interface 830 can be split into two or more separate components, such as a north bridge and a south bridge, for example. Also, in some embodiments some or all of the functionality of I/O interface 830, such as an interface to system memory 820, can be incorporated directly into processor 810.
Network interface 840 can be configured to allow data to be exchanged between the computing device 800 and other devices attached to a network (e.g., network 890), such as one or more external systems or between nodes of the computing device 800. In various embodiments, network 890 can include one or more networks including but not limited to Local Area Networks (LANs) (e.g., an Ethernet or corporate network), Wide Area Networks (WANs) (e.g., the Internet), wireless data networks, some other electronic data network, or some combination thereof. In various embodiments, network interface 840 can support communication via wired or wireless general data networks, such as any suitable type of Ethernet network, for example; via digital fiber communications networks; via storage area networks such as Fiber Channel SANs, or via any other suitable type of network and/or protocol.
Input/output devices 850 can, in some embodiments, include one or more display terminals, keyboards, keypads, touchpads, scanning devices, voice or optical recognition devices, or any other devices suitable for entering or accessing data by one or more computer systems. Multiple input/output devices 850 can be present in computer system or can be distributed on various nodes of the computing device 800. In some embodiments, similar input/output devices can be separate from the computing device 800 and can interact with one or more nodes of the computing device 800 through a wired or wireless connection, such as over network interface 840.
Those skilled in the art will appreciate that the computing device 800 is merely illustrative and is not intended to limit the scope of embodiments. In particular, the computer system and devices can include any combination of hardware or software that can perform the indicated functions of various embodiments, including computers, network devices, Internet appliances, PDAs, wireless phones, pagers, and the like. The computing device 800 can also be connected to other devices that are not illustrated, or instead can operate as a stand-alone system. In addition, the functionality provided by the illustrated components can in some embodiments be combined in fewer components or distributed in additional components. Similarly, in some embodiments, the functionality of some of the illustrated components may not be provided and/or other additional functionality can be available.
The computing device 800 can communicate with other computing devices based on various computer communication protocols such a Wi-Fi, Bluetooth.RTM. (and/or other standards for exchanging data over short distances includes protocols using short-wavelength radio transmissions), USB, Ethernet, cellular, an ultrasonic local area communication protocol, etc. The computing device 800 can further include a web browser.
Although the computing device 800 is depicted as a general purpose computer, the computing device 800 is programmed to perform various specialized control functions and is configured to act as a specialized, specific computer in accordance with the present principles, and embodiments can be implemented in hardware, for example, as an application specified integrated circuit (ASIC). As such, the process steps described herein are intended to be broadly interpreted as being equivalently performed by software, hardware, or a combination thereof.
While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof.
In the foregoing description, numerous specific details, examples, and scenarios are set forth in order to provide a more thorough understanding of the present principles. It will be appreciated, however, that embodiments of the principles can be practiced without such specific details. Further, such examples and scenarios are provided for illustration, and are not intended to limit the teachings in any way. Those of ordinary skill in the art, with the included descriptions, should be able to implement appropriate functionality without undue experimentation.
References in the specification to “an embodiment,” etc., indicate that the embodiment described may include a particular feature, structure, or characteristic, but every embodiment may not necessarily include the particular feature, structure, or characteristic. Such phrases are not necessarily referring to the same embodiment. Further, when a particular feature, structure, or characteristic is described in connection with an embodiment, it is believed to be within the knowledge of one skilled in the art to effect such feature, structure, or characteristic in connection with other embodiments whether or not explicitly indicated.
Claims
1. A method in an integrated bonding system for optimizing bonding alignment between a die and a substrate, comprising:
- bonding, using a bonder of the integrated bonding system, a first die to a first substrate using preset alignment settings;
- transferring, using a transfer robot of the integrated bonding system, the bonded die-substrate combination to an on-board inspection tool of the integrated bonding system;
- inspecting, at the on-board inspection tool, an alignment of the bond between the die and the substrate of the bonded die-substrate combination to determine a misalignment measure representing a misalignment of the bond between the die and the substrate of the bonded die-substrate combination;
- determining from the misalignment measurement, using a machine learning process, a correction measurement to be communicated to the bonder; and
- bonding, in the bonder, a different die to a different substrate using the determined machine-learning based correction measurement.
2. The method of claim 1, further comprising:
- determining if there are any other dies to be bonded to any substrates.
3. The method of claim 1, further comprising:
- comparing the determined misalignment measure to a threshold to determine whether a determined misalignment of the bond between the die and the substrate of the bonded die-substrate combination is within an acceptable tolerance.
4. The method of claim 3, wherein the threshold represents a maximum allowable misalignment of the bond between the die and the substrate of the bonded die-substrate combination.
5. The method of claim 3, wherein if the determined misalignment is determined to not be within the acceptable tolerance, the correction measurement is determined and if the determined misalignment is determined to be within an acceptable tolerance, another die can be bonded to the first substrate.
6. The method of claim 3, wherein if the determined misalignment is determined to be within an acceptable tolerance and the determined misalignment is determined to be getting worse, the correction measurement is determined.
7. The method of claim 3, wherein the another die comprises at least one of a die of a different type and a die bonded to the first substrate using a different bonder of the integrated bonding system.
8. The method of claim 1, further comprising:
- after the bonding of the different die to the different substrate using the determined machine-learning based correction measurement, the method of claim 1 returns to the transferring of the bonded die-substrate combination to the on-board inspection tool of the integrated bonding system.
9. An apparatus in an integrated bonding system for optimizing bonding alignment between a die and a substrate, comprising:
- a processor; and
- a memory coupled to the processor, the memory having stored therein at least one of programs or instructions executable by the processor to configure the apparatus to: cause a bonder of the integrated bonding system to bond a first die to a first substrate using preset alignment settings; cause a transfer robot of the integrated bonding system to transfer the bonded die-substrate combination to an on-board inspection tool of the integrated bonding system; cause the on-board inspection tool to inspect an alignment of the bond between the die and the substrate of the bonded die-substrate combination to determine a misalignment measure representing a misalignment of the bond between the die and the substrate of the bonded die-substrate combination; determine from the misalignment measurement, using a machine learning process, a correction measurement to be communicated to the bonder; and cause the bonder to bond a different die to a different substrate using the determined machine-learning based correction measurement.
10. The apparatus of claim 9, wherein the apparatus is further configured to: determine if there are any other dies to be bonded to any substrates.
11. The apparatus of claim 9, wherein the apparatus is further configured to:
- compare the determined misalignment measure to a threshold to determine whether a determined misalignment of the bond between the die and the substrate of the bonded die-substrate combination is within an acceptable tolerance.
12. The apparatus of claim 11, wherein the threshold represents a maximum allowable misalignment of the bond between the die and the substrate of the bonded die-substrate combination.
13. The apparatus of claim 11, wherein if the determined misalignment is determined to not be within the acceptable tolerance, the correction measurement is determined and if the determined misalignment is determined to be within an acceptable tolerance, another die can be bonded to the first substrate.
14. The apparatus of claim 13, wherein the another die comprises at least one of a die of a different type and a die bonded to the first substrate using a different bonder of the integrated bonding system.
15. The apparatus of claim 11, wherein if the determined misalignment is determined to be within an acceptable tolerance and the determined misalignment is determined to be getting worse, the correction measurement is determined.
16. The apparatus of claim 9, wherein the apparatus is further configured to:
- after the bonding of the different die to the different substrate using the determined machine-learning based correction measurement, again transfer the bonded die-substrate combination to the on-board inspection tool of the integrated bonding system, again cause the on-board inspection tool to inspect an alignment of the bond between the die and the substrate of the bonded die-substrate combination to determine a misalignment measure representing a misalignment of the bond between the die and the substrate of the bonded die-substrate combination, again determine from the misalignment measurement, using a machine learning process, a correction measurement to be communicated to the bonder, and again cause the bonder to bond a different die to a different substrate using the determined machine-learning based correction measurement.
17. An integrated bonding system for optimizing bonding alignment between a die and a substrate, comprising:
- a bonder bonding a first die to a first substrate using preset alignment settings;
- a transfer robot transferring the bonded die-substrate combination to an on-board inspection tool of the integrated bonding system; and
- an on-board inspection tool inspecting an alignment of the bond between the die and the substrate of the bonded die-substrate combination to determine a misalignment measure representing a misalignment of the bond between the die and the substrate of the bonded die-substrate combination and determining from the misalignment measurement, using a machine learning process, a correction measurement to be communicated to the bonder;
- wherein the bonder bonds a different die to a different substrate using the determined machine-learning based correction measurement.
18. The system of claim 17, further comprising at least one of a plasma chamber, a UV release chamber, a wet-clean chamber, an integration chamber, and a degas chamber for pre-processing at least one of a die and a substrate.
19. The system of claim 17, further comprising a different bonder for bonding at least one die of a different type than the first die to at least one substrate, including the first substrate.
20. The system of claim 17, wherein the on-board inspection tool further compares the determined misalignment measure to a threshold to determine whether a determined misalignment of the bond between the die and the substrate of the bonded die-substrate combination is within an acceptable tolerance and if the determined misalignment is determined to not be within the acceptable tolerance, the correction measurement is determined and if the determined misalignment is determined to be within an acceptable tolerance and the determined misalignment is determined to be getting worse, the correction measurement is determined and the bonder bonds a different die to a different substrate using the determined machine-learning based correction measurement.
Type: Application
Filed: Feb 25, 2022
Publication Date: Aug 31, 2023
Inventors: Ruiping WANG (San Jose, CA), Shijing WANG (El Dorado Hills, CA), Selim NAHAS (Santa Clara, CA), Ying WANG (Singapore), Guan Huei SEE (Singapore)
Application Number: 17/680,554