System and method for adjusting a PID controller in a limited rotation motor system

- GSI Group Corporation

An adjustment system is disclosed for adjusting a proportional, integral, derivative controller in a limited rotation motor system. The adjustment system includes a first transform unit, a second transform unit, a model identification unit, and a PID adjustment unit. The first transform unit is for receiving a first digital signal that is representative of a motor control signal, and is for providing a first frequency domain sequence that is representative of a frequency domain representation of the motor control signal. The second transform unit is for receiving a second digital signal that is representative of a position detection signal, and is for providing a second frequency domain sequence that is representative of a frequency domain representation of the position detection signal. The model identification unit is for identifying a representation of a ratio of the first and second frequency domain sequences. The PID adjustment unit is for identifying appropriate values for the coefficient kp of a proportional unit of the system, for the coefficient ki of an integral unit for the system, and for the coefficient kd of a derivative unit for the system.

Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

The present application claims priority to U.S. Provisional Patent Application Ser. No. 60/538,842 filed Jan. 23, 2004, and claims priority to U.S. Provisional Patent Application Ser. No. 60/575,255 filed May 28, 2004, and claims priority to U.S. Provisional Patent Application Ser. No. 60/613,962 filed Sep. 28, 2004.

BACKGROUND

The present invention generally relates to limited rotation motor systems, and relates in particular to systems and methods for designing and adjusting limited rotation motor systems.

Limited rotation motors generally include stepper motors and constant velocity motors. Certain stepper motors are well suited for applications requiring high speed and high duty cycle sawtooth scanning at large scan angles. For example, U.S. Pat. No. 6,275,319 discloses an optical scanning device for raster scanning applications.

Limited rotation motors for certain applications, however, require the rotor to move between two positions with a precise and constant velocity rather than by stepping and settling in a sawtooth fashion. Such applications require that the time needed to reach the constant velocity be as short as possible and that the amount of error in the achieved velocity be as small as possible. Constant velocity motors generally provide a higher torque constant and typically include a rotor and drive circuitry for causing the rotor to rotate about a central axis, as well as a position transducer, e.g., a tachometer or a position sensor, and a feedback circuit coupled to the transducer that permits the rotor to be driven by the drive circuitry responsive to an input signal and a feedback signal. For example, U.S. Pat. No. 5,424,632 discloses a conventional two-pole limited rotation motor.

A requirement of a desired limited rotation motor for certain applications is a system that is capable of changing the angular position of a load such as a mirror from angle A to angle B, with angles A and B both within the range of angular motion of the scanner, and both defined arbitrarily precisely, in an arbitrarily short time while maintaining a desired linearity of velocity within an arbitrarily small error. Both the minimum time of response of this system and the minimum velocity error are dominated by the effective bandwidth of the system. The effective bandwidth of the system, however, is governed by many factors, including the open loop gain of the system.

A limited rotation torque motor may be modeled or represented by a double-integrator model plus several flexible modes and low frequency non-linear effects. A typical closed-loop servo system for a galvanometer includes integral actions for low frequency uncertainties and a notch filter for high frequency resonant modes. System operation is chosen at the mid-frequency range where the system is well modeled by the rigid body. For a double integrator rigid body model, there is a direct relationship between the open-loop gain and the cross-over frequency on the frequency response plot. For example, an automatic tuning system for a servowriter head positioning system is disclosed in Autotuning of a servowriter head positioning system with minimum positioning error, Y. H. Huang, S. Weerasooriya and T. S. Low, J. Applied Physics, v. 79 pp. 5674–5676 (1996).

FIG. 1 shows a model of a limited rotation torque motor system 10 of the prior art. The system 10 includes a controller 12 (e.g., a position, integral, derivative or PID controller) that receives an input command 14. The controller 12 provides a control signal to a motor 16, which moves an optical element such as a mirror to provide position changes 18 responsive to the input command 14. The system also includes a position detector 20 that provides a position detection signal 22 that is also provided to the controller 12 with the input command 14. Open-loop gain (or 0 dB cross-over variations) of the system affects closed-loop system performance if the controller is not adaptive to these variations.

In the limited rotation motor actuator, the open-loop gain is determined by the torque constant of the motor, the inertia of the mirror and rotor structure, and the gain characteristics of the power amplifier. The torque constant may change with the operation temperature. For example, the magnetic material used in the motor may have temperature coefficients of between about 0.1% C and 1% C. With a temperature change of 20 C, the resulting change in torque constant may be non-negligible. The torque constant also changes with the angle of operations. There are other factors that may affect the torque constant as well as the imperfect coil winding, which causes changes in the field density (see for example, U.S. Pat. No. 5,225,770).

The change of head from one size to another size may also cause significant changes in total inertia, and consequently the open-loop gain. Adaptive filter adjustment of open-loop gain variations due to change in mirrors is more desirable when human intervention is not required at initial set up. Other factors that may contribute to open-loop gain variations are temperature dependence of the power amplifier and changes in power amplifier circuits due to aging.

Such limited rotation motors may be used, for example, in a variety of laser scanning applications, such as high speed surface metrology. Further laser processing applications include laser welding (for example high speed spot welding), surface treatment, cutting, drilling, marking, trimming, laser repair, rapid prototyping, forming microstructures, or forming dense arrays of nanostructures on various materials.

The processing speeds of such systems are typically limited by one of more of mirror speed, X-Y stage speed, material interaction and material thermal time constants, the layout of target material and regions to be processed, and software performance. Generally, in applications where one or more of mirror speed, position accuracy, and settling time are factors that limit performance, any significant improvement in scanning system open loop gain may translate into immediate throughput improvements.

There is a need, therefore, for an improved limited rotation motor system, and more particularly, there is a need for a rotor for a limited rotation motor system that provides maximum performance.

SUMMARY

In accordance with an embodiment, the invention provides an adjustment system for adjusting a proportional, integral, derivative controller in a limited rotation motor system. The adjustment system includes a first transform unit, a second transform unit, a model identification unit, and a PID adjustment unit. The first transform unit is for receiving a first digital signal that is representative of a motor control signal, and is for providing a first frequency domain sequence that is representative of a frequency domain representation of the motor control signal. The second transform unit is for receiving a second digital signal that is representative of a position detection signal, and is for providing a second frequency domain sequence that is representative of a frequency domain representation of the position detection signal. The model identification unit is for identifying a representation of a ratio of the first and second frequency domain sequences. The PID adjustment unit is for identifying appropriate values for the coefficient kp of a proportional unit of the system, for the coefficient ki of an integral unit for the system, and for the coefficient kd of a derivative unit for the system.

BRIEF DESCRIPTION OF THE DRAWINGS

The following description may be further understood with reference to the accompanying drawings in which:

FIG. 1 shows an illustrative diagrammatic functional view of a limited rotation motor and control system in accordance with the prior art;

FIG. 2 shows an illustrative diagrammatic functional view of a limited rotation motor and control system in accordance with an embodiment of the invention;

FIGS. 3A and 3B show illustrative graphical representations of a pseudo random binary sequence position signal that is provided to a motor controller, and the associated position detection signal that is produced by the motor in response to the pseudo random binary sequence;

FIG. 4 shows an illustrative diagrammatic representation of a controller in accordance with an embodiment of the invention;

FIG. 5 shows an illustrative graphical representation of a measured frequency response of a system in accordance with an embodiment of the invention;

FIG. 6 shows illustrative graphical representations of magnitude response curves of various PID controllers that may be employed in accordance with certain embodiments of the invention;

FIG. 7 shows an illustrative graphical representation of a motor transfer function in a system to be controlled in accordance with an embodiment of the invention;

FIG. 8 shows an illustrative graphical representation of a control system transfer function of a system in accordance with an embodiment of the invention;

FIG. 9 shows an illustrative diagrammatic functional view of a galvanometer and control system in accordance with another embodiment of the invention;

FIG. 10 shows an illustrative diagrammatic functional view of a galvanometer and control system in accordance with a further embodiment of the invention; and

FIGS. 11A and 11B show illustrative graphical representations of step response signals in a control system with and without employing a tuning system in accordance with an embodiment of the invention.

The drawings are shown for illustrative purposes only.

DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENTS

In accordance with various embodiments of the invention, limited rotation motor performance data is captured from a motor system. A pseudo random binary signal is input to the system. The signal that is input to the motor (the motor input signal) is recorded, and the position signal that is received from the position detector (the PD signal) is also recorded. A Fast Fourier Transform (FFT) is performed on each signal, and a frequency response representation for the PD signal is compared to the frequency response representation for the motor input signal by taking the ratio of these two representations. The ratio provides a sequence (the ratio sequence) that represents the open loop frequency response for the system. The open loop frequency response may be provided in a Bode plot of the magnitude versus frequency. A mathematical system model may then be generated that represents the transfer function of the motor system. Knowing the mathematical model for a motor system permits the system to be designed to provide optimal output, e.g., by adjusting the PID coefficients to achieve optimal performance, or by designing a controller that best complements the motor system transfer function to achieve optimal performance.

The system provides that the identification of the open loop cross over frequency variations in the motor system may be identified automatically (even via a remote digital network) as a result of changes in mirror inertia, operating temperature and operation angle. The automatic identification may be performed closed-loop so that system stability is not affected during the procedure. A data collection procedure may be performed in milliseconds.

An automatic identification system in accordance with an embodiment of the invention may involve system excitation using a pseudo random binary sequence (PRBS), then conducting a Fast Fourier Transform (FFT) on the captured time responses. The system identification is then modeled using the FFT data.

FIG. 2 shows an illustrative diagrammatic view of a system 30 in accordance with an embodiment of the invention. The system 30 includes a PID controller 32 that receives an input command 34. The controller 32 provides a control signal 35 to a motor 36, which moves an optical element such as a mirror to provide position changes 38 responsive to the input command 34. The system 30 also includes a position detector 40 that provides a position detection signal 42 that is also provided to the controller 42 with the input command 34. The controller 32 includes proportional amplifier 44 (kp), a integrating element 46 (ki), and a derivative element 48 (kd). The system also includes a PID adjustment unit 50 that receives the motor control signal that is provided by the controller 32 and the position detection signal 42. The motor control signal and the position detection signal are provided in digital form to a FFT converter within the adjustment unit 50 to determine the closed loop frequency responses, and the open loop frequency response is derived from the closed loop frequency response.

In particular, a pseudo random binary sequence is input to the system either as the input command 34 or is provided as a perturbation to the output of the controller 32. The data points for the PRBS excitation signal may be powers of twos. FIG. 3A shows at 60 a PRBS signal, and FIG. 3B shows at 62 a position detection provided by the motor in response to the PRBS signal shown in FIG. 3A. The input process may capture, for example, 1024 data points for each input signal.

As shown in FIG. 4, the captured control signal 35 and position detection signal 42 may be converted to digital signals by A/D converters 54 and 56 is either signal is not already in digital form. Once the input signals are in digital form, they may be transmitted any distance, for example, via a network, and the output PID adjustment signals may also be transmitted via a network in a digital environment. The digital input time domain signals are then converted to frequency domain representations of the signals by FFT converter units 64 and 66 respectively. Each FFT provides a complex polynomial of the form a0w0, a1w1, a2w2 . . . anwn, where n may, for example, be 512. A sequence of the ratios of the values a0, a1, a2 . . . an for the position detection signal 42 over the respective values a0, a1, a2 . . . an for the control signal yields a sequence of magnitudes m0, m1, m2 . . . mn. This ratio sequence is provided by the ratio sequence unit 68. These magnitudes m0, m1, m2 . . . mn provide the open loop frequency responses for the system and may be plotted in graphical form as shown at 90 in FIG. 5. As shown in FIG. 5, the system may experience some distortion at low frequencies 92, some harmonic resonance at high frequencies 94, and may be operated in the mid frequency range 96. The data collection procedure may require very little time, for example 13.44 μsec for a 1024 PBRS sequence.

Having determined the open loop frequency responses, the system may then identify a model for the system (using identification unit 70), then interpolate the open loop gain from the identified model (at interpolation unit 72) and then adjust the controller gain accordingly using the proportional adjust unit 74, the integral adjust unit 76 and the derivative adjust unit 78. The outputs of the adjust units 74, 76 and 78 may be provided to D/A converters 80, 82 and 84 respectively, and these analog PID outputs 52a, 52b and 52c may be provided to the PID units 44, 46 and 48 of the controller 32.

The system model may be identified in a variety of ways, including for example, frequency matching using stored information regarding a plurality of frequency curves for known systems. For example, FIG. 6 shows examples of magnitude response curves 100 for various PID controllers. When a system model has been developed, the best fit frequency curve may be selected. For example, FIG. 7 shows at 102 a model for a controller over a desired range having the transfer function

- s 4 - 3.085 s 3 - 10.47 s 2 - 15.82 s - 6.642 0.3259 s 3 + 2.942 s 2 + 2.951 s - 0.0067

Using a best fit analysis, the closest matching frequency curve (from 100) may be chosen, and the controller P, I and D values may be adjusted accordingly. For example, FIG. 8 shows at 104 a fitted PID controller with kp=1.05, kd=1 and ki=2.25, with the transfer function of

s 2 + 1.05 s + 2.25 s

The system, therefore, first provides a higher order controller that meets the design specifications, and then identifies a PID controller that matches the frequency response of the high order controller. Examples of matching criteria include (1) identifying the PID parameters so that the differences between magnitudes of the frequency responses of the optimal controller and that of the PID controller is minimized in the least mean square (LMS) sense, and (2) identifying the PID parameters so that the distance on the s-plane between magnitudes of the frequency responses of the optimal controller and that of the PID controller is minimized in the LMS sense. Frequency weighting functions may be used for each of the above. In further embodiments, other identification methods may involve linear least square with weighting, non-linear search with weighting, and linear least square followed by non-linear search, each with weighting.

The objective, therefore, of frequency matching is to select the appropriate controller coefficients for a given controller architecture so that the difference between the frequency responses C(w) and D(w) is minimized, where C(w) is the controller to be designed, D(w) is the desired controller and w is the frequency variable in radians/sec. For optimization methods employing LMS, this is equivalent to minimizing the following

Q = [ ( real ( C ( w ) ) - real ( D ( w ) ) 2 + ( image ( C ( w ) ) - image ( D ( w ) ) 2 ]
where real( ) and image( ) represent the real and imaginary part of the frequency responses respectively. For a linear time-invariant minimal phase system, the phase of the frequency response is uniquely defined by the magnitude of the frequency response. The equivalent function may be defined as

Q = for all w of interest [ ( mag ( C ( w ) ) - mag ( D ( w ) ) 2 ] and Q = for all w of interest [ ( ang ( C ( w ) ) - ang ( D ( w ) ) 2 ]
where mag( ) and ang( ) represent the magnitude and phase angle of the frequency responses respectively. When the frequency responses at certain frequencies are more significant than at other frequencies, the desired frequency response D(w) may be replaced by D(w)*W(w) in the above functions where W(w) is the weighting function. For example, if the weighting of all other frequencies are 1 in the weighting function W(w), the value of 10 may be assigned to frequencies that are more critical. This provides a weighted LMS method.

For a PID controller as shown in FIG. 2, therefore, the frequency response may be generalized as
C(w)=(kd*jw+ki−kp*w2)/jw
where kp, ki and kd are the gains of the proportional, integral and derivative of the error respectively. These three coefficients fully define the PID controller and may be designed by substituting the above equation for C(w) into the functions discussed above for Q.

As shown in FIG. 9, a PI plus D controller system 110 in accordance with a further embodiment of the invention may include a PID controller 112 that receives an input command 114. The controller 112 provides a control signal to a motor 116, which moves an optical element such as a mirror to provide position changes 118 responsive to the input command 114. The system also includes a position detector 120 that provides a position detection signal 122 that is also provided to the controller 112 with the input command 114. The system also includes a PID adjustment unit 124 the receives the motor control signal and the position detection signal, and provide output adjustment signals to the proportional amplifier 126 (kp), the integral unit 128 (ki) and the derivative unit 130 (kd).

Instead of feeding back the derivative of the error signal as with the PID controller discussed above, the PI plus D controller provides feedback of the derivative of the velocity signal only. The frequency response of the PI plus D controller therefore is
C(w)=(kp*jw+ki)/jw*(1+kd*jw*P(w))
where P(w) is the frequency response of the system to be controlled. Again, the controller coefficients kp, ki, kd may be designed using frequency matching by substituting the above equation for C(w) into the functions for Q discussed above.

As shown in FIG. 10, a P plus I plus D controller system 140 in accordance with a further embodiment of the invention may include a PID controller 142 that receives an input command 144. The controller 142 provides a control signal to a motor 146, which moves an optical element such as a mirror to provide position changes 148 responsive to the input command 144. The system also includes a position detector 150 that provides a position detection signal 152 that is also provided to the controller 142 with the input command 144. The system also includes a PID adjustment unit 154 the receives the motor control signal and the position detection signal, and provide output adjustment signals to the proportional amplifier 156 (kp), the integral unit 158 (ki) and the derivative unit 160 (kd).

The error proportional term in the PI plus D controller is therefore replaced with the position proportional term. The frequency response of the P plus I plus D controller therefore is
C(w)=(ki)/jw*(1+(kd*jw+kp)*P(w))
where P(w) is the frequency response of the system to be controlled. Again, the controller coefficients kp, ki, kd may be designed using frequency matching by substituting the above equation for C(w) into the functions for Q discussed above.

The invention provides, therefore, that a PID controlled limited rotation motor system may be adjusted to provide improved performance by adjusting the coefficients for the proportional, integral and derivative elements of the PID controller. FIG. 11A shows a command measurement 170 and a corresponding position measurement 172 for a PID controller system prior to performing an adjustment in accordance with an embodiment, and FIG. 11B shows a command measurement 174 and a corresponding position measurement 176 for a the PID controller system after an adjustment is made to the PID coefficients in accordance with an embodiment of the invention.

Those skilled in the art will appreciate that numerous modifications and variations may be made to the above disclosed embodiments without departing from the spirit and scope of the invention.

Claims

1. An adjustment system for adjusting a proportional, integral, derivative (PID) controller in a limited rotation motor system, said adjustment system comprising:

first transform means for receiving a first digital signal that is representative of a motor control signal, and for providing a first frequency domain sequence that is representative of a frequency domain representation of the motor control signal;
second transform means for receiving a second digital signal that is representative of a position detection signal, and for providing a second frequency domain sequence that is representative of a frequency domain representation of the position detection signal;
model identification means for identifying a representation of a ratio of the first and second frequency domain sequences; and
PID adjustment means for identifying appropriate values for the coefficient kp of a proportional unit of the system, for the coefficient ki of an integral unit for the system, and for the coefficient kd of a derivative unit for the system responsive to the ratio of the first and second frequency domain sequences.

2. The system as claimed in claim 1, wherein said first transform means and said second transform means each perform a Fast Fourier Transform.

3. The system as claimed in claim 1, wherein said adjustment means is coupled to the proportional, integral, derivative controller via a digital network.

4. The system as claimed in claim 1, wherein said model identification means includes best fit analysis means for identifying a known frequency response that most closely matches the ratio of the first and second frequency domain sequences.

5. The system as claimed in claim 1, wherein the ratio of the first and second frequency domain sequences is provided by the second frequency domain sequence divided by the first frequency domain sequence.

6. The system as claimed in claim 1, wherein the proportional, integral, derivative controller is a PI plus D controller.

7. The system as claimed in claim 1, wherein the proportional, integral, derivative controller is a P plus I plus D controller.

8. The system as claimed in claim 1, wherein said proportional, integral, derivative controller is employed in a limited rotation motor system.

9. A proportional, integral, derivative (PID) controller including a proportional unit, an integral unit, and a derivative unit, said controller comprising:

first transform means for receiving a first digital signal that is representative of a motor control signal, and for providing a first frequency domain sequence that is representative of a frequency domain representation of the motor control signal;
second transform means for receiving a second digital signal that is representative of a position detection signal, and for providing a second frequency domain sequence that is representative of a frequency domain representation of the position detection signal;
model identification means for identifying a representation of a ratio of the first and second frequency domain sequences; and
PID adjustment means for identifying appropriate values for the coefficient kp of the proportional unit of the system, for the coefficient ki of the integral unit for the system, and for the coefficient kd of the derivative unit for the system responsive to the ratio of the first and second frequency domain sequences.

10. The system as claimed in claim 9, wherein said PID adjustment means is coupled to the proportional, integral, derivative controller via a digital network.

11. The system as claimed in claim 9, wherein said model identification means includes best fit analysis means for identifying a known frequency response that most closely matches the ratio of the first and second frequency domain sequences.

12. The system as claimed in claim 9, wherein the ratio of the first and second frequency domain sequences is provided by the second frequency domain sequence divided by the first frequency domain sequence.

13. The system as claimed in claim 9, wherein the proportional, integral, derivative controller is a PI plus D controller.

14. The system as claimed in claim 9, wherein the proportional, integral, derivative controller is a P plus I plus D controller.

15. The system as claimed in claim 9, wherein said proportional, integral, derivative controller is employed in a limited rotation motor system.

16. A proportional, integral, derivative (PID) controller system including a first controller for controlling an x axis limited rotation motor, and a second controller for controlling a y axis limited rotation motor, each of said first and second controllers comprising:

first transform means for receiving a first digital signal that is representative of a motor control signal, and for providing a first frequency domain sequence that is representative of a frequency domain representation of the motor control signal;
second transform means for receiving a second digital signal that is representative of a position detection signal, and for providing a second frequency domain sequence that is representative of a frequency domain representation of the position detection signal;
model identification means for identifying a representation of a ratio of the first and second frequency domain sequences; and
PID adjustment means for identifying appropriate values for the coefficient kp of a proportional unit of the system, for the coefficient ki of the integral unit for the system, and for the coefficient kd of a derivative unit for the system responsive to the ratio of the first and second frequency domain sequences.

17. The system as claimed in claim 16, wherein said PID adjustment means is coupled to the proportional, integral, derivative controller via a digital network.

18. The system as claimed in claim 16, wherein said model identification means includes best fit analysis means for identifying a known frequency response that most closely matches the ratio of the first and second frequency domain sequences.

19. The system as claimed in claim 16, wherein the ratio of the first and second frequency domain sequences is provided by the second frequency domain sequence divided by the first frequency domain sequence.

20. The system as claimed in claim 16, wherein said proportional, integral, derivative controller system is employed in a limited rotation motor system.

Referenced Cited
U.S. Patent Documents
3932794 January 13, 1976 Iwako
3999043 December 21, 1976 Reiss et al.
4151567 April 24, 1979 Dorsemagen et al.
4282468 August 4, 1981 Barker et al.
4398241 August 9, 1983 Baker et al.
4514671 April 30, 1985 Louth
4532402 July 30, 1985 Overbeck
4536906 August 27, 1985 Varndell et al.
4624368 November 25, 1986 Satake
4631605 December 23, 1986 O'Gwynn
4646280 February 24, 1987 Toyosawa
4670653 June 2, 1987 McConkle et al.
4809253 February 28, 1989 Baas et al.
4845698 July 4, 1989 Baas
4855674 August 8, 1989 Murate et al.
4864295 September 5, 1989 Rohr
4870631 September 26, 1989 Stoddard
4893068 January 9, 1990 Evans, Jr.
4903131 February 20, 1990 Lingemann et al.
4930027 May 29, 1990 Steele et al.
4956831 September 11, 1990 Sarraf et al.
4961117 October 2, 1990 Rumley
4965513 October 23, 1990 Haynes et al.
4972344 November 20, 1990 Stoddard et al.
5075875 December 24, 1991 Love et al.
5093608 March 3, 1992 Kono et al.
5119213 June 2, 1992 Graves et al.
5122720 June 16, 1992 Martinson et al.
5167002 November 24, 1992 Fridhandler
5185676 February 9, 1993 Nishiberi
5187364 February 16, 1993 Blais
5225770 July 6, 1993 Montagu
5229574 July 20, 1993 Stone
5245528 September 14, 1993 Saito et al.
5257041 October 26, 1993 Kresock et al.
5275041 January 4, 1994 Poulsen
5280377 January 18, 1994 Chandler et al.
5285378 February 8, 1994 Matsumoto
5293102 March 8, 1994 Martinson et al.
5313147 May 17, 1994 Yoneda et al.
5331264 July 19, 1994 Cheng et al.
5375186 December 20, 1994 Schuettpelz
5406496 April 11, 1995 Quinn
5424526 June 13, 1995 Leonhardt et al.
5424632 June 13, 1995 Montagu
5452285 September 19, 1995 Monen
5453618 September 26, 1995 Sutton et al.
5534071 July 9, 1996 Varshney et al.
5537109 July 16, 1996 Dowd
5541486 July 30, 1996 Zoller et al.
5568377 October 22, 1996 Seem et al.
5585976 December 17, 1996 Pham
5589870 December 31, 1996 Curry et al.
5600121 February 4, 1997 Kahn et al.
5604516 February 18, 1997 Herrod et al.
5610487 March 11, 1997 Hutsell
5646765 July 8, 1997 Laakmann et al.
5653900 August 5, 1997 Clement et al.
5656908 August 12, 1997 Rehm
5699494 December 16, 1997 Colbert et al.
5726883 March 10, 1998 Levine et al.
5742503 April 21, 1998 Yu
5767494 June 16, 1998 Matsueda et al.
5801371 September 1, 1998 Kahn et al.
5805448 September 8, 1998 Lindsay et al.
5808725 September 15, 1998 Moberg et al.
5859774 January 12, 1999 Kuzuya et al.
5869945 February 9, 1999 Ha et al.
5886335 March 23, 1999 Matsueda
5886422 March 23, 1999 Mills
5912541 June 15, 1999 Bigler et al.
5914924 June 22, 1999 Takagi et al.
5986989 November 16, 1999 Takagi et al.
6054828 April 25, 2000 Hill
6072653 June 6, 2000 Goker
6081751 June 27, 2000 Luo et al.
6107600 August 22, 2000 Kurosawa
6144011 November 7, 2000 Moss et al.
6198176 March 6, 2001 Gillette
6198246 March 6, 2001 Yutkowitz
6211484 April 3, 2001 Kaplan et al.
6211639 April 3, 2001 Meister et al.
6211640 April 3, 2001 Fujisaki et al.
6243350 June 5, 2001 Knight et al.
6256121 July 3, 2001 Lizotte et al.
6275319 August 14, 2001 Gadhok
6304359 October 16, 2001 Gadhok
6317637 November 13, 2001 Limroth
6350239 February 26, 2002 Ohad et al.
6353766 March 5, 2002 Weinzierl
6424873 July 23, 2002 Przybylski
6442444 August 27, 2002 Matsubara et al.
6445962 September 3, 2002 Blevins et al.
6449564 September 10, 2002 Kliman et al.
6453722 September 24, 2002 Liu et al.
6463352 October 8, 2002 Tadokoro et al.
6510353 January 21, 2003 Gudaz et al.
6577907 June 10, 2003 Czyszczewski et al.
6622099 September 16, 2003 Cohen et al.
6643080 November 4, 2003 Goodner, III et al.
6646397 November 11, 2003 Discenzo
6697685 February 24, 2004 Caldwell
6721445 April 13, 2004 Azencott
6774601 August 10, 2004 Schwartz et al.
6782296 August 24, 2004 Hoche
6812668 November 2, 2004 Akiyama
6822415 November 23, 2004 Komiya et al.
6826519 November 30, 2004 Fujino
6853951 February 8, 2005 Jarrell et al.
6876167 April 5, 2005 Jones
6885972 April 26, 2005 Samata et al.
6895352 May 17, 2005 Josselson et al.
6937908 August 30, 2005 Chang et al.
7039557 May 2, 2006 Mayer et al.
20010011550 August 9, 2001 Zheng
20020049513 April 25, 2002 Nussbaum et al.
20030097193 May 22, 2003 Makino et al.
20030128240 July 10, 2003 Martinez et al.
20030163296 August 28, 2003 Richards
20040135534 July 15, 2004 Cullen
20050174124 August 11, 2005 Huang
20050228512 October 13, 2005 Chen et al.
20050251271 November 10, 2005 Cutler
Foreign Patent Documents
2359739 April 2003 CA
2629473 April 1979 DE
3505681 August 1985 DE
3520189 December 1986 DE
4211213 October 1993 DE
0260138 March 1988 EP
0378093 July 1990 EP
0339402 June 1993 EP
896265 July 1998 EP
1283593 February 2003 EP
1298511 April 2003 EP
2600789 December 1987 FR
951785 March 1964 GB
63190584 August 1988 JP
01224189 September 1989 JP
04229088 August 1992 JP
05036851 February 1993 JP
07114402 May 1995 JP
2000028955 January 2000 JP
2000-330641 November 2000 JP
2001142917 May 2001 JP
2001-245488 September 2001 JP
2002199147 July 2002 JP
2003044111 February 2003 JP
WO93/18525 September 1993 WO
WO09917282 April 1999 WO
WO01/33303 May 2001 WO
WO01/64591 September 2001 WO
WO03/097290 November 2003 WO
Other references
  • Datasheets for Copley Controls Corp., 2002 (4 pages).
  • “Digital Servoamplifier Upgrades Brush Motor Drive Systems,” Copley Controls Corp., New Product Release dated Apr. 28, 2002, pp. 1-7.
  • Y. Tzou, “Auto-tuning Control of Self-Commissioning Electric Drives,” Power Electronics and Mechatronics Control Lab., Dept. of Electrical & Control Engineering, National Chiao Tung Univ., Taiwan, pp. 483-487.
  • Opposition Communication dated Jan. 3, 2006 and translation of pending claims in opposition proceeding regarding EP 896265.
  • Levy, G.F.: “Numeric Activex Components” Software Practice & Experience, John Wiley & Sons, Ltd, Chichester, GB, vol. 31, No. 2, Feb. 2001, p. 147-189.
  • Huang GQ et al.: “Web-based product and process data modeling in concurrent ‘design for X’” Robotics and Computer Integrated Manufacturing, Pergamon Press, Oxford, GB, vol. 15, No. 1, Feb. 1999, p. 53-63.
  • B.A. Brandin, “A digital approach to the disturbance-accommodation problem,” Transactions of the Institute of Measurement and Control, vol. 10, No. 5, Oct. 1988, London, UK, pp. 273-280.
  • C.C. Hang et al., “On-Line Auto Tuning of PID Controllers Based on the Cross-Correlation Technique,” IEEE Transactions on Industrial Electronics, vol. 38, No. 6, Dec. 1991, New York, US, pp. 428-437.
  • C.C. Hang et al., “Development of An Intelligent Self-Tuning PID Controller,” Advances in Instrumentation and Control, vol. 47, No. 2, Jan. 1992, Research Triangle Park, US, pp. 1101-1111.
  • Scanlab, Smart Scanning-inteliScan 10, Aug. 2003, SCANLAB America, Inc., Cincinnati, Ohio.
  • Lasesys Corporation, Series LBS-6000 Galvanometric Scanners, Feb. 6, 2004, http:www.lasesys.com/galvanometric.html.
  • Phototonics Spectra, Cambridge Technology Inc. Digital Control Center DC900, Jul. 2003, http://www.photonics.com/spectra/minimag/XQ/ASP/minimagid.70/QX/read.htm.
  • Birou et al., “Real-time robot drive control with PM-synchronous motors using a DSP-based computer system,” Power Electronics and Motion Control Conference, 2000. Proceedings. PIEMC 2000. The Third International Aug. 15-18, 2000, Piscataway, NJ, USA, IEEE, vol. 3, Aug. 15, 2000, pp. 1290-1295.
  • Y.H. Huang et al., “Autotuning of a servowriter head positioning system with minimum positioning error,” J. Applied Physics, vol. 79, No. 8, Apr. 1996.
Patent History
Patent number: 7190144
Type: Grant
Filed: Jan 21, 2005
Date of Patent: Mar 13, 2007
Patent Publication Number: 20050162174
Assignee: GSI Group Corporation (Billerica, MA)
Inventor: Yuhong Huang (Acton, MA)
Primary Examiner: Loha Ben
Attorney: Gauthier & Connors, LLP
Application Number: 11/040,230