Plasma cassette etcher

- Drytek, Inc.

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Description

FIG. 1 is a front perspective view of a plasma cassette etcher showing our new design;

FIG. 2 is a front elevational view of the plasma cassette etcher shown in FIG. 1;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a rear elevational view thereof;

FIG. 6 is a left side elevational view thereof, looking toward the left side thereof as it is shown in FIGS. 1 and 2; and

FIG. 7 is a right side elevational view thereof, looking toward the right side thereof as it is shown in FIGS. 1 and 2.

Referenced Cited
U.S. Patent Documents
D228455 September 1973 Amar et al.
D228755 October 1973 Amar et al.
4264393 April 28, 1981 Gorin et al.
4341582 July 27, 1982 Kohman et al.
4397708 August 9, 1983 Frantzen
Patent History
Patent number: D275032
Type: Grant
Filed: Jan 6, 1982
Date of Patent: Aug 7, 1984
Assignee: Drytek, Inc. (Wilmington, MA)
Inventors: Joseph A. Maher, Jr. (Hamilton, MA), Arthur W. Zafiropoulo (Manchester, MA)
Primary Examiner: Bernard Ansher
Law Firm: Weingarten, Schurgin, Gagnebin & Hayes
Application Number: 6/337,373
Classifications
Current U.S. Class: D24/11