Plasma cassette etcher
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Description
FIG. 1 is a front perspective view of a plasma cassette etcher showing our new design;
FIG. 2 is a front elevational view of the plasma cassette etcher shown in FIG. 1;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a rear elevational view thereof;
FIG. 6 is a left side elevational view thereof, looking toward the left side thereof as it is shown in FIGS. 1 and 2; and
FIG. 7 is a right side elevational view thereof, looking toward the right side thereof as it is shown in FIGS. 1 and 2.
Referenced Cited
Patent History
Patent number: D275032
Type: Grant
Filed: Jan 6, 1982
Date of Patent: Aug 7, 1984
Assignee: Drytek, Inc. (Wilmington, MA)
Inventors: Joseph A. Maher, Jr. (Hamilton, MA), Arthur W. Zafiropoulo (Manchester, MA)
Primary Examiner: Bernard Ansher
Law Firm: Weingarten, Schurgin, Gagnebin & Hayes
Application Number: 6/337,373
Type: Grant
Filed: Jan 6, 1982
Date of Patent: Aug 7, 1984
Assignee: Drytek, Inc. (Wilmington, MA)
Inventors: Joseph A. Maher, Jr. (Hamilton, MA), Arthur W. Zafiropoulo (Manchester, MA)
Primary Examiner: Bernard Ansher
Law Firm: Weingarten, Schurgin, Gagnebin & Hayes
Application Number: 6/337,373
Classifications
Current U.S. Class:
D24/11